JP2001241717A - Air cleaning unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an air cleaning unit enabled to keep the uniform speed of air flow when the multiple duct units are connected for supplying a large quantity of air flow by arranging an air volume controlling board to the opening part for attaching the air cleaning filter of the duct units on the side of an air blowing unit, in the air cleaning unit fixed with an air cleaning filter attached to the under surface of the duct. SOLUTION: The air cleaning unit comprises an air blowing unit 3 and ducts, wherein the air blowing unit under which is provided with an air inlet hole on the down stream side is provided with an air path built in with an blower fan for the circulation of air, the blower fan unit and the duct are arranged so that the upper edge surface of the blower unit is on the same horizontal plane with the upper surface of the duct, and in an air cleaning unit 2 extendedly connected to a plurality of the ducts under surface of which is attached and fixed with the air cleaning filter, the air volume control board is attached to the opening part on the side of the air blowing unit on the upstream side.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air purifying apparatus which can easily form a dust-free and aseptic clean room in the fields of semiconductor industry, optical equipment, precision equipment, electronic equipment, medical equipment, food brewing industry and the like. .

[0002]

2. Description of the Related Art As a conventional clean room or clean booth, for example, as shown in Japanese Utility Model Publication No. 56-5707, an air suction port and a blower are arranged outside a room where air is to be purified. In addition, a laminar flow type clean room is known in which a filter is arranged above a ceiling of the room and clean air is blown out from the entire surface of the ceiling. However, in the case of such a clean room, it is necessary to provide a passage for clean air above the ceiling and to provide various facilities for purifying the air outside the room. In addition, in order to make an existing room a clean room, there is a drawback that a large remodeling is required in which the existing ceiling and walls are demolished and an air purifying device is installed. In addition, since the indoor air is only exhausted from the exhaust port provided on the side wall surface near the floor using the pressure difference, the clean air flowing down to the upper surface of the work table or the like occurs, Therefore, there is a disadvantage that dust on the upper surface of the work table and the like also rises together. Furthermore, the clean air that has been blown out is discharged from the lower part of the side wall of the room to the outside of the room, and then new dust-containing air is sucked in from the suction port and passes through the filter. However, there is a disadvantage that the efficiency of the air filter does not increase. Furthermore, since the air inlet is opened on the lower side surface of the main body, the cleaning air blown out from the entire ceiling flows obliquely toward the air inlet, so that uniform air cleaning is achieved in all the rooms. Is difficult.

In order to solve the above problems, there is an air purifying apparatus as disclosed in Japanese Patent Publication No. 3-48417. This device is arranged in a closed room, and the room is a clean room, at least one side of which is in close contact with the inner wall, and whose upper end surface is in close contact with the lower surface of the ceiling of the room. A main body, and a wind conduit extending horizontally from an upper portion of the columnar main body and having at least an upper surface thereof in contact with a ceiling of a room. The columnar main body has relatively short legs and an air suction port on a lower surface thereof. In addition, the inside thereof has an air passage in which a blower for air circulation and a filter for air cleaning are provided, and the wind conduit has a width substantially equal to that of the columnar main body and a ceiling of a room in an extending direction. , And has air outlets in all directions in the room on the entire surface of both side plates and the lower bottom plate. Further, the pillar-shaped main body and the wind conduit are formed such that an upper end surface of the pillar-shaped main body and an upper surface of the wind conduit form a series of horizontal planes, and the entire length thereof is equal to the ceiling length of the room in the wind conduit extending direction. It is configured to be. However, in the air purifying device as described above, since the wind speed of the air blown out of the wind conduit adjacent to the columnar main body and the wind speed of the air blown out of the wind conduit away from the columnar main body are different, There is a problem that it is not possible to make the distribution of the blown airflow uniform in the interior.

In order to solve such a drawback, there is an air purifying apparatus as disclosed in, for example, Japanese Patent Laid-Open No. 6-66439. In this device, air whose temperature and humidity are controlled by an air conditioner provided outside a clean room is guided to a HEPA filter through a ventilation duct. The air cleaned by the filter is sent to a plurality of air supply units formed of perforated plates extending linearly into the room. This air supply unit is an air supply duct disposed on the ceiling of a clean room, and is formed of a perforated plate extending in the longitudinal direction of the room, and the hole diameter of the perforated plate is equal to or less than the plate thickness. Further, in this air supply unit, the cross-sectional area of the flow path of the air is gradually reduced from the upstream side to the downstream side, and the direction of the flow of the inflow air is adjusted at the air inlet. A flow path adjuster is provided. In this air supply unit, the velocity of the air flowing out of each hole from the upstream side to the downstream side is constant, but it can be applied only to ducts of a predetermined length from the end to the end of the room, so it is necessary It is not possible to change the length of the duct after constructing only the necessary parts, and it lacks what is called flexibility.

