CN102482299B - 使氯硅烷加氢脱氯成氢硅烷的催化剂及用该催化剂合成氢硅烷的方法 - Google Patents
使氯硅烷加氢脱氯成氢硅烷的催化剂及用该催化剂合成氢硅烷的方法 Download PDFInfo
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- 239000001257 hydrogen Substances 0.000 title claims abstract description 42
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 42
- 238000000034 method Methods 0.000 title claims abstract description 42
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title claims abstract description 34
- 239000005046 Chlorosilane Substances 0.000 title claims abstract description 26
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 title claims abstract description 25
- 229910000077 silane Inorganic materials 0.000 title claims abstract description 24
- 125000004435 hydrogen atom Chemical class [H]* 0.000 title claims abstract description 7
- 230000015572 biosynthetic process Effects 0.000 title description 4
- 238000003786 synthesis reaction Methods 0.000 title description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims abstract description 34
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 34
- 239000011701 zinc Substances 0.000 claims abstract description 34
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000006243 chemical reaction Methods 0.000 claims abstract description 15
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 12
- 150000004706 metal oxides Chemical group 0.000 claims abstract description 12
- 238000002360 preparation method Methods 0.000 claims abstract description 10
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 8
- 239000001996 bearing alloy Substances 0.000 claims abstract description 7
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 6
- 230000003197 catalytic effect Effects 0.000 claims abstract description 6
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract 3
- 239000000203 mixture Substances 0.000 claims description 25
- 150000002431 hydrogen Chemical class 0.000 claims description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 6
- 239000000377 silicon dioxide Substances 0.000 claims description 6
- 229960001866 silicon dioxide Drugs 0.000 claims description 6
- 235000012239 silicon dioxide Nutrition 0.000 claims description 6
- 239000011135 tin Substances 0.000 claims description 6
- 229910052718 tin Inorganic materials 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 4
- 229910021485 fumed silica Inorganic materials 0.000 claims description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 4
- 239000004408 titanium dioxide Substances 0.000 claims description 4
- LIKFHECYJZWXFJ-UHFFFAOYSA-N dimethyldichlorosilane Chemical compound C[Si](C)(Cl)Cl LIKFHECYJZWXFJ-UHFFFAOYSA-N 0.000 description 8
- 239000005055 methyl trichlorosilane Substances 0.000 description 7
- JLUFWMXJHAVVNN-UHFFFAOYSA-N methyltrichlorosilane Chemical compound C[Si](Cl)(Cl)Cl JLUFWMXJHAVVNN-UHFFFAOYSA-N 0.000 description 7
- 239000003054 catalyst Substances 0.000 description 6
