JP2014006024A - Local cleaning system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a local cleaning system capable of supplying necessary irreducible clean air and also supplying the clean air over the entire region to be cleaned.SOLUTION: There is provided a local cleaning system 1 which supplies clean air to a region to be cleaned at a periphery of a film 100 arranged along a horizontal plane, the local cleaning system 1 including barrier air current generation plates 20 which generate an air current to prevent contaminations outside the region to be cleaned from entering the region to be cleaned by being controlled to tilt at a predetermined angle away from a pair of fan filter units 10 with the distance from the fan filter units 10 based upon the fan filter units, the fan filter units being arranged opposite each other in a horizontal direction with at least a part of the film 100 interposed.

Description

  The present invention relates to a local cleaning system for performing local air cleaning.

  2. Description of the Related Art In recent years, manufacturing facilities such as liquid crystals and semiconductors have been made into clean rooms for the purpose of performing quality control of these products during the manufacturing process.

  Here, in the manufacturing facility, the required cleanliness is different for each process until the manufacturing is performed. For example, the highest cleanliness is required in the laminating process and the like, and the high cleanliness as in the laminating process is not required in the other raw material charging process and the extrusion process. Therefore, in such a clean room, each process is partitioned by a partition wall or the like according to the required cleanliness, and an energy saving effect has been obtained by blowing the minimum necessary clean air to each partition. .

  For example, Patent Document 1 discloses that a local clean space is formed by locally partitioning a part of the internal space of a clean room with a partition, and this local clean space is made highly clean.

JP 2001-263748 A

  However, when such a clean room is adopted in a film product manufacturing facility, the film product is usually formed as a series of strips that are not separated in each of the above-described lamination process, raw material charging process, extrusion process, and the like. Therefore, it cannot be partitioned by a partition wall for each of the above steps. Therefore, in the film product manufacturing facility, a large room type clean room capable of including all the processes including the above processes is formed, and all the processes including the above processes are divided into the large room type clean room. It was inherent.

  Here, since the cleanliness of such a large-room clean room as a whole is matched to the laminating process that requires the highest cleanliness, a raw material charging process that does not require the same cleanliness as the laminating process, etc. As for the extrusion process and the like, the same cleanliness as the lamination process and the like is maintained, resulting in waste and energy saving performance being reduced.

  Also, in the conventional clean room, clean air was blown from the clean air blower opening provided on the ceiling surface toward the floor in the room, so the lower part of the gantry and the film behind the film. The lower part has a problem that the clean air blown from the ceiling does not reach, and the clean air cannot be supplied to the entire area to be cleaned.

  The present invention has been made in view of the above, and is capable of supplying a minimum amount of clean air and capable of supplying clean air to the entire area to be cleaned. It aims to provide a cleaning system.

  In order to solve the above-described problems and achieve the object, the local cleaning system according to claim 1 is a local cleaning that supplies clean air to a region to be cleaned around a strip disposed along a horizontal plane. It is a system, and is a pair of air blowing means arranged to face each other along a horizontal direction across at least a part of the belt-like body, and blows clean air in a direction along the belt-like surface of the belt-like body Thus, at least the air blowing means that generates a clean region between the pair of air blowing means arranged opposite to each other, and the air blowing direction of either the top or bottom or side of the air blowing means, with the air blowing means as a starting point. An air flow that prevents contamination outside the cleaning target region from flowing into the cleaning target region by controlling the tilting unit to be inclined by a predetermined angle in a direction away from the belt-like body as the distance from the air blowing unit increases. Comprising generating a barrier air flow generating means for the.

  Moreover, the local cleaning system of Claim 2 WHEREIN: The said local airflow production | generation means is arrange | positioned to the upper end part and lower end part of the said ventilation means in the local cleaning system of Claim 1.

  Further, the local cleaning system according to claim 3 is the local cleaning system according to claim 1 or 2, wherein the local cleaning system is an air intake means disposed above or below the cleaning target region, and at least the cleaning target region. Intake means for expanding the clean region upward or downward by taking in air.

  Moreover, the local cleaning system of Claim 4 is arrange | positioned along the horizontal surface in the local cleaning system of Claim 1 or 3 above the said strip | belt body between the said ventilation means arranged facing each other. Or a bottom plate arranged along a horizontal plane below the belt-like body between the air blowing means arranged opposite to each other.

  Further, the local cleaning system according to claim 5 is the local cleaning system according to claim 4, wherein the barrier airflow generation means is disposed at an end opposite to the end where the top plate or the bottom plate is disposed. Provided, and the air blowing speed in the vicinity of the end portion where the top plate or the bottom plate of the air blowing means is arranged is made smaller than the air blowing speed in the vicinity of the end portion of the air blowing means where the barrier airflow generating means is arranged.

  Further, the local cleaning system according to claim 6 is the local cleaning system according to claim 4 or 5, wherein the top plate or the bottom plate is located at any position inside the cleaning target region or the cleaning target region. The strip is disposed closer to the top plate than an intermediate point between the top plate and the bottom surface of the cleaning target region, or the strip is disposed on the bottom plate and the cleaning target region. It arrange | positioned near the said baseplate rather than the middle point with the upper surface of.

  Further, the local cleaning system according to claim 7 is the local cleaning system according to any one of claims 4 to 6, wherein the top plate or the bottom plate is the top plate or the bottom plate and the belt-like body. Discharge means for discharging the clean air between the outside to the area to be cleaned through the top plate or the bottom plate.

