CN102656410A

CN102656410A - Clean room

Info

Publication number: CN102656410A
Application number: CN201080025662.4A
Authority: CN
Inventors: 蕨野慎治; 和气清隆; 中村元彦; 村山民树
Original assignee: Asahi Kogyosha Co Ltd
Current assignee: Asahi Kogyosha Co Ltd
Priority date: 2010-10-28
Filing date: 2010-11-12
Publication date: 2012-09-05
Anticipated expiration: 2030-11-12
Also published as: JP4755307B1; TW201217719A; TWI431229B; KR20120057571A; KR101284022B1; WO2012056592A1; JP2012093066A; CN102656410B

Abstract

Provided is a clean room wherein a necessary speed of a down flow can be ensured even if a circulating air volume is small, and furthermore, filter leak test can be easily performed. Ports for blowing out temperature-controlled cleaned air to the clean zone (11) in a clean room (10) are formed using a plurality of plate nozzles (20).

Description

The toilet

Technical field

The present invention relates to employed toilets such as a kind of semiconductor manufacturing, crystal liquid substrate manufacturing, pharmaceuticals and food manufacturing, particularly the subtend clean area is discharged and has been carried out improved toilet by the outlet of the clean air of accurate temperature adjustment.

Background technology

In the manufacturing works of semiconductor manufacturing, crystal liquid substrate manufacturing, pharmaceuticals and food manufacturing etc., make the whole building toiletization.

As the toilet, exist folk prescription shown in Figure 8 to streaming (laminar) and non-folk prescription shown in Figure 92 modes to formula (turbulent flow type).

Folk prescription shown in Figure 8 constitutes to streaming toilet 40; The roughly whole face of striding the ceiling of the clean area 41 that is provided with manufacturing equipment M is provided with air feed chamber 42; Outlet 43 at this air feed chamber 42 is provided with high-performance filter (HEPA or ULPA) 44; 45 bottoms are formed with and return chamber 46 on the floor, will return chamber 46 and link and be connected circulating path 47 with air feed chamber 42, at these circulating path 47 connection air conditioners 48.

In formula toilet 50, filter unit 51 is set at non-folk prescription shown in Figure 9 respectively in the position that needs of the ceiling portion of clean area 41.Filter unit 51 constitutes, and at the outlet 53 of air feed chamber 52 high-performance filter 54 is set.In the toilet 50 of this Fig. 9, except filter unit 51, the formation of returning chamber 46, circulating path 47, air conditioner 48 is identical with the toilet 40 of Fig. 8.

At folk prescription shown in Figure 8 in streaming toilet 40; Clean air from the outlet 43 of air feed chamber 42 set filter 44 equably to clean area 41 air feed; In clean area 41, become from the floor 45 to the air-flow that returns chamber 46 exhausts (returning) through sinking; Therefore the particle that in clean area 41, produces can not flow to returning chamber 46 diffusely, can improve the cleannes of clean area 41 and the homogenising of realization Temperature Distribution.

On the other hand; In formula toilet 50, be provided with filter unit 51 at non-folk prescription shown in Figure 9, therefore at filter unit 51, between 51 in the position that needs of the ceiling portion of clean area 41; Clean air does not flow and is detained; Become turbulent flow, but through with manufacturing equipment M configuration filter unit 51 accordingly, position is set, can need the position to prevent the diffusion of particle thus.But, at non-folk prescription under the situation of formula, even for desired thermic load in the clean area 41 is handled and feed air temperature is controlled, under filter unit 51 with and in addition, become the Temperature Distribution that has produced difference.

For the diffusion to the particle that produces at clean area 41 is controlled; And will remove from the heating of device of manufacturing equipment M etc.; The face wind speed of sinking need be 0.15～0.5m/sec, and in streaming, existence needs the problem of very big amount of air circulation at the folk prescription of Fig. 8.In this, the non-folk prescription of Fig. 9 is to formula, and through in the needs position filter unit 51 being set, total blast volume lacks to streaming than folk prescription and gets final product.