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 6
- 239000005052 trichlorosilane Substances 0.000 description 6
- 239000006227 byproduct Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 239000000047 product Substances 0.000 description 5
- 239000004411 aluminium Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 4
- 150000001721 carbon Chemical group 0.000 description 4
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 4
- 239000012153 distilled water Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- -1 alkyl chlorosilane Chemical compound 0.000 description 3
- 238000004817 gas chromatography Methods 0.000 description 3
- 230000001698 pyrogenic effect Effects 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 2
- 229910021536 Zeolite Inorganic materials 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 229910000323 aluminium silicate Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- NEHMKBQYUWJMIP-UHFFFAOYSA-N chloromethane Chemical compound ClC NEHMKBQYUWJMIP-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000008246 gaseous mixture Substances 0.000 description 2
- 239000002638 heterogeneous catalyst Substances 0.000 description 2
- 150000004678 hydrides Chemical class 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000010791 quenching Methods 0.000 description 2
- 239000002516 radical scavenger Substances 0.000 description 2
- 239000011949 solid catalyst Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010457 zeolite Substances 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910007857 Li-Al Inorganic materials 0.000 description 1
- 229910008447 Li—Al Inorganic materials 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- DPDMMXDBJGCCQC-UHFFFAOYSA-N [Na].[Cl] Chemical compound [Na].[Cl] DPDMMXDBJGCCQC-UHFFFAOYSA-N 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 238000009903 catalytic hydrogenation reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- QABCGOSYZHCPGN-UHFFFAOYSA-N chloro(dimethyl)silicon Chemical compound C[Si](C)Cl QABCGOSYZHCPGN-UHFFFAOYSA-N 0.000 description 1
- YGZSVWMBUCGDCV-UHFFFAOYSA-N chloro(methyl)silane Chemical compound C[SiH2]Cl YGZSVWMBUCGDCV-UHFFFAOYSA-N 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- NWKBSEBOBPHMKL-UHFFFAOYSA-N dichloro(methyl)silane Chemical class C[SiH](Cl)Cl NWKBSEBOBPHMKL-UHFFFAOYSA-N 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000007210 heterogeneous catalysis Methods 0.000 description 1
- 238000005984 hydrogenation reaction Methods 0.000 description 1
- 238000006459 hydrosilylation reaction Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052987 metal hydride Inorganic materials 0.000 description 1
- 150000004681 metal hydrides Chemical class 0.000 description 1
- 229940050176 methyl chloride Drugs 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000012619 stoichiometric conversion Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000010512 thermal transition Effects 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
