CN104713175B - Interlayer structure - Google Patents

Interlayer structure Download PDF

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Publication number
CN104713175B
CN104713175B CN201510136399.0A CN201510136399A CN104713175B CN 104713175 B CN104713175 B CN 104713175B CN 201510136399 A CN201510136399 A CN 201510136399A CN 104713175 B CN104713175 B CN 104713175B
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China
Prior art keywords
air
interlayer structure
plate
bottom plate
structure according
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CN201510136399.0A
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CN104713175A (en
Inventor
马小刚
郭辉旭
张子谦
周亮
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/28Arrangement or mounting of filters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/108Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering using dry filter elements

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)

Abstract

The invention discloses a kind of interlayer structure, it includes:It is provided with the top plate of air inlet;Bottom plate that is parallel with the top plate and being provided with lower air outlet;It is arranged on the lower filter of the lower air outlet;And two ends respectively connect some side plates of the top plate and the bottom plate, the side plate also includes some side air-outs mouthful close to the bottom plate, wherein, the side plate, the top plate and the bottom plate enclose box-like structure.Turbulent flow in this interlayer structure is few, and dust is not easy the upper surface deposition in bottom plate, easily keeps the Particulate Cleanliness cleannes in toilet in higher level.

Description

Interlayer structure
Technical field
The present invention relates to clean technology, more particularly to a kind of interlayer structure.
Background technology
Precise treatment, high-purity processing are generally carried out in the toilet of clean room, to prevent the dust in air from polluting Precision instrument, precision equipment and product, so as to lift production qualification rate and the quality of product.For example, in FPD manufacturing industry In, it is necessary to keep the Airborne particulate concentration in workshop below some value, to reach corresponding particulate cleannes level Not.
Fig. 1 shows a kind of structure of existing clean room 100.This clean room 100 includes toilet 20, is located at Return zone 25 below toilet and the interlayer above toilet 10.The structure of interlayer 10 is general in box Shape, is enclosed and is formed by top plate 12, bottom plate 11 and some side plates 13.Top plate 12 sets air inlet 15, bottom plate 11 to set lower air-out Mouth 14.Generally, filter 16 is set on lower air outlet 14.Air by preliminary purification enters technology from air inlet 15 Interlayer 10, then enters toilet 20 through filter 16 and vertical unidirectional stream is formed in toilet 20, finally by setting The bottom plate for having gate hole enters return zone 25 and is recovered.
In order to prevent the dust in air from being deposited in the upper surface of bottom plate 11, it will usually in the connection of top plate 12 and side plate 13 Place opens up side air-out mouthful 18 and emptied.But, so it would generally form disorderly in the corner of bottom plate 11 with the junction of side plate 13 Stream, the air into the corner is difficult to discharge, and the dust granule carried secretly in air mutually collides, mutually adsorbs and sink here Product.The dust of deposition intermittently can be brought into lower air outlet 14 by turbulent flow for a long time, so as to cause the particulate in toilet 20 Cleannes are reduced.It is particularly evident in cleannes rank requirement very high clean room.
The content of the invention
The technical problems to be solved by the invention are the turbulent flow in reduction interlayer so that dust is not easy in bottom plate Upper surface is deposited, so as to keep the Particulate Cleanliness cleannes in toilet in higher level.
For above-mentioned technical problem, the present invention proposes a kind of interlayer structure, and it includes:It is provided with the top of air inlet Plate;Bottom plate that is parallel with top plate and being provided with lower air outlet;It is arranged on the lower filter of lower air outlet;And two ends are divided equally Not Lian Jie top plate and bottom plate some side plates, side plate also includes some side air-outs mouthful close to bottom plate, wherein, side plate, top plate and Bottom plate encloses box-like structure.
