CN110307610A - A kind of clean room - Google Patents
A kind of clean room Download PDFInfo
- Publication number
- CN110307610A CN110307610A CN201910668606.5A CN201910668606A CN110307610A CN 110307610 A CN110307610 A CN 110307610A CN 201910668606 A CN201910668606 A CN 201910668606A CN 110307610 A CN110307610 A CN 110307610A
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- China
- Prior art keywords
- material storage
- air
- transmission range
- storage rack
- return air
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/70—Control systems characterised by their outputs; Constructional details thereof
- F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
- F24F11/74—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/28—Arrangement or mounting of filters
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Abstract
The present invention relates to flat-panel monitor manufacturing technology fields, disclose a kind of clean room, wherein, material storage is equipped in toilet with transmission range and positioned at the technique production district of material storage and transmission range two sides, material storage is interior equipped with material storage rack group with transmission range, the two sides of material storage rack group are equipped with partition plate, the top of interlayer are extended at the top of each partition plate, and bottom is connect with wafer board；Material storage rack group includes two rows of material storage racks, and the gap between every row's material storage rack and adjacent partition plate forms return air passageway, and return air passageway is connected to upper interlayer；Every row's material storage rack is equipped with multiple fan filter units, and material transmission range is formed between two rows of material storage racks, and the bottom of every row's material storage rack is equipped with the current path in connection material transferring area and adjacent return air passageway；Fresh air air supply tube is equipped in lower interlayer, the air outlet of fresh air air supply tube is connected to each return air passageway.
Description
Technical field
The present invention relates to flat-panel monitor manufacturing technology field more particularly to a kind of clean rooms.
Background technique
Currently, the main product of electronics industry is semiconductor chip and flat-panel display device, due to the essence of its production process
Close processing request, production environment need stringent cleaniliness classs, therefore, semiconductor chip and flat-panel display device plus
Work production needs to carry out in toilet, and clean indoor cleaniliness classs passes through the fan filter unit being arranged on furred ceiling
Maintenance is ejected from return air inlet to indoor feeding pure air, and by indoor suspended particles.Traditional clean room such as Fig. 1 institute
Show, including workshop ontology 1, upper interlayer 5, lower interlayer 6 are equipped in workshop ontology 1 and are located at upper 5 and of interlayer
Clear production layer between lower interlayer 6, the interior wafer board 3 for being equipped with aerial setting of clear production layer and setting are in wafer board
Toilet 2 on 3, toilet 2 include raised floor 201 on the wafer board 3, furred ceiling 202 and with raised floor 201 with
And the wallboard that furred ceiling 202 cooperates, 2 two sides of toilet are equipped with the technology passageway for being connected to lower interlayer 5 and upper interlayer 6
7, and the dry cooling coil 9 for cooling cycle air is equipped between lower interlayer 6 and each technology passageway 7.
Need to guarantee that the space of air purity there are three parts in toilet 2, respectively material memory block 211, material passes
Defeated area 212 and technique production district 22, wherein material memory block 211 is equipped with material storage rack 10, for storing glass to be processed
The materials such as glass substrate, chip, material transferring area 212 is interior to be equipped with automatic conveying device；The usual arrangement technology of technique production district 22 is raw
Produce equipment and the zone of action of operator.Due to glass to be processed in material memory block 211 and material transferring area 212
Glass substrate, chip etc. are directly contacted with surrounding air, so grade of cleanliness is usually much strict in technique life in the space
Grade of cleanliness in producing region 22.
Multiple fan filter units 8 are disposed on the furred ceiling 202 of technique production district 22, also, in order to guarantee that material is deposited
Storage and the stringenter cleaniliness classs of transmission range 21, are usually abound with fan filter machine on the furred ceiling 202 in material transferring area 212
Group 8, and in the side high-density arrangement fan filter unit 8 of material storage rack 10.Entire toilet air cleaning and conditioning system
Air circulation path is as illustrated by the arrows in fig. 1, wherein due to the fan filter unit 8 of 10 side of material storage rack installation
What is sucked is the air in technique production district 22, causes that additional arrange is needed to deposit with material on the furred ceiling 202 of technique production district 22
The fan filter unit for storing up the identical air quantity of fan filter unit of 10 side of frame installation, leads to the furred ceiling of technique production district 22
The quantity of fan filter unit 8 to be mounted is needed to greatly increase on 202, equally, energy consumption is also increase accordingly.