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- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/12—Organo silicon halides
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
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- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/12—Organo silicon halides
- C07F7/121—Preparation or treatment not provided for in C07F7/14, C07F7/16 or C07F7/20
- C07F7/126—Preparation or treatment not provided for in C07F7/14, C07F7/16 or C07F7/20 by reactions involving the formation of Si-Y linkages, where Y is not a carbon or halogen atom
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
- B01J21/06—Silicon, titanium, zirconium or hafnium; Oxides or hydroxides thereof
- B01J21/08—Silica
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Abstract
用于制备通式RnCl3-nSiH的氢硅烷的方法,该方法是在存在基于金属氧化物的载体上的催化量的锌和/或含锌合金(K)的情况下通过通式RnCl4-nSi的氯硅烷与氢气的反应进行的,其中两式中的基团R均同时及彼此独立地代表氢原子、具有1至18个碳原子的、任选经取代或未经取代的烃基,n是1至3。
Description
技术领域
本发明涉及通过在存在基于金属锌的非均相催化剂的情况下用氢气使氯硅烷催化氢化而制备氢硅烷的方法,以及该催化剂。
背景技术
根据本发明的方法例如适合于使在合成纯硅时大量产生的四氯硅烷加氢脱氯生成三氯硅烷,其中三氯硅烷例如可以重新用于沉积硅或者可以通过根据本发明的方法进一步转化成其同系物二氯硅烷、氯硅烷和单硅烷。
根据本发明的方法的另一个应用例如是由烷基氯硅烷合成氢烷基氯硅烷。在该称作Müller-Rochow法的用于制备甲基氯硅烷的方法中,使氯甲烷与元素硅反应。在此,获得硅烷混合物,其除了含有诸如甲基三氯硅烷、二甲基二氯硅烷的氯硅烷以外还含有氢硅烷,例如甲基二氯硅烷和二甲基氯硅烷。这些氢硅烷是令人非常感兴趣的,因为其例如可以通过氢化硅烷化反应转化成其他有机官能的硅烷。因为氢硅烷在该Müller-Rochow合成中仅作为副产物产生,所以其可用性严重受限。因此,令人感兴趣的是,与Müller-Rochow法脱离,针对性地将氯硅烷转化成氢硅烷。
已知用于从氯硅烷合成氢硅烷的各种不同的方法。
根据现有技术,通常通过在非常高的温度下的热转化而实施高纯度四氯硅烷的加氢脱氯。
因此,US3,933,985描述了在从900℃至1200℃的范围内的温度下及在H2∶SiCl4的摩尔比例为从1∶1至3∶1的情况下四氯硅烷与氢反应生成三氯硅烷的反应。其描述了产率为12至13%。
专利US4,217,334报告了一种通过在从900℃至1200℃的温度范围内用氢使四氯硅烷氢化而使四氯硅烷转化为三氯硅烷的优化方法。通过高的H2∶SiCl4摩尔比例(高达50∶1)及对热的产物气体实施液体急冷至低于300℃,实现了明显更高的三氯硅烷产率(高达约35%,在H2∶四氯硅烷为5∶1的情况下)。该方法的缺点是氢在反应气体中的比例明显更高及所实施的利用液体急冷,这两种情况均显著增加该方法的能量消耗及因此增加了成本。
除了这些纯热力学过程,还已知与由文献公开的复合金属氢化物例如钠铝氢化物或锂铝氢化物的反应,尤其是与贱金属的化学计量反应。
因此,US5,329,038描述了一种方法,其中在存在选自铜、锌和锡的催化剂的情况下从氯硅烷通过与氢源和作为氯化物清除剂的铝的反应获得氢硅烷,其中必须以化学计量使用铝并产生对应的氯化铝作为副产物。
US2,406,605描述了一种类似的方法,其中使用化学计量的铝、镁或锌在不使用催化剂的情况下进行反应,但是同样产生等摩尔量的对应氯化物。
EP0412342描述了一种方法,其中使细碎的铝在由氯化铝和氯化钠组成的盐熔体中与氢反应生成氢化物,并消耗该氢化物用于使卤素取代的第2至第4周期的化合物转化成对应的氢化化合物。
EP0714900描述了一种方法,其中氯硅烷与氢在由选自钉、铑、钯、锇、铱和铂的金属组成的在载体材料上的非均相催化剂上反应生成对应的氢化衍生物。
所有这些已知的方法是常用的,它们在非常高的温度下实施,或者使用化学计量的氯化物清除剂或产生的副产品和副产物,或者使用在工艺技术上成问题的金属熔体和盐熔体,导致该方法不经济,或者尤其是在化学计量反应的情况下,形成大量的副产物。
发明内容
因此,本发明的目的是改进现有技术,尤其是开发一种经济且通用的方法,其允许在工业上可操作的温度范围内用分子氢使氯硅烷进行非均相催化的加氢脱氯。
出人意料地发现,可以在提高的温度下在存在由金属氧化物组成的载体中的催化量的元素锌的情况下在任意的氯硅烷与氢气的反应中获得氢硅烷。
因此,本发明涉及用于制备以下通式的氢硅烷的方法
RnCl3-nSiH
该方法是在存在优选分散在基于优选高熔点的金属氧化物的载体上的催化量的锌和/或含锌合金(K)的情况下通过以下通式的氯硅烷与氢气的反应进行的
RnCl4-nSi
其中,两式中的基团R均同时及彼此独立地代表氢原子、具有1至18个碳原子的、任选经取代或未经取代的烃基,优选为优选具有1至18个碳原子、更优选1至12个碳原子、特别优选1至8个碳原子的、任选经取代或未经取代的烷基或芳基,特别优选为甲基、苯基或乙基,而n可以取1至3的值。
在根据本发明的方法中,优选可以使用一种氯硅烷或者使用多种氯硅烷的混合物。
在根据本发明的方法中,优选使用也在Müller-Rochow法中产生的产物四氯硅烷、甲基三氯硅烷和二甲基二氯硅烷。
根据本发明的方法在高于所用氯硅烷与氢的混合物的露点的温度下在气相中实施,优选在高于锌的熔点的温度下实施该方法;根据本发明的方法优选在300℃与800℃之间、更优选在300℃与600℃之间、特别优选在450℃与600℃之间的温度下实施。
