CN102337086A - 氟氧化镧铈稀土抛光液及其制备方法 - Google Patents
氟氧化镧铈稀土抛光液及其制备方法 Download PDFInfo
- Publication number
- CN102337086A CN102337086A CN201110228791XA CN201110228791A CN102337086A CN 102337086 A CN102337086 A CN 102337086A CN 201110228791X A CN201110228791X A CN 201110228791XA CN 201110228791 A CN201110228791 A CN 201110228791A CN 102337086 A CN102337086 A CN 102337086A
- Authority
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- Prior art keywords
- cerium
- fluorine
- polishing
- lanthanum
- salt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000005498 polishing Methods 0.000 title claims abstract description 102
- 229910052761 rare earth metal Inorganic materials 0.000 title claims abstract description 26
- -1 Lanthana cerium oxyfluoride rare earth Chemical class 0.000 title claims abstract description 24
- 238000002360 preparation method Methods 0.000 title claims abstract description 19
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum oxide Inorganic materials [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 title abstract 10
- 239000007788 liquid Substances 0.000 title abstract 9
- 229910052684 Cerium Inorganic materials 0.000 claims abstract description 44
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims abstract description 43
- 239000000843 powder Substances 0.000 claims abstract description 28
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 26
- 239000002245 particle Substances 0.000 claims abstract description 15
- 239000007787 solid Substances 0.000 claims abstract description 15
- 230000008021 deposition Effects 0.000 claims abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000002002 slurry Substances 0.000 claims description 41
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 28
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims description 28
- VPJQDYNOVJRQLN-UHFFFAOYSA-N [O-2].[La+3].[Ce+3].[F].[O-2].[O-2] Chemical compound [O-2].[La+3].[Ce+3].[F].[O-2].[O-2] VPJQDYNOVJRQLN-UHFFFAOYSA-N 0.000 claims description 28
- NZPIUJUFIFZSPW-UHFFFAOYSA-H lanthanum carbonate Chemical compound [La+3].[La+3].[O-]C([O-])=O.[O-]C([O-])=O.[O-]C([O-])=O NZPIUJUFIFZSPW-UHFFFAOYSA-H 0.000 claims description 28
- 239000012530 fluid Substances 0.000 claims description 24
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims description 22
- 239000006185 dispersion Substances 0.000 claims description 18
- XTEGARKTQYYJKE-UHFFFAOYSA-M Chlorate Chemical compound [O-]Cl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-M 0.000 claims description 16
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 16
- 229910052731 fluorine Inorganic materials 0.000 claims description 16
- 239000011737 fluorine Substances 0.000 claims description 16
- 229910000029 sodium carbonate Inorganic materials 0.000 claims description 14
- 235000017550 sodium carbonate Nutrition 0.000 claims description 14