In addition, the requirement of the cleaniliness classs in material memory block 211 and material transferring area 212 is very tight, need to guarantee cleanliness
The air output of grade is very big, but the equipment heating amount in the region and very little, so the air stream for flowing through the region is only few
Part needs cooling treatment, but builds mode according to traditional toilet 2 shown in FIG. 1, is mounted on 212 top of material transferring area
Fan filter unit 8 and the air-flow that sucks of the fan filter unit 8 that is mounted on 10 side wall of material storage rack be all
By dry cooling coil 9 treated air-flow, meanwhile, from the air-flow that technique production district 22 and material transferring area 212 flow out into
After entering lower interlayer 6, dry cooling coil 9 all have passed through, cause the quantity of dry cooling coil 9 additionally to increase very much, cause
Many engineerings appear in the case where not arranging dry cooling coil 9 in defined space；Furthermore from technique production district 22 and object
The air-flow that material transmission range 212 is sent out all passes through technology passageway 7 and upper interlayer 5, causes technology passageway 7 and upper technology
Space required for interlayer 5 increases, and increases construction cost.
Summary of the invention
The present invention provides a kind of clean room, is carried out by the air circulation path to toilet's air cleaning and conditioning system excellent
Change, reduce the air output of technique production district and the quantity of dry cooling coil and fan filter unit, has compressed technology folder
Road and the occupied space of upper interlayer, reduce energy consumption and construction cost.
The embodiment of the invention provides a kind of clean room, which includes workshop ontology, in the workshop ontology
Equipped with upper interlayer, lower interlayer and the clear production between the upper interlayer and the lower interlayer
Layer, the interior wafer board for being equipped with aerial setting of the clear production layer and the toilet being arranged on the wafer board, it is described clean
Clean room includes the furred ceiling on top and the wallboard with furred ceiling cooperation, the two sides of the toilet be equipped with for be connected to it is described under
The technology passageway of interlayer and the upper interlayer, and be equipped with and be used between the lower interlayer and each technology passageway
The dry cooling coil of cooling cycle air；
Material storage and transmission range and technique production district, and material storage and transmission range are equipped in the toilet
And the furred ceiling of the technique production district is respectively equipped with multiple fan filter units；Wherein,
The material storage is interior equipped with material storage rack group with transmission range, and the two sides of the material storage rack group are respectively equipped with
Partition plate extends to the top of the upper interlayer at the top of each partition plate, and bottom is connect with the wafer board；
The material storage rack group includes two rows of material storage racks, between every row's material storage rack and adjacent partition plate
Gap forms return air passageway, and the return air passageway is connected to the upper interlayer；On every row's material storage rack side wall
It to the air-flow that sucks in the return air passageway and is sent into inside corresponding material storage rack equipped with multiple fan filter units；
Material transmission range is formed between the two rows material storage rack, and the bottom of every row's material storage rack is equipped with and connects
Lead to the current path in the material transferring area Yu adjacent return air passageway；
Fresh air air supply tube is equipped in the lower interlayer, the air outlet of the fresh air air supply tube and the return air passageway connect
It is logical.
In above-described embodiment, return air passageway is formed by setting partition plate and between partition plate and material storage rack, from
And the most of air-flow for flowing out material transferring area is directly entered in return air passageway, air-flow a part quilt in return air passageway
Fan filter unit sucking on material storage rack side wall is set, and is sent out after pressurized filtering, material storage rack is passed through
Enter material transferring area afterwards；Another part is arranged on the sucking of the fan filter unit on material transferring area furred ceiling, and through adding
It is sent into material transferring area after press filtration, to realize that air-flow recycles on the spot, the air output for reducing technique production district is set in this way
And the quantity of dry cooling coil and fan filter unit, have compressed technology passageway and the occupied sky of upper interlayer
Between, reduce energy consumption and construction cost；Also, the air outlet of fresh air air supply tube is connected to return air passageway, so can to return
Transporting low temperature fresh air in wind passageway, by control be sent into fresh air volume, with ensure material storage with transmission range in temperature and
Humidity requirement.
Optionally, the fresh air air supply tube is equipped with electric control valve, and material storage and transmission range are interior or described
Temperature sensor is equipped in return air channel；
Further include control device, the control device respectively with the temperature sensor and the motorized adjustment valve signal
Connection, the control device are used to control the aperture of the electric control valve according to the temperature that the temperature sensor detects to control
Make the air output of the fresh air air supply tube.
