CN102386201B - 发光装置及其制造方法 - Google Patents

发光装置及其制造方法 Download PDF

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Publication number
CN102386201B
CN102386201B CN201110262068.3A CN201110262068A CN102386201B CN 102386201 B CN102386201 B CN 102386201B CN 201110262068 A CN201110262068 A CN 201110262068A CN 102386201 B CN102386201 B CN 102386201B
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China
Prior art keywords
light
semiconductor layer
carrier
emitting device
layer
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CN201110262068.3A
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Chinese (zh)
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CN102386201A (zh
Inventor
陈昭兴
钟健凯
刘欣茂
姚久琳
黄建富
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Epistar Corp
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Epistar Corp
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/10Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/813Bodies having a plurality of light-emitting regions, e.g. multi-junction LEDs or light-emitting devices having photoluminescent regions within the bodies
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/011Manufacture or treatment of bodies, e.g. forming semiconductor layers
    • H10H20/018Bonding of wafers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/819Bodies characterised by their shape, e.g. curved or truncated substrates
    • H10H20/82Roughened surfaces, e.g. at the interface between epitaxial layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/83Electrodes
    • H10H20/831Electrodes characterised by their shape
    • H10H20/8316Multi-layer electrodes comprising at least one discontinuous layer
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/10Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
    • H10H29/14Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00 comprising multiple light-emitting semiconductor components
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/83Electrodes
    • H10H20/831Electrodes characterised by their shape
    • H10H20/8312Electrodes characterised by their shape extending at least partially through the bodies
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/84Coatings, e.g. passivation layers or antireflective coatings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/857Interconnections, e.g. lead-frames, bond wires or solder balls

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  • Led Devices (AREA)
  • Led Device Packages (AREA)
CN201110262068.3A 2010-09-06 2011-09-06 发光装置及其制造方法 Active CN102386201B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US38025810P 2010-09-06 2010-09-06
US61/380,258 2010-09-06

Publications (2)

Publication Number Publication Date
CN102386201A CN102386201A (zh) 2012-03-21
CN102386201B true CN102386201B (zh) 2016-07-06

Family

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CN201110262068.3A Active CN102386201B (zh) 2010-09-06 2011-09-06 发光装置及其制造方法

Country Status (6)

Country Link
US (2) US8592827B2 (enExample)
JP (1) JP6038436B2 (enExample)
KR (1) KR20120025433A (enExample)
CN (1) CN102386201B (enExample)
DE (1) DE102011053274B4 (enExample)
TW (2) TWI557934B (enExample)

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TWI446578B (zh) * 2010-09-23 2014-07-21 Epistar Corp 發光元件及其製法
US8241932B1 (en) * 2011-03-17 2012-08-14 Tsmc Solid State Lighting Ltd. Methods of fabricating light emitting diode packages
TWI488295B (zh) * 2012-05-25 2015-06-11 Phostek Inc 發光二極體陣列與其形成方法
TWI466328B (zh) * 2012-06-11 2014-12-21 Ritedia Corp 覆晶式發光二極體及其製法與應用
JP2014096455A (ja) * 2012-11-08 2014-05-22 Stanley Electric Co Ltd 半導体発光素子アレイおよび車両用灯具
US20140151630A1 (en) * 2012-12-04 2014-06-05 Feng-Hsu Fan Protection for the epitaxial structure of metal devices
TWI499091B (zh) * 2012-12-18 2015-09-01 新世紀光電股份有限公司 發光裝置
DE102013103079A1 (de) * 2013-03-26 2014-10-02 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip und Verfahren zur Herstellung eines optoelektronischen Halbleiterchips
KR20140140399A (ko) * 2013-05-29 2014-12-09 서울바이오시스 주식회사 복수개의 발광 요소들을 갖는 발광다이오드 및 그것을 제조하는 방법
DE112013007192B4 (de) * 2013-06-26 2024-05-23 Epistar Corporation Lichtemittierende Vorrichtung
TWI566427B (zh) * 2013-07-05 2017-01-11 晶元光電股份有限公司 發光元件及其製造方法
CN105324857B (zh) * 2013-07-05 2019-01-11 晶元光电股份有限公司 发光元件的制造方法
DE102013107531A1 (de) * 2013-07-16 2015-01-22 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip
KR101767078B1 (ko) 2013-07-29 2017-08-10 에피스타 코포레이션 반도체 소자를 선택적으로 전이하는 방법
TWI603390B (zh) * 2013-07-29 2017-10-21 晶元光電股份有限公司 選擇性轉移半導體元件的方法
US11329195B2 (en) 2013-08-27 2022-05-10 Epistar Corporation Semiconductor light-emitting device
US9461209B2 (en) * 2013-11-27 2016-10-04 Epistar Corporation Semiconductor light-emitting device
CN110047865B (zh) * 2013-09-03 2024-02-23 晶元光电股份有限公司 具有多个发光结构的发光元件
KR102378952B1 (ko) * 2015-08-27 2022-03-25 쑤저우 레킨 세미컨덕터 컴퍼니 리미티드 발광소자 및 이를 포함하는 발광소자 패키지
CN106784276B (zh) * 2016-11-30 2019-04-12 陕西科技大学 一种金刚石热沉GaN基异侧电极LED制作方法
US20200243736A1 (en) * 2017-01-12 2020-07-30 Enkris Semiconductor, Inc. Semiconductor device and fabrication method for the same
WO2018160858A1 (en) * 2017-03-01 2018-09-07 Phase Sensitive Innovations, Inc. Diamond-backed photodiodes, diamond-sandwiched photodiodes, photodiode systems and related methods of manufacture
CN109768134A (zh) * 2019-01-28 2019-05-17 华引芯(武汉)科技有限公司 一种发光高效率反转垂直结构高压芯片及其制备方法
CN112687780B (zh) * 2020-12-29 2022-02-11 厦门三安光电有限公司 一种高压发光二极管芯片

