CN102460641A - 用于改进颗粒间接触部位和填充半导体金属氧化物颗粒层中的间隙的热不稳定性前体化合物 - Google Patents

用于改进颗粒间接触部位和填充半导体金属氧化物颗粒层中的间隙的热不稳定性前体化合物 Download PDF

Info

Publication number
CN102460641A
CN102460641A CN201080026778XA CN201080026778A CN102460641A CN 102460641 A CN102460641 A CN 102460641A CN 201080026778X A CN201080026778X A CN 201080026778XA CN 201080026778 A CN201080026778 A CN 201080026778A CN 102460641 A CN102460641 A CN 102460641A
Authority
CN
China
Prior art keywords
metal oxide
semiconducting metal
semiconducting
substrate
porous layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201080026778XA
Other languages
English (en)
Chinese (zh)
Inventor
F·弗莱施哈克尔
I·多姆克
A·卡尔波夫
M·卡斯特勒
V·弗洛卡
L·韦伯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BASF SE
Original Assignee
BASF SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BASF SE filed Critical BASF SE
Publication of CN102460641A publication Critical patent/CN102460641A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/29Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
    • H10P14/2901Materials
    • H10P14/2922Materials being non-crystalline insulating materials, e.g. glass or polymers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/26Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using liquid deposition
    • H10P14/265Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using liquid deposition using solutions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34Deposited materials, e.g. layers
    • H10P14/3402Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3424Deposited materials, e.g. layers characterised by the chemical composition being Group IIB-VIA materials
    • H10P14/3426Oxides
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34Deposited materials, e.g. layers
    • H10P14/3402Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3434Deposited materials, e.g. layers characterised by the chemical composition being oxide semiconductor materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34Deposited materials, e.g. layers
    • H10P14/3438Doping during depositing
    • H10P14/3441Conductivity type
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34Deposited materials, e.g. layers
    • H10P14/3451Structure
    • H10P14/3452Microstructure
    • H10P14/3461Nanoparticles

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
CN201080026778XA 2009-06-16 2010-06-15 用于改进颗粒间接触部位和填充半导体金属氧化物颗粒层中的间隙的热不稳定性前体化合物 Pending CN102460641A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP09162783.6 2009-06-16
EP09162783 2009-06-16
PCT/EP2010/058391 WO2010146053A1 (de) 2009-06-16 2010-06-15 Thermolabile vorläufer-verbindungen zur verbesserung der interpartikulären kontaktstellen und zum auffüllen der zwischenräume in halbleitenden metalloxidpartikelschichten

Publications (1)

Publication Number Publication Date
CN102460641A true CN102460641A (zh) 2012-05-16

Family

ID=42751990

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201080026778XA Pending CN102460641A (zh) 2009-06-16 2010-06-15 用于改进颗粒间接触部位和填充半导体金属氧化物颗粒层中的间隙的热不稳定性前体化合物

Country Status (6)

Country Link
US (1) US9129801B2 (enExample)
EP (1) EP2443650A1 (enExample)
JP (1) JP5634511B2 (enExample)
KR (1) KR20120039638A (enExample)
CN (1) CN102460641A (enExample)
WO (1) WO2010146053A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105934535A (zh) * 2014-01-31 2016-09-07 默克专利股份有限公司 制备uv光检测器的方法
CN105940485A (zh) * 2014-01-31 2016-09-14 默克专利有限公司 半导体膜的制备
CN109074949A (zh) * 2016-04-22 2018-12-21 西门子股份公司 HGü空气扼流线圈及制造方法

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2501472A1 (de) * 2009-11-20 2012-09-26 Basf Se Mehrlagenkatalysator zur herstellung von carbonsäuren und/oder carbonsäureanhydriden mit vanadiumantimonat in wenigstens einer katalysatorlage und verfahren zur herstellung von phthalsäureanhydrid mit niedriger hotspottemperatur
WO2011073044A1 (de) 2009-12-18 2011-06-23 Basf Se Metalloxid-feldeffekttransistoren auf mechanisch flexiblem polymersubstrat mit aus lösung prozessierbarem dielektrikum bei niedrigen temperaturen
US20110230668A1 (en) * 2010-03-19 2011-09-22 Basf Se Catalyst for gas phase oxidations based on low-sulfur and low-calcium titanium dioxide
US8901320B2 (en) 2010-04-13 2014-12-02 Basf Se Process for controlling a gas phase oxidation reactor for preparation of phthalic anhydride
WO2011135514A2 (en) * 2010-04-28 2011-11-03 Basf Se Process for preparing a zinc complex in solution
US9117964B2 (en) 2010-06-29 2015-08-25 Merck Patent Gmbh Preparation of semiconductor films
US8859459B2 (en) 2010-06-30 2014-10-14 Basf Se Multilayer catalyst for preparing phthalic anhydride and process for preparing phthalic anhydride
US9212157B2 (en) 2010-07-30 2015-12-15 Basf Se Catalyst for the oxidation of o-xylene and/or naphthalene to phthalic anhydride
DE102012206234A1 (de) * 2012-04-17 2013-10-17 Evonik Industries Ag Formulierungen enthaltend ammoniakalische Hydroxo-Zink-Verbindungen
JP5936568B2 (ja) 2013-03-08 2016-06-22 富士フイルム株式会社 酸化物半導体薄膜トランジスタ用基板およびその基板を用いた半導体装置
US20160116652A1 (en) * 2013-06-20 2016-04-28 Merck Patent Gmbh Method for controlling the optical properties of uv filter layers
US9214288B2 (en) * 2013-09-05 2015-12-15 National Cheng Kung University Flexible photo-anode of dye-sensitized solar cell and manufacturing method thereof
GB201319263D0 (en) * 2013-10-31 2013-12-18 Montanuniversit T Leoben Method of manufacturing an electrically conductive or semiconductive structure and electronic device comprising the same
CN112090170B (zh) * 2020-09-30 2022-05-06 安徽泰龙锌业有限责任公司 一种紫外光冷燃烧除臭氧化锌滤芯材料的制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040046168A1 (en) * 2002-08-13 2004-03-11 Agfa-Gevaert Porous metal oxide semiconductor spectrally sensitized with metal oxide
US20060284171A1 (en) * 2005-06-16 2006-12-21 Levy David H Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby
CN101138689A (zh) * 2007-07-12 2008-03-12 奇迪电器集团有限公司 用于去除水中氨氮的过滤介质及其制备方法以及由该过滤介质制成的滤芯

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2079664A2 (de) * 2006-10-11 2009-07-22 Basf Se Verfahren zur herstellung oberflächenmodifizierter nanopartikulärer metalloxide, metallhydroxide und/oder metalloxidhydroxide
US7511343B2 (en) * 2006-10-12 2009-03-31 Xerox Corporation Thin film transistor
WO2009013291A2 (en) 2007-07-25 2009-01-29 Basf Se Field effect elements
WO2009016107A1 (en) 2007-07-30 2009-02-05 Basf Se Method for depositing a semiconducting layer from a liquid
JP2009040640A (ja) * 2007-08-09 2009-02-26 Andes Denki Kk 酸化亜鉛薄膜の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040046168A1 (en) * 2002-08-13 2004-03-11 Agfa-Gevaert Porous metal oxide semiconductor spectrally sensitized with metal oxide
US20060284171A1 (en) * 2005-06-16 2006-12-21 Levy David H Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby
CN101138689A (zh) * 2007-07-12 2008-03-12 奇迪电器集团有限公司 用于去除水中氨氮的过滤介质及其制备方法以及由该过滤介质制成的滤芯

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
JÖRG J. SCHNEIDER, ET AL.: "《A Printed and Flexible Field-Effect Transistor Device with Nanoscale Zinc Oxide as Active Semiconductor Material》", 《ADVANCED MATERIALS》 *
M. HILGENDORFF: "From ZnO Colloids to Nanocrystalline Highly", 《J. ELECTROCHEM. SOC.》 *
STEPHEN T. MEYERS,ET AL.: "《Aqueous Inorganic Inks for Low-Temperature Fabrication of》", 《JOURNAL OF AMERICAN CHEMICAL SOCIETY》 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105934535A (zh) * 2014-01-31 2016-09-07 默克专利股份有限公司 制备uv光检测器的方法
CN105940485A (zh) * 2014-01-31 2016-09-14 默克专利有限公司 半导体膜的制备
US10431704B2 (en) 2014-01-31 2019-10-01 Merck Patent Gmbh Method for producing a UV photodetector
CN109074949A (zh) * 2016-04-22 2018-12-21 西门子股份公司 HGü空气扼流线圈及制造方法
CN109074949B (zh) * 2016-04-22 2022-02-18 西门子股份公司 HGü空气扼流线圈及制造方法
US11562853B2 (en) 2016-04-22 2023-01-24 Siemens Energy Global GmbH & Co. KG High voltage direct current energy transmission (HVDCT) air-core inductor, and method for manufacturing the HVDCT air-core inductor

Also Published As

Publication number Publication date
US9129801B2 (en) 2015-09-08
US20120086002A1 (en) 2012-04-12
JP2012530033A (ja) 2012-11-29
WO2010146053A1 (de) 2010-12-23
JP5634511B2 (ja) 2014-12-03
KR20120039638A (ko) 2012-04-25
EP2443650A1 (de) 2012-04-25

Similar Documents

Publication Publication Date Title
US9129801B2 (en) Thermally labile precursor compounds for improving the interparticulate contact sites and for filling the interstices in semiconductive metal oxide particle layers
TWI516635B (zh) 製造半導體層之方法
TWI509102B (zh) 製造含氧化銦之層的方法,藉由該方法製得之含氧化銦之層及其用途
US8546594B2 (en) Indium oxoalkoxides for producing coatings containing indium oxide
CN103201409B (zh) 制备含氧化铟的层的方法
CN102668086B (zh) 位于具有可由溶液低温加工的电介质的机械柔性聚合物衬底上的金属氧化物场效应晶体管
CN102858690B (zh) 制备呈溶液的锌配合物的方法
CN104350179B (zh) 用于制备含氧化铟的层的方法
KR101531606B1 (ko) 자발적 연소 반응이 발생하는 인듐아연 산화물계 반도체 잉크 조성물 및 이를 통해 제조되는 무기 반도체 박막
JP2016534993A (ja) 酸化インジウム含有層を製造するための配合物、当該層の製造法及び当該層の使用
US9969896B2 (en) Indium-zinc-oxide semiconductor ink composition in which a spontaneous combustion reaction occurs, and inorganic semiconductor thin film produced thereby
KR20200030267A (ko) 반도체 금속 기판 제조 방법
WO2014092414A1 (ko) 자발적 연소 반응이 발생하는 인듐아연 산화물계 반도체 잉크 조성물 및 이를 통해 제조되는 무기 반도체 박막

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20120516