CN102656410B - Clean room - Google Patents

Clean room Download PDF

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Publication number
CN102656410B
CN102656410B CN201080025662.4A CN201080025662A CN102656410B CN 102656410 B CN102656410 B CN 102656410B CN 201080025662 A CN201080025662 A CN 201080025662A CN 102656410 B CN102656410 B CN 102656410B
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China
Prior art keywords
nozzle
mentioned
flat plate
toilet
clean
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CN201080025662.4A
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Chinese (zh)
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CN102656410A (en
Inventor
蕨野慎治
和气清隆
中村元彦
村山民树
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Asahi Kogyosha Co Ltd
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Asahi Kogyosha Co Ltd
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
    • F24F7/10—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit with air supply, or exhaust, through perforated wall, floor or ceiling

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Sanitary Device For Flush Toilet (AREA)

Abstract

Provided is a clean room wherein a necessary speed of a down flow can be ensured even if a circulating air volume is small, and furthermore, filter leak test can be easily performed. Ports for blowing out temperature-controlled cleaned air to the clean zone (11) in a clean room (10) are formed using a plurality of plate nozzles (20).

Description

Toilet
Technical field
The present invention relates to the toilet that a kind of semiconductor manufacturing, crystal liquid substrate manufacture, pharmaceuticals and food manufacturing etc. use, particularly subtend clean area discharges the toilet improved by the outlet of the clean air of accurate temperature adjustment.
Background technology
In the manufacturing works of semiconductor manufacturing, crystal liquid substrate manufacture, pharmaceuticals and food manufacturing etc., make whole building toilet.
As toilet, there are 2 modes of the non-one direction formula (turbulent flow type) shown in the one direction streaming (laminar-flow type) shown in Fig. 8 and Fig. 9.
One direction streaming toilet 40 shown in Fig. 8 is configured to, the roughly whole face of ceiling across the clean area 41 being provided with manufacturing equipment M is provided with for gas chamber 42, the outlet 43 of this confession gas chamber 42 is provided with high-performance filter (HEPA or ULPA) 44, be formed in bottom, floor 45 and return chamber 46, chamber 46 will be returned link with confession gas chamber 42 and be connected circulating path 47, connect air conditioner 48 at this circulating path 47.
In the non-one direction formula toilet 50 shown in Fig. 9, filter unit 51 is set respectively in the position that needs in the ceiling portion of clean area 41.Filter unit 51 is configured to, and arranges high-performance filter 54 at the outlet 53 for gas chamber 52.In the toilet 50 of this Fig. 9, except filter unit 51, return chamber 46, circulating path 47, air conditioner 48 formation identical with the toilet 40 of Fig. 8.
In the one direction streaming toilet 40 shown in Fig. 8, the filter 44 of clean air set by from the outlet 43 supplying gas chamber 42 is equably to clean area 41 air feed, become from floor 45 to the air-flow returning chamber 46 and be vented (returning) by sinking in clean area 41, therefore the particle produced in clean area 41 can not flow to returning chamber 46 diffusely, can improve the cleannes of clean area 41 and realize the homogenising of Temperature Distribution.
On the other hand, in the non-one direction formula toilet 50 shown in Fig. 9, the position that needs in the ceiling portion of clean area 41 is provided with filter unit 51, therefore between filter unit 51,51, clean air does not flow and is detained, become turbulent flow, but by the setting position configuration filter unit 51 accordingly with manufacturing equipment M, the diffusion that can position needed to prevent particle thus.But, when non-one direction formula, even if control feed air temperature to process thermic load required in clean area 41, immediately below filter unit 51 and beyond it, become the Temperature Distribution creating difference.
In order to control the diffusion of the particle produced at clean area 41, and the heating of the device from manufacturing equipment M etc. is removed, the face wind speed of sinking needs to be 0.15 ~ 0.5m/sec, in the one direction streaming of Fig. 8, there is the problem needing very large amount of air circulation.In this, the non-one direction formula of Fig. 9, by arranging filter unit 51 in needs position, total blast volume is fewer than one direction streaming.