  Moreover, the local cleaning system of Claim 8 is a local cleaning system as described in any one of Claim 1 to 7. WHEREIN: The said ventilation means is a fan filter unit.

  Further, the local cleaning system according to claim 9 is the local cleaning system according to any one of claims 1 to 8, wherein the barrier airflow generation means is either above or below the air blowing means. The nozzle is arranged so that the air blowing direction of the end portion is inclined by a predetermined angle in the direction away from the belt-like body as the air blowing means is separated from the air blowing means.

  According to the local cleaning system of Claim 1, since it is possible to clean locally with respect to a strip | belt body, without dividing a clean room, compared with the case where it cleans only by a clean room. Energy saving performance is improved. In addition, it is possible to blow clean air even in a range where clean air cannot be delivered in a clean room. Further, by providing the barrier airflow generation means, it is possible to perform local cleaning of the cleaning target region while opening the upper or lower portion of the cleaning target region, so that the user can access the band from above or below. It is possible to perform local cleaning of the strip in an easy state.

  According to the local cleaning system of claim 2, since the upper and lower sides of the cleaning target area are opened by providing the barrier airflow generation means on both the upper end portion and the lower end portion of the blower means, the user can form a belt-like shape. It is possible to perform local cleaning of the band-like body in a state in which the body is more easily accessible.

  According to the local cleaning system of the third aspect, it is possible to perform local cleaning with higher accuracy by performing intake from below or above the cleaning target region. It is also possible to extend the clean area in the intake direction.

  According to the local cleaning system of claim 4, it is possible to shield the airflow inside and outside the area to be cleaned by the top plate installed above the strip or the bottom plate installed below the strip. Therefore, it is possible to perform local cleaning with higher accuracy. Further, the clean air blown from the blower moves along the top plate or the bottom plate, so that the reach distance of the clean air can be extended.

  According to the local cleaning system of Claim 5, since the ventilation speed in the vicinity of the edge part by which the top plate or the baseplate is arrange | positioned can be reduced, energy-saving performance improves. Further, the energy of the reduced air blowing speed in the vicinity of the end portion where the top plate or the bottom plate is arranged is the air blowing speed in the vicinity of the end portion where the barrier airflow generating means is arranged among the end portions of the blowing means. It is possible to spend on increasing.

  According to the local cleaning system of claim 6, the cleanliness of the band-shaped body by arranging the band-shaped body at a position near the top plate or a position near the bottom plate, which is a particularly clean position in the clean region. Can be improved.

  According to the local cleaning system of claim 7, the clean air accumulated between the top plate and the top surface of the strip or the clean air accumulated between the bottom plate and the bottom surface of the strip is used for the top plate or the bottom plate. The space between the top plate and the upper surface of the belt or the space between the bottom plate and the lower surface of the belt is extremely positive pressure. It is possible to prevent the strip-shaped body from being deformed by the clean air accumulated in the space pressing the strip-shaped body downward or upward.

  According to the local cleaning system of the eighth aspect, the cleaning is performed in the direction along the band-shaped surface of the band-shaped body by an extremely easy configuration of using FFU that is generally known as a blowing unit that blows clean air. It is possible to blow out air.

  According to the local cleaning system of the ninth aspect, contaminants outside the area to be cleaned can be obtained by an extremely easy configuration in which a nozzle disposed at a predetermined angle is provided at the end of the FFU as a barrier airflow generation unit. It is possible to prevent the flow into the cleaning target area.

It is a perspective view which shows the state which installed the local cleaning system which concerns on Embodiment 1 of this invention. It is AA arrow sectional drawing of FIG. FIG. 2 is a side cross-sectional view of a clean room with a local cleaning system with additional components. It is a sectional side view of the clean room which has arrange | positioned the local cleaning system which concerns on Embodiment 2 of this invention. It is a sectional side view of the clean room which has arrange | positioned the local cleaning system which concerns on Embodiment 3 of this invention. It is a figure which shows the experimental result of an Example. It is a sectional side view of the clean room which has arrange | positioned the local cleaning system which concerns on the modification of this invention. It is a sectional side view of the clean room which has arrange | positioned the local cleaning system which concerns on the other modification of this invention.

  Embodiments of a local cleaning system according to the present invention will be described below in detail with reference to the accompanying drawings. [I] First, the basic concept of the embodiment will be described, then [II] the specific contents of each embodiment will be described, and [III] Finally, modifications to each embodiment will be described. However, the present invention is not limited to each embodiment.

[I] Basic Concept of Embodiment First, the basic concept of the embodiment will be described. The local cleaning system which concerns on this Embodiment is a local cleaning system which supplies clean air with respect to the cleaning object area | region around the strip | belt shaped object arrange | positioned along a horizontal surface. Here, the “strip-shaped body” is an object formed in a strip shape and is a product to be cleaned by the local cleaning system, and has a concept including, for example, a film. In the following description, it is assumed that the strip is a film, and the film is manufactured in a film manufacturing facility. In addition, although the film is not necessarily arranged along the horizontal direction at all positions in the film manufacturing facility, in the present application, it is assumed that the local cleaning system is installed for a portion arranged along the horizontal direction. explain. The “cleaning target region” is a region to be cleaned by the local cleaning system, and specifically is a space formed between FFUs to be described later. Note that a “cleaning region” to be described later is a region that is actually cleaned by a local cleaning system, and in this respect, the “cleaning target region” and the “cleaning region” are different concepts. “Clean air” is air blown out from an FFU, which will be described later, and is air that satisfies a certain standard of cleanliness.

