EP4006434A4 - Clean workshop capable of being controlled in partition mode - Google Patents

Clean workshop capable of being controlled in partition mode Download PDF

Info

Publication number
EP4006434A4
EP4006434A4 EP20844025.5A EP20844025A EP4006434A4 EP 4006434 A4 EP4006434 A4 EP 4006434A4 EP 20844025 A EP20844025 A EP 20844025A EP 4006434 A4 EP4006434 A4 EP 4006434A4
Authority
EP
European Patent Office
Prior art keywords
controlled
partition mode
clean workshop
workshop capable
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20844025.5A
Other languages
German (de)
French (fr)
Other versions
EP4006434B1 (en
EP4006434A1 (en
Inventor
Xueli QIN
Qun Zhang
Hongmei XIAO
Dong Yan
Peng Li
Chuanyan LI
Jiangbiao WANG
Xinshang ZHANG
Wei Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
China Electronics Engineering Design Institute Co Ltd
SY Technology Engineering and Construction Co Ltd
Original Assignee
China Electronics Engineering Design Institute Co Ltd
SY Technology Engineering and Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN201910668606.5A external-priority patent/CN110307610A/en
Priority claimed from CN201910740337.9A external-priority patent/CN110469160B/en
Application filed by China Electronics Engineering Design Institute Co Ltd, SY Technology Engineering and Construction Co Ltd filed Critical China Electronics Engineering Design Institute Co Ltd
Publication of EP4006434A1 publication Critical patent/EP4006434A1/en
Publication of EP4006434A4 publication Critical patent/EP4006434A4/en
Application granted granted Critical
Publication of EP4006434B1 publication Critical patent/EP4006434B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/0008—Control or safety arrangements for air-humidification
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/70—Control systems characterised by their outputs; Constructional details thereof
    • F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/02—Ducting arrangements
    • F24F13/0227—Ducting arrangements using parts of the building, e.g. air ducts inside the floor, walls or ceiling of a building
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F6/00—Air-humidification, e.g. cooling by humidification
    • F24F6/12—Air-humidification, e.g. cooling by humidification by forming water dispersions in the air
    • F24F6/14—Air-humidification, e.g. cooling by humidification by forming water dispersions in the air using nozzles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
    • F24F7/10—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit with air supply, or exhaust, through perforated wall, floor or ceiling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2110/00—Control inputs relating to air properties
    • F24F2110/10—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2110/00—Control inputs relating to air properties
    • F24F2110/20—Humidity

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Civil Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Ventilation (AREA)
EP20844025.5A 2019-07-23 2020-07-20 Clean workshop capable of being controlled in partition mode Active EP4006434B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201910668606.5A CN110307610A (en) 2019-07-23 2019-07-23 A kind of clean room
CN201910740337.9A CN110469160B (en) 2019-08-12 2019-08-12 Clean room arrangement structure with secondary humidification system and clean production factory building
PCT/CN2020/103109 WO2021013133A1 (en) 2019-07-23 2020-07-20 Clean workshop capable of being controlled in partition mode

Publications (3)

Publication Number Publication Date
EP4006434A1 EP4006434A1 (en) 2022-06-01
EP4006434A4 true EP4006434A4 (en) 2022-08-31
EP4006434B1 EP4006434B1 (en) 2024-10-23

Family

ID=74193122

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20844025.5A Active EP4006434B1 (en) 2019-07-23 2020-07-20 Clean workshop capable of being controlled in partition mode

Country Status (3)

Country Link
EP (1) EP4006434B1 (en)
KR (1) KR102686948B1 (en)
WO (1) WO2021013133A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022262553A1 (en) * 2021-06-17 2022-12-22 Intelligent Precision Micro-Systems Limited Clean room module

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4699640A (en) * 1985-06-28 1987-10-13 Kajima Corporation Clean room having partially different degree of cleanliness
JPH1096332A (en) * 1996-09-20 1998-04-14 Mitsubishi Electric Corp Clean room
US20020068524A1 (en) * 2000-11-08 2002-06-06 Toshiaki Nakagawa Clean room for semiconductor device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004184010A (en) * 2002-12-05 2004-07-02 Sony Corp Clean room
JP4597769B2 (en) * 2005-05-24 2010-12-15 東洋熱工業株式会社 Clean room and its design and construction method
CN1329696C (en) * 2005-08-22 2007-08-01 无锡华润微电子有限公司 Flow pattern of air conditioning and purifying system in cleaning room
JP2009138975A (en) * 2007-12-04 2009-06-25 Shinwa Controls Co Ltd Cleaning method of clean room exhaust
CN102200334B (en) * 2010-03-25 2015-06-03 元邦Tech株式会社 Water spray humidification control method for clean room and humidification control system
CN103046776B (en) * 2013-01-10 2015-08-26 亚翔系统集成科技（苏州）股份有限公司 A kind of toilet for semiconductor factory building
CN203783198U (en) * 2014-03-18 2014-08-20 亚翔系统集成科技（苏州）股份有限公司 Clean room for semiconductor plant
CN109059099A (en) * 2018-06-01 2018-12-21 世源科技工程有限公司 A kind of cleanliness control system of toilet
CN110469160B (en) * 2019-08-12 2024-08-27 中国电子工程设计院有限公司 Clean room arrangement structure with secondary humidification system and clean production factory building
CN110307610A (en) * 2019-07-23 2019-10-08 世源科技工程有限公司 A kind of clean room

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4699640A (en) * 1985-06-28 1987-10-13 Kajima Corporation Clean room having partially different degree of cleanliness
JPH1096332A (en) * 1996-09-20 1998-04-14 Mitsubishi Electric Corp Clean room
US20020068524A1 (en) * 2000-11-08 2002-06-06 Toshiaki Nakagawa Clean room for semiconductor device

Also Published As

Publication number Publication date
KR20220012361A (en) 2022-02-03
KR102686948B1 (en) 2024-07-19
EP4006434B1 (en) 2024-10-23
WO2021013133A1 (en) 2021-01-28
EP4006434A1 (en) 2022-06-01

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