JPS62268940A - Local cleaner - Google Patents
Local cleanerInfo
- Publication number
- JPS62268940A JPS62268940A JP61113292A JP11329286A JPS62268940A JP S62268940 A JPS62268940 A JP S62268940A JP 61113292 A JP61113292 A JP 61113292A JP 11329286 A JP11329286 A JP 11329286A JP S62268940 A JPS62268940 A JP S62268940A
- Authority
- JP
- Japan
- Prior art keywords
- port
- blow
- clean
- air
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims abstract description 15
- 238000004140 cleaning Methods 0.000 claims description 21
- 230000003749 cleanliness Effects 0.000 description 10
- 238000000034 method Methods 0.000 description 6
- 239000000428 dust Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
この発明は局所清浄装置に係り、特にクリーンルームで
使用され、送風機、フィルタ、吹出口、吸込口を備えた
局所清浄装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a local cleaning device, and particularly to a local cleaning device that is used in a clean room and includes a blower, a filter, an outlet, and a suction port.
近年、半導体産業、精密産業など、その生産工程におい
て塵埃管理を要する所が急増し、これに伴い、クリーン
ルームの建設が活発に行われている。このクリーンルー
ムの清浄度は生産工程に於ける管理対象塵埃粒径などに
よって区別され、一般に０．５μｍ以上の粒径を対象に
清浄度のクラス分けがされている。この方式としては、
全面ダウンフロー、部分ダウンフローなどがあり、対象
室内全体を一定の清浄度に保つようにしている。しかし
、同一製品の生産工程においても、必要清浄度は異なる
ことが多く、例えば半導体製造工程のマスク工程などは
最も高い清浄度が要求され、検査工程は、それに比べる
と、低グレードの清浄度で十分対応できる。しかし、ク
リーンルームの設計に当たっては、最も高清浄が要求さ
れるレベルで統一することがあり、この場合、大きな換
気回数が必要となり、その送風動力は全動力費の６０〜
７０％を占め、この低減がユーザーから切望されている
。BACKGROUND ART In recent years, the number of places requiring dust control in production processes such as the semiconductor industry and precision industry has rapidly increased, and as a result, clean rooms are being actively constructed. The cleanliness of this clean room is distinguished by the particle size of dust particles to be controlled in the production process, and is generally classified into cleanliness classes based on particle sizes of 0.5 μm or more. This method is
There are full downflow and partial downflow methods to maintain a certain level of cleanliness throughout the room. However, even in the production process of the same product, the required cleanliness often differs. For example, the mask process in the semiconductor manufacturing process requires the highest level of cleanliness, while the inspection process requires a lower grade of cleanliness. I can handle it well. However, when designing a clean room, the highest level of cleanliness is required.
It accounts for 70%, and this reduction is highly desired by users.
そこで、できるだけ送風動力を低減するために、クリー
ンルーム全体の清浄度は必要レベルよりも１ランク下げ
、最も清浄度を必要としている工程では、局所清浄装置
をクリーンルーム内に設置する場合がある。Therefore, in order to reduce the blowing power as much as possible, the cleanliness of the entire clean room is lowered by one rank below the required level, and a local cleaning device may be installed in the clean room in the process that requires the highest level of cleanliness.
この局所清浄装置は一般に第４図に示す構造をしている
。すなわち、風洞１の内部には送風機２が設けられ、そ
の下流側である上部にはフィルタ３が設けられている。This local cleaning device generally has the structure shown in FIG. That is, a blower 2 is provided inside the wind tunnel 1, and a filter 3 is provided at the upper part on the downstream side thereof.
又、風洞１の入口には穴開き板などの吸込口４が取付け
られており、同じく、風洞１の出口側には穴開き板など
の吹出口５が取付けられている。Further, a suction port 4 such as a perforated plate is attached to the entrance of the wind tunnel 1, and similarly, an air outlet 5 such as a perforated plate is attached to the exit side of the wind tunnel 1.
更に、吹出口５の外には作業台６が設けられ、その天井
部７に照明器具８が取付けられ、作業台６の側面は側板
９で覆われている。このように構成された局所清浄装置
では、吸込口４から送風機２によって風洞内に導入され
た空気はフィルタ３で塵埃が濾過され清浄空気となった
後、吹出口５から吹出され、作業台６から、天井部７ま
での空間全体を清浄域として確保している。Furthermore, a workbench 6 is provided outside the air outlet 5, a lighting fixture 8 is attached to the ceiling 7 of the workbench 6, and the side surface of the workbench 6 is covered with a side plate 9. In the local cleaning device configured in this way, the air introduced into the wind tunnel by the blower 2 from the suction port 4 is filtered to remove dust by the filter 3 and becomes clean air, and then blown out from the blowout port 5 to the workbench 6. The entire space from the ceiling to the ceiling 7 is secured as a clean area.
局所清浄装置の吹出口高さは一般の製品の出入り等の作
業性を考慮し、７００〜８００１ｍであるが、その作業
に必要とする清浄域の高さは１００〜２００ｎである事
が多い。この為、従来の局所清浄装置では、必要な清浄
域しく上の空間が清浄化されるため、その分、送風動力
が大きくなるという欠点があった。The height of the outlet of the local cleaning device is 700 to 8001 m, taking into account the workability of general products such as loading and unloading, but the height of the clean area required for this work is often 100 to 200 nm. For this reason, conventional local cleaning devices have the disadvantage that the space above the required clean area is cleaned, which increases the blowing power accordingly.
本発明はこのような事情に鑑みてなされたもので、清浄
空間の高さを作業に必要な高さ分だけ確保し、送風動力
の低減化を図るようにした局所清浄装置を提供すること
を目的とする。The present invention has been made in view of these circumstances, and aims to provide a local cleaning device that secures the height of a clean space by the height necessary for work and reduces the blowing power. purpose.
本発明は前記目的を達成するために、送風機、フィルタ
、吸込口及び吹出口を備え、前記吹出口から作業面上に
清浄空気を吹き出し、該作業面上に清浄空間を確保する
局所清浄装置において、吹出口の上部から吹き出される
清浄空気の吹出方向を斜め上方とし、吹出口の下部から
吹き出される清浄空気の吹出方向をほぼ水平とすべく前
記吹出口を構成し、前記作業面からその作業に必要な所
定高さの清浄空間を確保することを特徴としている。In order to achieve the above object, the present invention provides a local cleaning device that includes a blower, a filter, a suction port, and an air outlet, blows clean air from the air outlet onto a work surface, and secures a clean space on the work surface. , the air outlet is constructed so that the blowing direction of the clean air blown out from the upper part of the air outlet is diagonally upward, and the blowing direction of the clean air blown out from the lower part of the air outlet is almost horizontal; It is characterized by ensuring a clean space of a predetermined height necessary for work.
以下添付図面に従って本発明に係る局所清浄装置の好ま
しい実施例を詳説する。Preferred embodiments of the local cleaning device according to the present invention will be described in detail below with reference to the accompanying drawings.
この局所清浄装置は、第１０に示すように送風機１０、
フィルタ１２、吸込口１４及び吹出口１５を備え、送風
機ＩＯ及びフィルタ１２は風洞１８の内部に設けられ、
吸込口１４及び吹出口１６はそれぞれ風洞１８の入口部
及び出口部に設けられている。This local cleaning device includes a blower 10, as shown in No. 10,
It is equipped with a filter 12, an inlet 14, and an outlet 15, and the blower IO and the filter 12 are provided inside the wind tunnel 18,
The inlet 14 and the outlet 16 are provided at the inlet and outlet of the wind tunnel 18, respectively.
吹出口１６は上下二段に分割され、上段吹出口１６ａは
清浄空気を斜め上方に吹き出すように構成され、下段吹
出口１６ｂは清浄空気を水平に吹き出すように構成され
ている。The air outlet 16 is divided into upper and lower parts, with the upper air outlet 16a configured to blow clean air obliquely upward, and the lower air outlet 16b configured to blow clean air horizontally.
また、フィルタ１２と吹出口１６との間の風洞１８は、
上段吹出口用風洞１８ａと下段吹出口用風洞１８ｂとに
分割され、風洞１８ａには上段吹出口１６ａが接続され
、風洞１８ｂには下段吹出口１６ｂが接続され、各々の
風洞１８ａ、１８ｂの途中には風量調整器２０ａ、２０
ｂが設けられている。Moreover, the wind tunnel 18 between the filter 12 and the air outlet 16 is
The wind tunnel 18a is divided into an upper air outlet wind tunnel 18a and a lower air outlet wind tunnel 18b.The upper air outlet 16a is connected to the wind tunnel 18a, and the lower air outlet 16b is connected to the wind tunnel 18b. There are air volume regulators 20a, 20
b is provided.
更に、吹出口前面には作業台２２が設けられ、この作業
台２２の両側面は側板２４で覆われている。Further, a workbench 22 is provided in front of the outlet, and both sides of the workbench 22 are covered with side plates 24.
前記の如く構成された本発明に係る局所清浄装置におい
て、吸込口１４から送風器１０によって風洞１８内に吸
い込まれた空気は、フィルタ１２で塵埃が濾過され、清
浄空気となった後、風洞１８ａ、１８ｂを経て、吹出口
１６ａ、１６ｂから作業台２２上に吹き出される。In the local cleaning device according to the present invention configured as described above, the air sucked into the wind tunnel 18 by the blower 10 from the suction port 14 is filtered to remove dust by the filter 12 and becomes clean air, and then is passed through the wind tunnel 18a. , 18b, and is blown onto the workbench 22 from the air outlets 16a, 16b.
ここで、上段の吹出口１６ａから斜め上方に吹き出され
る清浄空気は、汚染空気を遮断するために用いられ、下
段の吹出口１６ｂから水平に吹き出される清浄空気は、
上方からの汚染がない場合に、作業面からその作業に必
要な高さく１００ｉｉ〜２００ｍｍ）の清浄空間を作業
面全域に確保するために用いられる。Here, the clean air blown diagonally upward from the upper air outlet 16a is used to block contaminated air, and the clean air blown out horizontally from the lower air outlet 16b is used to block contaminated air.
It is used to ensure a clean space over the entire work surface with a height of 100mm to 200mm necessary for the work from the work surface when there is no contamination from above.
また、吹出口１６の更に詳細な構造を説明すると、吹出
口１６の近傍における風Ｆ１８ａの高さが５０１）、風
洞１８ｂの高さが１００鰭の場合、上段の吹出口１６ａ
の吹出角度は概ね上部が１５〜２０度、下部が２５〜３
０度が好ましい。そして、上段の吹出口１６ａからの吹
出風速が１．２ｍ／Ｓ、下部の吹出口Ｌ６ｂからの吹出
風速が０．６ｍ／ｓの時が最も効率良く清浄空間を大き
く確保することができることを実験により確認している
。Further, to explain the more detailed structure of the air outlet 16, when the height of the wind F18a near the air outlet 16 is 501) and the height of the wind tunnel 18b is 100 fins, the upper air outlet 16a
The blowout angle is approximately 15 to 20 degrees at the top and 25 to 3 degrees at the bottom.
0 degrees is preferred. Experiments showed that a large clean space could be secured most efficiently when the air velocity from the upper outlet 16a was 1.2 m/s and the air velocity from the lower outlet L6b was 0.6 m/s. This has been confirmed by
ちなみに、第２図に示すように、単に水平吹出口２６を
設けた場合、清浄域Ａは吹出口２６から２００鶴離れた
領域までしか確保できないが、本発明の場合には高さが
作業に必要な１００龍〜２００龍で、吹出口から８０ｏ
ｎの領域まで清浄空間を確保することができる。Incidentally, as shown in Fig. 2, if the horizontal outlet 26 is simply provided, the clean area A can only be secured up to an area 200 meters away from the outlet 26, but in the case of the present invention, the height is not suitable for work. 80o from the outlet with the required 100 to 200 dragons
A clean space can be secured up to n areas.
なお、上記実施例では風洞及び吹出口をそれぞれ２つに
分割したが、これに限らず、例えば第３図に示すように
吹出口３０に適宜のガイドベーン３２をもうけるように
してもよい。要は、吹出口の上部からは斜め上方に、吹
出口の下部からはほぼ水平に清浄空気が吹き出されるよ
うに吹出口が構成されていればいかなるものでもよい。In the above embodiment, the wind tunnel and the air outlet are each divided into two parts, but the present invention is not limited to this. For example, as shown in FIG. 3, an appropriate guide vane 32 may be provided at the air outlet 30. In short, any type of outlet may be used as long as the outlet is configured such that clean air is blown out obliquely upward from the upper part of the outlet and substantially horizontally from the lower part of the outlet.
また、第１図において、吹出口には何も設けなかったが
、これは、下段吹出口に穴開き板などを設けても良い。Further, although nothing is provided at the air outlet in FIG. 1, a perforated plate or the like may be provided at the lower air outlet.
この場合、装置の意匠が向上する。更に、吹出口に整流
作用を促す物、例えば、整流格子、ハニカムボードなど
を設けても良い。In this case, the design of the device is improved. Furthermore, the outlet may be provided with something that promotes a rectifying action, such as a rectifying grid or a honeycomb board.
以上説明したように本発明に係る局所清浄装置によれば
、清浄空間の高さを作業に必要な高さに押さえ、かつ清
浄空気の吹出方向を工夫したので、送風動力が従来の局
所清浄装置に比べて約３分の１に低減することができる
。また、従来必要であった局所清浄装置天井部の構造が
不要になる。As explained above, according to the local cleaning device according to the present invention, the height of the clean space is kept to the height necessary for work, and the blowing direction of the clean air is devised, so that the blowing power is lower than that of the conventional local cleaning device. It can be reduced to about one-third compared to . Furthermore, the structure of the ceiling of the local cleaning device, which was necessary in the past, becomes unnecessary.
