CN102335639B - 分离装置 - Google Patents
分离装置 Download PDFInfo
- Publication number
- CN102335639B CN102335639B CN201110202517.5A CN201110202517A CN102335639B CN 102335639 B CN102335639 B CN 102335639B CN 201110202517 A CN201110202517 A CN 201110202517A CN 102335639 B CN102335639 B CN 102335639B
- Authority
- CN
- China
- Prior art keywords
- silicon
- waste liquid
- plate
- adsorption plate
- bits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 151
- 239000010703 silicon Substances 0.000 claims abstract description 151
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 142
- 239000007788 liquid Substances 0.000 claims abstract description 56
- 238000001179 sorption measurement Methods 0.000 claims abstract description 52
- 239000002699 waste material Substances 0.000 claims abstract description 46
- 230000005684 electric field Effects 0.000 claims abstract description 15
- 150000003376 silicon Chemical class 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 28
- 238000010521 absorption reaction Methods 0.000 abstract description 2
- 230000032258 transport Effects 0.000 description 12
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 239000010949 copper Substances 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000004064 recycling Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000005119 centrifugation Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005518 electrochemistry Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000000053 physical method Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Landscapes
- Electrostatic Separation (AREA)
- Water Treatment By Electricity Or Magnetism (AREA)
- Water Treatment By Sorption (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010-163279 | 2010-07-20 | ||
JP2010163279A JP5638300B2 (ja) | 2010-07-20 | 2010-07-20 | 分離装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102335639A CN102335639A (zh) | 2012-02-01 |
CN102335639B true CN102335639B (zh) | 2015-11-18 |
Family
ID=45511731
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110202517.5A Active CN102335639B (zh) | 2010-07-20 | 2011-07-19 | 分离装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5638300B2 (ja) |
CN (1) | CN102335639B (ja) |
TW (1) | TWI500442B (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012081385A (ja) * | 2010-10-07 | 2012-04-26 | Disco Corp | 分離装置 |
JP5868150B2 (ja) * | 2011-12-06 | 2016-02-24 | 株式会社ディスコ | 廃液処理装置 |
JP6078236B2 (ja) * | 2012-06-01 | 2017-02-08 | 株式会社ディスコ | 加工廃液処理装置 |
JP6093566B2 (ja) * | 2012-12-26 | 2017-03-08 | 株式会社ディスコ | 廃液処理装置 |
JP6328978B2 (ja) * | 2014-04-02 | 2018-05-23 | 株式会社ディスコ | 廃液処理装置 |
CN110612147B (zh) * | 2017-03-14 | 2023-03-28 | 加拿大全国研究委员会 | 用于相分离的电吸附空化装置和方法 |
JP7245068B2 (ja) * | 2019-02-15 | 2023-03-23 | 株式会社ディスコ | 廃液処理装置 |
CN114950736A (zh) * | 2022-02-25 | 2022-08-30 | 长沙理工大学 | 太阳能板清洗用静电吸附尘水分离装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6433205B1 (en) * | 2002-01-15 | 2002-08-13 | Dow Corning Corporation | Magnetic separation for silicon-containing materials |
CN101128282A (zh) * | 2005-12-22 | 2008-02-20 | 株式会社分离 | 脏液处理装置 |
CN101568366A (zh) * | 2007-08-29 | 2009-10-28 | 株式会社分离 | 过滤装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS586522B2 (ja) * | 1975-11-19 | 1983-02-04 | 清水建設株式会社 | ベントナイト泥水分離方法および装置 |
US4372837A (en) * | 1979-10-16 | 1983-02-08 | Petrolite Corporation | Radial flow electrofilter |
JPH11253838A (ja) * | 1998-03-10 | 1999-09-21 | Ishikawajima Hanyoki Service Co Ltd | シリコンウエハー製造工程における微粒混合液体の固液分離方法及び装置 |
US6126803A (en) * | 1998-10-19 | 2000-10-03 | Dow Corning Corporation | Method for removing particulate from a liquid silicon containing compound |
JP3076839B2 (ja) * | 1999-01-20 | 2000-08-14 | 工業技術院長 | 分散液中の微粒子の分離方法、微粒子の分級方法及び微粒子の吸着力測定方法、並びにそれらの方法の実施のための装置 |
NO314138B1 (no) * | 2001-08-27 | 2003-02-03 | Elkem Materials | Fremgangsmåte for fjerning av forurensinger fra silisiuminneholdende residuer |
TWI232127B (en) * | 2003-03-26 | 2005-05-11 | Sanyo Electric Co | Water treating apparatus and water treating method using such apparatus |
JP2007283248A (ja) * | 2006-04-19 | 2007-11-01 | Sharp Corp | 分離回収装置および分離回収方法 |
WO2008048656A2 (en) * | 2006-10-18 | 2008-04-24 | Kinetico Incorporated | Electroregeneration apparatus and water treatment method |
JP2008115040A (ja) * | 2006-11-02 | 2008-05-22 | Sharp Corp | シリコン再生装置、シリコン再生方法 |
-
2010
- 2010-07-20 JP JP2010163279A patent/JP5638300B2/ja active Active
-
2011
- 2011-06-03 TW TW100119564A patent/TWI500442B/zh active
- 2011-07-19 CN CN201110202517.5A patent/CN102335639B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6433205B1 (en) * | 2002-01-15 | 2002-08-13 | Dow Corning Corporation | Magnetic separation for silicon-containing materials |
CN101128282A (zh) * | 2005-12-22 | 2008-02-20 | 株式会社分离 | 脏液处理装置 |
CN101568366A (zh) * | 2007-08-29 | 2009-10-28 | 株式会社分离 | 过滤装置 |
Also Published As
Publication number | Publication date |
---|---|
TW201208753A (en) | 2012-03-01 |
JP2012024661A (ja) | 2012-02-09 |
JP5638300B2 (ja) | 2014-12-10 |
TWI500442B (zh) | 2015-09-21 |
CN102335639A (zh) | 2012-02-01 |
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PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant |