WO2008139513A1 - 磁極幅測定方法 - Google Patents

磁極幅測定方法 Download PDF

Info

Publication number
WO2008139513A1
WO2008139513A1 PCT/JP2007/059147 JP2007059147W WO2008139513A1 WO 2008139513 A1 WO2008139513 A1 WO 2008139513A1 JP 2007059147 W JP2007059147 W JP 2007059147W WO 2008139513 A1 WO2008139513 A1 WO 2008139513A1
Authority
WO
WIPO (PCT)
Prior art keywords
pole
nonmagnetic
film
nonmagnetic film
polished
Prior art date
Application number
PCT/JP2007/059147
Other languages
English (en)
French (fr)
Inventor
Tsutomu Komuro
Original Assignee
Fujitsu Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to PCT/JP2007/059147 priority Critical patent/WO2008139513A1/ja
Publication of WO2008139513A1 publication Critical patent/WO2008139513A1/ja

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G11B5/3166—Testing or indicating in relation thereto, e.g. before the fabrication is completed
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G11B5/3169—Working or finishing the interfacing surface of heads, e.g. lapping of heads

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

　外面がストッパ膜等の第１非磁性膜で覆われ、その第１非磁性膜の上からさらにアルミナ膜等の第２非磁性膜で覆われた磁極を研磨加工して、被研磨面において露出した磁極の幅を測定する際に、磁極の幅を高精度に測定することが可能な磁極幅測定方法を提供する。 　外面が第１非磁性膜８３で覆われ、第１非磁性膜８３の上からさらに第２非磁性膜８１で覆われた磁極８０ａを研磨加工して、研磨加工の被研磨面において少なくとも磁極８０ａの一部を第１および第２非磁性膜８３，８１から露出させ、露出した磁極８０ａの幅を測定する磁極幅測定方法であって、前記被研磨面に、磁極８０ａおよび第２非磁性膜８１よりも第１非磁性膜８３に対する除去レートの高い除去加工を行った後、前記露出した磁極８０ａの幅ｗを測定する。
PCT/JP2007/059147 2007-04-27 2007-04-27 磁極幅測定方法 WO2008139513A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/059147 WO2008139513A1 (ja) 2007-04-27 2007-04-27 磁極幅測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/059147 WO2008139513A1 (ja) 2007-04-27 2007-04-27 磁極幅測定方法

Publications (1)

Publication Number Publication Date
WO2008139513A1 true WO2008139513A1 (ja) 2008-11-20

Family

ID=40001750

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/059147 WO2008139513A1 (ja) 2007-04-27 2007-04-27 磁極幅測定方法

Country Status (1)

Country Link
WO (1) WO2008139513A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012533141A (ja) * 2009-07-08 2012-12-20 シーゲイト テクノロジー エルエルシー 複合磁気シールドを有する磁気センサ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11175927A (ja) * 1997-12-12 1999-07-02 Nec Corp 強磁性トンネル接合素子の製造方法
JP2005235316A (ja) * 2004-02-20 2005-09-02 Alps Electric Co Ltd 磁気ヘッド、およびその製造方法
JP2006107697A (ja) * 2004-10-07 2006-04-20 Headway Technologies Inc 垂直磁気記録用磁気ヘッドおよびその製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11175927A (ja) * 1997-12-12 1999-07-02 Nec Corp 強磁性トンネル接合素子の製造方法
JP2005235316A (ja) * 2004-02-20 2005-09-02 Alps Electric Co Ltd 磁気ヘッド、およびその製造方法
JP2006107697A (ja) * 2004-10-07 2006-04-20 Headway Technologies Inc 垂直磁気記録用磁気ヘッドおよびその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012533141A (ja) * 2009-07-08 2012-12-20 シーゲイト テクノロジー エルエルシー 複合磁気シールドを有する磁気センサ
US8945405B2 (en) 2009-07-08 2015-02-03 Seagate Technology Llc Magnetic sensor with composite magnetic shield

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