CN2923597Y - Automatic-cleaning storehouse - Google Patents

Automatic-cleaning storehouse Download PDF

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Publication number
CN2923597Y
CN2923597Y CN 200620112693 CN200620112693U CN2923597Y CN 2923597 Y CN2923597 Y CN 2923597Y CN 200620112693 CN200620112693 CN 200620112693 CN 200620112693 U CN200620112693 U CN 200620112693U CN 2923597 Y CN2923597 Y CN 2923597Y
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CN
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Prior art keywords
storage
air
clean
fan
cell
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CN 200620112693
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Chinese (zh)
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陈俊杰
杨国祥
陈建良
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财团法人工业技术研究院
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Abstract

This utility model is an automated clean storage, which provides clean air to the storage by exterior air supply system wherein a fan filtering unit is arranged, and makes the fan in the interior air circulating system cooperate with the air duct and filtering screen, to filter out pollution particles in the air flowing into the storage by making the air pass through the filtering screen several times. The fan can enhance the air flow velocity flowing through the first and the second storage lattices of the storage frame and improves the ability to filter out the pollution particles in the storage lattices, thus to promote the air cleanness by circular operation of the interior circulation system.

Description

自动化洁净仓储 Automated Warehousing clean

技术领域 FIELD

本实用新型是关于一种仓储,特别是关于一种提高仓储内储存格洁净度的自动化洁净仓储。 The present invention relates to a warehouse, especially in automated warehousing clean relates to an increase in the storage cell store cleanliness.

背景技术 Background technique

目前晶圆、制药、TFT、LCD业界常用的仓储制造方式有两种,一种是直接由无尘室天花板的外部供风系统提供洁净空气,经由导流管路导引气体至仓储侧壁出风,如图1所示。 Currently wafer, pharmaceuticals, TFT, LCD industry, there are two manufacturing methods commonly used storage, one is to provide clean air directly from an external air supply system clean room ceiling via flow line leading the gas to the storage sidewall wind, as shown in FIG. 这种仓储包括二侧风道204、存放物料的第一、第二储存架体201、202的储存格203及搬移物料的一组存取单元30,其设计方法、构造简单,外部供风系统10具有多数个风机过滤单元101(FFU),该多数个风机过滤单元101将洁净空气流入各储存格203并排出仓储,由于该风机过滤单元101的出口阻抗较大,导致各储存格203内气流速度不快,使储存格203内污染粒子的排除能力较低。 Such storage duct 204 includes two sides, a first material storage, a second storage rack access unit group 203 of cells 201, 202 and moving the material 30, the design method, a simple structure, the external air supply system 10 having a plurality of fan filter units 101 (FFU), the plurality of fan filter unit 101 flows into the clean air discharge of each storage cell 203 and, since the outlet of the fan filter unit 101 is large impedance, resulting in each of the cells in a stream 203 fast enough, so that the cell 203 is low ability to eliminate particulate pollution.

为了加强仓储内部污染粒子的排除与阻挡能力,因而有侧边风道装设风机过滤单元提供侧向水平气流的设计出现,如图2所示。 In order to strengthen the internal storage exclude the presence of contaminating particles in the barrier capability, hence the mounting side duct fan filter unit is designed to provide lateral horizontal airflow, as shown in FIG. 于侧边风道204装设多数个风机过滤单元101的设计方式,对仓储确实能提高第一、第二储存架体201、202的储存格203内水平层流速度,然而这种设计方式需要搭配大量薄型的风机过滤单元101,增加许多的制造与维护成本。 Duct 204 is mounted on the side of the plurality of design approach of the fan filter unit 101, first to really improve storage, 201 and 202 within cell 203 horizontal laminar flow speed of the second storage rack, however, this design requires thin with a large number of fan filter units 101, increase the number of manufacturing and maintenance costs.

上述两种仓储设计的方式是直接由外部供风系统供风与排气,并没有任何的内部循环机制,且为了加强仓储内的洁净度,需要在仓储的两侧风道装设多数个风机过滤单元以提供储存格内侧向水平气流,如此增加气流流速可增强污染粒子的滤除,提高仓储内的洁净度。 Two kinds of the above-described embodiment is designed warehouse directly from an external air supply system for the exhaust air, and there is no mechanism for internal circulation, and in order to enhance the cleanliness of storage, necessary to install a plurality of fan duct on both sides of the warehouse filtration unit cell to provide a horizontal airflow inward, thus increasing the air velocity can be enhanced to filter out contaminant particles to improve the cleanliness of the warehouse. 但增加多数个风机过滤单元虽可增强仓储的洁净度,其制造与维护的成本甚高,为了同时考量提高洁净度及降低成本,必需找出更适当的方法克服以上存在的问题。 However, although the increase may be a plurality of fan filter units to enhance the cleanliness of storage, and the manufacturing cost of maintenance is very high, in order to improve the cleanliness and also consider the cost, it is necessary to find a more appropriate way to overcome the above problems.

