JPH0668408B2 - Air blower for clean room and high ceiling clean room using the same - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to an air blowing device for a clean room and a technique for forming a clean zone in an arbitrary area in a high ceiling room using the air blowing device.

[Conventional technology]

The ceiling height of conventional clean rooms is at most about 3 m, and there are few examples of clean rooms with ceiling heights of 5 to 20 m or more. This is because there is no need for a ceiling height higher than necessary because work equipment is installed on the floor.
This is because the higher the ceiling, the more difficult it is to control the air flow and the air conditioning load becomes excessive. In addition, regardless of the height of the ceiling, in the case of a large space, it is usual to create a smaller enclosed room and build this into a clean room. This is not usually done for the same reason as above.

[Problems to be solved by the invention]

It may be required to construct a large space with a high ceiling in a clean room. This is because when a large work machine is installed, the manufacturing line is built up and down, and the physical distribution goes up and down inside the room, and the existing high ceiling room (a non-clean room such as a normal factory space) is large. For example, if you want to use it as it is in a clean room without modification. However, constructing such a large room as a laminar flow type clean room requires extremely large equipment costs and operating costs. Further, it is difficult to maintain a high clean area in the whole room even if a large amount of cost is required, and a large amount of waste is required when the work area that requires high cleanliness is limited. Occurs.

The present invention has been made for the purpose of solving such a problem.

[Means for solving problems]

The present invention has devised an air blowing device suitable for constructing such a large space high ceiling room as a clean room, and has a first air passage in which a wall along the longitudinal direction is provided with an air intake opening. And a second duct in which a plurality of air injection nozzles are connected in series on the wall surface along the longitudinal direction, and a composite duct is placed back to back,
Also, an air blowing device for a clean room is provided, in which an air communication passage is provided from one end of the first air passage of this composite duct to the other end of the second air passage, and a fan and a HEPA filter are attached to this air communication passage. It is provided.

Then, as a high-ceiling clean room using this air blowing device for a clean room, this device is installed at each corner of the high-ceiling room with the longitudinal direction being vertical, or near one wall surface of the high-ceiling room and facing it. It is installed near the other wall with the longitudinal direction substantially horizontal.
The direction of each air injection nozzle of this device is uniformly directed toward the next adjacent device, and the wall surface of each device having each air intake opening collides with the air stream flowing toward this device. (EN) A high-ceiling clean room which is directed to a direction and forms a unidirectional vortex flow in a space position at an arbitrary height in a high-ceiling chamber by operating a fan in the device.

The contents of the present invention will be specifically described below with reference to the drawings.

FIG. 1 shows an example of an air blowing device for forming a clean room according to the present invention, and shows a part of the external appearance with a notched upper part. The device of the present invention has an elongated box shape (duct shape with both ends closed) as a whole. And
Inside this elongated box, a first air passage 1 and a second air passage 2 are formed back to back along the longitudinal direction. In this example, by installing the partition plate 3 extending in the longitudinal direction so as to diagonally cross the corner in the box,
A first air passage 1 and a second air passage 2 each having a triangular cross section are formed. The lower end of the composite duct consisting of the first air passage 1 and the second air passage 2 is up to the position shown by a in FIG. 1, and the partition plate 3 is present up to this position a. A fan filter unit 7 described later is connected to this lower end. On the other hand, although not shown in FIG. 1, the upper end of the composite duct is closed and the partition plate 3 extends to the upper end thereof. That is, the upper ends of the first air passage 1 and the second air passage 2 are closed.

On the wall surface of the first air passage 1, an air intake opening 4 is continuously provided in the longitudinal direction. In the illustrated example, circular air intake openings 4 are provided at predetermined intervals in the longitudinal direction. Although not shown, each of the air intake openings 4 can be provided with opening opening / closing means, such as a manual blind, which can freely open and close the opening. The air intake opening 4 may be formed by providing a slit along the longitudinal direction on the wall surface of the first air passage 1. Also in this case, it is preferable to provide an opening / closing plate that can freely adjust the opening length of the slit at any position.

Air injection nozzles 5 are continuously provided in the second air passage 2 at predetermined intervals in the longitudinal direction. In the illustrated example, a number of air intake openings 4 corresponding to the circular air intake openings 4 of the first air passage 1 are connected to the wall surface of the corresponding position of the second air passage 2. A damper is attached to each of the air injection nozzles 5 so that the number of blowout operations can be arbitrarily adjusted. Reference numeral 6 denotes an opening / closing handle of the damper. Further, it is preferable that each air jet nozzle 5 be configured to freely change the air blowing angle to some extent.

An air communication passage is provided from one end of the first air passage to the other end of the second air passage in the composite duct, and a fan and a HEPA filter are provided in this air communication passage. First
In the figure, this air communication passage is provided at the lower end of the composite duct, and this portion constitutes the fan filter unit 7.