Patent documentation 1: TOHKEMY 2010-112646 communique

Summary of the invention

Yet; Manufacturing equipment M also maximizes recently; The height of clean area 41 need be for more than the 6m, at non-folk prescription to formula, even the clean air of temperature adjustment is discharged from filter 54; When arriving floor 45, also can spread, existence can't obtain needing the position to become wind speed (0.15～0.5m/sec) the problem of sinking.

Therefore, preferably flow with sinking to the horizontal profile integral body that makes clean area the streaming, become many problems but can not eliminate the circulation total blast volume like folk prescription.

In addition, in two modes,, need flow aerosol and carry out the filter leaks test with air feed from the air feed side, to confirm whether there is the hole on the filter in order to discharge clean air from filter.The test of this filter leaks scans the sampling detector of the lower surface of filter in length and breadth and defines the position in leak free aerosol and hole, but in inspection, has time-consuming problem.

Therefore, the objective of the invention is to, solve above-mentioned problem, a kind of toilet is provided,, can guarantee that also temperature is controlled and cleannes are guaranteed the wind speed of needed sinking, and can carry out the filter leaks test simply even air circulation is less.

To achieve these goals, a kind of toilet of the present invention is characterised in that, being formed by a plurality of flat plate nozzles by the outlet of the clean air of temperature adjustment of clean area.

A kind of toilet of the present invention possesses: clean area is provided with manufacturing equipment; The air feed chamber is arranged to lower openings the ceiling of this clean area; Return chamber, be arranged under the floor of above-mentioned clean area; The air circulation path links this and returns chamber and above-mentioned air feed chamber; Air conditioner is connected with the air circulation path; High-performance filter is arranged on the circulating path that links air conditioner and above-mentioned air feed chamber; And a plurality of flat plate nozzles are set to cover the opening of the ceiling of above-mentioned air feed chamber and clean area.

In addition, high-performance filter also can replace being connected with above-mentioned air circulation path and being arranged in the air feed chamber.

Flat plate nozzles used in the present invention be with a plurality of nozzles of going up in length and breadth of the flat board that forms slim case shape and this flat board integratedly resin forming form.The internal diameter of nozzle forms the interior any size of scope of 2～40mm.

In addition, in the present invention, flat board that also can flat plate nozzles is provided with: the bigger nozzle of internal diameter of discharging clean air with certain angle; And be configured between the said nozzle the less nozzle of discharging clean air with wide-angle of internal diameter.

In the present invention; Obtain effective jet length that the clean air of discharging from the nozzle of flat plate nozzles reaches wind speed 0.5m/sec in advance according to nozzle inside diameter; According to the selected nozzle inside diameter of effective jet length of said nozzle, on the face of certain height on the above-mentioned floor, to reach wind speed 0.15～0.5m/sec.

In addition; Discharge with certain extended corner during the effective jet length of arrival from the clean air that each nozzle is discharged; Nozzle interval each other is set to; Under the extended corner of the clean air of discharging from adjacent nozzles, the clean air from adjacent nozzles in above-mentioned effective jet length intersects each other.

The invention effect:

The present invention brings into play following good result.

(1) outlet of the clean air of clean area is formed by a plurality of flat plate nozzles, can freely select thus from what each nozzle of flat plate nozzles was discharged and arrived distance by the wind speed of the clean air of temperature adjustment and its.

(2), also can make the arrival distance and the needed wind speed optimization of clean area of nozzle even the ceiling of toilet is higher.

The global cycle amount that (3) can make the air in the toilet is 1/3～1/10 of toilet in the past.

(4) high-performance filter is arranged on circulatory system road or the air feed chamber, therefore can carry out inspections such as filter leaks test simply.

Description of drawings

Fig. 1 is the overall diagram of expression one embodiment of the present invention.