第１図は本発明に係る局所清浄装置の一実施例を示す断
面図、第２図は従来の吹出方法とその清浄度域を示す断
面図、第３図は本発明に係る局所清浄装置の他の実施例
を示す要部断面図、第４図は従来の局所清浄装置を示す
断面図である。
１０・・・送風機、１２・・・フィルタ、１４・・・吸
込口、１６．３０・・・吹出口、１６ａ・・・上段吹出
口、１６ｂ・・・下段吹出口、１８・・・風洞、２０ａ
、２０ｂ・・・風量調整器、２２・・・作業台、２４・
・・側板、３２・・・ガイドベーン。
出願人 日立プラント建設株式会社
第１図
１０・・・送風機 １２・・・フィルタ １４・・・
吸込口１６、”３０・・・吹出口 １６（１・・・上役
０欠出口１６ｂ・・・下仮口更出口 １８・・・風洞
２０ａ、２０ｂ・・・ｉ’５１．−１２＊Ａ ２
２ 、・、 イ乍業古史 ２４ ・・・ イ貝
りオシ、３２・・ガイ冒ベーン
第２図
フロ
第３図
第４図Fig. 1 is a sectional view showing an embodiment of the local cleaning device according to the present invention, Fig. 2 is a sectional view showing a conventional blowing method and its cleanliness range, and Fig. 3 is a sectional view showing the local cleaning device according to the present invention. FIG. 4 is a sectional view of a main part showing another embodiment, and FIG. 4 is a sectional view showing a conventional local cleaning device. 10... Blower, 12... Filter, 14... Suction port, 16.30... Air outlet, 16a... Upper air outlet, 16b... Lower air outlet, 18... Wind tunnel, 20a
, 20b... Air volume regulator, 22... Workbench, 24.
...Side plate, 32...Guide vane. Applicant: Hitachi Plant Construction Co., Ltd. Figure 1 10...Blower 12...Filter 14...
Suction port 16, "30...Blowout port 16 (1...Superior 0 cutout port 16b...Lower provisional outlet further outlet 18...Wind tunnel
20a, 20b...i'51. -12*A 2
2 ,・、The ancient history of the industry 24...Igai Rioshi, 32...Gai Exploration Figure 2 Floor Figure 3 Figure 4
Claims (2)
記吹出口から作業面上に清浄空気を吹き出し、該作業面
上に清浄空間を確保する局所清浄装置において、吹出口
の上部から吹き出される清浄空気の吹出方向を斜め上方
とし、吹出口の下部から吹き出される清浄空気の吹出方
向をほぼ水平とすべく前記吹出口を構成し、前記作業面
からその作業に必要な所定高さの清浄空間を確保するこ
とを特徴とする局所清浄装置。(1) In a local cleaning device that is equipped with a blower, a filter, a suction port, and an air outlet, and blows clean air from the air outlet onto a work surface to secure a clean space above the work surface, the air is blown out from the upper part of the air outlet. The outlet is configured so that the blowing direction of the clean air is diagonally upward, and the blowing direction of the clean air blown out from the lower part of the blower outlet is almost horizontal, and the outlet is configured to have a predetermined height required for the work from the work surface. A local cleaning device characterized by ensuring a clean space.
特許請求の範囲第１項記載の局所清浄装置。(2) The local cleaning device according to claim 1, wherein the predetermined height is 100 mm to 200 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61113292A JPS62268940A (en) | 1986-05-16 | 1986-05-16 | Local cleaner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61113292A JPS62268940A (en) | 1986-05-16 | 1986-05-16 | Local cleaner |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62268940A true JPS62268940A (en) | 1987-11-21 |
Family
ID=14608488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61113292A Pending JPS62268940A (en) | 1986-05-16 | 1986-05-16 | Local cleaner |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62268940A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5346426A (en) * | 1990-03-29 | 1994-09-13 | Kronfaelt Mats | Method and an apparatus in ventilation |
| JP2014006024A (en) * | 2012-06-26 | 2014-01-16 | Takenaka Komuten Co Ltd | Local cleaning system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61110826A (en) * | 1984-11-02 | 1986-05-29 | Sanken Setsubi Kogyo Kk | Partial air cleaning method and device thereof |
-
1986
- 1986-05-16 JP JP61113292A patent/JPS62268940A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61110826A (en) * | 1984-11-02 | 1986-05-29 | Sanken Setsubi Kogyo Kk | Partial air cleaning method and device thereof |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5346426A (en) * | 1990-03-29 | 1994-09-13 | Kronfaelt Mats | Method and an apparatus in ventilation |
| JP2014006024A (en) * | 2012-06-26 | 2014-01-16 | Takenaka Komuten Co Ltd | Local cleaning system |
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