  In addition, the local cleaning system which concerns on this Embodiment is demonstrated as what is arrange | positioned around the film in the inside of a clean room. In this way, when performing the local cleaning on the film, it is possible to further maintain the cleanliness of the area to be cleaned by maintaining the cleanliness of the entire room by the cleanroom. Since it is possible to significantly reduce the amount of blown air, energy saving performance is improved. The local cleaning system may be installed in a space other than the clean room, but it is desirable to install it in a space where a certain degree of cleanliness is maintained.

[II] Specific Contents of Each Embodiment Next, specific contents of each embodiment according to the present invention will be described.

[Embodiment 1]
First, the first embodiment will be described. This form is a form in which a barrier airflow generation plate is provided at the lower end portion of the FFU and a top plate is provided at the upper end portion.

(Constitution)
FIG. 1 is a perspective view showing a state in which the local cleaning system according to the present embodiment is installed. As shown in FIG. 1, the local cleaning system is arranged so as to sandwich the film, and a plurality of the local cleaning systems are arranged along the longitudinal direction of the film, thereby cleaning the film at a plurality of positions of the film. It is possible to supply air. In FIG. 1, a gap is provided between each local cleaning system. This allows a person to access the film through this gap. Actually, the local cleaning systems may be arranged in close contact with each other without providing the gap. In this case, the number of local cleaning systems to be installed will increase as compared with the case where a gap is provided, but in a state where contaminants outside the cleaning target region are less likely to flow into the cleaning target region. Local cleaning can be performed, and the cleanliness of the clean area is further improved. As will be described later, even if each local cleaning system is installed with a gap between each other, if the gap is less than a predetermined gap, the cleanliness of the film located in the gap is not significantly reduced. Absent. In the following, each configuration of the local cleaning system will be described in detail with the X direction in FIG. 1 as the width direction, the Y direction as the length direction, and the Z direction as the height direction as necessary.

(Configuration-Local cleaning system)
FIG. 2 is a cross-sectional view taken along the line AA of FIG. As shown in FIG. 2, the local cleaning system 1 according to the first embodiment schematically includes a fan filter unit (hereinafter referred to as FFU) 10, a barrier airflow generation plate 20, a top plate 30, and an exhaust fan 40. Configured.

(Configuration-Local cleaning system-FFU)
The FFU 10 is a blowing unit that generates a clean region between at least a pair of the FFUs 10 arranged to face each other by blowing clean air in a direction along the band-like surface of the film 100. The FFU 10 is formed as a rectangular parallelepiped shape whose longitudinal direction is arranged along the length direction, and is provided as a pair on both sides in the width direction of the film 100 arranged in the clean room 110, and at least a part of the film 100 It is arranged so as to face along the width direction across the wall. The outer surface of the FFU 10 is provided with a blow-out surface 11 on the surface facing the film 100, the suction surface 12 is provided on the opposite surface, and a filter (HEPA filter, ULPA filter, etc.) not shown is provided therein. . Then, the air sucked from the suction surface 12 is changed into clean air through the filter, and the air is blown from the blow-out surface 11 so that the clean air can be supplied to the region to be cleaned around the film 100. is there.

  Here, the FFU 10 is fixed at a predetermined height by an FFU column 13 installed perpendicular to the floor surface. The predetermined height may be any height as long as the FFUs 10 arranged to face each other can sandwich at least a part of the film 100. In addition, the top plate 30 to be described later is disposed at any position inside the cleaning target region or at a position in contact with the cleaning target region, and the film 100 is located at an intermediate point between the top plate 30 to be described later and the bottom surface of the cleaning target region. It is desirable to determine the position of the FFU 10 so as to be arranged near the top plate 30 described later. This is because, in the case where the top plate 30 is arranged at any position inside the cleaning target area or at a position in contact with the cleaning target area, the position near the top board 30 in the cleaning area is particularly high in cleanliness. This is because, by setting the FFU 10 and the film 100 in such a positional relationship, it is possible to dispose the film 100 at a particularly high cleanliness position in the cleaning target region.

  If the blowing speed of the FFU 10 is too slow, the clean air cannot reach the entire area to be cleaned, and if the blowing speed is too fast, an air current that attracts the surrounding air is generated, resulting in intrusion of particles. Problems arise. Therefore, it is necessary to adjust the blowing speed to an appropriate value. This adjusted value can be obtained, for example, by experiments. In addition, although the ventilation speed of the vicinity of the top plate 30 mentioned later and the ventilation speed of the vicinity of the barrier airflow production | generation board 20 mentioned later may be different, this point is mentioned later in description of each structure.

