CN102483931B - 具有复合磁屏蔽的磁性传感器 - Google Patents
具有复合磁屏蔽的磁性传感器 Download PDFInfo
- Publication number
- CN102483931B CN102483931B CN201080031224.9A CN201080031224A CN102483931B CN 102483931 B CN102483931 B CN 102483931B CN 201080031224 A CN201080031224 A CN 201080031224A CN 102483931 B CN102483931 B CN 102483931B
- Authority
- CN
- China
- Prior art keywords
- magnetic
- shielding element
- magneto
- layer
- grain growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3912—Arrangements in which the active read-out elements are transducing in association with active magnetic shields, e.g. magnetically coupled shields
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/398—Specially shaped layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
- Hall/Mr Elements (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/499,157 | 2009-07-08 | ||
| US12/499,157 US8437105B2 (en) | 2009-07-08 | 2009-07-08 | Magnetic sensor with composite magnetic shield |
| PCT/US2010/041285 WO2011005914A1 (en) | 2009-07-08 | 2010-07-08 | Magnetic sensor with composite magnetic shield |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102483931A CN102483931A (zh) | 2012-05-30 |
| CN102483931B true CN102483931B (zh) | 2015-04-01 |
Family
ID=43064561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201080031224.9A Expired - Fee Related CN102483931B (zh) | 2009-07-08 | 2010-07-08 | 具有复合磁屏蔽的磁性传感器 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US8437105B2 (enExample) |
| JP (1) | JP6022936B2 (enExample) |
| KR (1) | KR101389487B1 (enExample) |
| CN (1) | CN102483931B (enExample) |
| WO (1) | WO2011005914A1 (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8611055B1 (en) * | 2009-07-31 | 2013-12-17 | Western Digital (Fremont), Llc | Magnetic etch-stop layer for magnetoresistive read heads |
| US8771847B2 (en) | 2011-10-14 | 2014-07-08 | Seagate Technology | Reader stop-layers |
| EP2833542B1 (en) * | 2012-03-30 | 2019-01-16 | National Institute of Advanced Industrial Science and Technology | Actuator element using carbon electrode |
| JP2013254547A (ja) * | 2012-06-08 | 2013-12-19 | Hitachi Ltd | マイクロ波アシスト記録用磁気ヘッド及び磁気記録再生装置 |
| US9183857B2 (en) * | 2012-11-01 | 2015-11-10 | Seagate Technology Llc | Magnetic devices having shields including a nickel alloy |
| US8531801B1 (en) | 2012-12-20 | 2013-09-10 | Western Digital (Fremont), Llc | Method and system for providing a read transducer having a composite magnetic shield with smooth interfaces |
| US20140254047A1 (en) | 2013-03-08 | 2014-09-11 | Seagate Technology Llc | Reader with decoupled magnetic seed layer |
| JP6122353B2 (ja) * | 2013-06-25 | 2017-04-26 | ルネサスエレクトロニクス株式会社 | 半導体パッケージ |
| US9478239B2 (en) * | 2013-06-27 | 2016-10-25 | Seagate Technology Llc | Reader structure with barrier layer contacting shield |
| US9691417B1 (en) | 2013-06-28 | 2017-06-27 | Seagate Technology Llc | Magnetoresistive sensor having a synthetic antiferromagnetic bottom shield |
| US9251815B2 (en) * | 2013-06-28 | 2016-02-02 | Seagate Technology Llc | Magnetoresistive sensor with AFM-stabilized bottom shield |
| US9190082B2 (en) * | 2013-08-28 | 2015-11-17 | Seagate Technology, Llc | Dual reader structure |
| KR101476932B1 (ko) * | 2013-11-20 | 2014-12-26 | 한양대학교 산학협력단 | 수직 자기 이방성을 갖는 mtj 구조, 이의 제조방법 및 이를 포함하는 자성소자 |
| US9368136B2 (en) * | 2014-02-27 | 2016-06-14 | Seagate Technology Llc | Magnetoresistive sensor having synthetic antiferromagnetic layer in top and bottom shields |
| US9412401B2 (en) | 2014-05-13 | 2016-08-09 | Seagate Technology Llc | Data reader magnetic shield with CoFeNiB material |
| US9230565B1 (en) | 2014-06-24 | 2016-01-05 | Western Digital (Fremont), Llc | Magnetic shield for magnetic recording head |
| US9454979B1 (en) | 2014-11-14 | 2016-09-27 | Seagate Technology Llc | Sensor structure with multilayer top shield |
| US10074387B1 (en) | 2014-12-21 | 2018-09-11 | Western Digital (Fremont), Llc | Method and system for providing a read transducer having symmetric antiferromagnetically coupled shields |
| US11307055B2 (en) * | 2019-09-18 | 2022-04-19 | Analog Devices International Unlimited Company | Sensor with magnetic shield |
| US11754646B2 (en) * | 2021-03-24 | 2023-09-12 | Analog Devices International Unlimited Company | Magnetic sensor system |
| CN115798522B (zh) * | 2021-09-09 | 2025-10-10 | 西部数据技术公司 | 具有稳定上读取器的磁性读取传感器及相关方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5838521A (en) * | 1995-04-17 | 1998-11-17 | Read-Rite Corporation | Magnetoresistive transducer having laminated magnetic shields |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4447839A (en) * | 1980-10-28 | 1984-05-08 | Compagnie Internationale Pour L'informatique Cii-Honeywell Bull (Societe Anonyme) | Magnetoresistant transducer |
