CN102337513B - 石墨烯透明导电薄膜的制备方法 - Google Patents
石墨烯透明导电薄膜的制备方法 Download PDFInfo
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- CN102337513B CN102337513B CN 201110336836 CN201110336836A CN102337513B CN 102337513 B CN102337513 B CN 102337513B CN 201110336836 CN201110336836 CN 201110336836 CN 201110336836 A CN201110336836 A CN 201110336836A CN 102337513 B CN102337513 B CN 102337513B
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- graphene
- transparent
- conductive film
- hydrogen
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 46
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 44
- 238000002360 preparation method Methods 0.000 title claims abstract description 13
- 238000000034 method Methods 0.000 claims abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims abstract description 9
- 239000002184 metal Substances 0.000 claims abstract description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 78
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 48
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 48
- 239000007789 gas Substances 0.000 claims description 40
- 239000010410 layer Substances 0.000 claims description 38
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 32
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 32
- 239000001257 hydrogen Substances 0.000 claims description 32
- 229910052739 hydrogen Inorganic materials 0.000 claims description 32
- 239000000377 silicon dioxide Substances 0.000 claims description 32
- 239000000853 adhesive Substances 0.000 claims description 24
- 230000001070 adhesive effect Effects 0.000 claims description 24
- 229910052786 argon Inorganic materials 0.000 claims description 24
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 16
- 239000008367 deionised water Substances 0.000 claims description 16
- 229910052757 nitrogen Inorganic materials 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 15
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 14
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 14
- 229920003023 plastic Polymers 0.000 claims description 14
- 239000002985 plastic film Substances 0.000 claims description 14
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 8
- 239000012790 adhesive layer Substances 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 8
- 229910052759 nickel Inorganic materials 0.000 claims description 8
- 229910000570 Cupronickel Inorganic materials 0.000 claims description 7
- 229910000640 Fe alloy Inorganic materials 0.000 claims description 7
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims description 7
- IYRDVAUFQZOLSB-UHFFFAOYSA-N copper iron Chemical compound [Fe].[Cu] IYRDVAUFQZOLSB-UHFFFAOYSA-N 0.000 claims description 7
- 229910052742 iron Inorganic materials 0.000 claims description 7
- 239000003822 epoxy resin Substances 0.000 claims description 5
- 229920000647 polyepoxide Polymers 0.000 claims description 5
- 239000004925 Acrylic resin Substances 0.000 claims description 4
- 229920002803 thermoplastic polyurethane Polymers 0.000 claims description 3
- 239000003054 catalyst Substances 0.000 abstract description 5
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 4
- 229910052723 transition metal Inorganic materials 0.000 abstract description 4
- 150000003624 transition metals Chemical class 0.000 abstract description 4
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 abstract description 2
- 239000011159 matrix material Substances 0.000 abstract 3
- 239000011230 binding agent Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 229920000642 polymer Polymers 0.000 abstract 1