(Configuration-Local cleaning system-Barrier airflow generation plate)
The barrier airflow generation plate 20 is a barrier airflow generation means that prevents contaminants outside the cleaning target area from flowing into the cleaning target area. The barrier airflow generation plate 20 is formed in a long plate shape having substantially the same length as the length of the FFU 10, and its side surface is installed at a position a predetermined distance above the lower end portion of the blowing surface 11 of the FFU 10. Then, with this installation point as a base point, it is inclined by a predetermined angle in a direction away from the film as it moves away from the FFU 10. Since the barrier airflow generation plate 20 is installed with such an inclination, the clean air blown out from the blowing surface 11 of the FFU 10 located below the installation point of the barrier airflow generation plate 20 is generated as a barrier airflow generation. The air is blown obliquely downward along the inclination of the plate 20. The clean air blown out from the blow-out surfaces 11 of the left and right FFUs 10 through the barrier airflow generation plate 20 collides below the center position in the width direction of the film 100, thereby generating a barrier airflow as shown in FIG. To do. By generating the barrier airflow in this way, it is possible to prevent particles outside the cleaning target region from flowing into the cleaning target region.

  In addition, in order to generate a barrier airflow using the barrier airflow generation plate 20 in this way, the blowing speed of the clean air blown from the blowout surface 11 of the FFU 10 located below the installation point of the barrier airflow generation plate 20 is increased. It is also good to do. In this case, a larger amount of energy is consumed by increasing the blowing speed of the FFU 10 near the barrier airflow generation plate 20, but as will be described later, the blowing speed of the FFU 10 near the top board 30 can be reduced. Since it is possible, energy saving performance does not fall as the local cleaning system 1 whole.

  The clean air blown from the blow-out surface 11 of the FFU 10 above the installation point of the barrier airflow generation plate 20 and below the film 100 is blown obliquely downward by the barrier airflow generation plate 20. Go straight and do not. The clean air blown out from the FFUs 10 on both sides collides with each other in the vicinity immediately below the center in the width direction of the film 100 and is blown out vertically downward. This impinging airflow can also prevent contaminants outside the cleaning target region from flowing into the cleaning target region.

  As described above, each local cleaning system 1 is installed with a gap of a predetermined interval. Here, the clean air blown out from the FFU 10 does not travel accurately linearly along the width direction, but actually travels while diffusing in the length direction. Therefore, the cleaning region also extends somewhat in the direction away from the local cleaning system 1 along the length direction of the local cleaning system 1. Therefore, even if each local cleaning system 1 is installed with a gap between each other, the cleanliness of the film 100 positioned in the gap is not significantly reduced as long as the gap is not more than a predetermined gap. Note that this predetermined interval can be obtained by, for example, experiments.

(Configuration-Local cleaning system-Top plate)
The top plate 30 is a top plate 30 arranged along a horizontal plane above the film 100 between the FFUs 10 arranged to face each other, and is formed, for example, as a plate-like body made of resin or plastic. The top plate 30 is placed on the upper surface of the FFU 10 at both ends thereof, and prevents the clean air above the film 100 from leaking outside the region to be cleaned. Moreover, since the clean air blown from the FFU 10 moves along the bottom surface of the top plate 30 due to the Coanda effect, the moving distance of the clean air can be extended. Thereby, it is possible to reduce the ventilation speed in the vicinity of the top plate 30 of the FFU 10, and the energy saving performance is improved.

  Here, the clean air blown from the FFUs 10 on both sides accumulates in the space between the top plate 30 and the upper surface of the film 100, so that the space becomes extremely positive pressure and the clean air accumulated in the space. However, if the film 100 is pressed downward, the film 100 may be distorted. Therefore, in order to solve this problem, a discharge hole 31 may be provided in the top plate 30 as shown in FIG. 3 is a side sectional view of a clean room 110 in which a local cleaning system 1 having additional components is arranged (a sectional view corresponding to the AA section in FIG. 1; the same applies to FIG. 4 and subsequent figures). is there. The discharge holes 31 are discharge means for discharging clean air between the top plate 30 and the film 100 to the outside of the cleaning target region via the top plate 30, and a plurality of discharge holes 31 are provided near the center of the top plate 30. Yes. Then, it is possible to discharge the clean air accumulated between the top plate 30 and the upper surface of the film 100 to the upper surface of the top plate 30, thereby extremely reducing the space between the top plate 30 and the upper surface of the film 100. It is possible to prevent a positive pressure, and it is possible to prevent the film 100 from being deformed by the clean air accumulated in the space pressing the film 100 downward.

  In addition, if the top plate 30 is arrange | positioned above FFU10, it does not need to be mounted on the upper surface of FFU10. For example, you may arrange | position in the position which does not touch FFU10 further upwards from the upper surface of FFU10. Moreover, you may arrange | position in the position where the both ends of the top plate 30 contact | connect the blowing surface 11 of FFU10.

(Configuration-Local cleaning system-Exhaust fan)
Returning to FIG. 2, the exhaust fan 40 is an intake means that expands the clean region downward by performing intake to the clean target region. The exhaust fan 40 is a fan provided on the floor surface below the film 100, and sucks air above the exhaust fan 40 and blows it to a duct provided under the floor. In this way, the exhaust fan 40 sucks air into the area to be cleaned, so that the area to be cleaned can be expanded downward, and the cleanliness of the area to be cleaned can be kept higher. It is. The point that the cleaning target area is expanded downward by the exhaust fan 40 and the point that the cleanliness of the cleaning target area is improved will be described later in the embodiment.

  In addition to the exhaust fan 40 or in place of the exhaust fan 40, a partition 41 having a long plate surface orthogonal to the floor surface as shown in FIG. 3 is provided on the floor surface below the central position in the width direction of the film 100. May be installed. With this partition 41, the clean air blown from the lower end of the FFU 10 moves downward along the partition 41, and it is possible to generate a vertically downward barrier airflow and extend the clean region downward. Become.

