CN102391788A - 氮化铝基片的快速超精密抛光浆料及抛光清洗加工方法 - Google Patents
氮化铝基片的快速超精密抛光浆料及抛光清洗加工方法 Download PDFInfo
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- CN102391788A CN102391788A CN2011102422894A CN201110242289A CN102391788A CN 102391788 A CN102391788 A CN 102391788A CN 2011102422894 A CN2011102422894 A CN 2011102422894A CN 201110242289 A CN201110242289 A CN 201110242289A CN 102391788 A CN102391788 A CN 102391788A
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CN201110242289.4A CN102391788B (zh) | 2011-08-23 | 2011-08-23 | 氮化铝基片的快速超精密抛光浆料及抛光清洗加工方法 |
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CN201110242289.4A CN102391788B (zh) | 2011-08-23 | 2011-08-23 | 氮化铝基片的快速超精密抛光浆料及抛光清洗加工方法 |
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CN102391788A true CN102391788A (zh) | 2012-03-28 |
CN102391788B CN102391788B (zh) | 2014-11-26 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106019418A (zh) * | 2016-05-13 | 2016-10-12 | 郑海东 | 一种树脂眼镜片的加工方法 |
CN108789163A (zh) * | 2018-05-30 | 2018-11-13 | 郑州合晶硅材料有限公司 | 一种硅片背面抛光用装置及抛光方法 |
CN112521866A (zh) * | 2020-12-16 | 2021-03-19 | 北京国瑞升科技股份有限公司 | 一种氮化铝陶瓷基板用抛光液及其制备方法和抛光方法 |
CN112658977A (zh) * | 2020-12-17 | 2021-04-16 | 江苏集萃精凯高端装备技术有限公司 | 片状氧化镥激光晶体化学机械抛光方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20010017007A1 (en) * | 2000-02-03 | 2001-08-30 | Toshiya Hagihara | Polishing composition |
WO2004100242A1 (ja) * | 2003-05-09 | 2004-11-18 | Sanyo Chemical Industries, Ltd. | Cmpプロセス用研磨液及び研磨方法 |
CN1857865A (zh) * | 2006-05-31 | 2006-11-08 | 天津晶岭微电子材料有限公司 | 蓝宝石衬底材料表面粗糙度的控制方法 |
CN1864926A (zh) * | 2006-06-09 | 2006-11-22 | 河北工业大学 | 硅单晶衬底材料表面粗糙度的控制方法 |
US20070256367A1 (en) * | 2004-08-30 | 2007-11-08 | Showa Denko K.K. | Polishing Slurry, Production Method of Glass Substrate for Information Recording Medium and Production Method of Information Recording Medium |
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2011
- 2011-08-23 CN CN201110242289.4A patent/CN102391788B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20010017007A1 (en) * | 2000-02-03 | 2001-08-30 | Toshiya Hagihara | Polishing composition |
WO2004100242A1 (ja) * | 2003-05-09 | 2004-11-18 | Sanyo Chemical Industries, Ltd. | Cmpプロセス用研磨液及び研磨方法 |
US20070256367A1 (en) * | 2004-08-30 | 2007-11-08 | Showa Denko K.K. | Polishing Slurry, Production Method of Glass Substrate for Information Recording Medium and Production Method of Information Recording Medium |
CN1857865A (zh) * | 2006-05-31 | 2006-11-08 | 天津晶岭微电子材料有限公司 | 蓝宝石衬底材料表面粗糙度的控制方法 |
CN1864926A (zh) * | 2006-06-09 | 2006-11-22 | 河北工业大学 | 硅单晶衬底材料表面粗糙度的控制方法 |
Non-Patent Citations (1)
Title |
---|
刘玉岭等: "《超大规模集成电路衬底材料性能及加工测试技术工程》", 31 August 2002, 冶金工业出版社 * |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106019418A (zh) * | 2016-05-13 | 2016-10-12 | 郑海东 | 一种树脂眼镜片的加工方法 |
CN106019418B (zh) * | 2016-05-13 | 2019-10-25 | 郑海东 | 一种树脂眼镜片的加工方法 |
CN108789163A (zh) * | 2018-05-30 | 2018-11-13 | 郑州合晶硅材料有限公司 | 一种硅片背面抛光用装置及抛光方法 |
CN112521866A (zh) * | 2020-12-16 | 2021-03-19 | 北京国瑞升科技股份有限公司 | 一种氮化铝陶瓷基板用抛光液及其制备方法和抛光方法 |
CN112658977A (zh) * | 2020-12-17 | 2021-04-16 | 江苏集萃精凯高端装备技术有限公司 | 片状氧化镥激光晶体化学机械抛光方法 |
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CN102391788B (zh) | 2014-11-26 |
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Address after: 226600 fine chemical garden No. 11, Haian Economic Development Zone, Nantong, Jiangsu Applicant after: JIANGSU TIANHENG NANO SCIENCE AND TECHNOLOGY Co.,Ltd. Address before: 226600 fine chemical garden No. 11, Haian Economic Development Zone, Nantong, Jiangsu Applicant before: JIANGSU TIANHENG NANO SCIENCE AND TECHNOLOGY Co.,Ltd. Address after: 226600 fine chemical garden No. 11, Haian Economic Development Zone, Nantong, Jiangsu Applicant after: JIANGSU TIANHENG NANO SCIENCE AND TECHNOLOGY Co.,Ltd. Address before: 226600 fine chemical garden No. 11, Haian Economic Development Zone, Nantong, Jiangsu Applicant before: Nantong Haixun Tianheng Nanometer Technology Co.,Ltd. |
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Effective date of registration: 20160823 Address after: 226600 Nantong, Haian, east of the town of East China Sea Road (East), No. 18, No. Patentee after: JIANGSU HAIXUN INDUSTRY &COMMERCE GROUP Co.,Ltd. Address before: 226600 fine chemical garden No. 11, Haian Economic Development Zone, Nantong, Jiangsu Patentee before: JIANGSU TIANHENG NANO SCIENCE AND TECHNOLOGY Co.,Ltd. |