In a specific embodiment, air inlet is located at the middle part of top plate, and lower air outlet is located at the middle part of bottom plate.
In a specific embodiment, some side air-outs mouthful are respectively positioned on one parallel in the plane of bottom plate.
In a specific embodiment, interlayer structure also includes some volume dampers, each volume damper It is correspondingly arranged at each side air-out intraoral.
In a specific embodiment, the aperture efficiency of the volume damper away from air inlet is adjusted close to the air quantity of air inlet The opening for saving valve is big.
In a specific embodiment, interlayer structure also includes being provided with some bar grooves for being parallel to each other and ventilative The cover plate of mouth and some screws being fixed on cover plate through bar groove on side plate, cover plate is covered on the gas outlet of side, in cover plate Side outlet can stagger or align with ventilation port when the both direction extended respectively to bar groove is slided.
Be provided with that the bearing of trend of welt groove is arranged in order in a specific embodiment, on cover plate is some ventilative Mouthful, the bearing of trend of some side air-out opening's edge bar grooves is arranged in order, and each ventilation port corresponding with each air outlet can align.
In a specific embodiment, the distance of two neighboring side air-out mouthful is more than side air-out mouthful in bar groove bearing of trend Width.
In a specific embodiment, interlayer structure also includes the upper filter for being arranged on air inlet.
In a specific embodiment, upper filter and/or lower filter are blower fan filtering unit.
When sending into air from the air inlet of top plate, the air pressure in interlayer structure is more than the air pressure in toilet, one Air-flow is divided to enter toilet by lower filter.Simultaneously as the air pressure in interlayer structure is more than side air-out mouthful The air pressure in outside, another part air is sent out from side air-out mouthful, this partial air bottom plate and the junction of side plate formation to The unidirectional stream of side air-out mouthful flowing, the marginal portion of bottom plate is all the time by the gas flow purging, and dust is difficult in the marginal portion of bottom plate Deposition.Simultaneously as foring the unidirectional stream to side air-out mouthful flowing, turbulent flow is eliminated, dust is not easy deposition.In addition, under Filter is located at the weather side that this unidirectionally flows, even if having kicked up dust in side air-out mouthful near zone for some reason, this A little dusts also only alee can flow and be flowed out from side air-out mouthful in side.Thus the turbulent flow in interlayer is reduced so that dust It is not easy the upper surface deposition in bottom plate, so as to keep the Particulate Cleanliness cleannes in toilet in higher level.
Brief description of the drawings
The invention will be described in more detail below based on embodiments and refering to the accompanying drawings.Wherein:
Fig. 1 shows a kind of structural representation of existing clean room;
Fig. 2 shows the complete section schematic front view of the clean room of one embodiment of the present invention;
Fig. 3 shows partial schematic diagram of the side gas outlet under completely enclosed state;
Fig. 4 shows partial schematic diagram of the side gas outlet under full open position;
Fig. 5 shows the complete section schematic top plan view of the interlayer structure in Fig. 2.
In the accompanying drawings, identical part uses identical reference.Accompanying drawing is not drawn according to actual ratio.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
As shown in Fig. 2 clean room 200 includes interlayer structure 30, toilet 40 and return zone 50.Interlayer Structure 30 includes top plate 32, bottom plate 31, lower filter 36 and some side plates 33.The box-like that interlayer structure 30 is substantially in Structure, the skeleton of the box-like structure is enclosed and formed by top plate 32, bottom plate 31 and side plate 33.