含锌合金优选为锌、黄铜和/或青铜。
基于全部的固体催化剂(K),催化剂锌的使用量优选为0.1至99.9重量%、更优选1至50重量%、特别优选5至30重量%的元素锌。在催化剂锌在多孔载体中位于载体的内表面上的意义上,催化剂锌与载体优选还在载体中使用。作为载体,优选考虑基体,即优选为骨架物,更优选为一种或多种选自以下组中的优选高熔点的金属氧化物:二氧化硅、氧化铝、氧化锌、二氧化钛、二氧化锆及其混合氧化物,例如优选为铝硅酸盐,更优选为沸石及其任意的混合物,其中优选为二氧化硅,特别优选为火成二氧化硅。此外,非均相固体优选还可以包含少量的一种或多种选自铜、锡和硅的助催化剂或者这些物质的任意混合物,其中基于元素锌的量,助催化剂的存在比例优选为0.01至1,特别优选为0.25至1,其中优选为铜,并且可以代替高达一半重量的锌,即锌与助催化剂优选为铜以1∶1的比例存在。载体优选为多孔的。
包含氯硅烷和氢的气体混合物在根据本发明的催化剂上的反应通常以优选在每小时100与10000之间、更优选250与2500之间、特别优选500与1000之间的气基催化剂负载(气时空速GHSV)进行,其中待反应的氯硅烷在气体混合物中的比例在1与90体积%之间、优选在5与50体积%之间、更优选在20与40体积%之间。
在根据本发明的方法中产生的氢硅烷由于其沸点低优选可以通过蒸馏从未反应的氯硅烷分离出。优选将未反应的氯硅烷再循环,并重新用于反应。
根据本发明的方法可以分批式或者连续地实施。
本发明还涉及催化剂K,其中催化剂K包含优选分散在基于优选高熔点的金属氧化物的载体上的锌或含锌合金。
催化剂K优选为多孔的,并且是通过优选将一种或多种选自以下组中的金属氧化物分散在蒸馏水中:二氧化硅、氧化铝、二氧化钛、二氧化锆及其混合氧化物,例如优选为铝硅酸盐,更优选为沸石及其任意的混合物,其中优选为二氧化硅,特别优选为火成二氧化硅,并将金属锌以及任选存在的一种或多种选自铜、锡和硅的助催化剂或它们的任意混合物添加至该组合物而制得的。将该组合物挤出,并优选进行干燥,获得长度优选为4mm至20mm、更优选4mm至10mm且直径优选为1mm至6mm、更优选为3mm至6mm的圆柱体。此外,还可以将该组合物挤压成任意的形状,例如优选为小丸、环或小片,并且优选还可以具有一个或多个开口。基于固体催化剂(K)即催化剂与载体,金属催化剂锌的添加量为0.1至99.9重量%,优选为1至50重量%,更优选为5至30重量%;基于元素锌的量,优选以0.01至1、更优选0.25至1的比例任选地添加优选选自铜、锡和硅的助催化剂。
具体实施方式
以下实施例更详细地描述本发明,而不应限制其范围。
实施例1:四氯硅烷的加氢脱氯
将30克火成二氧化硅分散在70克蒸馏水中,并基于全部固体,将对应于1重量%的比例的金属锌添加至该组合物。随后将该组合物挤出形成挤出物(条)并干燥。将10克干燥催化剂引入管式反应器中,并首先用氢气在500℃下处理2小时。引导20体积%四氯硅烷在氢气中的混合物于450℃下对应于625每小时的GHSV经过催化剂,并通过气相色谱法测定排出的产物混合物的组成。
所形成的三氯硅烷的量明显大于每摩尔锌2摩尔SiHCl3的化学计量反应所对应的量。直至约48小时之后实验结束,实现225的TON(转化数)。
实施例2:甲基三氯硅烷的加氢脱氯
将30克火成二氧化硅分散在70克蒸馏水中,并基于全部固体,将对应于1重量%的比例的金属锌添加至该组合物。随后使用柱塞式挤出机将该组合物挤出形成挤出物,切割并干燥。将10克干燥催化剂引入管式反应器中,并首先用氢气在500℃下处理2小时。引导20体积%甲基三氯硅烷在氢气中的混合物于450℃下对应于625每小时的GHSV经过催化剂,并通过气相色谱法测定排出的产物混合物的化学组成。
在理论化学计量转化的情况下,每摩尔锌仅形成最多2摩尔二氯甲基硅烷。结果表明,以明显的超化学计量形成甲基二氯硅烷作为甲基三氯硅烷加氢脱氯的反应产物,对应于直至约36小时之后实验结束时120的TON。
实施例3:甲基三氯硅烷的加氢脱氯
将30克火成二氧化硅分散在70克蒸馏水中,并基于全部固体以重量%计,将对应于下表的催化活性的金属添加至该组合物。随后将该组合物挤出形成挤出物并干燥。将10克干燥催化剂引入管式反应器中,并首先用氢气在500℃下处理2小时。引导20体积%甲基三氯硅烷在氢气中的混合物于450℃下以625h-1的GHSV经过催化剂,并通过气相色谱法测定排出的产物混合物的化学组成。将结果以稳态产率的形式列于下表中。
Claims (10)
1.用于制备以下通式的氢硅烷的方法
RnCl3-nSiH
该方法是在存在基于金属氧化物的载体上的催化量的锌和/或含锌合金(K)的情况下通过选自以下通式的氯硅烷和四氯硅烷的氯硅烷与氢气的反应进行的
RnCl4-nSi
其中,两式中的基团R同时及彼此独立地代表氢原子、具有1至18个碳原子的、任选经取代或未经取代的烃基,n是1至3。
2.根据权利要求1的用于制备氢硅烷的方法,其特征在于,所述金属氧化物是二氧化硅、氧化铝、二氧化钛、二氧化锆或其混合氧化物。
3.根据权利要求2的用于制备氢硅烷的方法,其特征在于,所述金属氧化物是火成二氧化硅。
4.根据权利要求1至3之一的用于制备氢硅烷的方法,其特征在于,(K)额外各自包含一种选自铜、锡和硅的物质或者包含它们的任意混合物。
5.根据权利要求1至3之一的用于制备氢硅烷的方法,其特征在于,基于(K),在载体中的锌和/或含锌合金的含量为5重量%至30重量%的元素锌。
6.根据权利要求1至3之一的用于制备氢硅烷的方法,其特征在于,该方法在300℃至600℃下实施。
7.包含在基于金属氧化物的载体上的锌和/或含锌合金的催化剂用于制备以下通式的氢硅烷的用途
RnCl3-nSiH
其是在存在催化量的所述催化剂的情况下通过选自以下通式的氯硅烷和四氯硅烷的氯硅烷与氢气的反应制备的
RnCl4-nSi
其中,两式中的基团R同时及彼此独立地代表氢原子、具有1至18个碳原子的、任选经取代或未经取代的烃基,n是1至3。
8.根据权利要求7的用途,其特征在于,所述金属氧化物是二氧化硅、氧化铝、二氧化钛、二氧化锆或其混合氧化物。
9.根据权利要求8的用途,其特征在于,所述金属氧化物是火成二氧化硅。
10.根据权利要求9的用途,其特征在于,所述催化剂额外各自包含一种选自铜、锡和硅的物质或者包含这些物质的任意混合物。
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US5329038A (en) * | 1993-12-29 | 1994-07-12 | Dow Corning Corporation | Process for hydrogenation of chlorosilane |
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