Patent document 1: Japanese Unexamined Patent Publication 2010-112646 publication
Summary of the invention
But, nearest manufacturing equipment M also maximizes, the height of clean area 41 needs for more than 6m, in non-one direction formula, even if the clean air of temperature adjustment is discharged from filter 54, also can spread when arriving floor 45, existing and cannot obtain the problem needing position to become the wind speed (0.15 ~ 0.5m/sec) of sinking.
Therefore, as one direction streaming, preferably make the horizontal profile of clean area overall with sinking flowing, but the many problems of circulation total blast volume change can not be eliminated.
In addition, in two modes, in order to discharge clean air from filter, need flow aerosol from air feed side and carry out filter leaks test, so that whether acknowledged filter exists hole together with air feed.This filter leaks is tested, and is scanned in length and breadth by the sampling detector of the lower surface of filter and defines the position in leak free aerosol and hole, but in inspection, there is time-consuming problem.
Therefore, the object of the invention is to, solve above-mentioned problem, a kind of toilet is provided, even if air circulation is less, also can guarantees that temperature control and cleannes guarantee the wind speed of required sinking, and filter leaks test can be carried out simply.
To achieve these goals, the feature of a kind of toilet of the present invention is, the outlet of the clean air be tempered of clean area is formed by multiple flat plate nozzles.
A kind of toilet of the present invention possesses: clean area, is provided with manufacturing equipment; For gas chamber, be arranged to lower openings the ceiling of this clean area; Return chamber, under being arranged on the floor of above-mentioned clean area; Air circulation path, links this and returns chamber and above-mentioned confession gas chamber; Air conditioner, is connected with air circulation path; High-performance filter, is arranged on and links on air conditioner and the above-mentioned circulating path supplying gas chamber; And multiple flat plate nozzles, is set to cover the above-mentioned opening supplying the ceiling of gas chamber and clean area.
In addition, high-performance filter also can replace being connected with above-mentioned air circulation path and be arranged at in gas chamber.
Flat plate nozzles used in the present invention be the multiple nozzle gone up in length and breadth of flat board by being formed as slim box like and this flat board integratedly resin forming formed.The internal diameter of nozzle is formed as the arbitrary size in the scope of 2 ~ 40mm.
In addition, in the present invention, also can be provided with on the flat board of flat plate nozzles: with the nozzle that the internal diameter of certain angle discharge clean air is larger; And be configured between said nozzle, the less nozzle of discharging clean air with wide-angle of internal diameter.
In the present invention, effective jet length that the clean air of discharging from the nozzle of flat plate nozzles reaches wind speed 0.5m/sec is obtained in advance according to nozzle inside diameter, effective jet length according to said nozzle selectes nozzle inside diameter, so that the face of certain height on above-mentioned floor to reach wind speed 0.15 ~ 0.5m/sec.
In addition, the clean air of discharging from each nozzle is discharged with certain extended corner during the effective jet length of arrival, nozzle interval is each other set to, under the extended corner of the clean air of discharging from adjacent nozzle, the clean air from adjacent nozzle in above-mentioned effective jet length intersects mutually.
Invention effect:
The present invention plays following good result.
(1) outlet of the clean air of clean area, is formed by multiple flat plate nozzles, freely can select wind speed and its arrival distance of the clean air be tempered of discharging from each nozzle of flat plate nozzles thus.
(2) even if the ceiling of toilet is higher, the wind speed optimization required for arrival Distance geometry clean area of nozzle can also be made.
(3) the global cycle amount of the air in toilet can be made to be 1/3 ~ 1/10 of toilet in the past.