(effect)
As described above, according to the present embodiment, it is possible to locally clean the film 100 without partitioning the clean room 110, so that the cleaning is performed only by the clean room 110. Energy saving performance is improved. In the clean room 110, it is possible to blow clean air even in a range where clean air could not be delivered. In addition, by providing the barrier airflow generation plate 20, it is possible to perform local cleaning of the cleaning target region while opening the lower portion of the cleaning target region, so that the user can easily access the film 100 from below. It is possible to perform local cleaning of the film 100.

  In addition, it is possible to perform local cleaning with higher accuracy by inhaling air from below with respect to the cleaning target region. It is also possible to extend the clean area in the intake direction.

  In addition, the top plate 30 installed above the film 100 can shield the airflow inside and outside the region to be cleaned, and more accurate local cleaning can be performed. Further, the clean air blown from the FFU 10 moves along the top plate 30 so that the reach distance of the clean air can be extended.

  Moreover, since it is possible to reduce the ventilation speed in the vicinity of the edge part in which the top board 30 is arrange | positioned, energy saving performance improves. Moreover, the air blown speed in the vicinity of the edge part in which the barrier airflow generation board 20 is arrange | positioned among the edge parts of FFU10 is increased by the energy which reduced the ventilation speed in the vicinity of the edge part in which the top plate 30 is arrange | positioned. Can be spent on.

  Moreover, it becomes possible to improve the cleanliness | purity with respect to the film 100 by arrange | positioning the film 100 in the position of the top plate 30 vicinity which is a position with especially high cleanliness also in a clean area | region.

  Moreover, it is possible to discharge the clean air accumulated between the top plate 30 and the upper surface of the film 100 to the outside of the cleaning target region via the top plate 30, thereby the top plate 30 and the film 100. It is possible to prevent the space between the upper surface of the film from becoming extremely positive pressure, and the clean air accumulated in the space presses the film 100 downward, causing the film 100 to be deformed. Can be prevented.

  Further, the clean air can be blown out in the direction along the belt-like surface of the film 100 by using an extremely easy configuration in which the FFU 10 that is generally known as a blower that blows clean air is used.

[Embodiment 2]
Next, a second embodiment will be described. In this form, a barrier airflow generation plate is provided at the upper end portion of the FFU, and a bottom plate is provided at the lower end portion. The configuration and processing of the second embodiment are substantially the same as the configuration and processing of the first embodiment unless otherwise specified, and the configuration and processing substantially the same as the configuration and processing of the first embodiment are the same. The same reference numerals as those used in Embodiment 1 are attached as necessary, and the description thereof is omitted.

(Constitution)
Initially, the structure of the local cleaning system 2 which concerns on Embodiment 2 is demonstrated. FIG. 4 is a side sectional view of the clean room 110 in which the local cleaning system 2 according to Embodiment 2 of the present invention is arranged. As shown in FIG. 4, the local cleaning system 2 is generally configured to include a barrier airflow generation plate 50, a bottom plate 60, and an exhaust fan 70.

(Configuration-Local cleaning system-Barrier airflow generation plate)
The barrier airflow generation plate 50 is a barrier airflow generation means that shields the airflow between the inside of the cleaning target region and the outside of the cleaning target region. In addition, since the configuration is merely the flipping of the barrier airflow generation plate 20 in the first embodiment, detailed description thereof is omitted.

(Configuration-Local cleaning system-Bottom plate)
The bottom plate 60 is a bottom plate 60 arranged along a horizontal plane below the film 100 between the FFUs 10 arranged to face each other. For example, the bottom plate 60 is formed as a plate-like body made of resin or plastic. The bottom plate 60 is placed on the lower surface of the FFU 10 at both ends thereof, and prevents the clean air below the film 100 from leaking out of the clean target area to the outside of the clean target area. The bottom plate 60 may be provided with a discharge hole 61 as in the first embodiment, and clean air accumulated between the bottom plate 60 and the lower surface of the film 100 is discharged below the bottom plate 60 through the discharge hole 61. By this, it is possible to prevent the space between the bottom plate 60 and the lower surface of the film 100 from becoming an extremely positive pressure, and the clean air accumulated in the space moves the film 100 upward. It is possible to prevent the film 100 from being deformed by being pressed against the surface. In other respects, since the bottom plate 60 can be configured in the same manner as the top plate 30 in the first embodiment, detailed description thereof is omitted.

(Configuration-Local cleaning system-Exhaust fan)
The exhaust fan 70 is an intake means that expands the clean area upward by performing intake air to the clean area. The exhaust fan 70 is a fan provided on the ceiling surface above the film 100, sucks air in the lower part of the exhaust fan 70, and blows it to a duct provided on the back of the ceiling. In other respects, exhaust fan 70 can be configured in the same manner as exhaust fan 40 in the first embodiment, and thus detailed description thereof is omitted.

(effect)
As described above, according to the present embodiment, it is possible to locally clean the film 100 without partitioning the clean room 110, so that the cleaning is performed only by the clean room 110. Energy saving performance is improved. In the clean room 110, it is possible to blow clean air even in a range where clean air could not be delivered. In addition, by providing the barrier airflow generation plate 50, it is possible to perform local cleaning of the cleaning target region while opening the upper portion of the cleaning target region, so that the user can easily access the film 100 from above. It is possible to perform local cleaning of the film 100.

  Further, it is possible to perform local cleaning with higher accuracy by inhaling air from above with respect to the cleaning target region. It is also possible to extend the clean area in the intake direction.

  In addition, the bottom plate 60 installed below the film 100 can shield the airflow inside and outside the region to be cleaned, and more accurate local cleaning can be performed. Further, the clean air blown from the FFU 10 moves along the bottom plate 60, whereby the reach distance of the clean air can be extended.

  Moreover, since it is possible to reduce the ventilation speed in the vicinity of the edge part in which the baseplate 60 is arrange | positioned, energy-saving performance improves. Moreover, the energy which reduced the ventilation speed in the vicinity of the edge part in which the baseplate 60 is arrange | positioned increases the ventilation speed in the vicinity of the edge part in which the barrier airflow generation board 50 is arrange | positioned among the edge parts of FFU10. Can be spent on.

  Moreover, it becomes possible to improve the cleanliness | purity with respect to the film 100 by arrange | positioning the film 100 in the position near the baseplate 60 which is a position with especially high cleanliness also in a clean area | region.

  Moreover, it is possible to discharge the clean air accumulated between the bottom plate 60 and the lower surface of the film 100 to the outside of the cleaning target region via the bottom plate 60, thereby It is possible to prevent the space between the plates from becoming extremely positive pressure, and the clean air accumulated in the space prevents the film 100 from being deformed by pressing the film 100 upward. It is possible.

[Embodiment 3]
Next, Embodiment 3 will be described. This form is a form in which a barrier airflow generation plate is provided at both the upper end and the lower end of the FFU. The configuration and processing of the third embodiment are substantially the same as the configuration and processing of the first and second embodiments, unless otherwise specified, and are substantially the same as the configuration and processing of the first and second embodiments. For processing, the same reference numerals as those used in the first and second embodiments are attached as necessary, and detailed description thereof is omitted.

(Constitution)
Initially, the structure of the local cleaning system 3 which concerns on Embodiment 3 is demonstrated. FIG. 5 is a side sectional view of the clean room 110 in which the local cleaning system 3 according to Embodiment 3 of the present invention is arranged. As shown in FIG. 5, this local cleaning system 3 is roughly configured by a barrier airflow generation plate 50 installed at the upper end of the FFU 10, a barrier airflow generation plate 20 installed at the lower end of the FFU 10, and the ceiling surface. An exhaust fan 70 provided and an exhaust fan 40 provided on the floor are provided. The barrier airflow generation plate 50 installed at the upper end of the FFU 10 can be configured in the same manner as the barrier airflow generation plate 50 in the second embodiment, and the barrier airflow installed at the lower end of the FFU 10 The generation plate 20 can be configured in the same manner as the barrier airflow generation plate 20 in the first embodiment, and the exhaust fan 70 provided on the ceiling surface is configured in the same manner as the exhaust fan 70 in the second embodiment. Further, since the exhaust fan 40 provided on the floor surface can be configured in the same manner as the exhaust fan 40 in the first embodiment, detailed description of the configuration is omitted.

  As described above, by providing the barrier airflow generation plate on both the upper end portion and the lower end portion of the FFU 10, the film 100 can be locally cleaned without the top plate 30 and the bottom plate 60. This allows the user to access the film 100 from above and below the local cleaning system 3.

(effect)
According to the present embodiment, by providing the barrier airflow generation plate on both the upper end portion and the lower end portion of the FFU 10, the upper and lower portions of the cleaning target area are opened, so that the user can further improve the film 100. It is possible to perform local cleaning of the film 100 in an easily accessible state.

(Example)
Hereinafter, the present invention will be described in more detail with reference to examples. However, the technical scope of the present invention is not limited to these examples.

  In this example, the local cleaning system 1 was used in a general air-conditioned room to clean the vicinity of the film 100, and the cleanliness was measured at a plurality of points near the film 100. As the local cleaning system 1, (1) when only the FFU 10 is arranged (simple facing type), (2) when the FFU 10 and the top plate 30 are arranged (+ top plate type), (3) the FFU 10, the top plate 30 and the barrier airflow generation plate 20 (+ barrier airflow generation plate type), (4) When the FFU 10, the top plate 30, the barrier airflow generation plate 20 and the exhaust fan 40 are arranged (+ exhaust fan type) Experiments were conducted on a total of four patterns. In addition, the width of the film 100 is 2 m, and the distance between the FFUs 10 arranged to face each other is 4 m.

  And FIG. 6 is a figure which shows the experimental result of an Example. Among these, the upper bar graph in FIG. 6 is a diagram showing the results of measuring the cleanliness of the upper and lower surfaces of each of the four patterns of the film 100, and the bar graph on the left side of each pattern indicates the cleanliness of the upper surface of the film 100. It is a graph, and the bar graph on the right side is a graph showing the cleanliness of the lower surface of the film 100. In addition, this bar graph is a graph that visually represents a value obtained by dividing the dust concentration in the vicinity of the film 100 by the dust concentration in the surrounding environment, and when this value is 1/100 or less, Assume that the target cleanliness has been achieved. On the other hand, the distribution diagram in the lower part of FIG. 6 is a diagram showing the distribution of the cleanliness of the air in the vicinity of the local cleaning system 1 as seen from the direction of arrows AA in FIG. Corresponds to each bar graph.