Fig. 2 is the overall diagram of expression other embodiments of the present invention.

Fig. 3 is illustrated in the partial perspective view that the state of flat plate nozzles is installed among Fig. 1, Fig. 2 on the air feed chamber.

Fig. 4 is the local amplification sectional view that the state of flat plate nozzles is installed on the air feed chamber in Fig. 1, Fig. 2.

Fig. 5 be among expression the present invention based on the different wind speed of discharging from nozzle of each internal diameter of nozzle with arrive apart between the figure of relation.

Fig. 6 is the figure that the expansion state to the clean air of discharging from each nozzle of flat plate nozzles among the present invention describes.

Fig. 7 is the figure that the expansion state of the clean air of when on flat plate nozzles, being provided with the different nozzle of extended corner among the present invention, from two nozzles, discharging describes.

Fig. 8 representes that in the past folk prescription is to the overall diagram of streaming toilet.

Fig. 9 representes that in the past non-folk prescription is to the overall diagram of formula toilet.

The specific embodiment

Below based on accompanying drawing a preferred embodiment of the present invention is elaborated.

Fig. 1 representes the overall diagram of toilet of the present invention.

At first; Toilet 10 constitutes; On the ceiling of the clean area that manufacturing equipment M is set 11, stride roughly whole and a plurality of air feed chamber 12 and be adjacent to each other be provided with, be formed with in the bottom on the floor 15 of clean area 11 and return chamber 16; To return chamber 16 and link with air feed chamber 12 and be connected with circulating path 17, this circulating path 17 is connected with air conditioner 18.

In this embodiment, circulating path 17 is provided with high-performance filter (HEPA or ULPA) 19, a plurality of flat plate nozzles 20 is set and constitutes outlet at the peristome of air feed chamber 12.

Air conditioner 18 has evaporimeter 21 and circulating fan 22; Be connected with the importing pipeline 13 of extraneous air OA in its suction side; On the circulating path 17 that arrives air conditioner 18, be connected with exhaust line 14, exhaust line 14 possesses the scavenger fan with a part of exhaust of circulating air.

This toilet 10 does; The ceiling of clean area 11 is formed by the nozzle 24 of flat plate nozzles 20; From nozzle 24 discharge by air conditioner 18 regulate, by the clean air CA of high-performance filter 19 dedustings; Therefore even the ceiling height of clean area 11 is higher, also can be through freely selecting nozzle diameter, on floor 15 need highly (using point), for example liftoff plate 15 is the height of 1m; Guarantee to become the wind speed (0.15～0.5m/sec), and can make the amount of air circulation that needs be in the past 1/3～1/10 air quantity of the sinking that needs.

In addition, high-performance filter 19 only is connected with circulating path 17, can carry out its filter leaks test simply.

Fig. 2 representes the overall diagram of other toilets of the present invention.

The basic comprising of the toilet 10 of Fig. 2 is identical with the toilet 10 of Fig. 1, but high-performance filter 19 is arranged in the air feed chamber 12.The toilet 10 of Fig. 2, except the installation site of high-performance filter 19 with Fig. 1 is different, other are identical with Fig. 1, therefore in Fig. 2, give the symbol identical with Fig. 1 and omit explanation.

In this Fig. 1, toilet 10 shown in Figure 2; The example of expression does; The air feed chamber of on the ceiling of clean area 11, installing 12; On roughly whole of ceiling, arrange and be provided with a plurality ofly, constitute folk prescription to the streaming toilet, but also can air feed chamber 12 is arranged on the needing the position of ceiling and constitute non-folk prescription to the formula toilet.

In addition, air feed chamber 12 also can replace arranging a plurality of, and is made up of an air feed chamber 12 with roughly whole the mode that covers ceiling.

In addition, the local amplification stereogram when Fig. 3 representes that flat plate nozzles 20 of the present invention is installed to the peristome of air feed chamber 12, Fig. 4 representes flat plate nozzles 20 is installed to the partial section of air feed chamber 12.