(4) high-performance filter is arranged on circulatory system road or supplies in gas chamber, therefore, it is possible to carry out the inspections such as filter leaks test simply.
Accompanying drawing explanation
Fig. 1 is the overall diagram representing one embodiment of the present invention.
Fig. 2 is the overall diagram representing other embodiments of the present invention.
Fig. 3 represents in Fig. 1, Fig. 2 in the partial perspective view supplying gas chamber installs the state of flat plate nozzles.
Fig. 4 is at the close-up sectional view supplying gas chamber installs the state of flat plate nozzles in Fig. 1, Fig. 2.
Fig. 5 represents in the present invention based on the different wind speed from nozzle discharge of each internal diameter of nozzle and the figure arriving the relation between distance.
Fig. 6 is the figure be described the expansion state of the clean air that each nozzle from flat plate nozzles in the present invention is discharged.
Fig. 7 is the figure be described the expansion state of the clean air of discharging when being provided with the different nozzle of extended corner in the present invention in flat plate nozzles, from two nozzles.
Fig. 8 is the overall diagram of the one direction streaming toilet represented in the past.
Fig. 9 is the overall diagram of the non-one direction formula toilet represented in the past.
Detailed description of the invention
Based on accompanying drawing, a preferred embodiment of the present invention is described in detail below.
Fig. 1 represents the overall diagram of toilet of the present invention.
First, toilet 10 is configured to, on the ceiling of clean area 11 that manufacturing equipment M is set, across roughly whole, multiple gas chamber 12 that supplies is adjacent to arrange mutually, be formed in the bottom on the floor 15 of clean area 11 and return chamber 16, to return chamber 16 link with confession gas chamber 12 and be connected with circulating path 17, this circulating path 17 is connected with air conditioner 18.
In the present embodiment, circulating path 17 is provided with high-performance filter (HEPA or ULPA) 19, multiple flat plate nozzles 20 is set in the opening portion for gas chamber 12 and forms outlet.
Air conditioner 18 has evaporimeter 21 and circulating fan 22, the importing pipeline 13 of extraneous air OA is connected with in its suction side, the circulating path 17 arriving air conditioner 18 is connected with exhaust line 14, and exhaust line 14 possesses a scavenger fan part for circulating air be vented.
This toilet 10 is, the ceiling of clean area 11 is formed by the nozzle 24 of flat plate nozzles 20, discharge from nozzle 24 and regulated by air conditioner 18, by the clean air CA of high-performance filter 19 dedusting, even if therefore the ceiling height of clean area 11 is higher, also can by freely selecting nozzle diameter, on floor 15 need height (use point), such as liftoff plate 15 be the height of 1m, guarantee the wind speed (0.15 ~ 0.5m/sec) of the sinking becoming needs, and can make the amount of air circulation of needs be in the past 1/3 ~ 1/10 air quantity.
In addition, high-performance filter 19 is only connected with circulating path 17, can carry out its filter leaks test simply.
Fig. 2 represents the overall diagram of other toilets of the present invention.
The basic comprising of the toilet 10 of Fig. 2 is identical with the toilet 10 of Fig. 1, but is arranged on by high-performance filter 19 in gas chamber 12.The toilet 10 of Fig. 2, except the installation site of high-performance filter 19 is different from Fig. 1, other are identical with Fig. 1, therefore give the symbol identical with Fig. 1 in fig. 2 and omit the description.
In the toilet 10 shown in this Fig. 1, Fig. 2, the example represented is, what the ceiling of clean area 11 was installed supplies gas chamber 12, on roughly whole of ceiling, spread configuration is multiple, form one direction streaming toilet, but also can form non-one direction formula toilet by being arranged on the needing position of ceiling for gas chamber 12.
In addition, arrangement also can be replaced multiple for gas chamber 12, and be formed for gas chamber 12 by one in the mode of roughly whole that covers ceiling.
In addition, Fig. 3 represents enlarged partial isometric view during opening portion flat plate nozzles 20 of the present invention being installed to confession gas chamber 12, and Fig. 4 represents partial section flat plate nozzles 20 being installed to and supplying gas chamber 12.