FIG. 2 schematically shows the fan filter unit 7 forming the air communication passage portion. As shown in the figure, this fan filter unit 7 has a fan 8 and a HEPA filter 9 mounted in a box-shaped casing having substantially the same diameter as the composite duct. An opening 10 leading to the passage 1 and an opening 11 leading to the second air passage 2 are provided. The lower edge of the partition plate 3 of the composite duct is in contact with the upper plate 13, and the opening 11 is formed in the upper plate 13 on the side of the first air passage 1 divided by the partition plate 3.
Since the upper plate 13 on the second air passage 2 side is provided with the opening 11, the lower end of the first air passage 1 and the lower end of the second air passage 2 communicate with each other through the fan filter unit 7. In the illustrated fan filter unit 7, the inside of the casing is divided into a fan box 15 and a HEPA filter box 16 by a partition plate 14, an opening 10 is formed in the upper plate of the fan box 15, and an opening 11 is formed in the upper plate of the HEPA filter box 16.
In addition, the outlet of the fan 8 installed in the fan box 15 is opened from the partition plate 14 to the HEPA filter box 16, so that the air in the first wind passage 1 is taken into the fan filter unit 7 and the HEPA filter is installed. After purifying at 9, air is sent to the second air passage 2. Therefore, when the fan 8 is driven, the air around the composite duct is taken into the first air passage 1 through the air intake opening 4, and the HEPA
After being purified by the filter 9, the air is injected from the air injection nozzle 5 of the second air passage 2. At that time, by adjusting the numerical apertures of the air intake opening 4 and the air injection nozzle 5, air can be sucked in from any position in the longitudinal direction of the composite duct and blown out from any position.

FIG. 3 shows a high ceiling clean room using the air blowing device for a clean room of the present invention described in FIGS. 1 and 2. Air conditioned by the air conditioner 21 is installed in the high ceiling room 20.
By blowing out through the HEPA filter unit 22, a clean clean harmony space is formed. In addition, the return air is taken into the air conditioner 21 from the high ceiling room 20 and the outside air (OA) is supplied to the air conditioner.
Take in 21. The illustrated example shows an example in which the clean room air blowing device 24 according to the present invention having a length corresponding to the ceiling height is installed vertically at the four corners of the high ceiling room 20,
The air injection nozzles of the respective devices are installed so as to be oriented uniformly toward the next device or slightly toward the inside of the room. In this case, the surface of each device provided with the air intake opening is oriented in the direction in which the air blown out from the adjacent device is taken in.

And adjust the number of air injection nozzles that each device operates,
For example, as shown in the figure, some of the air injection nozzles in the middle abdomen are adjusted to operate, and only the air intake openings at the height of the operating air injection nozzles are opened, When air is injected from the air injection nozzle, a unidirectional swirl flow is formed in the room at that height, and this swirl flow generates a unidirectional swirl flow in the center of the room to create a clean zone in this hollow part. Can be formed. That is, air purified by the HEPA filter of each device flows in the hollow part where this vortex is generated, and even if this hollow part is in the work area where the dust generation source exists, the dust is blown away by the vortex and diffuses. Therefore, the cleanliness is maintained higher than that in the area above and below the swirling flow.

Similarly, when the operating position of the air injection nozzle is adjusted to a high position near the ceiling, or conversely to a low position near the floor surface, the inside of the swirling flow produces a high cleanliness due to the generation of vortices. Degree zones can be formed. Therefore, according to the device of the present invention, the clean zone can be freely formed in the zone of any height in the high ceiling chamber 20.

FIG. 4 shows a high ceiling clean room constructed by arranging the clean room air blowing devices of FIGS. 1 and 2 sideways. The members shown in FIG. 4 with the same numerals as those in FIG. 3 are substantially the same members as those explained in FIG. In this example, each clean room forming device 24 is used horizontally, but in the case of FIG. 4, a device 24a with the air injection nozzle facing upward is installed near one wall surface of the high ceiling chamber 20. At the same time, the device 24b with the air injection nozzle facing the opposite wall surface is installed at a position where the upward jet from the device 24a reaches, and on the other side of the other opposite wall surface, the device 24c with the air injection nozzle facing downward.
Is installed at substantially the same height as the device 24b, and the device 24d in which the air jet nozzle is directed toward the device 24a is positioned substantially at the same height as the device 24a at the position where the downward jet from this device 24c reaches. It was installed. In this case, the air intake opening of each device is preferably provided on the surface on which the jet flow flowing toward the device collides. Even with such an installation method, a circulating flow of air that sequentially passes through each device can be formed, and a unidirectional vortex flow is generated in the thorn surrounded by this circulating flow.

