JPH03113221A - Local cleaning air flow control device - Google Patents

Abstract

PURPOSE:To provide an energy saving by a method wherein a purifying means is arranged at a ceiling surface of an upper part of a target region having a high degree of cleanliness and a surrounding region of the purifying means is provided with a surrounding area blowing port of which flow passage is metered so as to form an air flow layer having a higher sir speed than an air flow speed in the region of high degree of cleanliness. CONSTITUTION:Within a target region of a high degree of cleanliness, a part of air within a space 3 of a ceiling part is blown by an air blower 11 to a filter 10 and a surrounding region blowing port 13. Air flow passed through the filter 10 flows down in the target region of high degree of cleanliness at an air speed V1. Concurrently, and air speed V2 in air flow layer blown from the surrounding region blowing port 13 around the filter 10 flows down at a faster air speed than the air speed V1 of the air flow in the region of high degree of cleanliness, resulting in forming an air curtain between it and an area out of target region of a high degree of cleanliness within a clean room. Dust are merged into the air flow in the surrounding region so as to prevent the region of a high degree of cleanliness from being influenced by the dust. The air flow flowed down the region of a high degree of cleanli ness enter from a floor 5 having some holes into an under-floor space 6, enter from a duct 8 into the ceiling space 3 and then circulates. Accordingly, an air flow control device may easily be adapted for a modification in layout of a manufacturing device and it is not neces sary to increase a degree of cleanliness within an entire room, so that it is possible to provide an energy saving.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an airflow control device for local cleanliness, and is particularly suitable for saving energy by maintaining high cleanliness only in necessary areas in, for example, semiconductor manufacturing processes. The present invention relates to a suitable local cleaning airflow control device.

[Prior art] First, the prior art will be explained with reference to FIG.

FIG. 6 is a schematic configuration diagram of a clean room showing conventional local cleaning.

Generally, in a clean room used in a semiconductor manufacturing process, for example, in order to increase the cleanliness of the room, it is necessary to use a high-performance filter and increase the amount of air circulating in the room. Therefore, the power of the blower increases, and the cost of operating power increases. This led to the development of a local cleaning airflow control device that maintains a high level of cleanliness only in the necessary areas. FIG. 6 is an example.

In Figure 6, IA is a clean room and 2 is a clean room.

The indoor ceiling surface, 3 is the ceiling space, 4 is the indoor floor surface,
It has an open-hole floor 5A. 6 is an underfloor space; 7 is a blower that generates circulating air; 8 is an underfloor space 6 and a ceiling space 3
This is a duct for air circulation that connects the 9A is a filter disposed on the ceiling surface 2, and solid arrows indicate the direction of airflow.

The space indicated by the two-dot chain line in the room is the target area where the high cleanliness area should be formed. A filter unit 12A having a filter 9A and an independent blower 11 is provided on the ceiling above the target area.

The wind speed V of the circulating air flow in the high cleanliness target area is slower than the wind speed v2 outside the target area, and V<V.

[Problems to be Solved by the Invention] Conventionally, in order to perform local cleaning, partitions were provided, or as in the example shown in FIG. The speed is made slower to prevent dust from being drawn in. However, this local cleaning airflow control is only applicable when the room is completely down-flowed, that is, when the circulating airflow passes through the filter 9A on the ceiling surface 2 and flows down the entire surface toward the floor surface 4 (open-hole floor 5). It was impossible.

The present invention was made in order to solve the above-mentioned problems in the conventional technology, and it is not necessary to increase the cleanliness of the entire room, and it is possible to locally control airflow regardless of the surrounding wind speed, and to control only the necessary target area. The object of the present invention is to provide a locally clean airflow control device that can achieve high cleanliness and save energy.

[Means for Solving the Problems] In order to achieve the above object, the configuration of the first invention related to the local clean airflow control device of the present invention forms a high cleanliness region locally in the room by circulating airflow. In an airflow control device for local cleanliness, a purification means is provided on the ceiling above the high cleanliness target area, and the air flow is arranged around the purification means so as to form an airflow layer with a wind velocity higher than that of the high cleanliness area. It is equipped with a surrounding area air outlet with a narrowed passage.

In addition, the configuration of the second invention related to the local clean air flow control device of the present invention is that in the local clean air flow control device that forms a high cleanliness area locally in a room by circulating airflow, the upper part of the high cleanliness target area is A filter unit having at least a filter and an air passage with a narrowed flow path adjacent to the filter is provided on the ceiling surface, and a plurality of sets of filter units of different shapes are combined and at least one of the filter units is installed. It is configured to include a blower to form a desired local clean air flow lower part.