实用新型内容本实用新型的主要目的是提供一种可加强仓储内部循环气流的自动化洁净仓储,利用风机搭配风道与滤网的设计方式制造额外的内部循环系统于仓储内,并通过由外部供风系统提供空气直接进入仓储内,风机吸入洁净空气并传送至各风道,经过滤网将洁净空气进一步地阻隔污染粒子而进入第一、第二储存架体的储存格内,最后储存格内的洁净空气又传回风机的入口以达成一内部循环。 SUMMARY OF THE INVENTION The main object of the invention is to provide an internal recycle stream can enhance automated storage warehouse clean, with the use of the fan duct and the sieve manufactured design additional storage in the internal circulation system, and by the external donor air system supplying air directly into the cells in a final storage, the intake fan and transmitted to each of the clean air duct, the clean air through the filter further contaminating particles into the first barrier, the cell of the second storage rack, clean air and back to the fan inlet to achieve an internal circulation.

此设计方式可增强仓储内储存格的风量并增加气流速度,使加速污染粒子的滤除,能阻绝污染粒子进入储存格以提高内部物料于储存格内的洁净度,其制造与维护的成本也较低,故可达到同时考量制造成本及空气的洁净度。 This design approach can enhance the storage within the storage cells of the wind and increasing gas flow rate, so that the acceleration contaminating particles filtered out, can block the contaminating particles into the cell to improve the cleanliness of the interior material in the cell, the cost of manufacturing maintenance also lower, it can simultaneously achieve considering the manufacturing cost and the cleanliness of the air.

为达成上述目的与功效,本实用新型所采用的技术手段及构造,兹就本实用新型较佳实施例详加说明其特征与功能如下,以利于完全了解。 To achieve the object and effects, and construction techniques used in the present invention, it is hereby preferred embodiment of the present invention which is described in detail following features and functions, in order to facilitate completely understood.

附图说明 BRIEF DESCRIPTION

图1是为现有的仓储结构一的示意图;图2是为现有的仓储结构二的示意图;及图3是为本实用新型自动化洁净仓储的示意图。 FIG 1 is a conventional schematic structure of a storage; FIG. 2 is a conventional schematic structure of the titanium storage; and FIG. 3 is a schematic view of the invention of the present automated warehousing clean.

【主要组件符号说明】10 外部供风系统101 风机过滤单元20 内部循环系统201 第一储存架体202 第二储存架体 The main internal components REFERENCE NUMERALS 10 air supply system 101 outside the fan filter unit 20, a first circulation system 201 of the second storage rack 202 storage rack