This state is shown in FIG. As shown in FIG. 5, in the hollow position where the vortex flow is generated, which is surrounded by the four devices 24, for the same reason as explained in FIG. A clean zone is formed. The position of the clean zone to be formed can be freely shifted in the lateral direction by adjusting the numerical apertures of the air injection nozzle and the air intake opening 4 of each device.

FIG. 6 shows the same high ceiling clean room as that of FIG. 5, except that the entire four devices are lowered near the floor. This case applies when forming a work area near the floor. Similarly, when forming a work area near the ceiling, a clean room forming device may be installed near the ceiling in the same relationship.

Also, in Figs. 4 to 6, each device 24 has two (24a.24b) near one wall and two (24c.24) near the opposite wall.
Although an example in which a total of four devices are installed in d) is shown, the number of devices is not necessarily limited to this example. Depending on the internal circumstances of the high ceiling room, a similar vortex flow can be formed, for example, by disposing at least one device near one (or the other) wall surface and at least two devices near the other (or one) wall surface. Is possible. However, in each case, with three or more devices arranged horizontally,
Around the clean zone to be formed, the direction of the air injection nozzle of each device is uniformly directed toward the next adjacent device, and the wall with the air intake opening of each device is attached to this device. It is necessary to be directed in the direction in which it collides with the air flow that is flowing toward it, so that the fan in each device is operated so that it can be rotated clockwise or counterclockwise to a spatial position at any height in the high ceiling room. A unidirectional eddy current can be formed.

As described above, according to the present invention, even in a large space of a high ceiling room, only a specific area therein can be freely formed in the clean zone, and the above-mentioned problem can be effectively solved. .

[Brief description of drawings]

FIG. 1 is a partially cutaway perspective view showing an example of a clean room forming apparatus according to the present invention, and FIG. 2 shows an example of a fan filter unit installed in an air communication passage portion of the clean room forming apparatus of FIG. FIG. 3 is a perspective view showing a high ceiling clean room using the clean room forming apparatus according to the present invention, and FIG. 4 is a perspective view showing another high ceiling clean room using the clean room forming apparatus according to the present invention. 5 and 5 are elevational views showing the air flow in the clean room of FIG. 4, and FIG. 6 is an elevational view showing the same air flow as in FIG. 5 formed near the floor. It is the figure shown. 1 …… First air passage, 2 …… Second air passage, 3 …… Partition plate, 4 …… Air intake opening, 5 …… Air injection nozzle, 6 …… Damper adjustment handle, 7…
… Fan filter unit, 8 …… fan, 9 …… HEPA filter, 20 …… high ceiling room, 21 …… air conditioner, 22 …… HEPA filter unit, 24 …… clean room forming device.

Claims (4)

[Claims] 1. A first air passage in which an air intake opening is continuously formed on a wall surface along the longitudinal direction, and a second air passage in which a plurality of air injection nozzles are connected to the wall surface along the longitudinal direction are back to back. An air communication passage that is composed of a composite duct and that connects from one end of the first air passage to the other end of the second air passage of this composite duct, and installs a fan and a HEPA filter in this air communication passage. Air blowing device for clean room. 2. The air blowing device for a clean room according to claim 1, wherein a plurality of air injection nozzles attached to the second air passage are provided with control means for controlling the number of operating nozzles. 3. A first air passage in which an air intake opening is continuously provided on a wall surface along the longitudinal direction, and a second air passage in which a plurality of air injection nozzles are continuously provided on the wall surface along the longitudinal direction are back to back. An air communication passage that is composed of a composite duct and that connects from one end of the first air passage to the other end of the second air passage of this composite duct, and installs a fan and a HEPA filter in this air communication passage. A clean room air blowing device is installed at each corner of a high ceiling room with the longitudinal direction being substantially vertical, and the direction of each air injection nozzle of this device is uniform in the direction of the next adjacent device. Or slightly toward the room,
The wall surface of the device having each air intake opening is oriented in a direction in which it collides with the air flow flowing toward the device, and the operation of the fan in the device causes a space of an arbitrary height in the high ceiling room. A high-ceiling clean room that creates a unidirectional vortex flow in its position. 4. A first air passage in which an air intake opening is continuously provided on a wall surface along the longitudinal direction, and a second air passage in which a plurality of air injection nozzles are continuously provided on the wall surface along the longitudinal direction face to back. An air communication passage that is composed of a composite duct and that connects from one end of the first air passage to the other end of the second air passage of this composite duct, and installs a fan and a HEPA filter in this air communication passage. A total of at least three air blowing devices for clean rooms are installed near one wall surface of the high ceiling room and near the other wall surface facing the high ceiling room with the longitudinal direction substantially horizontal. The direction of the air injection nozzle is uniformly directed in the direction of the next adjacent device, the wall surface of the device having the respective air intake openings being directed in the direction of impingement with the air stream flowing towards this device. The operation of the fan in the device High ceiling clean room that creates a clockwise or counterclockwise unidirectional vortex at any height in the room.