Therefore, the present inventors have disclosed in Japanese Patent Application Laid-Open No. 8-289.
As shown in Japanese Patent Publication No. 20, at least, a ventilation unit disposed on the inner side surface of a room whose one side is to be cleaned, and a duct extending horizontally from an upper portion of the ventilation unit, The blower unit has an air suction port at a lower part thereof, and has an air passage in which a blower for air circulation is provided, and the blower unit and the duct are provided at an upper end surface of the blower unit. Proposed an air purifying apparatus for a clean room in which an air purifying filter is attached and fixed to a lower surface of the duct in a clean room air purifying apparatus arranged such that the upper surface of the duct forms a horizontal plane. . This air purifying device is provided with an air volume adjusting plate having an opening changed at a connection portion of each duct unit, and by reducing the cross-sectional area of the air flow path flowing from the upstream side to the downstream side, temporarily, If there is no gradient in the cross-sectional area of the flow path, the air flow velocity does not increase on the downstream side, and the average blowing velocity of the air supplied to the blowing unit duct can be made uniform.

However, the above-mentioned Japanese Patent Application Laid-Open No. 8-2892
In the case of the device described in Japanese Patent Publication No. 0, in order to buffer the air for each duct unit and to make the air flow distribution uniform, the air velocity blown out from a filter provided in the duct unit close to the air blowing unit is the farthest from the air blowing unit. It is faster than the blowing wind speed of the filter provided in the unit, and is not enough to achieve a uniform wind speed distribution over the entire area of the duct, and improvement has been required.

[0007]

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to solve at least the above problems and to provide at least a blower unit in an air purifying apparatus in which an air purifying filter is attached and fixed to the lower surface of a duct. By providing the air volume adjustment plate at the mounting opening of the air purification filter of the duct unit on the side, even when multiple duct units are connected to supply a large amount of air, uniform wind speed distribution over the entire area of the duct It is an object of the present invention to provide an air purifying device that can perform the cleaning.

[0008]

That is, in order to achieve the above object, an air purifying apparatus according to the present invention comprises:
As described, it is composed of a blower unit disposed on the inner side wall of the room where at least one side thereof is desired to be cleaned, and a duct extending horizontally from the top of the blower unit,
The blower unit has an air suction port at a lower portion on the downstream side thereof, and has an air passage in which a blower for air circulation is provided, and further, the blower unit and the duct The upper end surface of the unit and the upper surface of the duct are arranged so as to form a horizontal plane, the duct is composed of a plurality of duct units, and an air purifying filter is mounted on a mounting opening provided on the lower surface of the duct. In the fixed air cleaning device, an air volume adjusting plate is provided at least in the mounting opening of the duct unit side duct unit. In the air purifying apparatus according to the second aspect, in the air purifying apparatus according to the first aspect, an air outlet that is directed in all directions in the room is attached and fixed downstream of the air purifying filter. It is characterized by having. The air purifying apparatus according to claim 3 is:
3. The air purifying device according to claim 1, wherein the duct has no air purifying filter mounting opening, and the air purifying filter is not fixedly mounted to the duct unit. It is characterized by comprising a plurality of duct units having a filter mounting opening and a duct unit in which an air purifying filter is mounted and fixed to the mounting opening.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION The air purifying apparatus of the present invention is constructed as described above, and has a system in which an air conditioner is provided in a room and air is sucked and circulated from the floor of the room.
Since it can be installed in an existing clean room, improvement work on the ceiling and walls is not required, shortening the construction period and reducing construction costs. In addition, since only indoor air is circulated, purification is quickly achieved, energy required for adjusting temperature and humidity can be reduced, and energy saving can be achieved. In addition, since the duct can be installed in contact with the ceiling, a vortex is not generated immediately below the outlet, and laminar flow can be achieved. Also,
Since the filter is installed on the lower surface of the duct, the air supplied through the duct is laminarized by using the filter as a resistor, and a punching plate oriented in all directions in the room is provided with an air outlet on the downstream side of the filter. If set as
Air can be uniformly blown not only directly below the outlet but also to the entire room. In addition, it is possible to extend a plurality of ducts, and each duct can be composed of a plurality of duct units, so that clean air can be efficiently blown out only to a desired place, and the ducts can be provided as necessary. And the duct unit can be connected or omitted.