In the present embodiment, interlayer structure 30 is substantially in cuboidal cavity structure.Top plate 32 is rectangular.Top plate 32 It is provided with air inlet 34.Air inlet 34 is generally external in the outlet of blower fan, and the blower fan is used to pump into interlayer structure 30 Fresh air and/or return air.The air that the entrance of the blower fan can be communicated in thick effect filter, external environment condition imitates filtering dress through thick Put and obtain fresh air after filtering.The entrance of the blower fan can also generally be communicated in the return zone 50 of clean room 200, so as to circulate Utilize return air.
Bottom plate 31 is rectangular.Top plate 32 is parallel to each other with bottom plate 31.Each bar of bottom plate 31 is in each bar with top plate 32 pair It should align.Preferably, top plate 32 is identical with the length and width size of bottom plate 31.Bottom plate 31 for example can be the furred ceiling of building.Bottom plate 31 are provided with lower air outlet 35.Lower filter 36 is arranged on lower air outlet 35.The lower section of bottom plate 31 is generally toilet 40, skill Air in art sandwich 30 can be entered in toilet 40 by lower filter 36.The lower filter 36 can be Effective filter.
In the present embodiment, the quantity of side plate 33 is four pieces.Four blocks of side plates 33 are respectively from the circumference of bottom plate 31 and top plate 32 Cover on bottom plate 31 and top plate 32.The relative two ends of each side plate 33 connect top plate 32 and bottom plate 31 respectively.Side plate 33 is also Including some side air-outs mouthful 37 close to bottom plate 31.Side plate 33 can be wall.
So, when sending into air from the air inlet 34 of top plate 32, the air pressure in interlayer structure 30 is more than toilet 40 Interior air pressure, a part of air-flow enters toilet 40 by lower filter 36.Simultaneously as in interlayer structure 30 Air pressure be more than the air pressure in the outside of side air-out mouthfuls 37, another part air is sent out from side air-out mouthful 37.This partial air is in bottom plate 31 with the formation of the junction of side plate 33 to the unidirectional stream of the flowing of side air-out mouthful 37, the marginal portion of bottom plate 31 is all the time by the air-flow Purging, dust is difficult the marginal portion deposition in bottom plate 31.Simultaneously as the unidirectional stream to the flowing of side air-out mouthful 37 is formd, Turbulent flow is eliminated, dust is not easy deposition.In addition, lower filter 36 is located at the weather side that this unidirectionally flows, even if due to some Reason has kicked up dust in 37 near zones of side air-out mouthful, and these dusts also only alee can flow and be flowed from side air-out mouthful 37 in side Go out.Thus the particle cleanliness factor in toilet 40 is maintained.
Preferably, air inlet 34 is located at the middle part of top plate 32, and lower air outlet 35 is located at the middle part of bottom plate 31.So, air-flow Lower air outlet 35 is flowed to straight down from air inlet 34, does not change direction in this process, so that more energy efficient.Meanwhile, it is clean The velocity flow profile of the unidirectional stream of various pieces in room 40 is uniform, is thus not easily formed turbulent flow.
It is highly preferred that some side air-outs mouthful 37 are respectively positioned in a plane parallel to bottom plate 31.So, phase is flowed to respectively The shape in the path of two strands of air-flows of adjacent two side air-outs mouthful 37 is close, this two strands of air-flows do not allow to be also easy to produce interfere and Both form turbulent flow in region close to each other.
It is preferably carried out at one in mode, interlayer structure 30 also includes the upper filter for being arranged on air inlet 34 38.High efficiency particulate air filter or high efficiency particulate air filter during upper filter 38 can be used.Preferably, upper filter 38 and/or descended Filter device 36 is blower fan filtering unit (Fan Filter Unit).Blower fan filtering unit is a kind of self-powered powered air-purifying Device, its outlet air surface is larger.Blower fan filtering unit generally includes blower fan and the efficient filter below blower fan.Blower fan filtering machine The air at top can be sucked in blower fan filtering unit and blow to efficient filter by group.These air through during efficient filter by mistake Filter.Air after being filtered can uniformly be sent out in whole outlet air surface with wind speed of the speed difference in 20%.Due to from blower fan mistake The outlet air surface of filter group is big, and the VELOCITY DISTRIBUTION for the air sent out is uniform, so in interlayer structure 30 and toilet 40 Interior wind speed profile is evenly, it is not easy to because air velocity difference is big and forms turbulent flow so that deposition in interlayer structure 30 Dust.In addition, blower fan filtering unit is generally modularized design, install and easy to maintenance.