203 储存格204 风道205 滤网206 风机30 存取单元具体实施方式请参阅图3是为本实用新型自动化洁净仓储的示意图,本实用新型自动化洁净仓储包括一外部供风系统10、一内部循环系统20及一存取单元30,该外部供风系统10设有多数个风机过滤单元101,将空气过滤后送入仓储内。 203 cell strainer 204 205 206 fan duct 30 access unit DETAILED DESCRIPTION Referring to FIG. 3 is a schematic view of the invention clean warehouse automation, automation of the present invention includes an external storage clean air supply system 10, an inner loop the system 20 and an access unit 30, the external air supply system 10 is provided with a plurality of fan filter unit 101, after the air filter into the warehouse. 而该内部循环系统20是包括有一第一储存架体201、一第二储存架体202、二风道204、多数个滤网205及二风机206,该第一、第二储存架体201、202是设置于仓储内,其具有多数个储存格203,供存放物料。 20 and the inner circulation system comprising a first storage rack 201, a second storage rack 202, two air duct 204, a plurality of filters 205 and two fans 206, the first and second storage rack 201, 202 is disposed in the warehouse, which has a plurality of cell 203 for storage of materials. 而该储存格203环境空间需要高的洁净度以储存物料。 The environmental cell 203 and the space required to store the high cleanliness material. 该二风道204是分别设置于仓储内壁与该第一、第二储存架体201、202的周侧,并分别与该多数个储存格203连通。 The two duct 204 is provided on each circumferential side of the inner wall of the storage of the first, the second storage rack 201, 202, respectively, and in communication with the plurality of cell 203. 该每一储存格203与该风道204连通处设置有一滤网205,让流入该每一储存格203内的空气,均可经过该滤 205,使空气中的污染粒子滤除并让风速达到均匀分布的目的。 Each of the cell 203 is provided with a duct 204 which communicates at 205 with a filter, so that the air flowing into each cell 203, 205 may pass through the filter, so that pollution particles in the air so that the wind speed was filtered off and purpose of uniform distribution. 该二风机206是装设于该仓储内,装设于该仓储下方左右两侧较佳,且与该风道204连接,亦即该风机206的入口处是吸取外部供风系统10的洁净空气及部分仓储内部空气,出口处是与该仓储内的两侧风道204连接。 The two fans 206 are mounted inside the warehouse, the warehouse is mounted below the left and right sides preferred, and connected to the duct 204, i.e., the inlet of the fan 206 is 10 clean air sucking external air supply system and a storage portion inside the air outlet duct at both sides of the warehouse 204 within the connector. 该存取单元30是设置于仓储内的第一、第二储存架体201、202间,其包括有机械手臂等器具作存取作用,该存取单元30是用以存取物料或传递物料。 The access unit 30 is disposed in the first storage, the second storage rack between 201 and 202, which includes the mechanical arm or the like for accessing the appliance, the access unit 30 for accessing a transfer material or materials .

本实用新型实施例于运作时,该外部供风系统10将外部空气经过该多数个风机过滤单元101进行一次过滤,以滤除空气中的污染粒子,再将洁净空气气流集中由仓储中央较大的入口进入该仓储内部,可作为该仓储本身的外气来源,维持该仓储内部正压状态,热量排除与排除该仓储内部产生污染粒子的用途。 Example embodiment of the present invention at the time of operation, the external air supply system 10 through the outside air plurality of fan filter unit 101 performs a filter to filter out contaminant particles in the air, and then clean air stream concentrated by the large central warehouse the entrance to the interior of the warehouse, the warehouse itself can be a source of outside air, maintaining a positive pressure inside the warehouse, the interior of the heat removal and elimination of the use of generating storage of contaminated particles. 接着,洁净空气进入该风机206入口处前,先经过一滤网205再作进一步的污染粒子滤除才进入该风机206入口处,随着该风机206的运转将洁净空气导入该仓储两侧的风道204,同时,于该风道204与该复数储存格203间设有多数个滤网205,使洁净空气再一次将空气中的污染粒子滤除并分配到各储存格203内,而该多数个储存格203内的洁净空气已经多次的污染粒子滤除并达到一定的洁净度,最后该多数个储存格203内的洁净空气再传入该仓储内便完成一次内部循环过程。 Next, clean air enters the front inlet of the fan 206, through a first screen 205 for any further contaminating particles filtered out before entering the inlet of the fan 206, the fan 206 with the operation of the clean air is introduced into both sides of the warehouse duct 204, while the duct 204 to the reservoir 203 and the plurality of cells has a plurality of screen 205, so that clean air will again contaminating particles in the air filtered and dispensed into each cell 203, which a plurality of clean air within the cell 203 has a plurality of times and certain contaminating particles filtered cleanliness, and finally clean air within the plurality of cell 203 and then passed in an internal cycle is completed within the warehouse.

较佳地,为了更有效地提高仓储内储存格的空气洁净度,选择适当的风机及马达装设于仓储内,透过改变马达的转速以增加该风机的运转速度与循环风量,即可增强流入储存格气流流速,有效阻止污染粒子进入储存格内部,并配合滤网更可快速滤除仓储内部污染粒子。 Preferably, in order to more effectively improve the cleanliness of the air in the storage cell, and select the appropriate fan motor mounted in the warehouse, by changing the rotational speed of the motor to increase the operating speed and the amount of the circulating air fan, to enhance air velocity flowing into the cell, effectively prevent contaminating particles into the interior of the cell, and with the screen more quickly filter out contaminant particles internal storage.