Optionally, the material storage and the bottom of transmission range and the wafer board of return air passageway corresponding region are equipped with
Sealing plate, the sealing plate are used for the bottom and the lower technology of material storage and transmission range and the return air passageway
Interlayer isolation；
Alternatively, the top of the material storage and transmission range and the hole of the wafer board of return air passageway corresponding region
Equipped with cover board, the cover board is used for the bottom and the lower technology of material storage and transmission range and the return air passageway
Interlayer isolation.
Optionally, in material storage with transmission range, the bottom of every row's material storage rack and the wafer board
Between be equipped with raised floor, between the raised floor and the wafer board formed for be connected to the material transferring area with it is adjacent
Return air passageway current path.
Optionally, the fresh air air supply tube is connected to the Fresh air handing unit of toilet's air cleaning and conditioning system.
Detailed description of the invention
Fig. 1 is the organigram of the clean room provided in the prior art；
Fig. 2 is a kind of organigram of clean room provided in an embodiment of the present invention；
Fig. 3 is the organigram of another clean room provided in an embodiment of the present invention.
Appended drawing reference:
1- workshop ontology
The toilet 2-
201- raised floor 202- furred ceiling
The storage of 21- material and transmission range
211- material memory block 212- material transferring area
22- technique production district 23- return air passageway
3- wafer board 4- partition plate
Interlayer 7- technology passageway under the upper interlayer 6- of 5-
The dry cooling coil of 8- fan filter unit 9-
10- material storage rack 11- fresh air air supply tube
12- sealing plate 13- electric control valve
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, the present invention is made into one with reference to the accompanying drawing
Step describes in detail, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.
Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts all
Other embodiments shall fall within the protection scope of the present invention.
The embodiment of the invention provides a kind of clean rooms, are extended at the top of upper interlayer by being arranged in toilet
Partition plate and form the return air that is connected to upper interlayer and material transferring area between partition plate and material storage rack and press from both sides
Road reduces the air output of technique production district so that the air circulation path of toilet's air cleaning and conditioning system be optimized
And the quantity of dry cooling coil and fan filter unit, have compressed technology passageway and the occupied sky of upper interlayer
Between, reduce energy consumption and construction cost.
Specifically, the clean room includes workshop ontology, be equipped in workshop ontology upper interlayer, lower interlayer and
Clear production layer between upper interlayer and lower interlayer；Be equipped in clear production layer the wafer board of aerial setting with
And the toilet on wafer board is set, toilet include top furred ceiling and with furred ceiling cooperation wallboard, the two of toilet
Side is equipped with the technology passageway for being connected to lower interlayer Yu upper interlayer, and between lower interlayer and each technology passageway
Equipped with the dry cooling coil for cooling cycle air；
Material storage and transmission range and technique production district, and material storage and transmission range and technique are equipped in toilet
The furred ceiling of production district is respectively equipped with multiple fan filter units；Wherein,
Material storage is respectively equipped with partition plate with material storage rack group, the two sides of material storage rack group are equipped in transmission range,
The top of interlayer is extended at the top of each partition plate, and bottom is connect with wafer board；
Material storage rack group includes two rows of material storage racks, the gap between every row's material storage rack and adjacent partition plate
Return air passageway is formed, and return air passageway is connected to upper interlayer；Every row's material storage rack side wall is equipped with multiple blower fan filterings
Device unit is to the air-flow that sucks in return air passageway and is sent into inside corresponding material storage rack；
Material transmission range is formed between two rows of material storage racks, and the bottom of every row's material storage rack is equipped with connection material and passes
The current path in defeated area and adjacent return air passageway；
Fresh air air supply tube is equipped in lower interlayer, the air outlet of fresh air air supply tube is connected to each return air passageway.
In above-described embodiment, it is provided with partition plate away from the side of another row's material storage rack in every row's material storage rack,
Also, return air passageway is formed between material storage rack and adjacent partition plate, return air passageway both passes through the gas under material storage rack
Logical circulation road is connected to material transferring area, is connected to further through the hole on wafer board with lower interlayer, also, return air passageway also with
Upper interlayer connection, due to path and pressure balance etc., the air-flow flowed out from material transferring area is largely able to enter
Return air passageway, after mixing with the fresh air of fresh air air supply tube conveying, a part of air-flow is arranged on the wind on material storage rack side wall
The sucking of machine filter unit, and sent out after pressurized filtering, enter material transferring area after passing through material storage rack；Another part gas
Stream flows up into interlayer, and is arranged on the sucking of the fan filter unit at the top of material transferring area, pressurized
It is sent into material transferring area after filtering, air-flow realizes as a result, recycles on the spot, since the air-flow that this part recycles on the spot no longer passes through
Overdrying cooling coil, technology passageway and upper interlayer, so, the quantity of dry cooling coil can greatly reduce, also, technology
Passageway and the occupied space of upper interlayer can also be compressed, and the cost of toilet's construction is reduced, simultaneously as
The fan filter unit being arranged on material storage rack side wall no longer sucks air from technique production district, so that it is raw to reduce technique
The air output and fan filter unit quantity in producing region, reduce energy consumption and construction cost；In addition, being blown by setting fresh air
Pipe is that return air passageway conveys fresh air, has ensured material storage and the temperature and humidity requirement in transmission range.
In order to more be apparent from the construction and principle of clean room provided in an embodiment of the present invention, now in conjunction with attached drawing
It is described in detail.
As shown in Fig. 2, the clean room includes workshop ontology 1, upper interlayer 5 is equipped in workshop ontology 1, lower technology is pressed from both sides
Layer 6 and the clear production layer between upper interlayer 5 and lower interlayer 6, clear production layer is interior to be equipped with aerial setting
Wafer board 3 and the toilet 2 that is arranged on wafer board 3,2 two sides of toilet be additionally provided with for be connected to lower interlayer 6 with
The technology passageway 7 of upper interlayer 5, and be equipped between lower interlayer 6 and each technology passageway 7 for cooling cycle air
Dry cooling coil 9.
Wafer board 3 is the concrete slab for being uniformly provided with hole, has support and ventilation function；Toilet 2 includes top
Furred ceiling 202 and the wallboard that cooperates with furred ceiling 202, material storage is equipped in toilet 2 and is produced with transmission range 21 and technique
Area 22, and material storage and the furred ceiling of transmission range 21 and technique production district 22 are respectively equipped with multiple fan filter units 8, such as
Shown in Fig. 2, Fig. 3, material storage and the two sides of transmission range 21 are respectively equipped with technique production district 22；In material storage and transmission range 21
Equipped with material storage rack group, the two sides of material storage rack group are respectively equipped with partition plate 4, and the top of each partition plate 4 extends to
The top of interlayer 5, and bottom is connect with wafer board 3；Material storage rack group includes two rows of material storage racks 10, every row's material
Gap between storage rack 10 and adjacent partition plate 4 forms return air passageway 23, and each return air passageway 23 and upper interlayer 5
Connection specifically, return air passageway 23 is connected to by the hole opened up on furred ceiling 202 with upper interlayer 5, and is opened on furred ceiling 202
If these holes be distributed in region corresponding with return air passageway 23.
In material storage with transmission range 21, material storage rack 10 is for storing the objects such as glass substrate to be processed, chip
Material, is provided with the region i.e. material memory block 211 of material storage rack 10, and the region between two rows of material storage racks 10 forms material
Transmission range 212 is provided with automatic conveying device in material transferring area 212；Wherein, in material memory block 211, every row's material storage
The side wall of frame 10 is equipped with multiple fan filter units 8 to the air-flow that sucks in return air passageway 23 and is sent into corresponding material
Inside storage rack 10, that is, these fan filter units 8 can be sucked into the air-flow in return air passageway 23, and filtered, added
It sends out, i.e., sends out to material memory block 211 to 10 side of material storage rack after pressure processing, thus diluted material memory block 211
Aerosol concentration, to maintain the cleaniliness classs requirement of material memory block 211；In material transferring area 212, high-density arrangement exists
The fan filter unit 8 at top sucks the air-flow in upper interlayer 5, and to material transferring area after filtering, pressurized treatments
It is sent out in 212, thus the aerosol concentration of diluted material transmission range 212, to maintain the cleaniliness classs in material transferring area 212
It is required that.