It is preferably carried out at one in mode, interlayer structure 30 also includes some volume dampers.Each air quantity is adjusted Section valve is correspondingly arranged on each side air-out mouthful 37.Dust can be reduced by adjusting the openings of sizes of volume damper to sink Drop.For example, the aperture efficiency of the volume damper away from air inlet 34 is big close to the opening of the volume damper of air inlet 34, so To improve the barometric gradient that the side air-out mouthful 37 away from air inlet 34 arrives air inlet 34, so as to avoid because barometric gradient is small, wind Dust is settled caused by speed is too low.
It is preferably carried out at as shown in Figure 3 one in mode, interlayer structure 30 also includes cover plate 60 and is used for Some screws 63 of securing cover plate 60.Cover plate 60 includes some bar grooves 61 and ventilation port 62.It is parallel to each other between bar groove 61.Side plate 33 are additionally provided with some screwed holes matched with screw 63.Each bar groove 61 is set corresponding to each screwed hole so that cover plate 60 when covering on side air-out mouthfuls 37, the screwed hole alignment that each bar groove 61 can be corresponding thereto.As shown in figure 4, cover plate 60 When being slided in the direction that welt groove 61 extends, ventilation port 62 can align side air-out mouthfuls 37;As shown in figure 3, cover plate 60 exists When another direction that welt groove 61 extends is slided, ventilation port 62 can stagger so that cover plate 60 shelters from side with side air-out mouthful 37 Air outlet 37.After cover plate 60 is covered on side air-out mouth 37, each screw 63 is passed through in bar groove 61 and embedded screwed hole and will covered Plate 60 is fixed on dividing plate.Each screw 63 is unclamped, the bearing of trend of welt groove carrys out slide cover 60 to adjust side air-out mouthful 37 Aperture, so as to adjust the air velocity and flow of side air-out mouthfuls 37, thus reduce the turbulent flow in interlayer structure 30.
Preferably, some ventilation ports 62 that the bearing of trend of welt groove 61 is arranged in order are provided with cover plate 60, if dry side goes out The bearing of trend of 37 welt groove of air port 61 is arranged in order, and each ventilation port 62 can alignment corresponding with each air outlet.So can be with The aperture of these side air-outs mouthful 37 is adjusted simultaneously.
Preferably, the distance of two neighboring side air-out mouthful 37 is more than 37 width on the bearing of trend of bar groove 61 of side air-out mouthful Degree.So, when clean system does not work, side air-out mouthful 37 can be completely enclosed by cover plate 60, so as to avoid environmental contaminants Enter from side air-out mouthful 37 in interlayer structure 30.
Preferably, some bar grooves 61 are distributed in the edge of cover plate 60, and ventilation port 62 is arranged on the middle part of cover plate 60.So, The stress of cover plate 60 is more reasonable, and the sealing property of cover plate 60 is more preferable.
It is preferably carried out at as shown in Figure 5 one in mode, bottom plate 31 is provided with some lower air-out being arranged in array Mouth 35, top plate 32 is provided with some air inlets 34 being arranged in array.Blower fan filtering unit sets the He of air outlet 35 in each of the lower In each air inlet 34.This interlayer structure 30 is particularly suitable for use in the larger clean room 200 of structure.
Although by reference to preferred embodiment, invention has been described, is not departing from the situation of the scope of the present invention Under, various improvement can be carried out to it and part therein can be replaced with equivalent.Especially, as long as in the absence of structure punching Prominent, the every technical characteristic being previously mentioned in each embodiment can combine in any way.The invention is not limited in text Disclosed in specific embodiment, but all technical schemes including falling within the scope of the appended claims.