Flat plate nozzles 20 is, uses mould to pass through flat board 23 and the nozzle 24 of the one-body molded slim box like of resin forming.
This flat plate nozzles 20 is such as formed as the size of 30cm × 30cm, 50cm × 50cm, and the thickness around dull and stereotyped 23 is 10 ~ 20mm degree, and the height of nozzle 24 exists at 20 ~ 200mm, internal diameter scope suitably formed.
The resin used is engineering plastics, can select any one in polyformaldehyde, polyimides, Merlon, sex change polyphenylene oxide, polybutylene terephthalate (PBT).In addition, the electroconductive powders such as carbon black, powdered graphite, zinc oxide can also be added or the anti-live agent that is made up of nonionic system or anion system surfactant etc. in resin.
In addition, around dull and stereotyped 23, the Screw hole 25 fixing for Screw described later of 3 positions is formed on each limit.
Below, flat plate nozzles 20 is described to the installation for gas chamber 12.
First, flat plate nozzles 20 arrangement is supported on the carriage 30 that formed by the metal side tube such as SUS or aluminium etc.This carriage 30 has the square box 31,31 supported flat plate nozzles 20, and this square box 31 is provided with screwed hole 32 oppositely with the Screw hole 25 of flat plate nozzles 20.
When flat plate nozzles 20 is installed to carriage 30, the encapsulant 26 to sealing between it is set.Encapsulant 26 is formed as the framework shape of the square box 31 of carriage 30, and this external position consistent with the screwed hole 32 of carriage 30 forms Screw hole 27.
Flat plate nozzles 20 is installed as to carriage 30, and carriage 30 carries the encapsulant 26 of frame-shaped, all around arranged flat nozzle 20 on sealing material 26.In this condition, in Screw hole 25, be screwed into Screw 28, and be screwed into Screw 28 by the Screw hole 27 of encapsulant 26 to the screwed hole 32 of carriage 30, flat plate nozzles 20 is installed on carriage 30.
So, via encapsulant 26 by Screw fixing flat plate nozzles 20 is arranged on carriage 30 after, this carriage 30 is installed to in gas chamber 12.
As shown in Figure 4, this confession gas chamber 12 is configured to, and having opening portion is become framework 33 on rectangular-shaped case by square-tube-shaped, the periphery and upper surface of this framework 33 are provided with lid 35.Carriage 30 is arranged on the upper surface of framework 33 by bolt, nut 39 via encapsulant 38.
So, after supplying that the carriage 30 being provided with flat plate nozzles 20 has been installed by gas chamber 12, the ceiling of the clean area 11 shown in Fig. 1, Fig. 2 is installed for gas chamber 12, and is connected with the pipeline of circulating path 17, form toilet 10 thus.
Next, be described forming the shape of nozzle 24 of flat plate nozzles 20 of outlet of ceiling of clean area 11, its internal diameter and its installation interval.
First, as shown in Figure 3,4, the shape of nozzle 24 is formed as down funnel-form, but also can be formed as cylindric.
Next, the configurable number of nozzle 24 is described.
First, every 1m is set to the clean air of discharging from high-performance filter in the past 2air quantity (3m when the face wind speed of area is 0.05m/sec 3/ min) be benchmark, nozzle inside diameter is respectively discharge identical air quantity (3m 3/ min) time nozzle radical as follows.
? nozzle time nozzle number be 1591 (40 × 40), nozzle time nozzle number be 254 (16 × 16), nozzle time nozzle number be 63 (8 × 8), nozzle time nozzle number be 16 (4 × 4), nozzle time nozzle number be 4 (2 × 2).Therefore, these radicals are set to, every 1m 2, be arranged at equal intervals as quadrilateral shape in length and breadth or be arranged at equal intervals as zigzag triangle.
Next, to from the nozzle wind speed (m/sec) of clean air of discharging downwards and arrive the result that distance (m) carries out simulating, be described according to Fig. 5.
First, in filter in the past, arrival distance when discharging with wind speed 0.05m/sec, 5m is maximum, and when reaching 5m, wind speed is zero.
On the other hand, known nozzle time arrive distance be 5m, nozzle time arrive distance be 6.5m, nozzle time arrive distance be 7.2m, with nozzle time arrive distance be 8m, when nozzle diameter become large time arrival apart from elongated, the nozzle of scope time, arriving distance does not have gap.