In addition, the bottom of every row's material storage rack 10 is equipped with connection material transferring area in material storage with transmission range 21
212 be connected tos with the current path in adjacent return air passageway 23, i.e. return air passageway 23 with material transferring area 212, when being specifically arranged, often
Arrange material storage rack 10 bottom and wafer board 3 between be equipped with raised floor 201, between raised floor 201 and wafer board 3 between
Gap forms said flow access.In addition, raised floor 201 can also be set on wafer board 3 in technique production district 22,
Raised floor 201 is equipped with hole, to ensure that technique production district 22 is connected to lower interlayer 6, also, raised floor
201 surface is relatively flat, is convenient for arrangement technology production equipment, can also can be arranged in the devices such as some pipelines overheadly
In gap between plate 201 and wafer board 3.
As shown in Fig. 2, return air passageway 23 is both connected by the current path of 10 bottom of material storage rack and material transferring area 212
It is logical, it is connected to further through the hole being arranged on wafer board 3 with lower interlayer 6, air-flow a part that material transferring area 212 is flowed out is logical
The current path for crossing 10 bottom of material storage rack enters return air passageway 23, and another part passes through under the hole entrance on wafer board 3
Interlayer 6, wherein this fraction for entering lower interlayer 6 is largely worn due to path and pressure balance etc.
The hole for crossing wafer board 3 also enters return air passageway 23 (sub-fraction air-flow passes through dry 9 entrance technology passageway 7 of cooling coil)；It returns
Air-flow a part in wind passageway 23 is arranged on the sucking of the fan filter unit 8 on 10 side wall of material storage rack, and through adding
It is sent out after press filtration, enters material transferring area 212 after passing through material storage rack 10；Another part air-flow flows up into skill
Art interlayer 5, and the fan filter unit 8 for being arranged on 212 top of material transferring area sucks, and is sent into material after pressurized filtering
In transmission range 212；It can be seen that the most of air-flow flowed out by material transferring area 212 is after entering return air passageway 23, by setting
It sets the fan filter unit 8 on 10 side wall of material storage rack and is arranged in the blower fan filtering at 212 top of material transferring area
Device unit 8 has been returned in material transferring area 212, is realized and is recycled on the spot, since the air-flow that this part recycles on the spot no longer passes through
Overdrying cooling coil 9, technology passageway 7 and upper interlayer 5, so, the quantity of dry cooling coil 9 can greatly reduce, also,
Technology passageway 7 and the occupied space of upper interlayer 5 can also be compressed, and reduce the cost of the construction of toilet 2, together
When, the blower fan filtering machine due to return air passageway 23 to be arranged on 10 side wall of material storage rack provides air quantity, technique production district
22 top does not have to again the blower mistake of additional arrangement air quantity identical as the fan filter unit 8 that 10 side of material storage rack is installed
Filter unit 8, to reduce 8 quantity of air output and fan filter unit of technique production district 22, reduce energy consumption and
Construction cost.It is worth noting that raised floor 201 can also be not provided in construction shown in Fig. 2, it is built into reducing
This.
With continued reference to Fig. 2, in order to guarantee the temperature and relative humidity pa of material storage and transmission range 21, lower interlayer
Fresh air air supply tube 11 is equipped in 6, and the air outlet of fresh air air supply tube 11 is connected to each return air passageway 23, fresh air air supply tube 11 is used
In by treated, Cryogenic air is transported in return air passageway 23, in return air passageway 23, fresh air is mixed with circulating current,
Mixed airflow a part is arranged on the sucking of the fan filter unit on material storage rack side wall, and send after pressurized filtering
Out, enter material transferring area after passing through material storage rack；Another part flows up into interlayer, and is arranged on object
Expect the fan filter unit sucking at the top of transmission range, is sent into material transferring area after pressurized filtering.When specific setting, fresh air
Air supply tube 11 can be connected to the Fresh air handing unit of toilet's air cleaning and conditioning system.Further, it is set on fresh air air supply tube 11
There is electric control valve 13, and is equipped with temperature sensor, electric control valve in material storage and in transmission range 21 or return air passageway 23
13 and temperature sensor connect respectively with control device signal, control device is used for the temperature control that detects according to temperature sensor
The aperture of electric control valve 13 processed, to control the air output of fresh air air supply tube 11.It in this way can be according to material storage and transmission range
The fresh air volume in return air passageway 23 is sent into temperature control in 21 or in return air passageway 23, to accurately control material memory block
211 and material transferring area 212 temperature.
