JP2003214668A - Clean room - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a clean room keeping a working area in an upper part of a manufacturing device in high cleanliness. <P>SOLUTION: In this clean room 10, a baseboard suction port 20 is formed on a side wall 24 of a room 12 for supplying clean air, and the air in a room 20 is sucked from the suction port 20. In the room 12, the manufacturing device 18 is disposed in the vicinity of the side wall 24, and a lot of FFUs 22 are disposed on the ceiling surface in the area of the device. In a space between the manufacturing device 18 and the side wall 24, a closing member 30 is installed to close the space. <P>COPYRIGHT: (C)2003,JPO

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room, and more particularly to a clean room in which a precision equipment manufacturing line is installed. 2. Description of the Related Art Since a clean room in which a precision equipment production line is installed has a lower required cleanliness than a clean room in which a semiconductor production line is installed, a local return method is adopted from the viewpoint of low cost. That is common. For example, in the clean room shown in FIG. 7, the floor of the room 1 is formed flat, and the baseboard suction port 3 is formed in the side wall 2 of the room 1. On the ceiling of Room 1, FFU (
A fan filter unit 5 is provided, and a precision device manufacturing apparatus 4 is installed inside the chamber 1. The manufacturing device 4 is disposed near the side wall 2 for convenience in installing the child device and the like in the return space 6. Since the area where the manufacturing apparatus 4 is installed (hereinafter referred to as the apparatus area) requires relatively high cleanliness, the FFU 5 has a higher quality than other areas (for example, worker's passage area).
Are installed densely. As a result, the apparatus area can be made higher in cleanliness than the other areas. Further, in the clean room in FIG. 7, the total number of FFUs 5 is smaller than in the case where the entire room 1 is set to a high degree of cleanliness, so that the cost can be reduced. [0004] However, the above-mentioned clean room is located in the upper region of the manufacturing apparatus 4.
There was a possibility that the set cleanliness could not be obtained. Since this area is an area where work is performed (hereinafter referred to as a work area), if the degree of cleanliness is reduced, the quality of a manufactured product is reduced. The present invention has been made in view of such circumstances, and an object of the present invention is to provide a clean room in which a work area above a manufacturing apparatus can be maintained with high cleanliness. According to the present invention, in order to achieve the above object, a purse board suction port for sucking air in the chamber is provided on a side wall of a chamber to which clean air is supplied. In the vicinity of the side wall of the chamber, an apparatus area in which the apparatus is installed is formed, and the apparatus area closes a gap between the side wall and the apparatus in a clean room set to a higher degree of cleanliness than an adjacent area. It is characterized in that a closing means is provided. The inventor of the present invention analyzes the airflow in a clean room, creates dust distribution, and the like to reduce the degree of cleanliness in the upper area (work area) of the apparatus. It was discovered that air was flowing in and was contaminated. Further, as a method for preventing this, it has been found that contamination of a work area can be prevented by eliminating an airflow flowing through a gap between the apparatus and the side wall. The present invention has been made in view of such circumstances, and by closing the gap between the side wall and the device with a closing means, the airflow flowing through this gap is eliminated, and as a result, the working area of the device area is contaminated. It is to prevent that. Thereby, the work area in the apparatus area can be maintained at high cleanliness. In addition, since the work area can be easily maintained at a high cleanliness level,
Efficient operation can be performed. Preferred embodiments of a clean room according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a schematic diagram showing a clean room 10 according to the present invention. [0010] As shown in FIG.
Is composed of a room 12, an under-ceiling space 14, and a return space 16, and inside the room 12 is a manufacturing apparatus 1 such as precision equipment.
8 are installed. The manufacturing device 18 is arranged close to the side wall 24 of the chamber 12 for convenience of installing the slave unit or the like (not shown) in the return space 16. However, the manufacturing apparatus 18
May be operated from the side wall 24 side.
And a predetermined gap. Also, the manufacturing apparatus 18
A leg or a wheel (not shown) is attached to the bottom surface 18A of the vehicle, and a gap is formed between the bottom surface 18A and the floor surface of the chamber 12. On the ceiling of the room 12, FFUs 22, 22,.
Is installed. Although the internal structure of the FFU 22 is not shown, the FFU 22 includes a fan that blows air in the under-the-ceiling space 14 into the chamber 12 and a filter member that removes dust from the blown air. By driving the FFU 22, the clean air flows down into the chamber 12. Note that FFU22
As the filter member, a HEPA filter, an ULPA filter, or the like is selected and used according to a setting environment. The floor of the chamber 12 is a flat floor without any openings (so-called solid floor), and a baseboard suction port 20 is formed at the lower end of the side wall 24 of the chamber 12. Therefore, room 12
The air inside is sucked into the return space 16 from the baseboard suction port 20. A part of the sucked air is exhausted to the outside, and the rest is returned to the ceiling space 14. A supply line 26 is connected to the space 14 above the ceiling. The supply line 26 is connected to an air conditioner (not shown), and supplies air (outside air) whose temperature and humidity have been adjusted and dust has been removed by the air conditioner. The air in the under-ceiling space 14 is supplied to the interior of the chamber 12 after the dust is removed by the FFU 22 described above. The clean room 10 constructed as described above
The interior of the room 12 is divided into an apparatus area where the manufacturing apparatus 18 is installed and another area (for example, a passage area), and the cleanliness is managed for each area. That is, the equipment area has relatively high cleanliness (for example, clas
s100 (target particle size of 0.3 μm or more)) and the passage area is set to a lower cleanliness (for example, class 1000 (target particle size of 0.3 μm or more)). The number of FFUs 22 according to the setting environment is arranged on the ceiling surface of each area, and the FFU 22 is arranged more in the device area than in the passage area.
2 are densely arranged. As a result, the apparatus area and the passage area can be maintained at the required cleanliness levels, respectively.
By reducing the total number of 2, the cost can be reduced. At the boundary between the apparatus area and the passage area, an eyelid (hanging wall) 28 is vertically provided from the ceiling surface.
The air flow of the clean air flowing down from the FFU 22 is rectified by the eye lid 28. The length of the eye lid 28 is about １ ／ to １ ／ of the height of the chamber 12.
, For example, the height of the room 12 is 2.5 to 3.5 m
Is set at 0.4 to 0.6 m. Incidentally, the side wall 24 of the chamber 12 and the manufacturing apparatus 1
The closing member 30 is provided between the side surface 18 </ b> B and the side surface 18 </ b> B. The closing member 30 includes a vertical plate 32 disposed vertically.
And an L-shaped horizontal plate 34 arranged horizontally. The vertical plate 32 is attached to the lower end of the side wall 24 so as to be slidable in the vertical direction, and can be fixed at an arbitrary height position. The horizontal plate 34
Has a length capable of closing the gap between the side wall 24 and the side surface 18B of the manufacturing apparatus 18. Further, the vertical plate 32 and the horizontal plate 34 are formed to have the same width as the manufacturing apparatus 18 as shown in FIG. Preferably, the vertical plate 32 is fixed such that the position of the horizontal plate 34 is at the same height as the bottom surface 18A of the manufacturing apparatus 18. This makes it possible to work on the horizontal plate 34. Further, in order to improve the durability of the closing member 30, the tip of the horizontal plate 34 is
It is good to connect to. Next, the operation of the clean room 10 configured as described above will be described. When the gap between the side wall 24 and the manufacturing apparatus 18 is closed by the closing member 30, the air in the passage area does not flow into the upper working area of the manufacturing apparatus 18. That is, the high-cleanliness air blown out from the FFU 22 in the apparatus area flows down and flows through the work area as it is. This clean air flows out into the passage area, and together with the air in the passage area, the bottom surface 1 of the manufacturing apparatus 18.
It flows into the baseboard suction port 20 through the space between 8A and the floor of the chamber 12. Thereby, dust in the passage area can be prevented from flowing into the work area, so that the work area can be maintained at high cleanliness. As described above, according to the clean room 10 of the present embodiment, since the gap between the side wall 24 and the manufacturing apparatus 18 is closed by the closing member 30, the working area above the manufacturing apparatus 18 is maintained at a high cleanliness. be able to. According to the present embodiment, the closing member 3
Since the zero vertical plate 32 is slidably attached to the side wall 24, the size of the baseboard suction port 20 can be changed, and the airflow distribution in the chamber 12 can be finely adjusted. Furthermore, according to the present embodiment, the horizontal plate 34 of the closing member 30 is fixed at the same height as the bottom surface 18A of the manufacturing apparatus 18 so as to form a double floor. Work can be done. In the above-described embodiment, the closing member 3
Although 0 is formed in an L shape by the vertical plate 32 and the horizontal plate 34, the configuration of the closing member 30 is not limited to this. For example, the closing member 36 shown in FIG. 3 is a type that is installed on the floor of the chamber 12, and includes a horizontal plate 38 that closes a gap between the manufacturing apparatus 18 and the side wall 24, a leg 40 that supports the horizontal plate 38, 40. The leg 40 is configured to be able to expand and contract, so that the horizontal plate 38 can be arranged at an arbitrary height. Since the closing member 36 thus configured has a structure that easily obtains a large durability, it is excellent in workability on the horizontal plate 38, is easy to install, and can be easily attached to a conventional clean room. Can be. Further, as shown in FIG. 4, the gap between the manufacturing apparatus 18 and the side wall 24 may be closed by the horizontal plate 42 alone. In this case, the horizontal plate 42 may be attached to either the side wall 24 or the manufacturing apparatus 28. Further, the horizontal plate 42 may be detachably attached or fixed. The clean room 10 shown in FIG.