At this, be need on the face of height at the liftoff plate of clean area, when will obtain controlling the diffusion of particle, the minimum windspeed 0.15m/sec that the heating of the device from manufacturing equipment etc. can be removed, nozzle time, the distance (hereinafter referred to as effective jet length) till the face of the needs height on from nozzle location to floor (such as within height 1m, usually height 2m) is approximately 3m, nozzle time effective jet length be about 5m, nozzle time effective jet length be 6.5m, nozzle time effective jet length be 7m, nozzle time effective jet length be 8m.In other words, if the known distance from needing the face of height to nozzle is in effective jet length of this nozzle, then, on the face needing height, enough wind speed of more than wind speed 0.15m/sec can be obtained.
Therefore, the ceiling height of clean area 11 according to Fig. 1, Fig. 2 can freely design the nozzle inside diameter and configuration radical thereof that can obtain the wind speed of more than 0.15m/sec on the face of the needs height on floor 15, compared with the mode of carrying out discharging from the whole face of filter, global cycle air quantity also becomes the air quantity of 1/3 ~ 1/10.
Fig. 6 schematically represents the expansion state of the clean air CA be tempered discharged from each nozzle 24 of flat plate nozzles 20.
First, the clean air CA be tempered discharged from each nozzle 24 discharges downwards, and according to the discharge shape of nozzle 24, has certain extended corner θ.At this, as described above, such as have selected nozzle when, effective jet length L of wind speed 0.15m/sec is 6.5m, within it arrives distance L, as shown in Figure 6, if coincided with one another from the clean air CA be tempered of adjacent nozzle 24, then the face of height (such as 1m) entirety that needs from floor can become the air-flow of even wind speed, uniform temperature.
In addition, in figure 6, near the ceiling of clean area 11, the spaced compartment of terrain of nozzle 24 is arranged, therefore between the discharged clean air CA be tempered, produce the delay of air, but the surrounding of the air be detained is surrounded by the clean air CA be tempered from each nozzle 24, even if therefore produce particle in air entrapment, also concomitantly can flow to any clean air CA be tempered and return chamber and can not broadly spread.
Fig. 7 represents the example of the diffusion reliably prevented when producing particle near the ceiling of clean area 11.
The example represented in this embodiment is, forms flat plate nozzles 20 in the mode in the configuration between nozzle 24 θ, 24 θ with extended corner θ with nozzle 24 α of the spread angle alpha of greater angle.
There is nozzle 24 α of this spread angle alpha, only spray between the clean air CA discharged from nozzle 24 θ, 24 θ, arrive distance shorter.Therefore, even if nozzle 24 α uses internal diameter less than the internal diameter of nozzle 24 θ, 24 θ, such as nozzle, also there is the arrival distance of 5m, and the discharge angle [alpha] of nozzle freely can be selected, the diffusion of particle can be prevented more reliably.
In addition, except the internal diameter of the nozzle 24 that the flat board 23 of flat plate nozzles 20 is formed can being changed, in the present invention, be pre-formed the various flat plate nozzles 20 that nozzle inside diameter is different, according to the configuration state of the manufacturing equipment M of clean area 11, flat plate nozzles 20 different for nozzle diameter is installed to clean area 11 discharge clean air in gas chamber 12, thus can also the wind speed profile of region entirety of free setting clean area 11.Namely, on ceiling on the region requiring Particle diffusion, configure the flat plate nozzles 20 be made up of the nozzle that internal diameter is larger, in the region of the impact without Particle diffusion, the flat plate nozzles 20 that configuration nozzle inside diameter is less, can become the discharge mode suppressing the one direction streaming of air circulation and the centre of non-one direction streaming further thus.
Above, embodiments of the present invention are illustrated, but the present invention can carry out various change.That is, be illustrated as toilet, but toilet is broad sense, such as, certainly can be used in the toilet formed in exposure device that crystal liquid substrate is exposed and the toilet be partially formed.
Symbol description
10 toilets
11 clean areas
12 for gas chamber
16 return chamber
20 flat plate nozzles
23 is dull and stereotyped
24 nozzles