For the storage of further satisfaction material and the pressure requirements in transmission range 21, as shown in figure 3, material storage and transmission
The bottom of the wafer board 3 of 23 corresponding region of area 21 and return air passageway is equipped with sealing plate 12, and sealing plate 12 is for storing material
It is isolated with the bottom in transmission range 21 and return air passageway 23 with lower interlayer 6；Alternatively, material storage and transmission range and return air
The top of the hole of the wafer board of passageway corresponding region is equipped with cover board, and cover board is used to press from both sides material storage with transmission range and return air
The bottom in road is isolated with lower interlayer, thus make material storage and transmission range and return air passageway and ambient enviroment completely every
From, and independent airflow circulating is formed between material storage and transmission range and return air passageway.Gas as shown by the arrows in Figure 3
Direction is flowed, the air-flow flowed out by material transferring area 212 is formed by current path entrance by raised floor 201 and wafer board 3
In return air passageway 23, and the fresh air conveyed with fresh air air supply tube 11 is mixed, and mixed airflow a part is arranged on material and deposits
The fan filter unit 8 stored up on 10 side wall of frame sucks, and sends out after pressurized filtering, and enters object after passing through material storage rack 10
Expect that transmission range 212, another part flow up into interlayer 5, is disposed in the blower mistake at 212 top of material transferring area
Filter unit 8 sucks, and sends out after pressurized filtering, and enters in material transferring area 212, forms circulation.Due to fresh air air supply tube
11 constantly convey fresh air into return air passageway 23, thus the pressure for keeping material storage projecting with the pressure value in transmission range 21
Force value has ensured the requirement that should be higher than that more bad cleaniliness classs area pressure value compared with stringent cleanliness degree grade area pressure value, that is,
It says, since material storage is higher with the pressure in transmission range 21, the air in the space is allowed to pass through the seam between structure
Gap etc. enters ambient enviroment, and the relatively bad air of cleaniliness classs is unable to reverse flow in ambient enviroment, and then ensure that
Material storage and cleaniliness classs stringenter in transmission range.
Alternatively, can also in lower interlayer position corresponding with each partition plate, be close to wafer board bottom surface down
The partition of vertically arranged certain altitude, and in the horizontally arranged sealing plate in the lower end of partition, vertically arranged partition and water
The sealing plate of flat setting is used to for material storage and the bottom of transmission range being isolated from the outside, thus material store and transmission range with
And independent airflow circulating is formed between return air passageway.
By above description as can be seen that in the embodiment of the present invention, deposit by setting partition plate and in partition plate and material
The return air passageway being connected to upper interlayer and material transferring area is formed between storage frame, to follow to the intrinsic air-flow of workshop
Endless path is optimized, and reduces the air output of technique production district and the number of dry cooling coil and fan filter unit
Amount, has compressed technology passageway and the occupied space of upper interlayer, reduces energy consumption and construction cost.In addition, may be used also
Fresh air is provided as return air passageway so that fresh air air supply tube is arranged, and in material storage and transmission range and return air passageway corresponding region
The bottom of wafer board is equipped with sealing plate, or the hole in material storage and transmission range and the wafer board of return air passageway corresponding region
Top be equipped with cover board, or store in the material that with transmission range and return air passageway corresponding region to be close to wafer board bottom surface past
Under vertically arranged certain altitude partition, and the lower end horizontal direction of partition be arranged sealing plate, thus make material storage and pass
Defeated area and return air passageway keep apart with ambient enviroment, further ensured material storage with transmission range in pressure, temperature with
And the requirement of humidity.
Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art
Mind and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to include these modifications and variations.