Although the closing of the gap between the manufacturing apparatus 18 and the side wall 24 is performed at the height position of the bottom surface 18A of the manufacturing apparatus 18, the present invention is not limited to this. For example, as shown in FIG. 4, the closing may be performed at the height position of the upper surface 18C of the manufacturing apparatus 18. In this way, even if a stagnation area is formed in the gap between the manufacturing apparatus 18 and the side wall 24, the working area on the upper surface 18C of the manufacturing apparatus 18 is not adversely affected, so that the cleanliness of the working area can be more reliably maintained. Can be maintained. As shown in FIG. 5, when the air suction port 18D is provided on the side surface 18B of the manufacturing apparatus 18, the gap may be closed at least at a position above the air suction port 18D. . Thus, the suction port 18
When the blockage is performed at a position higher than D, the airflow flowing from the work area to the suction port 18D through the gap can be blocked by the horizontal plate 42. Thus, the work area above the manufacturing apparatus 18 can be prevented from being contaminated by dust in the passage area. Similarly, when there is an outlet (not shown) on the side surface 18B of the manufacturing apparatus 18, it is preferable to close the outlet at a position higher than the outlet. Thus, it is possible to prevent turbulence from occurring in the device area due to air blown out from the blowout port. The horizontal plates 34, 38 for closing the gaps
Another plate member (not shown) may be vertically attached to both ends in the width direction (vertical direction in FIG. 2) of 42. By attaching this plate member, it is possible to block the airflow flowing in the width direction from the gap between the manufacturing apparatus 18 and the side wall 24 and being sucked into the baseboard suction port 20. This makes it more difficult for the air in the passage area to further pass through the work area. As shown in FIG. 6, the equipment area of the room 12 may have a double floor structure. That is, a horizontal floor plate 44 is installed at a predetermined height from the floor of the apparatus area, and the manufacturing apparatus 18 is installed on this floor plate 44. When the floor panel 44 has a double floor structure in this manner, an airflow that is drawn from the lower part of the passage area and below the floor board 44 into the skirting board suction port 20 is formed, so that air in the passage area does not flow into the apparatus area. . Therefore, it is possible to prevent the work area in the device area from being contaminated. In the above-described embodiment, the apparatus area is maintained at a high degree of cleanliness by arranging the FFUs 22 in the apparatus area more densely than the passage area. However, the method of managing cleanliness is not limited to this. is not. For example, as the filter member of the FFU 22 in the device area, a filter member having higher performance than the filter member in the passage area may be used.
In this case, the amount of clean air supplied to the device area can be reduced. In particular, in the present invention, it is possible to reduce the flow rate of the clean air supplied to the apparatus area to the same level as the flow rate of the passage area. Therefore, the cost can be reduced by reducing the number of FFUs 22 in the apparatus area. As described above, according to the clean room of the present invention, since the gap between the side wall and the apparatus is closed by the closing member, the airflow flowing through this gap can be eliminated, and as a result, In addition, it is possible to prevent air from flowing into the work area above the apparatus from an adjacent area. This makes it easier to maintain the work area requiring the highest degree of cleanliness at a high degree of cleanliness, so that efficient operation can be performed.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a clean room according to the present invention. FIG. 2 is a cross-sectional plan view taken along line 2-2 of FIG. 1. FIG. 3 is a side view showing a closing member different from FIG. FIG. 4 is a side view showing a closing member different from FIG. 1; FIG. 5 is a side view of a closing member closing a gap between a manufacturing apparatus having a suction port and a side wall; FIG. Schematic diagram showing a clean room [FIG. 7] Schematic diagram showing a conventional clean room [Description of symbols] 10 ... clean room, 12 ... room, 14 ... space above the ceiling,
16: return space, 18: manufacturing equipment, 20: baseboard suction port, 22: FFU, 24: side wall, 26: supply line, 2
8 ... eye lid, 30 ... closing member, 32 ... vertical plate, 34
… Horizontal plate

Claims (1)

Claims: 1. A side wall of a chamber to which clean air is supplied is provided with a baseboard suction port for sucking air in the chamber, and an apparatus is installed near the side wall of the chamber. A clean room in which a device area is formed and the device area is set to a higher degree of cleanliness than an adjacent area, wherein a closing means for closing a gap between the side wall and the device is provided.