- 239000000075 oxide glass Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052809 inorganic oxide Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 150000003839 salts Chemical group 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- Non-Insulated Conductors (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 201110336836 CN102337513B (zh) | 2011-10-31 | 2011-10-31 | 石墨烯透明导电薄膜的制备方法 |
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CN 201110336836 CN102337513B (zh) | 2011-10-31 | 2011-10-31 | 石墨烯透明导电薄膜的制备方法 |
Publications (2)
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CN102337513A CN102337513A (zh) | 2012-02-01 |
CN102337513B true CN102337513B (zh) | 2012-12-05 |
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CN 201110336836 Expired - Fee Related CN102337513B (zh) | 2011-10-31 | 2011-10-31 | 石墨烯透明导电薄膜的制备方法 |
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Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102627003A (zh) * | 2012-02-13 | 2012-08-08 | 京东方科技集团股份有限公司 | 一种静电保护膜、显示装置和静电保护膜的制备方法 |
CN102543476A (zh) * | 2012-02-24 | 2012-07-04 | 电子科技大学 | 一种染料敏化太阳能电池用石墨烯对电极及其制备方法 |
GB201205801D0 (en) | 2012-03-30 | 2012-05-16 | Isis Innovation | Process |
CN104080734A (zh) * | 2012-03-31 | 2014-10-01 | 海洋王照明科技股份有限公司 | 一种石墨烯纸的制备方法 |
CN103420360A (zh) * | 2012-05-16 | 2013-12-04 | 海洋王照明科技股份有限公司 | 石墨烯的制备方法 |
TW201401276A (zh) * | 2012-06-26 | 2014-01-01 | Ritedia Corp | 磁性儲存單元及其製備方法 |
CN102883486B (zh) * | 2012-09-28 | 2014-09-24 | 江苏物联网研究发展中心 | 一种基于石墨烯的透明电加热薄膜及其制备方法 |
KR102015912B1 (ko) | 2012-11-14 | 2019-08-29 | 엘지전자 주식회사 | 그래핀의 제조 방법 및 그 그래핀 |
CN103071925A (zh) * | 2012-12-28 | 2013-05-01 | 苏州德龙激光股份有限公司 | 用于刻蚀触摸屏上以石墨烯为导电层的装置及其方法 |
CN103064574A (zh) * | 2013-01-14 | 2013-04-24 | 无锡力合光电石墨烯应用研发中心有限公司 | 一种石墨烯电容式触摸屏金属电极的精细图案化方法 |
CN103235671A (zh) * | 2013-04-09 | 2013-08-07 | 无锡力合光电石墨烯应用研发中心有限公司 | 一种多点触控石墨烯电容触摸屏及其制备方法 |
CN103288077B (zh) * | 2013-06-28 | 2015-04-29 | 重庆墨希科技有限公司 | 一种快速无损转移石墨烯的方法 |
CN103358613B (zh) * | 2013-07-22 | 2016-05-11 | 常州二维碳素科技股份有限公司 | 制备高透过率石墨烯的方法 |
CN103569943B (zh) * | 2013-11-05 | 2016-03-30 | 无锡英普林纳米科技有限公司 | 一种耐摩擦的铂/石墨烯复合结构及其制备方法 |
CN103864062B (zh) * | 2014-01-27 | 2015-07-01 | 沈阳大学 | 一种石墨烯透明导电薄膜的制备方法 |
CN104495806B (zh) * | 2014-11-28 | 2017-01-11 | 中国科学院金属研究所 | 一种通过调控结合力转移大面积石墨烯的方法 |
CN105274491A (zh) * | 2015-11-12 | 2016-01-27 | 杭州电子科技大学 | 一种石墨烯-氮化硼异质相复合薄膜材料的制备方法 |
CN105887043A (zh) * | 2016-04-29 | 2016-08-24 | 杭州电子科技大学 | 一种碳氧化硅柔性纳米薄膜的制备方法 |
CN106087038A (zh) * | 2016-05-31 | 2016-11-09 | 湖北航天化学技术研究所 | 一种石墨烯/金属或合金复合材料的直接制备方法 |
CN106241785A (zh) * | 2016-07-30 | 2016-12-21 | 杨超坤 | 一种石墨烯透明薄膜的制备和转移方法 |
CN107364933A (zh) * | 2017-07-18 | 2017-11-21 | 王林双 | 石墨烯复合电极的制备工艺以及石墨烯复合电极及其应用 |
CN113057636B (zh) * | 2021-03-01 | 2023-07-04 | 上海英科心电图医疗产品有限公司 | 一种抗干扰石墨烯心电电极及其制备方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5390776B2 (ja) * | 2008-02-12 | 2014-01-15 | 株式会社カネカ | 透明導電膜の製造方法およびそれに従って製造される透明導電膜 |
JP5097172B2 (ja) * | 2009-06-23 | 2012-12-12 | 株式会社沖データ | グラフェン層の剥離方法、グラフェンウエハの製造方法、及び、グラフェン素子の製造方法 |
CN101760724B (zh) * | 2010-01-26 | 2011-10-12 | 电子科技大学 | 超大面积高质量石墨烯薄膜电极的制备方法 |
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Owner name: HAIAN MINGHUI METAL MATERIAL CO., LTD. Free format text: FORMER OWNER: HANGZHOU ELECTRONIC SCIENCE AND TECHNOLOGY UNIV Effective date: 20131025 |
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Free format text: CORRECT: ADDRESS; FROM: 310018 HANGZHOU, ZHEJIANG PROVINCE TO: 226600 NANTONG, JIANGSU PROVINCE |
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Effective date of registration: 20131025 Address after: 226600, Li County, Haian County, Jiangsu Province, Li West Village, 26 groups Patentee after: HAIAN MINGHUI METAL MATERIAL Co.,Ltd. Address before: Hangzhou City, Zhejiang province 310018 Xiasha Higher Education Park No. 2 street Patentee before: HANGZHOU DIANZI University |
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