[Effect] The function of the above technical means is as follows.

A filter related to purification means is provided above the high cleanliness target area, and the flow rate of the clean air flow is set to v2. Then, a surrounding area outlet with a narrowed flow path like a nozzle or a slit shape is formed around the filter, and by narrowing the flow path in this way, the airflow velocity v in the surrounding area of the high cleanliness area is
2 is thicker than the airflow velocity in the high cleanliness area (V<v
z), the dust is drawn into the airflow in the surrounding area, and the influence of dust on the high cleanliness target area can be prevented.

In addition, by providing a plurality of combination patterns (for example, 6 types) of the above-mentioned filter and surrounding area and combining them, a desired filter unit can be configured, and the area of the high cleanliness target area can be arbitrarily selected. .

[Example] Hereinafter, each example of the present invention will be described with reference to FIGS. 1 to 5.

FIG. 1 is a schematic configuration diagram of a clean room equipped with a local cleaning airflow control device according to an embodiment of the present invention, and FIG.
FIG. 3 is a schematic configuration diagram of a filter unit according to an embodiment of the present invention, FIG. 3 is a schematic configuration diagram of a local cleaning airflow control device according to another embodiment of the present invention, and FIG. A fifth schematic configuration diagram of a filter unit according to still another embodiment.
The figure is an explanatory diagram illustrating a combination pattern of a part of the filter and the surrounding area constituting the filter unit.

In the figure, the same reference numerals as those in FIG. 6 are the same parts as in the prior art, so detailed explanation thereof will be omitted.

In the clean room 1 shown in FIG. 1, the space indicated by the two-dot chain line is a target area that should form a high cleanliness area. The local clean airflow control device of this embodiment is disposed on the ceiling surface 2 above this high cleanliness area.

The floor surface 4 in the lower part of this high cleanliness target area is an open floor 5 (the opening position is not limited to that shown in the figure and may be changed to an appropriate position as appropriate).

On the other hand, in other rooms outside the high cleanliness target area, a filter 9 is installed on a part of the ceiling surface 2, and a part of the floor surface 4 is made into an open floor, so that circulating air flows through the area as an area that does not require high cleanliness. ing.

Next, we will discuss the first example of the local cleaning airflow control device of this embodiment.
This will be explained with reference to the figures.

In FIG. 1, reference numeral 1o indicates a filter 11, which is a purification means installed on the ceiling above the high cleanliness target area, is a blower for sending out locally clean air current, and reference numeral 13 indicates an area around the filter 10. The surrounding area outlet has a flow path narrowed into a nozzle shape or slit shape so as to form an air flow layer with a wind speed v2 higher than the air flow speed v1 in the high cleanliness region. 13a indicates the flow path constriction portion. And 12 is
Said filter 10. This is a filter unit comprising an air blower 119 and an air outlet 13 in the surrounding area.

Next, the effect of airflow control for local cleaning in such a lean room will be explained.

In the clean room 1, air flowing down from the ceiling surface 2 passes through the open floor 5, the underfloor space, flows through the duct 8 by the action of the blower 7, enters the ceiling space 3, and circulates thereafter.

Regarding the high cleanliness target area, a part of the air in the ceiling space 3 is blown by the blower 11 to the filter 10 and the surrounding area outlet 13 . The airflow that has passed through the filter 10 flows down through the high cleanliness region at a wind speed of V□. At the same time, the airflow layer blowing out from the surrounding area outlet 13 around the filter 10 has a wind speed v2 higher than the airflow speed v1 of the high cleanliness area, and flows between the airflow layer and the area outside the high cleanliness target area in the clean room. This creates a state similar to that of forming an air curtain, which entrains dust into the airflow in the surrounding area and prevents dust from affecting the high cleanliness area.

The airflow flowing down the high cleanliness area flows from the perforated floor 5 to the underfloor space 6.
The water enters the ceiling space 3 through the duct 8 and circulates thereafter.

According to this embodiment, it is easy to adapt to changes in the layout of manufacturing equipment in, for example, semiconductor manufacturing processes, and it is not necessary to increase the cleanliness of the entire room, so it is possible to save energy.

Next, another embodiment of the present invention will be described.

The filter unit 12B shown in FIG. 2 is different from the filter unit 12 shown in FIG.

An air volume adjusting device 14 is provided on the upstream side of the surrounding area outlet 13 (between the flow path restricting section 13a and the blower 11).

This air volume adjusting device 14 controls the cross-sectional area of the flow path and adjusts the air volume by rotating a rotary blade.

According to the embodiment shown in FIG.
Due to the synergistic effect, the wind speed of the air flow layer around the high cleanliness area can be controlled to a desired state.