  From the result of FIG. 6, the “+ top plate type” in which the top plate 30 is further installed in this “simple facing type” as compared to the “simple facing type” in which the FFU 10 is simply disposed facing each other. It has been found that it is possible to maintain a higher degree of cleanliness. In addition, the “+ barrier airflow generation plate type” in which the “barrier airflow generation plate 20” is further installed on the “+ top plate type” maintains higher cleanliness than the “+ top plate type”. Was found to be possible. In this “+ barrier airflow generation plate type”, it was found that the cleanliness of the lower surface of the film 100 approaches 1/100, which is the target value.

  In addition, the “+ exhaust fan type” in which the exhaust fan 40 is further installed in the “+ barrier airflow generation plate type” maintains a higher degree of cleanliness than the “+ barrier airflow generation plate type”. Was found to be possible. Referring to the distribution diagram of FIG. 6, it can be seen that in this “+ exhaust fan type”, the clean region is extended downward. Further, referring to the bar graph of FIG. 6, it was found that the cleanliness of both the upper surface of the film 100 and the lower surface of the film 100 was a value that cleared the target value. In this embodiment, the target value of cleanliness is set to be a value obtained by dividing the dust concentration in the vicinity of the film 100 by the dust concentration in the surrounding environment to be 1/100 or less, but this value may be determined as appropriate. Absent.

[III] Modifications to Each Embodiment While each embodiment according to the present invention has been described above, the specific configuration and means of the present invention are the same as the technical idea of each invention described in the claims. Modifications and improvements can be arbitrarily made within the range. Hereinafter, such a modification will be described.

(About problems to be solved and effects of the invention)
First, the problems to be solved by the invention and the effects of the invention are not limited to the above-described contents, and the present invention solves the problems not described above or has the effects not described above. There are also cases where only some of the described problems are solved or only some of the described effects are achieved. For example, the problem of the present invention is solved at least when local cleaning is possible by a system different from the conventional system.

(About dimensions and materials)
The dimensions, shapes, ratios, and the like of each part of the local cleaning system described in the detailed description of the invention and the drawings are merely examples, and may be any other dimensions, shapes, ratios, and the like. Moreover, about the material which comprises each part, the arbitrary materials containing a metal and resin can be used.

(Regarding the arrangement of the local cleaning system)
FIG. 7 is a side sectional view of the clean room 110 in which the local cleaning system 4 according to the modification of the present invention is arranged. As shown in FIG. 7, the local cleaning system 4 may have a double structure of upper and lower stages. In this case, instead of the top plate 30 of the lower local cleaning system 4, a pedestal 80 that can withstand human load may be installed. Thus, it becomes possible to access to the upper local cleaning system 4 by adopting a configuration in which a human can pass on the gantry 80. Further, the exhaust fan 40 may be provided on the upper surface of the gantry 80. With such a configuration, it is possible to perform intake air from the exhaust fan 40 provided on the upper surface of the gantry 80 to the cleaning target region of the upper local cleaning system 4. In addition, it is also possible to make the local cleaning system 4 into a multiple structure by arranging the same local cleaning system 4 further above the upper local cleaning system 4.

(About the top plate)
The top plate 30 may have other additional functions. For example, by adding a cooling function to the top plate 30, it is possible to cool the film 100 in the immediate vicinity of the film 100, so that the cooling temperature of the entire clean room 110 can be raised, and energy saving performance is improved. improves. In addition, for example, by adding a charge eliminating function to the top plate 30, it is possible to remove charges associated with the film 100 in the immediate vicinity of the film 100.

(Blowing means)
In the present embodiment, the FFU has been described as an example of the air blowing means. However, the air blowing means may be anything as long as it can blow clean air in a direction along the surface of the film. May be used.

(FFU placement)
In the present embodiment, the FFU 10 has been described as being opposed to the film 100 along the direction orthogonal to the longitudinal direction of the film 100, but the FFU 10 may be opposed to be disposed along the longitudinal direction of the film 100. In this case, if the end portion of the film 100 is folded vertically downward, the folded air of the film 100 blocks the clean air blown from the FFU 10 through the barrier airflow generation plate 20, and thus the barrier. The airflow cannot be generated. Therefore, in this case, it is preferable to fold the end portion of the film 100 along the horizontal direction so that the folded surface of the film 100 does not shield clean air. FIG. 8 is a side sectional view of the clean room 110 in which the local cleaning system 5 according to another modification of the present invention is arranged. As described above, as a configuration for folding the film 100 along the horizontal direction, a cylindrical support shaft 90 installed along the horizontal direction and inclined at a predetermined angle with respect to the longitudinal direction of the film 100 is used. A configuration is conceivable in which the film 100 is placed inside the cleaning target region, and the film 100 is wound and folded so as to be substantially along the circumferential portion of the support shaft 90.

(About barrier airflow generation means)
In the present embodiment, the barrier airflow generation plate 20 has been described as an example of the barrier airflow generation means. However, the barrier airflow generation means indicates that contaminants outside the cleaning target area flow into the cleaning target area. Other configurations may be adopted as long as the configuration can be prevented. For example, you may install a nozzle along the width direction of the lower end part of FFU10. This nozzle is a nozzle arranged so that the air blowing direction at the lower end of the FFU 10 is inclined by a predetermined angle in a direction away from the film 100 as the distance from the FFU 10 is increased from the FFU 10. The clean air blown out from the FFU 10 is blown obliquely downward at high speed through this nozzle, and collides with the clean air blown out from the opposite FFU 10 in the same manner, so that a barrier is formed below the area to be cleaned. An airflow can be generated. As described above, contaminants outside the cleaning target region flow into the cleaning target region by an extremely easy configuration in which the nozzle disposed at a predetermined angle is provided at the end of the FFU 10 as the barrier airflow generation unit. It is possible to prevent this.

