CN102596575B - 用于制造液体喷出头的方法 - Google Patents

用于制造液体喷出头的方法 Download PDF

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Publication number
CN102596575B
CN102596575B CN201080050773.0A CN201080050773A CN102596575B CN 102596575 B CN102596575 B CN 102596575B CN 201080050773 A CN201080050773 A CN 201080050773A CN 102596575 B CN102596575 B CN 102596575B
Authority
CN
China
Prior art keywords
layer
ejection head
liquid
manufacture
fluid ejection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201080050773.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN102596575A (zh
Inventor
佐藤环树
森末将文
米山宽乃
铃木工
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN102596575A publication Critical patent/CN102596575A/zh
Application granted granted Critical
Publication of CN102596575B publication Critical patent/CN102596575B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN201080050773.0A 2009-11-11 2010-11-02 用于制造液体喷出头的方法 Expired - Fee Related CN102596575B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009-258192 2009-11-11
JP2009258192A JP5279686B2 (ja) 2009-11-11 2009-11-11 液体吐出ヘッドの製造方法
PCT/JP2010/006474 WO2011058719A1 (en) 2009-11-11 2010-11-02 Method for manufacturing liquid ejection head

Publications (2)

Publication Number Publication Date
CN102596575A CN102596575A (zh) 2012-07-18
CN102596575B true CN102596575B (zh) 2014-08-27

Family

ID=43528301

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201080050773.0A Expired - Fee Related CN102596575B (zh) 2009-11-11 2010-11-02 用于制造液体喷出头的方法

Country Status (6)

Country Link
US (1) US20120222308A1 (enExample)
EP (1) EP2470372B1 (enExample)
JP (1) JP5279686B2 (enExample)
KR (1) KR101327674B1 (enExample)
CN (1) CN102596575B (enExample)
WO (1) WO2011058719A1 (enExample)

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JP6000715B2 (ja) * 2011-09-29 2016-10-05 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2014162038A (ja) * 2013-02-22 2014-09-08 Seiko Epson Corp 流路ユニット、液体噴射ヘッド、液体噴射装置、流路ユニットの製造方法
JP6261623B2 (ja) 2013-02-28 2018-01-17 ヒューレット−パッカード デベロップメント カンパニー エル．ピー．Ｈｅｗｌｅｔｔ‐Ｐａｃｋａｒｄ Ｄｅｖｅｌｏｐｍｅｎｔ Ｃｏｍｐａｎｙ， Ｌ．Ｐ． 成形式プリントバー
US9731509B2 (en) 2013-02-28 2017-08-15 Hewlett-Packard Development Company, L.P. Fluid structure with compression molded fluid channel
US9656469B2 (en) 2013-02-28 2017-05-23 Hewlett-Packard Development Company, L.P. Molded fluid flow structure with saw cut channel
KR101827070B1 (ko) 2013-02-28 2018-02-07 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. 유체 유동 구조체 성형
US10821729B2 (en) 2013-02-28 2020-11-03 Hewlett-Packard Development Company, L.P. Transfer molded fluid flow structure
US9724920B2 (en) 2013-03-20 2017-08-08 Hewlett-Packard Development Company, L.P. Molded die slivers with exposed front and back surfaces
KR102030735B1 (ko) 2018-01-26 2019-10-11 광주과학기술원 분광장치 및 분광방법

Citations (6)

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Publication number Priority date Publication date Assignee Title
CN1966270A (zh) * 2005-09-13 2007-05-23 三星电子株式会社 喷墨打印头的制造方法及使用该方法制得的喷墨打印头
CN1976811A (zh) * 2004-06-28 2007-06-06 佳能株式会社 排液头的制造方法和使用这一方法获得的排液头
WO2007063690A1 (en) * 2005-12-02 2007-06-07 Canon Kabushiki Kaisha Liquid discharge head producing method
US20090065474A1 (en) * 2007-09-06 2009-03-12 Canon Kabushiki Kaisha Liquid-ejection head and method for manufacturing liquid-ejection head substrate
US20090162797A1 (en) * 2007-12-19 2009-06-25 Canon Kabushiki Kaisha Method of manufacturing liquid ejection head
CN101495318A (zh) * 2006-07-28 2009-07-29 惠普发展公司，有限责任合伙企业 流体喷射装置及其制造方法

