CN102899724A - 一种消除蓝宝石晶体生长过程中气泡的方法 - Google Patents
一种消除蓝宝石晶体生长过程中气泡的方法 Download PDFInfo
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CN201210339878.9A CN102899724B (zh) | 2011-09-15 | 2012-09-13 | 一种消除蓝宝石晶体生长过程中气泡的方法 |
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CN201210339878.9A CN102899724B (zh) | 2011-09-15 | 2012-09-13 | 一种消除蓝宝石晶体生长过程中气泡的方法 |
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CN102899724A true CN102899724A (zh) | 2013-01-30 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105483817A (zh) * | 2015-12-09 | 2016-04-13 | 上海超硅半导体有限公司 | 单晶硅生长超声波控氧技术 |
CN105887198A (zh) * | 2016-06-16 | 2016-08-24 | 江苏中电振华晶体技术有限公司 | 一种清除蓝宝石晶体熔体料中气泡装置及清除方法 |
US20200340898A1 (en) * | 2017-12-04 | 2020-10-29 | Shimadzu Corporation | Fine bubble elimination method and fine bubble elimination device, and bubble size distribution measuring method and bubble size distribution measuring device |
CN114371223A (zh) * | 2022-03-16 | 2022-04-19 | 浙江大学杭州国际科创中心 | 一种碳化硅晶体生长检测装置、方法及碳化硅晶体生长炉 |
CN114411235A (zh) * | 2022-02-18 | 2022-04-29 | 闽都创新实验室 | 一种晶体生长气泡消除装置及消除晶体生长气泡的方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101004408A (zh) * | 2007-01-25 | 2007-07-25 | 上海交通大学 | 基质辅助激光解吸质谱样品功能靶盘制备方法 |
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Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101004408A (zh) * | 2007-01-25 | 2007-07-25 | 上海交通大学 | 基质辅助激光解吸质谱样品功能靶盘制备方法 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105483817A (zh) * | 2015-12-09 | 2016-04-13 | 上海超硅半导体有限公司 | 单晶硅生长超声波控氧技术 |
CN105483817B (zh) * | 2015-12-09 | 2019-04-02 | 上海超硅半导体有限公司 | 单晶硅生长超声波控氧技术 |
CN105887198A (zh) * | 2016-06-16 | 2016-08-24 | 江苏中电振华晶体技术有限公司 | 一种清除蓝宝石晶体熔体料中气泡装置及清除方法 |
CN105887198B (zh) * | 2016-06-16 | 2019-01-11 | 江苏振华新云电子有限公司 | 一种清除蓝宝石晶体熔体料中气泡装置及清除方法 |
US20200340898A1 (en) * | 2017-12-04 | 2020-10-29 | Shimadzu Corporation | Fine bubble elimination method and fine bubble elimination device, and bubble size distribution measuring method and bubble size distribution measuring device |
US11898949B2 (en) * | 2017-12-04 | 2024-02-13 | Shimadzu Corporation | Fine bubble elimination method and fine bubble elimination device, and bubble size distribution measuring method and bubble size distribution measuring device |
CN114411235A (zh) * | 2022-02-18 | 2022-04-29 | 闽都创新实验室 | 一种晶体生长气泡消除装置及消除晶体生长气泡的方法 |
CN114411235B (zh) * | 2022-02-18 | 2023-10-03 | 闽都创新实验室 | 一种晶体生长气泡消除装置及消除晶体生长气泡的方法 |
CN114371223A (zh) * | 2022-03-16 | 2022-04-19 | 浙江大学杭州国际科创中心 | 一种碳化硅晶体生长检测装置、方法及碳化硅晶体生长炉 |
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