- 150000000703 Cerium Chemical class 0.000 claims description 12
- 150000002603 lanthanum Chemical class 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 11
- WMOHXRDWCVHXGS-UHFFFAOYSA-N [La].[Ce] Chemical compound [La].[Ce] WMOHXRDWCVHXGS-UHFFFAOYSA-N 0.000 claims description 9
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 8
- 150000002823 nitrates Chemical class 0.000 claims description 8
- 239000000047 product Substances 0.000 claims description 8
- 235000012538 ammonium bicarbonate Nutrition 0.000 claims description 7
- 239000012065 filter cake Substances 0.000 claims description 7
- 238000004334 fluoridation Methods 0.000 claims description 7
- 239000002244 precipitate Substances 0.000 claims description 7
- 238000000498 ball milling Methods 0.000 claims description 5
- GCLGEJMYGQKIIW-UHFFFAOYSA-H sodium hexametaphosphate Chemical compound [Na]OP1(=O)OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])O1 GCLGEJMYGQKIIW-UHFFFAOYSA-H 0.000 claims description 5
- 235000019982 sodium hexametaphosphate Nutrition 0.000 claims description 5
- 239000001577 tetrasodium phosphonato phosphate Substances 0.000 claims description 5
- ATRRKUHOCOJYRX-UHFFFAOYSA-N Ammonium bicarbonate Chemical compound [NH4+].OC([O-])=O ATRRKUHOCOJYRX-UHFFFAOYSA-N 0.000 claims description 4
- 229910000013 Ammonium bicarbonate Inorganic materials 0.000 claims description 4
- 239000001099 ammonium carbonate Substances 0.000 claims description 4
- 235000011114 ammonium hydroxide Nutrition 0.000 claims description 4
- 230000018044 dehydration Effects 0.000 claims description 4
- 238000006297 dehydration reaction Methods 0.000 claims description 4
- 229910052746 lanthanum Inorganic materials 0.000 claims description 4
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical group [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 4
- 239000004743 Polypropylene Substances 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims description 3
- 238000005457 optimization Methods 0.000 claims description 3
- 229920001155 polypropylene Polymers 0.000 claims description 3
- 239000003082 abrasive agent Substances 0.000 abstract description 7
- 150000002910 rare earth metals Chemical class 0.000 abstract description 6
- 239000002270 dispersing agent Substances 0.000 abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 2
- 239000011521 glass Substances 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 abstract description 2
- 230000001105 regulatory effect Effects 0.000 abstract 3
- XVVDIUTUQBXOGG-UHFFFAOYSA-N [Ce].FOF Chemical compound [Ce].FOF XVVDIUTUQBXOGG-UHFFFAOYSA-N 0.000 abstract 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 abstract 1
- 238000005299 abrasion Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000000075 oxide glass Substances 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 13
