CN102432189B - 石英坩埚钡涂层的喷涂设备 - Google Patents
石英坩埚钡涂层的喷涂设备 Download PDFInfo
- Publication number
- CN102432189B CN102432189B CN201110279743.3A CN201110279743A CN102432189B CN 102432189 B CN102432189 B CN 102432189B CN 201110279743 A CN201110279743 A CN 201110279743A CN 102432189 B CN102432189 B CN 102432189B
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- China
- Prior art keywords
- fluted disc
- casing
- spraying
- barium
- axle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 101
- 238000005507 spraying Methods 0.000 title claims abstract description 43
- 229910052788 barium Inorganic materials 0.000 title claims abstract description 42
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 title claims abstract description 42
- 239000011248 coating agent Substances 0.000 title claims abstract description 31
- 238000000576 coating method Methods 0.000 title claims abstract description 31
- 239000010453 quartz Substances 0.000 title claims abstract description 24
- 239000007921 spray Substances 0.000 claims abstract description 15
- 238000001467 acupuncture Methods 0.000 claims abstract description 12
- 239000004744 fabric Substances 0.000 claims abstract description 12
- 210000003437 trachea Anatomy 0.000 claims abstract description 9
- 239000000377 silicon dioxide Substances 0.000 abstract description 33
- 239000013078 crystal Substances 0.000 abstract description 5
- 239000006004 Quartz sand Substances 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- 230000006872 improvement Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000012943 hotmelt Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000003708 ampul Substances 0.000 description 1
- 229910052916 barium silicate Inorganic materials 0.000 description 1
- HMOQPOVBDRFNIU-UHFFFAOYSA-N barium(2+);dioxido(oxo)silane Chemical compound [Ba+2].[O-][Si]([O-])=O HMOQPOVBDRFNIU-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Glass Melting And Manufacturing (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110279743.3A CN102432189B (zh) | 2011-09-20 | 2011-09-20 | 石英坩埚钡涂层的喷涂设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110279743.3A CN102432189B (zh) | 2011-09-20 | 2011-09-20 | 石英坩埚钡涂层的喷涂设备 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102432189A CN102432189A (zh) | 2012-05-02 |
CN102432189B true CN102432189B (zh) | 2016-06-01 |
Family
ID=45980587
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110279743.3A Expired - Fee Related CN102432189B (zh) | 2011-09-20 | 2011-09-20 | 石英坩埚钡涂层的喷涂设备 |
Country Status (1)
Country | Link |
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CN (1) | CN102432189B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109608052B (zh) * | 2018-12-25 | 2021-12-03 | 宁波宝斯达坩埚保温制品有限公司 | 一种石英坩埚表面涂覆装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4565711A (en) * | 1984-06-29 | 1986-01-21 | Wedtech Corp. | Method of and apparatus for the coating of quartz crucibles with protective layers |
CN1205250A (zh) * | 1997-07-16 | 1999-01-20 | 青海铝厂 | 可升降搅拌式涂石墨机 |
CN201346511Y (zh) * | 2009-06-05 | 2009-11-18 | 锦州佑鑫电子材料有限公司 | 石英坩埚涂层机 |
CN201525879U (zh) * | 2009-08-19 | 2010-07-14 | 河南中光学集团有限公司 | 一种大直径坩埚旋转装置 |
CN201648235U (zh) * | 2010-03-19 | 2010-11-24 | 常熟华融太阳能新型材料有限公司 | 太阳能石英坩埚的自动喷涂装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4096331B2 (ja) * | 2002-03-29 | 2008-06-04 | ジャパンスーパークォーツ株式会社 | Cvd法による石英ルツボ表面のバリウム含有層の形成方法 |
-
2011
- 2011-09-20 CN CN201110279743.3A patent/CN102432189B/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4565711A (en) * | 1984-06-29 | 1986-01-21 | Wedtech Corp. | Method of and apparatus for the coating of quartz crucibles with protective layers |
CN1205250A (zh) * | 1997-07-16 | 1999-01-20 | 青海铝厂 | 可升降搅拌式涂石墨机 |
CN201346511Y (zh) * | 2009-06-05 | 2009-11-18 | 锦州佑鑫电子材料有限公司 | 石英坩埚涂层机 |
CN201525879U (zh) * | 2009-08-19 | 2010-07-14 | 河南中光学集团有限公司 | 一种大直径坩埚旋转装置 |
CN201648235U (zh) * | 2010-03-19 | 2010-11-24 | 常熟华融太阳能新型材料有限公司 | 太阳能石英坩埚的自动喷涂装置 |
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Publication number | Publication date |
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CN102432189A (zh) | 2012-05-02 |
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Effective date of registration: 20160921 Address after: Concentrated zone B industry in Jingyan County 613100 Sichuan city of Leshan Province Patentee after: Leshan Zeerhui Technology Co., Ltd. Address before: Kyushu No. 13 building, 471000 Henan province Luoyang Xigong Road 71 room 1303 Patentee before: Shen Fumao |
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