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JPH08174833A (ja) * 1994-12-21 1996-07-09 Canon Inc インクジェット記録装置の記録ヘッドおよびその基板端面への酸化皮膜形成方法
DE69603639T2 (de) * 1995-03-31 2000-04-13 Canon K.K., Tokio/Tokyo Verfahren zum Herstellen eines Tintenstrahlkopfes
JP3343875B2 (ja) * 1995-06-30 2002-11-11 キヤノン株式会社 インクジェットヘッドの製造方法
US6137510A (en) * 1996-11-15 2000-10-24 Canon Kabushiki Kaisha Ink jet head
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US6986982B2 (en) * 2002-02-20 2006-01-17 Canon Kabushiki Kaisha Resist material and method of manufacturing inkjet recording head using the same
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JP2005074747A (ja) * 2003-08-29 2005-03-24 Canon Inc インクジェットヘッドの製造方法およびインクジェットヘッド
US7322104B2 (en) * 2004-06-25 2008-01-29 Canon Kabushiki Kaisha Method for producing an ink jet head
JP4484774B2 (ja) 2004-06-28 2010-06-16 キヤノン株式会社 液体吐出ヘッドの製造方法
JP4533256B2 (ja) * 2004-06-28 2010-09-01 キヤノン株式会社 微細構造体の製造方法および液体吐出ヘッドの製造方法
JP4761498B2 (ja) * 2004-06-28 2011-08-31 キヤノン株式会社 感光性樹脂組成物、ならびにこれを用いた段差パターンの製造方法及びインクジェットヘッドの製造方法
JP2006069009A (ja) * 2004-09-01 2006-03-16 Canon Inc インクジェットヘッドの製造方法
JP4614383B2 (ja) * 2004-12-09 2011-01-19 キヤノン株式会社 インクジェット記録ヘッドの製造方法、及びインクジェット記録ヘッド
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KR101452705B1 (ko) * 2008-01-10 2014-10-24 삼성전자주식회사 잉크젯 프린터 헤드의 제조 방법 및 상기 방법에 의하여제조된 잉크젯 프린터 헤드
JP5094519B2 (ja) 2008-04-14 2012-12-12 オリンパス株式会社 走査型レーザ顕微鏡
KR20090117010A (ko) * 2008-05-08 2009-11-12 삼성전자주식회사 잉크젯 프린터 헤드의 제조 방법 및 상기 방법에 의하여제조된 잉크젯 프린터 헤드
JP5312202B2 (ja) * 2008-06-20 2013-10-09 キヤノン株式会社 液体吐出ヘッド及びその製造方法
US8262199B2 (en) * 2008-09-30 2012-09-11 Fujifilm Corporation Droplet jetting head, method of manufacturing droplet jetting head, and droplet jetting apparatus equipped with droplet jetting head
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Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1976811A (zh) * 2004-06-28 2007-06-06 佳能株式会社 排液头的制造方法和使用这一方法获得的排液头
CN1966270A (zh) * 2005-09-13 2007-05-23 三星电子株式会社 喷墨打印头的制造方法及使用该方法制得的喷墨打印头
WO2007063690A1 (en) * 2005-12-02 2007-06-07 Canon Kabushiki Kaisha Liquid discharge head producing method
CN101495318A (zh) * 2006-07-28 2009-07-29 惠普发展公司，有限责任合伙企业 流体喷射装置及其制造方法
US20090065474A1 (en) * 2007-09-06 2009-03-12 Canon Kabushiki Kaisha Liquid-ejection head and method for manufacturing liquid-ejection head substrate
US20090162797A1 (en) * 2007-12-19 2009-06-25 Canon Kabushiki Kaisha Method of manufacturing liquid ejection head

Also Published As

Publication number Publication date
CN102596575A (zh) 2012-07-18
JP2011102001A (ja) 2011-05-26
EP2470372A1 (en) 2012-07-04
US20120222308A1 (en) 2012-09-06
EP2470372B1 (en) 2015-05-20
KR20120079171A (ko) 2012-07-11
KR101327674B1 (ko) 2013-11-08
JP5279686B2 (ja) 2013-09-04
WO2011058719A1 (en) 2011-05-19

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140827

Termination date: 20201102