Claims (5)
1. a kind of clean room, including workshop ontology, the workshop ontology is interior to be equipped with upper interlayer, lower interlayer and position
Clear production layer between the upper interlayer and the lower interlayer, the clear production layer is interior to be equipped with aerial setting
Wafer board and the toilet that is arranged on the wafer board, the toilet include top furred ceiling and with the furred ceiling
The wallboard of cooperation, the two sides of the toilet are equipped with the technology for being connected to the lower interlayer and the upper interlayer and press from both sides
Road, and the dry cooling coil for cooling cycle air is equipped between the lower interlayer and each technology passageway；Its feature
It is,
In the toilet be equipped with material storage with transmission range and technique production district, and the material storage with transmission range and
The furred ceiling of the technique production district is respectively equipped with multiple fan filter units；Wherein,
The material storage is interior equipped with material storage rack group with transmission range, and the two sides of the material storage rack group are respectively equipped with partition wall
Plate extends to the top of the upper interlayer at the top of each partition plate, and bottom is connect with the wafer board；
The material storage rack group includes two rows of material storage racks, the gap between every row's material storage rack and adjacent partition plate
Return air passageway is formed, and the return air passageway is connected to the upper interlayer；Every row's material storage rack side wall is equipped with
Multiple fan filter units are to the air-flow that sucks in the return air passageway and are sent into inside corresponding material storage rack；
Material transmission range is formed between the two rows material storage rack, and the bottom of every row's material storage rack is equipped with connection institute
State the current path in material transferring area Yu adjacent return air passageway；
Fresh air air supply tube is equipped in the lower interlayer, the air outlet of the fresh air air supply tube is connected to the return air passageway.
2. clean room as described in claim 1, which is characterized in that the fresh air air supply tube is equipped with electric control valve, and
Temperature sensor is equipped in the material storage and transmission range or in the return air channel；
It further include control device, the control device connects with the temperature sensor and the motorized adjustment valve signal respectively
It connects, the control device is used to control the aperture of the electric control valve according to the temperature that the temperature sensor detects to control
The air output of the fresh air air supply tube.
3. clean room as described in claim 1, which is characterized in that the material storage is pressed from both sides with transmission range and the return air
The bottom of the wafer board of road corresponding region is equipped with sealing plate, and the sealing plate is used for material storage and transmission range and institute
The bottom for stating return air passageway is isolated with the lower interlayer；
Alternatively, the material storage and the top of transmission range and the hole of the wafer board of return air passageway corresponding region are equipped with
Cover board, the cover board are used for the bottom and the lower interlayer of material storage and transmission range and the return air passageway
Isolation.
4. clean room as described in claim 1, which is characterized in that in material storage with transmission range, every row
It is equipped with raised floor between the bottom of material storage rack and the wafer board, is formed between the raised floor and the wafer board
For being connected to the current path in the material transferring area Yu adjacent return air passageway.
5. clean room as described in claim 1, which is characterized in that the fresh air air supply tube and toilet's air cleaning and conditioning system
Fresh air handing unit connection.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910668606.5A CN110307610A (en) | 2019-07-23 | 2019-07-23 | A kind of clean room |
| KR1020217043108A KR20220012361A (en) | 2019-07-23 | 2020-07-20 | Partition Mode Controllable Clean Workshop |
| PCT/CN2020/103109 WO2021013133A1 (en) | 2019-07-23 | 2020-07-20 | Clean workshop capable of being controlled in partition mode |
| EP20844025.5A EP4006434A4 (en) | 2019-07-23 | 2020-07-20 | Clean workshop capable of being controlled in partition mode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910668606.5A CN110307610A (en) | 2019-07-23 | 2019-07-23 | A kind of clean room |
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| CN110307610A true CN110307610A (en) | 2019-10-08 |
Family
ID=68080679
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910668606.5A Pending CN110307610A (en) | 2019-07-23 | 2019-07-23 | A kind of clean room |
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| Country | Link |
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| CN (1) | CN110307610A (en) |
Cited By (5)
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| CN111305612A (en) * | 2020-02-21 | 2020-06-19 | 上海振南工程咨询监理有限责任公司 | Semiconductor factory building toilet |
| WO2021013133A1 (en) * | 2019-07-23 | 2021-01-28 | 中国电子工程设计院有限公司 | Clean workshop capable of being controlled in partition mode |
| CN112728664A (en) * | 2020-12-24 | 2021-04-30 | 上海和辉光电股份有限公司 | Dust-free room arrangement mode for avoiding environmental pollution and dust-free room adopting same |
| CN112797551A (en) * | 2019-10-24 | 2021-05-14 | 夏泰鑫半导体(青岛)有限公司 | Air control cabinet module, clean room system and method for improving air quality of clean room |
| CN113597895A (en) * | 2021-08-06 | 2021-11-05 | 成都百威智联科技有限公司 | Modular granary three-dimensional breeze wall circulation structure, system, installation method and granary |
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| CN113597895A (en) * | 2021-08-06 | 2021-11-05 | 成都百威智联科技有限公司 | Modular granary three-dimensional breeze wall circulation structure, system, installation method and granary |
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Application publication date: 20191008 |