Flat plate nozzles 20 is to use the flat board 23 and nozzle 24 of mould through the one-body molded slim case shape of resin forming.

This flat plate nozzles 20 for example forms the size of 30cm * 30cm, 50cm * 50cm; Thickness around dull and stereotyped 23 is 10～20mm degree, and the height of nozzle 24 suitably forms in the scope of

at 20～200mm, internal diameter.

The resin that uses is engineering plastics, can select any in polyformaldehyde, polyimides, Merlon, sex change polyphenylene oxide, the polybutylene terephthalate (PBT).In addition, also can in resin, add electroconductive powder such as carbon black, powdered graphite, zinc oxide or be the anti-live agent that surfactant etc. constitutes by nonionic system or anion.

In addition, around dull and stereotyped 23, each limit be formed with 3 positions after state be used for the fixing Screw of Screw with hole 25.

Below, the installation to air feed chamber 12 describes to flat plate nozzles 20.

At first, flat plate nozzles 20 is arranged and is supported on the carriage 30 that is formed by metal side tubes such as SUS or aluminium etc.This carriage 30 has the

square box

31,31 that flat plate nozzles 20 is supported, and on this square box 31, is provided with screwed hole 32 with the Screw of flat plate nozzles 20 mutually opposed to each other with hole 25.

When flat plate nozzles 20 is installed to carriage 30, the encapsulant 26 to sealing between it is set.Encapsulant 26 forms the framework shape of the square box 31 of carriage 30, forms Screw hole 27 on screwed hole 32 consistent location of this external and carriage 30.

Flat plate nozzles 20 is installed as to carriage 30, the encapsulant 26 of bearing frame shape on carriage 30, before and after on the sealing material 26 about ground arranged flat nozzle 20.Under this state, be screwed into Screw 28 to Screw in hole 25, and be screwed into Screw 28 to the screwed hole 32 of carriage 30 through the Screw hole 27 of encapsulant 26, flat plate nozzles 20 is installed on the carriage 30.

So, via encapsulant 26 through Screw fixing be installed in flat plate nozzles 20 on the carriage 30 after, this carriage 30 is installed on the air feed chamber 12.

That kind as shown in Figure 4, this air feed chamber 12 constitutes, and has peristome and forms the framework 33 on the rectangular-shaped case by square tube, on the periphery of this framework 33 and upper surface, is equipped with and covers 35.Carriage 30 is installed on the upper surface of framework 33 through bolt, nut 39 via encapsulant 38.

So, on air feed chamber 12, installed after the carriage 30 that flat plate nozzles 20 is installed, air feed chamber 12 has been installed on the ceiling of Fig. 1, clean area 11 shown in Figure 2, and be connected, constituted toilet 10 thus with the pipeline of circulating path 17.

Next, to the shape of the nozzle 24 of the flat plate nozzles 20 of the outlet of the ceiling that forms clean area 11, its internal diameter with and installation interval describe.

At first, like Fig. 3, such shown in 4, the shape of nozzle 24 forms down funnel-form, but also can form cylindric.

Next, the configurable number to nozzle 24 describes.

At first, be made as every 1m with the clean air of discharging from high-performance filter in the past ²Air quantity (3m when the face wind speed of area is 0.05m/sec ³/ min) be benchmark, nozzle inside diameter is respectively

Discharge identical air quantity (3m ³/ nozzle radical min) time is following.

Nozzle number is 1591 (40 * 40) when the nozzle of

; Nozzle number is 254 (16 * 16) when the nozzle of

; Nozzle number is 63 (8 * 8) when the nozzle of

; Nozzle number is 16 (4 * 4) when the nozzle of

, and nozzle number is 4 (2 * 2) when the nozzle of

.Therefore, these radicals are set to, every 1m ², uniformly-spaced to be arranged as in length and breadth the quadrangle shape or triangle gets final product uniformly-spaced to be arranged as in a zigzag.