综合上述,本实用新型的自动化洁净仓储通过由外部供风系统及内部循环系统使流入仓储内的空气透过滤网作多次的污染粒子滤除,利用风机增强流入储存格内的气流流速并配合滤网即可快速滤除仓储内部污染粒子及有效阻止污染粒子进入储存格内部,以提升储存格内空气的洁净度。 In summary, the present invention automated storage and clean air supply system by the external and internal air circulation system for flowing into the storage contaminating particles are filtered through multiple filters, using a fan to enhance air flow flows in the flow cell and with internal storage screen to quickly filter out contaminant particles, and effectively prevent contaminating particles into the interior of a cell, to improve the cleanliness of the air cell.

Claims (4)

  1. 1.一种自动化洁净仓储,其特征在于包括:一外部供风系统,具有多数个风机过滤单元并提供洁净空气于仓储内;及一内部循环系统,包括:一第一储存架体,具有多数个储存格;一第二储存架体,具有多数个储存格;二风道,设置于仓储的周侧,分别与该第一、第二储存架体的多数个储存格连通;多数个滤网,设置于该每一储存格与该风道间的位置;及二风机,该二风机装设于仓储下方两侧内,且与该风道连接。 1. An automated warehousing clean, characterized by comprising: an external air supply system having a plurality of fan filter units in the clean air and to provide storage; and an inner circulation system, comprising: a first storage rack, with the majority of a cell; a second storage rack having a plurality of storage cells; second duct is provided on the circumferential side of the storage, respectively, in communication with the first plurality of second storage cell of the frame body; a plurality of filter disposed at a position between each of the cell with the air passage; and two fans, the two fans mounted on both sides of the lower storage, and connected to the duct.
  2. 2.如权利要求1所述的自动化洁净仓储,其特征在于,所述该外部供风系统是将洁净空气由仓储上方中央进入。 Clean the automated warehouse as claimed in claim 1, wherein said air supply system which is external to the central clean air enters the upper storage.
  3. 3.如权利要求1所述的自动化洁净仓储,其特征在于,更包括一存取单元,该存取单元是设置于该第一、第二储存架体间。 Clean the automated warehouse as claimed in claim 1, characterized in that, further comprising an access unit, the access unit is provided to the first, between the second storage rack.
  4. 4.如权利要求3所述的自动化洁净仓储,其特征在于,所述该存取单元包括有一机械手臂。 4. The automated warehouse according to clean claim 3, wherein said access unit comprises a robot.
CN 200620112693 2006-05-09 2006-05-09 Automatic-cleaning storehouse CN2923597Y (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101844661A (en) * 2010-05-31 2010-09-29 友达光电股份有限公司 Clean storehouse
CN101665183B (en) 2009-09-04 2012-04-25 友达光电股份有限公司 Warehouse system
CN102616576A (en) * 2012-03-26 2012-08-01 深圳市华星光电技术有限公司 Stacking equipment and air purifying system thereof
CN102974183A (en) * 2012-11-22 2013-03-20 深圳市华星光电技术有限公司 Air purification unit and warehousing system
CN103267321A (en) * 2013-05-30 2013-08-28 深圳中元宏康科技有限公司 Operating room air purifying system
CN105042699A (en) * 2015-08-27 2015-11-11 成都成实塑胶建材有限公司 Air supply system for dust-free room
CN105775534A (en) * 2016-05-26 2016-07-20 马人欢 Self-cleaning dustless storage room

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101665183B (en) 2009-09-04 2012-04-25 友达光电股份有限公司 Warehouse system
CN101844661A (en) * 2010-05-31 2010-09-29 友达光电股份有限公司 Clean storehouse
CN101844661B (en) 2010-05-31 2012-05-23 友达光电股份有限公司 Clean storehouse
CN102616576A (en) * 2012-03-26 2012-08-01 深圳市华星光电技术有限公司 Stacking equipment and air purifying system thereof
CN102974183A (en) * 2012-11-22 2013-03-20 深圳市华星光电技术有限公司 Air purification unit and warehousing system
WO2014079094A1 (en) * 2012-11-22 2014-05-30 深圳市华星光电技术有限公司 Air purification unit and warehousing system
CN103267321A (en) * 2013-05-30 2013-08-28 深圳中元宏康科技有限公司 Operating room air purifying system
CN105042699A (en) * 2015-08-27 2015-11-11 成都成实塑胶建材有限公司 Air supply system for dust-free room
CN105042699B (en) * 2015-08-27 2017-07-14 成都成实塑胶建材有限公司 One kind of cleanroom air supply system
CN105775534A (en) * 2016-05-26 2016-07-20 马人欢 Self-cleaning dustless storage room

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