CN102432189A - 石英坩埚钡涂层的喷涂设备 - Google Patents
石英坩埚钡涂层的喷涂设备 Download PDFInfo
- Publication number
- CN102432189A CN102432189A CN2011102797433A CN201110279743A CN102432189A CN 102432189 A CN102432189 A CN 102432189A CN 2011102797433 A CN2011102797433 A CN 2011102797433A CN 201110279743 A CN201110279743 A CN 201110279743A CN 102432189 A CN102432189 A CN 102432189A
- Authority
- CN
- China
- Prior art keywords
- quartz crucible
- casing
- fluted disc
- spraying
- rotary table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 87
- 239000010453 quartz Substances 0.000 title claims abstract description 56
- 238000005507 spraying Methods 0.000 title claims abstract description 42
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 title claims abstract description 40
- 229910052788 barium Inorganic materials 0.000 title claims abstract description 36
- 238000000576 coating method Methods 0.000 title claims abstract description 31
- 239000011248 coating agent Substances 0.000 title claims abstract description 30
- 239000007921 spray Substances 0.000 claims abstract description 17
- 238000001467 acupuncture Methods 0.000 claims description 11
- 239000004744 fabric Substances 0.000 claims description 11
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 239000013078 crystal Substances 0.000 abstract description 12
- 230000002035 prolonged effect Effects 0.000 abstract description 3
- 229920002748 Basalt fiber Polymers 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 239000004576 sand Substances 0.000 description 10
- 239000000377 silicon dioxide Substances 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 5
- 239000001913 cellulose Substances 0.000 description 4
- 229920002678 cellulose Polymers 0.000 description 4
- 230000006872 improvement Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000012943 hotmelt Substances 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052916 barium silicate Inorganic materials 0.000 description 1
- HMOQPOVBDRFNIU-UHFFFAOYSA-N barium(2+);dioxido(oxo)silane Chemical compound [Ba+2].[O-][Si]([O-])=O HMOQPOVBDRFNIU-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Glass Melting And Manufacturing (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110279743.3A CN102432189B (zh) | 2011-09-20 | 2011-09-20 | 石英坩埚钡涂层的喷涂设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110279743.3A CN102432189B (zh) | 2011-09-20 | 2011-09-20 | 石英坩埚钡涂层的喷涂设备 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102432189A true CN102432189A (zh) | 2012-05-02 |
CN102432189B CN102432189B (zh) | 2016-06-01 |
Family
ID=45980587
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110279743.3A Expired - Fee Related CN102432189B (zh) | 2011-09-20 | 2011-09-20 | 石英坩埚钡涂层的喷涂设备 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN102432189B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109608052A (zh) * | 2018-12-25 | 2019-04-12 | 宁波宝斯达坩埚保温制品有限公司 | 一种石英坩埚表面涂覆装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4565711A (en) * | 1984-06-29 | 1986-01-21 | Wedtech Corp. | Method of and apparatus for the coating of quartz crucibles with protective layers |
CN1205250A (zh) * | 1997-07-16 | 1999-01-20 | 青海铝厂 | 可升降搅拌式涂石墨机 |
JP2003292329A (ja) * | 2002-03-29 | 2003-10-15 | Japan Siper Quarts Corp | Cvd法による石英ルツボ表面のバリウム含有層の形成方法 |
CN201346511Y (zh) * | 2009-06-05 | 2009-11-18 | 锦州佑鑫电子材料有限公司 | 石英坩埚涂层机 |
CN201525879U (zh) * | 2009-08-19 | 2010-07-14 | 河南中光学集团有限公司 | 一种大直径坩埚旋转装置 |
CN201648235U (zh) * | 2010-03-19 | 2010-11-24 | 常熟华融太阳能新型材料有限公司 | 太阳能石英坩埚的自动喷涂装置 |
-
2011
- 2011-09-20 CN CN201110279743.3A patent/CN102432189B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4565711A (en) * | 1984-06-29 | 1986-01-21 | Wedtech Corp. | Method of and apparatus for the coating of quartz crucibles with protective layers |
CN1205250A (zh) * | 1997-07-16 | 1999-01-20 | 青海铝厂 | 可升降搅拌式涂石墨机 |
JP2003292329A (ja) * | 2002-03-29 | 2003-10-15 | Japan Siper Quarts Corp | Cvd法による石英ルツボ表面のバリウム含有層の形成方法 |
CN201346511Y (zh) * | 2009-06-05 | 2009-11-18 | 锦州佑鑫电子材料有限公司 | 石英坩埚涂层机 |
CN201525879U (zh) * | 2009-08-19 | 2010-07-14 | 河南中光学集团有限公司 | 一种大直径坩埚旋转装置 |
CN201648235U (zh) * | 2010-03-19 | 2010-11-24 | 常熟华融太阳能新型材料有限公司 | 太阳能石英坩埚的自动喷涂装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109608052A (zh) * | 2018-12-25 | 2019-04-12 | 宁波宝斯达坩埚保温制品有限公司 | 一种石英坩埚表面涂覆装置 |
CN109608052B (zh) * | 2018-12-25 | 2021-12-03 | 宁波宝斯达坩埚保温制品有限公司 | 一种石英坩埚表面涂覆装置 |
Also Published As
Publication number | Publication date |
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CN102432189B (zh) | 2016-06-01 |
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Effective date of registration: 20160921 Address after: Concentrated zone B industry in Jingyan County 613100 Sichuan city of Leshan Province Patentee after: Leshan Zeerhui Technology Co., Ltd. Address before: Kyushu No. 13 building, 471000 Henan province Luoyang Xigong Road 71 room 1303 Patentee before: Shen Fumao |
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Addressee: Shen Fumao Document name: payment instructions |
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Addressee: Shen Fumao Document name: Notice of termination of patent right |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160601 Termination date: 20200920 |