- 230000000694 effects Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 239000008367 deionised water Substances 0.000 description 6
- 229910021641 deionized water Inorganic materials 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 4
- 238000013019 agitation Methods 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 239000003446 ligand Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- LZRYCGNIFKCCCR-UHFFFAOYSA-N [Ce+3].[N+](=O)([O-])[O-].[N+](=O)([O-])[O-].[N+](=O)([O-])[O-].[La+3] Chemical compound [Ce+3].[N+](=O)([O-])[O-].[N+](=O)([O-])[O-].[N+](=O)([O-])[O-].[La+3] LZRYCGNIFKCCCR-UHFFFAOYSA-N 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 239000012752 auxiliary agent Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- CNERRGRDMYRHEV-UHFFFAOYSA-H [Cl-].[La+3].[Ce+3].[Cl-].[Cl-].[Cl-].[Cl-].[Cl-] Chemical compound [Cl-].[La+3].[Ce+3].[Cl-].[Cl-].[Cl-].[Cl-].[Cl-] CNERRGRDMYRHEV-UHFFFAOYSA-H 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000000634 powder X-ray diffraction Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 1
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- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
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Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102925106A (zh) * | 2012-11-14 | 2013-02-13 | 内蒙古科技大学 | 一种稀土抛光粉及其制备方法 |
CN103254870A (zh) * | 2013-05-19 | 2013-08-21 | 郭尧 | 一种氧化镧铈稀土抛光粉及其制备方法 |
CN103450814A (zh) * | 2013-01-10 | 2013-12-18 | 湖南皓志新材料股份有限公司 | 一种循环利用滤液晶种制备稀土抛光粉的方法 |
CN104017500A (zh) * | 2014-06-11 | 2014-09-03 | 泰安麦丰新材料科技有限公司 | 一种稀土抛光粉的制备方法 |
CN104356947A (zh) * | 2014-08-29 | 2015-02-18 | 海城海美抛光材料制造有限公司 | 二级中间体制备法生产稀土抛光粉 |
CN104371554A (zh) * | 2014-10-17 | 2015-02-25 | 乐山东承新材料有限公司 | 氟氧化镧铈稀土抛光液 |
CN104774561A (zh) * | 2015-03-27 | 2015-07-15 | 南昌大学 | 利用铌钽含氟废水制备稀土抛光粉并回收铵盐的方法 |
CN105038604A (zh) * | 2015-06-01 | 2015-11-11 | 华东理工大学 | 一种含氟稀土复合氧化物的组成及制备方法 |
CN105505226A (zh) * | 2015-12-02 | 2016-04-20 | 包头市新源抛光粉有限公司 | 一种稀土抛光粉及其制备方法 |
CN106479374A (zh) * | 2016-10-28 | 2017-03-08 | 扬州翠佛堂珠宝有限公司 | 一种碧玉抛光液 |
CN106675417A (zh) * | 2016-12-21 | 2017-05-17 | 安徽中创电子信息材料有限公司 | 一种球形氟氧化镧铈稀土抛光液及其制备方法 |
CN107663423A (zh) * | 2017-09-28 | 2018-02-06 | 东莞市赛亚稀土实业有限公司 | 一种氧化铈抛光粉的制备方法 |
CN108864948A (zh) * | 2018-08-17 | 2018-11-23 | 蓝思科技(长沙)有限公司 | 玻璃用抛光粉、抛光液及其制备方法、玻璃和电子产品 |
CN110872471A (zh) * | 2018-08-30 | 2020-03-10 | 惠州比亚迪实业有限公司 | 氧化铈抛光液及其制备方法和应用 |
CN112725623A (zh) * | 2020-12-02 | 2021-04-30 | 北京工业大学 | 一种从废稀土抛光粉中分离提取稀土与再生稀土抛光粉的方法 |
CN113969108A (zh) * | 2021-11-18 | 2022-01-25 | 东北大学 | 一种以铈富集物为原料制备光学玻璃用抛光液的方法 |
CN114262569A (zh) * | 2021-12-02 | 2022-04-01 | 甘肃金阳高科技材料有限公司 | 一种大口径光学玻璃抛光液的制备方法 |
CN115947604A (zh) * | 2022-12-14 | 2023-04-11 | 福建臻璟新材料科技有限公司 | 一种氮化铝基质的荧光陶瓷及其制备方法 |
CN116970343A (zh) * | 2023-08-02 | 2023-10-31 | 包头天骄清美稀土抛光粉有限公司 | 用于曲面玻璃盖板抛光的稀土抛光液及其制备方法和应用 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1696236A (zh) * | 2004-05-11 | 2005-11-16 | K.C.科技股份有限公司 | 化学机械抛光浆料及抛光基板的方法 |
CN101608097A (zh) * | 2009-07-14 | 2009-12-23 | 上海华明高纳稀土新材料有限公司 | 化学机械抛光用纳米氧化铈浆液及其制备方法 |
CN101899281A (zh) * | 2009-05-25 | 2010-12-01 | 甘肃稀土新材料股份有限公司 | 稀土抛光粉及其制造方法 |
-
2011
- 2011-08-10 CN CN 201110228791 patent/CN102337086B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1696236A (zh) * | 2004-05-11 | 2005-11-16 | K.C.科技股份有限公司 | 化学机械抛光浆料及抛光基板的方法 |
CN101899281A (zh) * | 2009-05-25 | 2010-12-01 | 甘肃稀土新材料股份有限公司 | 稀土抛光粉及其制造方法 |
CN101608097A (zh) * | 2009-07-14 | 2009-12-23 | 上海华明高纳稀土新材料有限公司 | 化学机械抛光用纳米氧化铈浆液及其制备方法 |
Cited By (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102925106A (zh) * | 2012-11-14 | 2013-02-13 | 内蒙古科技大学 | 一种稀土抛光粉及其制备方法 |
CN103450814A (zh) * | 2013-01-10 | 2013-12-18 | 湖南皓志新材料股份有限公司 | 一种循环利用滤液晶种制备稀土抛光粉的方法 |
CN103254870A (zh) * | 2013-05-19 | 2013-08-21 | 郭尧 | 一种氧化镧铈稀土抛光粉及其制备方法 |
CN104017500A (zh) * | 2014-06-11 | 2014-09-03 | 泰安麦丰新材料科技有限公司 | 一种稀土抛光粉的制备方法 |
CN104356947B (zh) * | 2014-08-29 | 2016-07-06 | 海城海美抛光材料制造有限公司 | 二级中间体制备法生产稀土抛光粉 |
CN104356947A (zh) * | 2014-08-29 | 2015-02-18 | 海城海美抛光材料制造有限公司 | 二级中间体制备法生产稀土抛光粉 |
CN104371554A (zh) * | 2014-10-17 | 2015-02-25 | 乐山东承新材料有限公司 | 氟氧化镧铈稀土抛光液 |
CN104371554B (zh) * | 2014-10-17 | 2017-07-11 | 乐山东承新材料有限公司 | 氟氧化镧铈稀土抛光液 |
CN104774561A (zh) * | 2015-03-27 | 2015-07-15 | 南昌大学 | 利用铌钽含氟废水制备稀土抛光粉并回收铵盐的方法 |
CN104774561B (zh) * | 2015-03-27 | 2017-07-28 | 南昌大学 | 利用铌钽含氟废水制备稀土抛光粉并回收铵盐的方法 |
CN105038604A (zh) * | 2015-06-01 | 2015-11-11 | 华东理工大学 | 一种含氟稀土复合氧化物的组成及制备方法 |
CN105505226A (zh) * | 2015-12-02 | 2016-04-20 | 包头市新源抛光粉有限公司 | 一种稀土抛光粉及其制备方法 |
CN106479374A (zh) * | 2016-10-28 | 2017-03-08 | 扬州翠佛堂珠宝有限公司 | 一种碧玉抛光液 |
CN106675417A (zh) * | 2016-12-21 | 2017-05-17 | 安徽中创电子信息材料有限公司 | 一种球形氟氧化镧铈稀土抛光液及其制备方法 |
CN107663423A (zh) * | 2017-09-28 | 2018-02-06 | 东莞市赛亚稀土实业有限公司 | 一种氧化铈抛光粉的制备方法 |
CN108864948A (zh) * | 2018-08-17 | 2018-11-23 | 蓝思科技(长沙)有限公司 | 玻璃用抛光粉、抛光液及其制备方法、玻璃和电子产品 |
CN110872471A (zh) * | 2018-08-30 | 2020-03-10 | 惠州比亚迪实业有限公司 | 氧化铈抛光液及其制备方法和应用 |
CN110872471B (zh) * | 2018-08-30 | 2021-10-22 | 惠州比亚迪实业有限公司 | 氧化铈抛光液及其制备方法和应用 |
CN112725623A (zh) * | 2020-12-02 | 2021-04-30 | 北京工业大学 | 一种从废稀土抛光粉中分离提取稀土与再生稀土抛光粉的方法 |
US11753308B1 (en) | 2020-12-02 | 2023-09-12 | Beijing University Of Technology | Method for separating and extracting rare-earth and regenerating rare-earth polishing powder from rare-earth polishing powder waste |
CN113969108A (zh) * | 2021-11-18 | 2022-01-25 | 东北大学 | 一种以铈富集物为原料制备光学玻璃用抛光液的方法 |
CN114262569A (zh) * | 2021-12-02 | 2022-04-01 | 甘肃金阳高科技材料有限公司 | 一种大口径光学玻璃抛光液的制备方法 |
CN115947604A (zh) * | 2022-12-14 | 2023-04-11 | 福建臻璟新材料科技有限公司 | 一种氮化铝基质的荧光陶瓷及其制备方法 |
CN116970343A (zh) * | 2023-08-02 | 2023-10-31 | 包头天骄清美稀土抛光粉有限公司 | 用于曲面玻璃盖板抛光的稀土抛光液及其制备方法和应用 |
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