  In addition, for example, only the lower end portion of the FFU 10 may be inclined downward by a predetermined angle. Moreover, you may make the ventilation speed of this lower end part higher than the ventilation speed of another part. With such a configuration, the air blowing direction of the FFU 10 at the lower end is tilted by a predetermined angle away from the FFU 10 with the FFU 10 as a base point, so that the clean air blown out from the FFU 10 is inclined obliquely downward. It is possible to generate a barrier airflow below the area to be cleaned by colliding with clean air blown out at high speed toward the FFU 10 facing the same.

(About the barrier airflow generation plate)
In the present embodiment, the barrier airflow generation plate is described as being installed at the upper or lower end of the FFU 10, but is installed at the side end of the FFU 10 (that is, the end of the FFU 10 in the length direction). It may be done. By doing in this way, it becomes possible to further prevent contamination from entering the inside of the cleaning target region from the side of the cleaning target region, and it is possible to further improve the cleanliness of the cleaning region. Become. Similarly, the nozzle described above may be installed on the side of the FFU 10.

(Exhaust fan)
In the present embodiment, one exhaust fan 40 is provided at a position directly below the center in the width direction of the area to be cleaned. However, any position may be used as long as it is below the area to be cleaned. For example, it may be provided one by one at a position that is a predetermined distance in the width direction from the position directly below the center. Further, the FFU support column 13 is formed in a rectangular parallelepiped shape and arranged below the FFU 10, and the exhaust fan 40 is provided on the side surface of the FFU support column 13 on the side where the film 100 exists, and suction is performed from both sides of the film 100. It's good.

  Further, in the present embodiment, the space through which the duct is inserted is provided on the floor surface, and the air sucked by the exhaust fan 40 is exhausted through the duct that is inserted into the space. It is good also as providing the space which a duct penetrates below.

  Further, the duct connected to the exhaust fan 40 may be connected to the air outlet of the clean room 110 so that the air is blown again as clean air from the air outlet of the clean room 110.

1, 2, 3, 4, 5 Local cleaning system 10 FFU
DESCRIPTION OF SYMBOLS 11 Outlet surface 12 Suction surface 13 FFU support | pillars 20 and 50 Barrier airflow production | generation board 30 Top plate 31 and 61 Exhaust hole 40 and 70 Exhaust fan 41 Screen 60 Bottom plate 80 Base 90 Support shaft 100 Film 110 Clean room

Claims (9)

A local cleaning system for supplying clean air to a region to be cleaned around a strip disposed along a horizontal plane,
A pair of air blowing means arranged opposite to each other along a horizontal direction across at least a part of the belt-like body, and at least the air blown out in a direction along the belt-like surface of the belt-like body A blowing means for generating a clean region between a pair of opposed blowing means;
By controlling the air blowing direction of either the top or bottom or side end of the air blowing means to be inclined by a predetermined angle in the direction away from the belt-like body as it is farther from the air blowing means with the air blowing means as a base point, Barrier airflow generation means for generating an airflow that prevents contaminants outside the cleaning target area from flowing into the cleaning target area;
Local cleaning system. The barrier airflow generation means is disposed at the upper end and the lower end of the blower means,
The local cleaning system of claim 1. Intake means arranged above or below the cleaning target area, comprising at least intake means for expanding the cleaning area upward or downward by performing intake to the cleaning target area.
The local cleaning system according to claim 1 or 2. A top plate arranged along a horizontal plane above the band-like body between the air blowing means arranged opposite to each other, or along a horizontal plane below the belt-like body between the air blowing means arranged opposite to each other. Provided with a bottom plate,
The local cleaning system according to claim 1 or 3. The barrier airflow generation means is provided at the end opposite to the end where the top plate or the bottom plate is disposed,
The blowing speed in the vicinity of the end portion where the top plate or the bottom plate of the blowing means is arranged is made smaller than the blowing speed in the vicinity of the end portion where the barrier airflow generation means of the blowing means is arranged,
The local cleaning system of claim 4. The top plate or the bottom plate is disposed at any position inside the cleaning target area or at a position in contact with the cleaning target area,
The band-shaped body is disposed closer to the top plate than an intermediate point between the top plate and the bottom surface of the cleaning target area, or the band-shaped body is positioned from an intermediate point between the bottom plate and the upper surface of the cleaning target area. Also placed near the bottom plate,
The local cleaning system according to claim 4 or 5. The top plate or the bottom plate includes discharge means for discharging clean air between the top plate or the bottom plate and the belt-like body to the outside of the cleaning target region via the top plate or the bottom plate.
The local cleaning system according to any one of claims 4 to 6. The air blowing means is a fan filter unit.
The local cleaning system according to any one of claims 1 to 7. The barrier airflow generation means inclines the air blowing direction of either the upper or lower end or the side of the air blowing means by a predetermined angle in a direction away from the belt-like body as the air blowing means is separated from the air blowing means with the air blowing means as a base point. With nozzles arranged as
A local cleaning system according to any one of the preceding claims.

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