Further, in the present invention, it is not always necessary to provide a filter and an air outlet serving as a punching plate on the lower surface of each duct unit, and the degree of cleanliness in the clean room can be freely set by closing unnecessary air outlets. Can be adjusted.

In addition, by providing an air flow adjusting plate having an opening gradually changed at least in the mounting opening on the upstream side of the filter of the duct unit on the blower unit side, the airflow flowing from the duct unit on the blower unit side to the opening is provided. , The flow of the air supplied to the blower duct unit can be made uniform, so that the average wind speed can be made uniform. In this case, it is preferable that the opening of the air volume adjusting plate gradually increases in a direction away from the duct unit.

[0012]

Next, an embodiment of the present invention will be described with reference to the drawings. 1 is a side view showing an embodiment of the air purifying apparatus of the present invention, FIG. 2 is an enlarged view of a portion C in FIG. 1, and FIG. 3 is a right side view of the apparatus shown in FIG.

An air purifying device 2 provided in a room 1 to be made a clean room is provided with a blower unit 3 provided so as to be in close contact with one side surface 1c and to have its upper end surface in close contact with the lower surface 1b of the ceiling. And a duct 4 extending horizontally from the upper part of the blower unit 3 and having its upper surface in contact with the ceiling lower surface 1b.

The blower unit 3 includes a package 3a,
It comprises a connection box 3b and a campus 3c connecting the package 3a and the connection box 3b. The package 3a is a steel box having a short leg 3g provided on the lower surface thereof for fixing the floor 3a to the floor 1a of the room 1. Inside the package 3a, a fan 3d, a fan coil 3e, a compressor 3f, and a schematic diagram are omitted. And an air passage is formed. Further, the package 3a has an air suction port 3h opened below the package 3a. The connection box 3b
It is connected to the duct 4. The campus 3c buffers dimensional errors in the width direction and the height direction.

The duct 4 includes a plurality of duct units 4
A, screws are fixed at the duct unit connection portions 4b, 4b, and the adjacent filter housing portions 4d, 4d are joined,
Each lower surface opens toward the room 1. FIG.
In each duct unit 4A, in order to fix the filter 5 on the downstream side around the mounting opening 4a, the filter 5 is pressed against the downstream surface of the mounting opening 4a via the gasket 6 as shown in FIG. The mounting angle 8 attached to the side surface of the filter 5 is fixed by screws 9 to the filter fixing portion 4.
By fixing to g, the filter is crimped to the filter crimping parts 4i and 4j and fixed.

On the downstream side of the filter 5, a punching plate 7 serving as an air outlet opening in all directions in the room 1 is attached, and is fixed together with a duct unit skirt 4 f and a filter fixing portion 4 g by screws 11. I have.

The punching plate 7 is useful for uniform airflow distribution when the width of the room 1 is small, but is not always necessary for the room 1 having a large width. The shape of the punching plate 7 is not particularly limited. For example, the punching plate 7 may be flat or mountain-shaped, but the mountain-shaped airflow can be directed in all directions in the room 1 than the flat-shaped airflow. Excellent in uniformity.

The size of the duct 4 is not limited to a length corresponding to the length of the ceiling of the room 1, and only a desired space can be purified by extending a plurality of ducts. The duct 4 is composed of a plurality of duct units 4 each including a duct unit to which an air cleaning filter 5 and a punching plate 8 as an air outlet are attached and fixed, and a duct unit to which these are not attached and fixed. The combination can be appropriately selected according to the desired cleanliness. In a duct unit that is not attached and fixed, an empty box 8 may be provided in a portion corresponding to the filter 5, and a non-perforated plate 9 may be provided in a portion corresponding to the punching plate 7 for the outlet.

On the upstream side of each of the filters 5 of the duct unit 4, there are provided folded portions 4c and 4e of the mounting opening 4a.
Make the size of the opening constant from the duct unit side,
It is provided so as to cover the air volume adjusting plate 10 in a punching shape. In this embodiment, the duct 4 employs a punch-shaped air volume adjusting plate 10, but a slit-shaped air volume adjusting plate may be appropriately selected.

In this embodiment, the I type is arranged in a single row. However, the L type in which the ducts 4 are arranged in two directions from the blower unit 3 as a base point, and the T type in which the ducts 4 are arranged in three directions, Can be appropriately selected depending on the combination of.