| JP2731506B2 (ja) * | 1993-11-22 | 1998-03-25 | 富士通株式会社 | 磁気抵抗効果型磁気ヘッド及びその製造方法 |
| US5515221A (en) | 1994-12-30 | 1996-05-07 | International Business Machines Corporation | Magnetically stable shields for MR head |
| JPH09128712A (ja) | 1995-10-27 | 1997-05-16 | Victor Co Of Japan Ltd | 磁気抵抗効果型ヘッド |
| US20010029158A1 (en) * | 1998-07-30 | 2001-10-11 | Yoshitaka Sasaki | Polishing apparatus and polishing method, and method of manufacturing semiconductor device and method of manufacturing thin film magnetic head |
| JP2000048327A (ja) * | 1998-07-31 | 2000-02-18 | Alps Electric Co Ltd | 薄膜磁気ヘッド |
| US6437949B1 (en) | 2000-02-08 | 2002-08-20 | Seagate Technology Llc | Single domain state laminated thin film structure |
| US6807031B2 (en) * | 2000-02-08 | 2004-10-19 | Seagate Technology Llc | Single domain state laminated thin film structure for use as a magnetic layer of a transducing head |
| US7180712B1 (en) * | 2000-02-28 | 2007-02-20 | Headway Technologies, Inc. | Shield structure design to improve the stability of an MR head |
| US6456467B1 (en) * | 2000-03-31 | 2002-09-24 | Seagate Technology Llc | Laminated shields with antiparallel magnetizations |
| US6767655B2 (en) * | 2000-08-21 | 2004-07-27 | Matsushita Electric Industrial Co., Ltd. | Magneto-resistive element |
| JP3659898B2 (ja) * | 2000-11-27 | 2005-06-15 | Tdk株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
| US6496335B2 (en) * | 2000-11-29 | 2002-12-17 | International Business Machines Corporation | Magnetic head shield structure having high magnetic stability |
| JP3600545B2 (ja) * | 2001-04-02 | 2004-12-15 | アルプス電気株式会社 | 薄膜磁気ヘッド |
| US6775108B2 (en) * | 2001-11-02 | 2004-08-10 | Seagate Technology Llc | Magnetic head having a read element shield and substrate with matching coefficients of thermal expansion |
| US7236333B2 (en) | 2003-12-11 | 2007-06-26 | Seagate Technology Llc | Domain wall free shields of MR sensors |
| US7340824B2 (en) * | 2004-06-30 | 2008-03-11 | Hitachi Global Storage Technologies Netherlands B.V. | Method for fabricating a magnetic head having an improved magnetic shield |
| US7270896B2 (en) * | 2004-07-02 | 2007-09-18 | International Business Machines Corporation | High performance magnetic tunnel barriers with amorphous materials |
| US7369360B2 (en) | 2004-11-05 | 2008-05-06 | Seagate Technology Llc | Perpendicular recording head having controlled permeability and saturation moment |
| JP2007242786A (ja) * | 2006-03-07 | 2007-09-20 | Tdk Corp | Cpp型磁気抵抗効果素子 |
| JP4121035B2 (ja) * | 2006-04-14 | 2008-07-16 | Tdk株式会社 | 磁気抵抗効果素子、薄膜磁気ヘッド、磁気ヘッド装置及び磁気記録再生装置 |
| US7697244B2 (en) * | 2006-06-12 | 2010-04-13 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetic head with stabilized ferromagnetic shield |
| JP2008010509A (ja) * | 2006-06-27 | 2008-01-17 | Fujitsu Ltd | 磁気抵抗効果素子及び磁気ディスク装置 |
| US7920363B2 (en) * | 2006-12-22 | 2011-04-05 | Hitachi Global Storage Technologies Netherlands B.V. | TMR sensor having magnesium/magnesium oxide tunnel barrier |
| US7796364B2 (en) * | 2006-12-29 | 2010-09-14 | Hitachi Global Storage Technologies Netherlands B.V. | Current-perpendicular-to-plane sensor epitaxially grown on a bottom shield |
| WO2008139513A1 (ja) * | 2007-04-27 | 2008-11-20 | Fujitsu Limited | 磁極幅測定方法 |
-
2009
- 2009-07-08 US US12/499,157 patent/US8437105B2/en active Active
-
2010
- 2010-07-08 JP JP2012519709A patent/JP6022936B2/ja not_active Expired - Fee Related
- 2010-07-08 WO PCT/US2010/041285 patent/WO2011005914A1/en not_active Ceased
- 2010-07-08 CN CN201080031224.9A patent/CN102483931B/zh not_active Expired - Fee Related
- 2010-07-08 KR KR1020127003433A patent/KR101389487B1/ko not_active Expired - Fee Related
-
2013
- 2013-04-23 US US13/868,515 patent/US8945405B2/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5838521A (en) * | 1995-04-17 | 1998-11-17 | Read-Rite Corporation | Magnetoresistive transducer having laminated magnetic shields |
Also Published As
| Publication number | Publication date |
|---|---|
| US8945405B2 (en) | 2015-02-03 |
| WO2011005914A1 (en) | 2011-01-13 |
| US8437105B2 (en) | 2013-05-07 |
| US20110007425A1 (en) | 2011-01-13 |
| KR20120045012A (ko) | 2012-05-08 |
| US20130233823A1 (en) | 2013-09-12 |
| KR101389487B1 (ko) | 2014-04-28 |
| JP2012533141A (ja) | 2012-12-20 |
| JP6022936B2 (ja) | 2016-11-09 |
| CN102483931A (zh) | 2012-05-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150401 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |