CN102478429B - 分光测量装置 - Google Patents

分光测量装置 Download PDF

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Publication number
CN102478429B
CN102478429B CN201110262087.6A CN201110262087A CN102478429B CN 102478429 B CN102478429 B CN 102478429B CN 201110262087 A CN201110262087 A CN 201110262087A CN 102478429 B CN102478429 B CN 102478429B
Authority
CN
China
Prior art keywords
light
wavelength
light source
etalon
interference filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201110262087.6A
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English (en)
Chinese (zh)
Other versions
CN102478429A (zh
Inventor
舟本达昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN102478429A publication Critical patent/CN102478429A/zh
Application granted granted Critical
Publication of CN102478429B publication Critical patent/CN102478429B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
CN201110262087.6A 2010-11-25 2011-09-06 分光测量装置 Expired - Fee Related CN102478429B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010262758A JP5633334B2 (ja) 2010-11-25 2010-11-25 分光測定装置
JP2010-262758 2010-11-25

Publications (2)

Publication Number Publication Date
CN102478429A CN102478429A (zh) 2012-05-30
CN102478429B true CN102478429B (zh) 2016-03-16

Family

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Family Applications (1)

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CN201110262087.6A Expired - Fee Related CN102478429B (zh) 2010-11-25 2011-09-06 分光测量装置

Country Status (3)

Country Link
US (2) US8711362B2 (https=)
JP (1) JP5633334B2 (https=)
CN (1) CN102478429B (https=)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2783193A4 (en) 2011-11-03 2015-08-26 Verifood Ltd COST-EFFECTIVE SPECTROMETRIC SYSTEM FOR USER-EATING FOOD ANALYSIS
CN102721643B (zh) * 2012-06-28 2015-07-15 北京利德曼生化股份有限公司 一种增加340nm处光强的光学系统和方法
JP2015534701A (ja) 2012-08-28 2015-12-03 デロス リビング エルエルシーＤｅｌｏｓ Ｌｉｖｉｎｇ Ｌｌｃ 居住環境に関連するウェルネスを増進するためのシステム、方法、及び物品
EP2746740B1 (en) * 2012-12-21 2019-05-08 IMEC vzw Spectral imaging device and method to calibrate the same
JP2014132304A (ja) * 2013-01-07 2014-07-17 Seiko Epson Corp 画像表示装置
GB2529070B (en) 2013-08-02 2017-07-12 Verifood Ltd Spectrometer comprising a plurality of isolated optical paths
JP2015120480A (ja) * 2013-12-25 2015-07-02 信二 細江 光照射装置
EP3090239A4 (en) 2014-01-03 2018-01-10 Verifood Ltd. Spectrometry systems, methods, and applications
EP3754588B1 (en) 2014-02-28 2023-08-16 Delos Living LLC Systems, methods, and articles for enhancing wellness associated with habitable environments
EP3209983A4 (en) 2014-10-23 2018-06-27 Verifood Ltd. Accessories for handheld spectrometer
WO2016125164A2 (en) 2015-02-05 2016-08-11 Verifood, Ltd. Spectrometry system applications
WO2016125165A2 (en) 2015-02-05 2016-08-11 Verifood, Ltd. Spectrometry system with visible aiming beam
JP6492838B2 (ja) * 2015-03-23 2019-04-03 セイコーエプソン株式会社 分光測定装置、画像形成装置、及び分光測定方法
WO2016162865A1 (en) 2015-04-07 2016-10-13 Verifood, Ltd. Detector for spectrometry system
US10066990B2 (en) 2015-07-09 2018-09-04 Verifood, Ltd. Spatially variable filter systems and methods
JP6623685B2 (ja) * 2015-10-29 2019-12-25 セイコーエプソン株式会社 測定装置及び印刷装置
US10203246B2 (en) 2015-11-20 2019-02-12 Verifood, Ltd. Systems and methods for calibration of a handheld spectrometer
CN105651386B (zh) * 2016-03-04 2018-12-11 温州佳易仪器有限公司 一种利用标准光源对色观察箱进行颜色测试的方法
JP2017173687A (ja) * 2016-03-25 2017-09-28 パイオニア株式会社 波長選択装置
US10254215B2 (en) 2016-04-07 2019-04-09 Verifood, Ltd. Spectrometry system applications
WO2018015951A1 (en) 2016-07-20 2018-01-25 Verifood, Ltd. Accessories for handheld spectrometer
US10791933B2 (en) 2016-07-27 2020-10-06 Verifood, Ltd. Spectrometry systems, methods, and applications
RU2649048C1 (ru) 2016-11-25 2018-03-29 Самсунг Электроникс Ко., Лтд. Система компактного спектрометра, предназначенного для неинвазивного измерения спектров поглощения и пропускания образцов биологической ткани
WO2019046580A1 (en) 2017-08-30 2019-03-07 Delos Living Llc SYSTEMS, METHODS AND ARTICLES FOR EVALUATING AND / OR IMPROVING HEALTH AND WELL-BEING
JP7027840B2 (ja) * 2017-11-29 2022-03-02 セイコーエプソン株式会社 分光反射測定器
JP2020020702A (ja) * 2018-08-02 2020-02-06 セイコーエプソン株式会社 分光測定器、電子機器及び分光測定方法
EP3850458A4 (en) 2018-09-14 2022-06-08 Delos Living, LLC AIR CLEANING SYSTEMS AND PROCEDURES
EP3864384A4 (en) 2018-10-08 2022-06-29 Verifood Ltd. Accessories for optical spectrometers
JP7388815B2 (ja) 2018-10-31 2023-11-29 浜松ホトニクス株式会社 分光ユニット及び分光モジュール
DE112019006324T5 (de) 2018-12-21 2021-09-09 Ams Sensors Singapore Pte. Ltd. Lineare temperaturkalibrierungskompensation für spektrometersysteme
WO2020176503A1 (en) 2019-02-26 2020-09-03 Delos Living Llc Method and apparatus for lighting in an office environment
US11898898B2 (en) 2019-03-25 2024-02-13 Delos Living Llc Systems and methods for acoustic monitoring
WO2020197497A1 (en) * 2019-03-27 2020-10-01 Ams Sensors Singapore Pte. Ltd. Self-calibrating spectral sensor modules
CN113646616B (zh) * 2019-03-27 2025-08-05 ams传感器新加坡私人有限公司 自校准光谱传感器模块
RU2720063C1 (ru) * 2019-10-25 2020-04-23 Самсунг Электроникс Ко., Лтд. Спектрометр, основанный на перестраиваемом лазере на чипе, и способ измерения спектра
US12350013B2 (en) 2019-10-25 2025-07-08 Samsung Electronics Co., Ltd. Spectrometer including tunable on-chip laser and spectrum measurement method
JP7562277B2 (ja) * 2020-03-23 2024-10-07 東京エレクトロン株式会社 分光分析システム及び分光分析方法
JP7128315B1 (ja) 2021-03-26 2022-08-30 アンリツ株式会社 光スペクトラムアナライザ及び波長校正制御方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0690085B2 (ja) 1985-07-22 1994-11-14 有限会社光伸光学 干渉フィルタ分光装置
JPH01260330A (ja) * 1988-04-11 1989-10-17 Sharp Corp 色認識装置
JPH0335129A (ja) * 1989-06-30 1991-02-15 Shimadzu Corp 広波長域用光源装置
JPH04305127A (ja) 1991-04-01 1992-10-28 Mitsubishi Rayon Co Ltd 印刷物検査装置
US7538869B2 (en) * 2004-06-30 2009-05-26 Chemimage Corporation Multipoint method for identifying hazardous agents
JP3770326B2 (ja) * 2003-10-01 2006-04-26 セイコーエプソン株式会社 分析装置
US7889348B2 (en) * 2005-10-14 2011-02-15 The General Hospital Corporation Arrangements and methods for facilitating photoluminescence imaging
JP2007139632A (ja) * 2005-11-21 2007-06-07 Olympus Corp 反射率測定機及び反射率測定方法。
JP2007192747A (ja) * 2006-01-20 2007-08-02 Konica Minolta Sensing Inc 分光特性測定装置、シフト量導出方法
FI119830B (fi) * 2006-05-24 2009-03-31 Valtion Teknillinen Spektrometri ja inferferometrinen menetelmä
JP4876943B2 (ja) * 2007-01-31 2012-02-15 コニカミノルタセンシング株式会社 波長変化補正システム及び波長変化補正方法
US7654685B2 (en) * 2007-03-06 2010-02-02 Veeco Instruments, Inc. Variable-wavelength illumination system for interferometry
EP1998155A1 (de) * 2007-05-30 2008-12-03 Roche Diagnostics GmbH Verfahren zur Wellenlängenkalibration eines Spektrometers
JP2009145149A (ja) * 2007-12-13 2009-07-02 Shimadzu Corp 分光光度計
JP2010048640A (ja) 2008-08-21 2010-03-04 National Institute Of Advanced Industrial Science & Technology 絶対分光放射計
JP2010160025A (ja) 2009-01-07 2010-07-22 Shimadzu Corp 分光光度計
JP2010249808A (ja) * 2009-03-24 2010-11-04 Olympus Corp 分光透過率可変素子を備えた分光イメージング装置及び分光イメージング装置における分光透過率可変素子の調整方法
JP2010237097A (ja) * 2009-03-31 2010-10-21 Konica Minolta Sensing Inc 二次元分光測定装置および二次元分光測定方法
US8693002B2 (en) * 2010-07-15 2014-04-08 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Fourier transform spectrometer system

Also Published As

Publication number Publication date
JP2012112839A (ja) 2012-06-14
US8711362B2 (en) 2014-04-29
JP5633334B2 (ja) 2014-12-03
US20120133948A1 (en) 2012-05-31
US9541451B2 (en) 2017-01-10
US20140168636A1 (en) 2014-06-19
CN102478429A (zh) 2012-05-30

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Granted publication date: 20160316