Next, the characteristics according to the embodiment of the present invention are shown in Table 1. In the evaluation, as shown in FIG.
Filter No. arranged in a line The characteristics are shown based on the measurement results at four measurement points 1 to 10 on the downstream side of each of the filters 1 to 10.

[0022]

[Table 1]

From this result, it is recognized that the wind speed distribution when the filter primary side punching metal of the system duct is attached is improved. That is, the wind speed value is 0.1 m / sec lower than the state without the punching metal, and the variation is about ± 50% of the total average value without the punching metal, while the variation with the punching metal is about ± 15%.
It can be seen that the leveling effect has appeared.

[0024]

As is apparent from the above description, in the air purifying apparatus of the present invention, since the air conditioner is provided in the room, it can be installed in the existing clean room, and the ceiling, wall and the like of the clean room can be installed. No remodeling work is required, shortening the construction period and reducing construction costs. In addition, since only the indoor air is circulated, the cleanliness is quickly achieved. Further, since air is uniformly blown out of the duct on the lower surface of the ceiling, laminar flow can be achieved without generating a vortex just below the outlet. Further, by providing a filter near the outlet of the duct, the air supplied through the duct is rectified by the resistance of the filter, and the airflow distribution is made uniform. In addition, by providing a punching plate as an air outlet on the downstream side, the air flow distribution can be further uniformized. By providing the air volume adjusting plate in the air conditioner, it is possible to average the blowing air speed from the filter provided at the head of the duct unit to the filter provided at the tail.

[Brief description of the drawings]

FIG. 1 is a side view of an embodiment of the air purifying apparatus of the present invention.

FIG. 2 is an enlarged view of a portion C of the device shown in FIG.

FIG. 3 is a right side view of a portion C of the device shown in FIG. 1;

FIG. 4 is a plan view showing measurement points for evaluating characteristics of an embodiment of the air cleaning device of the present invention.

[Explanation of symbols]

 1 Room 1a Floor surface 1b Ceiling lower surface 1c Inner side wall 2 Air purifier 3 Blower unit 3a Package 3b Connection box 3c Canvas 4 Duct unit 4A Duct unit 4a Opening 4b Connecting part 4c Folding part 4d Filter accommodation part 4e Folding part 4f Skirt Part 4g Filter fixing part 4i Filter crimping part 4j Filter crimping part 5 Filter 6 Gasket 7 Punching plate 8 Empty box 9 Screw 10 Punching plate

Continued on the front page (72) Inventor Hideo Ogoshi 2-20-8 Hatchobori, Chuo-ku, Tokyo Inside Fuji Electric Construction Co., Ltd. (72) Inventor Yojiro Miyachi 415 Sakunotani, Yuki-shi, Ibaraki Pref. Inside Yuki Plant (72) Inventor Shoichi Kushita 415, Sakuno Valley, Yuki City, Ibaraki Prefecture Japan Inorganic Company Limited Inside Yuki Plant (72) Inventor Hiroshi Oyama 415 Sakuno Valley, Yuki City, Ibaraki Prefecture, Japan Inorganic Company Limited F-term in Yuki factory (reference) 3L058 BD02 BE02 BF01 BG01 4D058 JA12 KB02 KB11 KC04 KC62 QA01 QA03 QA07 QA11 QA13 QA21 QA30 SA04 UA25

Claims (3)

[Claims] 1. A blower unit disposed on an inner side wall of a room whose at least one side surface is to be cleaned, and a duct extending in a horizontal direction from an upper portion of the blower unit, wherein the blower unit is located downstream of the blower unit. Side has an air suction port at the bottom, and has an air passage in which a blower for air circulation is provided, and furthermore, the blower unit and the duct, the upper end face of the blower unit and the duct An air purifying device arranged so that an upper surface forms a horizontal plane, the duct including a plurality of duct units, and an air purifying filter mounted and fixed to a mounting opening provided on a lower surface of the duct; The air purifier according to any one of claims 1 to 3, wherein an air flow adjusting plate is provided at least in the mounting opening of the air duct unit side duct unit. 2. The air purifying apparatus according to claim 1, wherein an air outlet that directs in all directions in the room is attached and fixed downstream of the air purifying filter. 3. The duct according to claim 1, wherein the duct has no mounting opening for the air purifying filter, and has a duct unit to which the air purifying filter is not fixed, and a mounting opening for the air purifying filter. 3. The air purifying apparatus according to claim 1, comprising a plurality of duct units in combination with a duct unit in which an air purifying filter is mounted and fixed in the mounting opening.