Next; To the wind speed (m/sec) of the clean air of discharging downwards with arrive distance (m) and carry out Simulation result, describe according to Fig. 5 from the nozzle of

.

At first, in filter in the past, the arrival distance when discharging with wind speed 0.05m/sec, 5m is maximum, wind speed is zero when reaching 5m.

Relative therewith; Can know that when the nozzle of

, arriving distance is 5m; When the nozzle of

, arriving distance is 6.5m; When the nozzle of

, arriving distance is 7.2m; When the nozzle of

and

, arriving distance is 8m; It is elongated when nozzle diameter becomes big, to arrive distance; During the nozzle of the scope at , arriving distance does not have gap.

At this; Liftoff plate at clean area is to need on the face of height; To obtain the diffusion of particle is controlled, can situation with the minimum windspeed 0.15m/sec that removes from the heating of device of manufacturing equipment etc. under; When the nozzle of

; Distance till the face of the needs height on from the nozzle location to the floor (for example height 1m, usually in the height 2m) (below be called effective jet length) is approximately 3m; Effective jet length is about 5m when the nozzle of ; Effective jet length is 6.5m when the nozzle of

; Effective jet length is 7m when the nozzle of

, and effective jet length is 8m when the nozzle of

.In other words, can know if the distance till from the face of needs height to nozzle in effective jet length of this nozzle, then on the face of needs height, can access the above enough wind speed of wind speed 0.15m/sec.

Therefore; Can freely design the nozzle inside diameter and the configuration radical thereof that on the face of the needs height on floor 15, can access the wind speed more than the 0.15m/sec according to the ceiling height of Fig. 1, clean area 11 shown in Figure 2; Compare with the mode of discharging from the whole face of filter, the global cycle air quantity also becomes 1/3～1/10 air quantity.

Fig. 6 schematically represent from each nozzle 24 of flat plate nozzles 20 discharge by the expansion state of the clean air CA of temperature adjustment.

At first, the clean air CA by temperature adjustment that discharges from each nozzle 24 discharges downwards, and according to the discharge shape of nozzle 24, has certain extended corner θ.At this; As above-mentioned; For example under the situation of the nozzle of having selected

; Effective jet length L of wind speed 0.15m/sec is 6.5m, arrives in the distance L that kind as shown in Figure 6 at it; If the clean air CA by temperature adjustment from adjacent nozzles 24 overlaps each other, then can become the air-flow of even wind speed, uniform temperature from the face integral body that needs height (for example 1m) of floor.

In addition, in Fig. 6, near the ceiling of clean area 11; Nozzle 24 compartment of terrain that separates each other is provided with; Therefore discharged by the clean air CA of temperature adjustment between, the delay that produces air, but the air that is detained around by being surrounded from each nozzle 24 by the clean air CA of temperature adjustment; Therefore, also can flow to together and return chamber and can more extensively not spread with any clean air CA by temperature adjustment even in air entrapment, produce particle.

Near the example of the diffusion when Fig. 7 representes to prevent reliably the ceiling of clean area 11, to produce particle.

The example of in this example, representing is that having more with configuration between 24 θ of the nozzle with extended corner θ, 24 θ, the mode of nozzle 24 α of the spread angle alpha of wide-angle forms flat plate nozzles 20.

Nozzle 24 α with this spread angle alpha only spray between the clean air CA that discharges from nozzle 24 θ, 24 θ, arrive distance and get final product than short.Therefore; Even nozzle 24 α use internal diameter, the for example nozzle of littler than the internal diameter of nozzle 24 θ, 24 θ; The arrival distance that also has 5m; And the discharge angle [alpha] of nozzle can freely be selected, and can prevent to produce the diffusion of particle more reliably.

In addition; Except can the internal diameter of the nozzle 24 that forms on the flat board 23 of flat plate nozzles 20 being changed; In the present invention, be pre-formed the different various flat plate nozzles 20 of nozzle inside diameter, according to the configuration state of the manufacturing equipment M of clean area 11; The flat plate nozzles 20 that nozzle diameter is different is installed to clean area 11 and discharges on the air feed chamber 12 of clean air, can also freely set the wind speed profile of the regional integration of clean area 11 thus.Promptly; On the ceiling on the zone that requires the particle diffusion; The flat plate nozzles 20 that configuration is made up of the bigger nozzle of internal diameter; In the zone of no particle diffusion influence, configuration nozzle inside diameter less flat plate nozzles 20, the folk prescription that can become further inhibition air circulation thus is to streaming and the non-folk prescription discharge mode to the centre of streaming.

More than, embodiment of the present invention is illustrated, but the present invention can carry out various changes.That is, be illustrated, but the toilet is a broad sense the for example sure toilet that is enough in formed toilet in the exposure device that crystal liquid substrate is made public and forms in the part as the toilet.

Symbol description

10 toilets

11 clean areas

12 air feed chambers

16 return chamber

20 flat plate nozzles

23 flat boards

24 nozzles

Claims (according to the modification of the 19th of treaty)

1. (after revising) a kind of toilet is characterized in that,

On the ceiling of clean area, be formed for forming peristome by the outlet of the clean air after the temperature adjustment, arrange at this peristome the flat plate nozzles that a plurality of lower surfaces at flat board are formed with a plurality of nozzles is set, form above-mentioned outlet.

2. (after revising) toilet as claimed in claim 1 is characterized in that,

With a plurality of nozzles of going up in length and breadth of the flat board that forms slim case shape with from the outstanding mode of this dull and stereotyped lower surface and flat board integratedly resin forming form above-mentioned flat plate nozzles.

3. (after revising) toilet as claimed in claim 2 is characterized in that,

The internal diameter of said nozzle forms the interior any size of scope of 2～40mm, and the height of said nozzle forms the interior arbitrary height of scope of 20～200mm.

4. (after revising) toilet as claimed in claim 3 is characterized in that,

Above-mentioned flat board is provided with: internal diameter is big and discharge the nozzle of clean air with certain discharge angle; And be configured between the said nozzle, internal diameter is little and discharge the nozzle of clean air with wide-angle.

5. (revise afterwards) a kind of toilet, it is characterized in that possessing:

Clean area is provided with manufacturing equipment;

The air feed chamber is arranged at the ceiling of this clean area, and the bottom has the peristome that is used to form by the outlet of the clean air after the temperature adjustment;

Return chamber, be arranged under the floor of above-mentioned clean area;

The air circulation path links this and returns chamber and above-mentioned air feed chamber;

Air conditioner is connected with the air circulation path;

High-performance filter is arranged on the circulating path that links air conditioner and above-mentioned air feed chamber; And,

A plurality of flat plate nozzles form a plurality of nozzles and constitute at the lower surface of flat board, and above-mentioned a plurality of flat plate nozzles are arranged the peristome of the bottom that is set to cover above-mentioned air feed chamber, are used on the ceiling of above-mentioned clean area, forming above-mentioned outlet.

6. (after revising) toilet as claimed in claim 5 is characterized in that,

Peristome in the bottom of above-mentioned air feed chamber is provided with the carriage that is formed with a plurality of square aperture, via encapsulant above-mentioned flat plate nozzles is installed at each opening of this carriage.

7. (after revising) toilet as claimed in claim 5 is characterized in that,

With a plurality of nozzles of going up in length and breadth of the flat board that forms slim case shape with from the outstanding mode of this flat board and flat board integratedly resin forming form above-mentioned flat plate nozzles.