Next, in the apparatus shown in FIG. 3, a filter unit 12C having a filter 10 and a blower 11C is installed on the ceiling above the high cleanliness target area.
A surrounding area outlet 13 having a flow passage constriction part 13a is provided in the area around 2C, and a filter 15 and a blower 16 are provided upstream of the surrounding area outlet 13.

In the embodiment shown in FIG. 3, the surrounding area air outlet 13, the filter 15. Filter unit 1 by blower 16
7 is configured, and filter units 12C, 17
A local cleaning airflow control device is constructed by the combination of the above.

According to the embodiment shown in FIG. 3, the same effects as those described in the embodiment shown in FIG. Therefore, the effect of dust in the high cleanliness region is further reduced, and there is an effect unique to this embodiment that the degree of cleanliness can be further improved.

Next, the filter unit 12D shown in FIG.
This filter unit 12B has a configuration in which a surrounding area air outlet is further added to the filter unit 12B shown in the figure.

That is, the filter unit 12D shown in FIG.
Filter 1 should be located on the ceiling above the high cleanliness target area
0, and surrounding area air outlets 13-1.
13-2, and has an air volume adjusting device 14-1, 14-2 and a blower 11D on the upstream side of the flow path constriction portion 13a.

According to the embodiment shown in FIG. 4, the same effects as those described in the embodiment shown in FIG. 1 can be expected.

As explained in each of the above embodiments, at least the filter 10 is installed on the ceiling above the high cleanliness target area, and the air passage (surrounding area air outlet 1
3), a plurality of sets (six types in this case) of filter units having different shapes as shown in FIGS. 5(a) to 5(f) are manufactured in advance.

By combining these, the area of the high cleanliness target area can be arbitrarily selected as shown in the example shown in FIG. 5(g), and a desired local clean air flow lower part can be formed.

It should be noted that each of the above-mentioned embodiments can be widely adopted regardless of the level of cleanliness of the clean room, and can also be applied to a high cleanliness area where temperature and humidity accuracy is required.

[Effects of the Invention] As explained in detail above, according to the present invention, there is no need to increase the cleanliness of the entire room, local airflow control is possible regardless of the ambient wind speed, and only the necessary target area is controlled. It is possible to provide a locally clean airflow control device that achieves high cleanliness and energy savings.

[Brief explanation of drawings]

Embodiments of the present invention will be described below with reference to FIGS. 1 to 5. FIG. 1 is a schematic configuration diagram of a clean room equipped with a local cleaning airflow control device according to an embodiment of the present invention, and FIG.
FIG. 3 is a schematic configuration diagram of a filter unit according to an embodiment of the present invention. FIG. 4 is a schematic configuration diagram of a local cleaning airflow control device according to another embodiment of the present invention. A fifth schematic configuration diagram of a filter unit according to still another embodiment.
The figure is an explanatory diagram illustrating a combination pattern of a part of the filter and the surrounding area constituting the filter unit, and FIG.
1 is a schematic configuration diagram of a clean room showing conventional local cleaning; FIG. 1...Clean room, 2...Ceiling surface, 5...Open floor.

Claims (1)

[Claims] 1. In a local clean airflow control device that forms a locally high cleanliness area in a room by circulating airflow, a purification means is provided on the ceiling surface above the high cleanliness target area, and a purification means is provided around the purification means. 1. An airflow control device for local cleanliness, characterized in that an airflow control device for local cleanliness is provided in a region with a peripheral area outlet having a narrowed flow path so as to form an airflow layer with a wind velocity higher than that of the high cleanliness region. 2. A purification means is installed on the ceiling above the high cleanliness target area, a surrounding area outlet with a narrowed flow path is formed in the area around this purification means, and a blower and air volume are installed on the upstream side of this surrounding area outlet. 2. The airflow control device for local cleaning according to claim 1, further comprising adjustment means. 3. A filter unit having a blower and a filter is installed on the ceiling above the high cleanliness target area, and a surrounding area air outlet with a narrowed flow path is formed around this filter unit. 2. The airflow control device for local cleaning according to claim 1, further comprising an independent blower and filter provided upstream of the airflow control device. 4. In a local clean airflow control device that forms a locally high cleanliness area in a room by circulating airflow, at least a filter and an air blower with a narrowed flow path adjacent to the filter are placed on the ceiling above the high cleanliness target area. In order to provide a filter unit having a channel, a plurality of sets of filter units of different shapes are combined, and at least one of the filter units is configured to have a blower,
A local clean airflow control device, characterized in that a desired local clean air flow lower part is formed.