Citations (4)

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KR20070113652A (ko) * 2006-05-25 2007-11-29 한국광기술원 웨이퍼 본딩 공정을 이용한 실리콘 기반 발광다이오드제조방법
WO2008031280A1 (fr) * 2006-09-13 2008-03-20 Helio Optoelectronics Corporation Structure de diode électroluminescente
TW200843149A (en) * 2006-12-29 2008-11-01 Semi Photonics Co Ltd Light emitting diodes (LEDs) with improved light extraction by roughening
WO2010072191A1 (de) * 2008-12-23 2010-07-01 Osram Opto Semiconductors Gmbh Optoelektronische projektionsvorrichtung

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JP3717196B2 (ja) * 1994-07-19 2005-11-16 豊田合成株式会社 発光素子
JP2005322722A (ja) * 2004-05-07 2005-11-17 Korai Kagi Kofun Yugenkoshi 発光ダイオード
US7221044B2 (en) * 2005-01-21 2007-05-22 Ac Led Lighting, L.L.C. Heterogeneous integrated high voltage DC/AC light emitter
CN1835253A (zh) * 2005-03-17 2006-09-20 日立电线株式会社 发光二极管阵列
KR100974923B1 (ko) * 2007-03-19 2010-08-10 서울옵토디바이스주식회사 발광 다이오드
DE102008011848A1 (de) * 2008-02-29 2009-09-03 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterkörper und Verfahren zur Herstellung eines solchen
KR20100028412A (ko) * 2008-09-04 2010-03-12 삼성전자주식회사 나노 막대를 이용한 발광 다이오드 및 그 제조 방법
JP5123269B2 (ja) * 2008-09-30 2013-01-23 ソウル オプト デバイス カンパニー リミテッド 発光素子及びその製造方法
KR100986570B1 (ko) * 2009-08-31 2010-10-07 엘지이노텍 주식회사 반도체 발광소자 및 그 제조방법

Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
KR20070113652A (ko) * 2006-05-25 2007-11-29 한국광기술원 웨이퍼 본딩 공정을 이용한 실리콘 기반 발광다이오드제조방법
WO2008031280A1 (fr) * 2006-09-13 2008-03-20 Helio Optoelectronics Corporation Structure de diode électroluminescente
TW200843149A (en) * 2006-12-29 2008-11-01 Semi Photonics Co Ltd Light emitting diodes (LEDs) with improved light extraction by roughening
WO2010072191A1 (de) * 2008-12-23 2010-07-01 Osram Opto Semiconductors Gmbh Optoelektronische projektionsvorrichtung

Also Published As

Publication number Publication date
JP6038436B2 (ja) 2016-12-07
TW201212280A (en) 2012-03-16
US8847248B2 (en) 2014-09-30
TWI539622B (zh) 2016-06-21
TWI557934B (zh) 2016-11-11
TW201212279A (en) 2012-03-16
KR20120025433A (ko) 2012-03-15
US8592827B2 (en) 2013-11-26
JP2012060115A (ja) 2012-03-22
DE102011053274B4 (de) 2021-03-18
CN102386201A (zh) 2012-03-21
DE102011053274A1 (de) 2012-03-08
US20120056212A1 (en) 2012-03-08
US20140077238A1 (en) 2014-03-20

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