8. (after revising) toilet as claimed in claim 7 is characterized in that,

9. (after revising) toilet as claimed in claim 7 is characterized in that,

Obtain effective jet length that the clean air of discharging from each nozzle of above-mentioned flat plate nozzles reaches wind speed 0.15m/sec in advance according to nozzle inside diameter; According to the selected nozzle inside diameter of effective jet length of said nozzle, on the face of certain height on the above-mentioned floor, to reach wind speed 0.15～0.5m/sec.

10. toilet as claimed in claim 9 is characterized in that,

Discharge with certain extended corner during the effective jet length of arrival from the clean air that each nozzle is discharged; Nozzle interval each other is set to; Under the extended corner of the clean air of discharging from adjacent nozzles, the clean air from adjacent nozzles in above-mentioned effective jet length intersects each other.

11. (revising the back) a kind of toilet is characterized in that possessing:

Clean area is provided with manufacturing equipment;

Return chamber, be arranged under the floor of above-mentioned clean area;

Air conditioner is connected with the air circulation path;

High-performance filter is arranged in the air feed chamber; And,

(12. revising the back) toilet as claimed in claim 11 is characterized in that,

Peristome in the bottom of above-mentioned air feed chamber is provided with the carriage that is formed with a plurality of square aperture, via encapsulant flat plate nozzles is installed at each opening of this carriage.

(13. revising the back) toilet as claimed in claim 11 is characterized in that,

(14. revising the back) toilet as claimed in claim 13 is characterized in that,

(15. revising the back) toilet as claimed in claim 14 is characterized in that,

16. toilet as claimed in claim 15 is characterized in that,

Claims

1. a toilet is characterized in that,

Being formed by a plurality of flat plate nozzles of clean area by the outlet of the clean air after the temperature adjustment.

2. toilet as claimed in claim 1 is characterized in that,

With a plurality of nozzles of going up in length and breadth of the flat board that forms slim case shape and this flat board integratedly resin forming form flat plate nozzles.

3. toilet as claimed in claim 2 is characterized in that,

The internal diameter of nozzle forms the interior any size of scope of 2～40mm.

4. toilet as claimed in claim 3 is characterized in that,

Flat board is provided with: internal diameter is big and discharge the nozzle of clean air with certain discharge angle; And be configured between the said nozzle, internal diameter is little and discharge the nozzle of clean air with wide-angle.

5. toilet is characterized in that possessing:

Clean area is provided with manufacturing equipment;

The air feed chamber is arranged to lower openings the ceiling of this clean area;

Return chamber, be arranged under the floor of above-mentioned clean area;

Air conditioner is connected with the air circulation path;

A plurality of flat plate nozzles are set to cover the opening of the ceiling of above-mentioned air feed chamber and clean area.

6. toilet as claimed in claim 5 is characterized in that,

Peristome at the air feed chamber is provided with the carriage that is formed with a plurality of square aperture, via encapsulant flat plate nozzles is installed at each peristome of this carriage.

7. toilet as claimed in claim 5 is characterized in that,

8. toilet as claimed in claim 7 is characterized in that,

9. toilet as claimed in claim 7 is characterized in that,

Obtain effective jet length that the clean air of discharging from the nozzle of flat plate nozzles reaches wind speed 0.15m/sec in advance according to nozzle inside diameter; According to the selected nozzle inside diameter of effective jet length of said nozzle, on the face of certain height on the above-mentioned floor, to reach wind speed 0.15～0.5m/sec.

10. toilet as claimed in claim 9 is characterized in that,

11. a toilet is characterized in that possessing:

Clean area is provided with manufacturing equipment;

Return chamber, be arranged under the floor of above-mentioned clean area;

Air conditioner is connected with the air circulation path;

High-performance filter is arranged in the air feed chamber; And,

12. toilet as claimed in claim 11 is characterized in that,

13. toilet as claimed in claim 11 is characterized in that,

14. toilet as claimed in claim 13 is characterized in that,

15. toilet as claimed in claim 14 is characterized in that,

16. toilet as claimed in claim 15 is characterized in that,