Claims (13)

1. a toilet, is characterized in that,
On the ceiling of clean area, form the opening portion of the outlet for the formation of the clean air after being tempered, be formed with the flat plate nozzles of multiple nozzle at the multiple lower surface at flat board of this opening portion spread configuration, form above-mentioned outlet,
By be formed as the multiple nozzle gone up in length and breadth of the flat board of slim box like and this flat board integratedly resin forming to form above-mentioned flat plate nozzles.
2. toilet as claimed in claim 1, is characterized in that,
The internal diameter of said nozzle is formed as the arbitrary size in the scope of 2 ~ 40mm, and the height of said nozzle is formed as the arbitrary height in the scope of 20 ~ 200mm.
3. toilet as claimed in claim 2, is characterized in that,
Above-mentioned flat board is provided with: internal diameter is large and discharge the nozzle of clean air with certain discharge angle; And being configured between said nozzle, internal diameter is little and discharge the nozzle of clean air with wide-angle.
4. a toilet, is characterized in that, possesses:
Clean area, is provided with manufacturing equipment;
For gas chamber, be arranged at the ceiling of this clean area, bottom has the opening portion of the outlet for the formation of the clean air after being tempered;
Return chamber, under being arranged on the floor of above-mentioned clean area;
Air circulation path, links this and returns chamber and above-mentioned confession gas chamber;
Air conditioner, is connected with air circulation path;
High-performance filter, is arranged on and links on air conditioner and the above-mentioned circulating path supplying gas chamber; And,
Multiple flat plate nozzles, forms multiple nozzle at the lower surface of flat board and forms, and above-mentioned multiple flat plate nozzles spread configuration is the opening portion covering the above-mentioned bottom for gas chamber, forms above-mentioned outlet on the ceiling at above-mentioned clean area,
By be formed as the multiple nozzle gone up in length and breadth of the flat board of slim box like and this flat board integratedly resin forming to form above-mentioned flat plate nozzles.
5. toilet as claimed in claim 4, is characterized in that,
The opening portion of the above-mentioned bottom for gas chamber is provided with the carriage being formed with multiple square aperture, via encapsulant, above-mentioned flat plate nozzles is installed at each opening of this carriage.
6. toilet as claimed in claim 4, is characterized in that,
The internal diameter of said nozzle is formed as the arbitrary size in the scope of 2 ~ 40mm, and the height of said nozzle is formed as the arbitrary height in the scope of 20 ~ 200mm.
7. toilet as claimed in claim 4, is characterized in that,
Effective jet length that the clean air of discharging from each nozzle of above-mentioned flat plate nozzles reaches wind speed 0.15m/sec is obtained in advance according to nozzle inside diameter, effective jet length according to said nozzle selectes nozzle inside diameter, so that the face of certain height on above-mentioned floor to reach wind speed 0.15 ~ 0.5m/sec.
8. toilet as claimed in claim 7, is characterized in that,
The clean air of discharging from each nozzle is discharged with certain extended corner during the effective jet length of arrival, nozzle interval is each other set to, under the extended corner of the clean air of discharging from adjacent nozzle, the clean air from adjacent nozzle in above-mentioned effective jet length intersects mutually.
9. a toilet, is characterized in that, possesses:
Clean area, is provided with manufacturing equipment;
For gas chamber, be arranged at the ceiling of this clean area, bottom has the opening portion of the outlet for the formation of the clean air after being tempered;
Return chamber, under being arranged on the floor of above-mentioned clean area;
Air circulation path, links this and returns chamber and above-mentioned confession gas chamber;
Air conditioner, is connected with air circulation path;
High-performance filter, is arranged on in gas chamber; And,
Multiple flat plate nozzles, forms multiple nozzle at the lower surface of flat board and forms, and above-mentioned multiple flat plate nozzles spread configuration is the opening portion covering the above-mentioned bottom for gas chamber, forms above-mentioned outlet on the ceiling at above-mentioned clean area,
By be formed as the multiple nozzle gone up in length and breadth of the flat board of slim box like and this flat board integratedly resin forming to form above-mentioned flat plate nozzles.
10. toilet as claimed in claim 9, is characterized in that,
The opening portion of the above-mentioned bottom for gas chamber is provided with the carriage being formed with multiple square aperture, via encapsulant, flat plate nozzles is installed at each opening of this carriage.
11. toilets as claimed in claim 9, is characterized in that,
The internal diameter of said nozzle is formed as the arbitrary size in the scope of 2 ~ 40mm, and the height of said nozzle is formed as the arbitrary height in the scope of 20 ~ 200mm.
12. toilets as claimed in claim 11, is characterized in that,
Effective jet length that the clean air of discharging from each nozzle of above-mentioned flat plate nozzles reaches wind speed 0.15m/sec is obtained in advance according to nozzle inside diameter, effective jet length according to said nozzle selectes nozzle inside diameter, so that the face of certain height on above-mentioned floor to reach wind speed 0.15 ~ 0.5m/sec.
13. toilets as claimed in claim 12, is characterized in that,
The clean air of discharging from each nozzle is discharged with certain extended corner during the effective jet length of arrival, nozzle interval is each other set to, under the extended corner of the clean air of discharging from adjacent nozzle, the clean air from adjacent nozzle in above-mentioned effective jet length intersects mutually.
CN201080025662.4A 2010-10-28 2010-11-12 Clean room Active CN102656410B (en)

Applications Claiming Priority (3)

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JP2010242798A JP4755307B1 (en) 2010-10-28 2010-10-28 Clean room
JP2010-242798 2010-10-28
PCT/JP2010/070202 WO2012056592A1 (en) 2010-10-28 2010-11-12 Clean room

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CN102656410A CN102656410A (en) 2012-09-05
CN102656410B true CN102656410B (en) 2015-07-01

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