Claims (10)

1. a kind of interlayer structure, it is characterised in that including:
It is provided with the top plate of air inlet;
Bottom plate that is parallel with the top plate and being provided with lower air outlet;
It is arranged on the lower filter of the lower air outlet;And
Two ends connect some side plates of the top plate and the bottom plate respectively, if the side plate includes the dry side close to the bottom plate Air outlet,
Wherein, the side plate, the top plate and the bottom plate enclose box-like structure.
2. interlayer structure according to claim 1, it is characterised in that the air inlet is located in the top plate Portion, the lower air outlet is located at the middle part of the bottom plate.
3. interlayer structure according to claim 2, it is characterised in that some side air-outs mouths be respectively positioned on one parallel to In the plane of bottom plate.
4. interlayer structure according to any one of claim 1 to 3, it is characterised in that the interlayer structure Also include some volume dampers, it is intraoral that each volume damper is correspondingly arranged at each side air-out.
5. interlayer structure according to claim 4, it is characterised in that the volume damper away from the air inlet Aperture efficiency is big close to the opening of the volume damper of the air inlet.
6. interlayer structure according to any one of claim 1 to 3, it is characterised in that the interlayer structure Also include being provided with the cover plate of some bar grooves being parallel to each other and be fixed on cover plate through the bar groove some on side plate Screw, the cover plate is additionally provided with ventilation port,
The cover plate is covered on the side gas outlet, when the both direction that the cover plate is extended to the bar groove respectively is slided The side outlet staggers or alignd with the ventilation port.
7. interlayer structure according to claim 6, it is characterised in that be provided with the cover plate along the bar groove Some ventilation ports that bearing of trend is arranged in order, the bearing of trend of bar groove is arranged in order described in some side air-out opening's edges, and each is saturating Corresponding with each air outlet it can align in air port.
8. interlayer structure according to claim 7, it is characterised in that the distance between two neighboring side air-out mouthful is big In width of the side air-out mouthful on the bearing of trend of the bar groove.
9. interlayer structure according to any one of claim 1 to 3, it is characterised in that the interlayer structure Also include the upper filter for being arranged on the air inlet.
10. interlayer structure according to claim 9, it is characterised in that the upper filter and/or it is described descended Filter device is blower fan filtering unit.
CN201510136399.0A 2015-03-26 2015-03-26 Interlayer structure Active CN104713175B (en)

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Application Number Priority Date Filing Date Title
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CN201510136399.0A CN104713175B (en) 2015-03-26 2015-03-26 Interlayer structure

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CN104713175B true CN104713175B (en) 2017-07-21

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109059099A (en) * 2018-06-01 2018-12-21 世源科技工程有限公司 A kind of cleanliness control system of toilet

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008157607A (en) * 2006-12-20 2008-07-10 Ind Technol Res Inst Air current feed system for laminar flow clean room
JP2010121909A (en) * 2008-11-21 2010-06-03 Hitachi Plant Technologies Ltd Method of removing gaseous contaminant within clean room
CN102889249A (en) * 2012-10-30 2013-01-23 深圳市华星光电技术有限公司 Fan filter unit and dust-free room air purification system
CN203163096U (en) * 2013-03-13 2013-08-28 江苏心日源建筑节能科技有限公司 Clean room system
JP2013228160A (en) * 2012-04-26 2013-11-07 Shimizu Corp Electric power control system
CN204200017U (en) * 2014-09-10 2015-03-11 江苏康顺医用净化工程有限公司 The medical delivery window that a kind of cleanliness factor is high

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008157607A (en) * 2006-12-20 2008-07-10 Ind Technol Res Inst Air current feed system for laminar flow clean room
JP2010121909A (en) * 2008-11-21 2010-06-03 Hitachi Plant Technologies Ltd Method of removing gaseous contaminant within clean room
JP2013228160A (en) * 2012-04-26 2013-11-07 Shimizu Corp Electric power control system
CN102889249A (en) * 2012-10-30 2013-01-23 深圳市华星光电技术有限公司 Fan filter unit and dust-free room air purification system
CN203163096U (en) * 2013-03-13 2013-08-28 江苏心日源建筑节能科技有限公司 Clean room system
CN204200017U (en) * 2014-09-10 2015-03-11 江苏康顺医用净化工程有限公司 The medical delivery window that a kind of cleanliness factor is high

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