CN102036742B - 用于制备气体在液体中的无气泡溶液的气化系统和方法 - Google Patents

用于制备气体在液体中的无气泡溶液的气化系统和方法 Download PDF

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Publication number
CN102036742B
CN102036742B CN200980118387.8A CN200980118387A CN102036742B CN 102036742 B CN102036742 B CN 102036742B CN 200980118387 A CN200980118387 A CN 200980118387A CN 102036742 B CN102036742 B CN 102036742B
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CN
China
Prior art keywords
gas
liquid
contactor
flow
porous element
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Expired - Fee Related
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CN200980118387.8A
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English (en)
Chinese (zh)
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CN102036742A (zh
Inventor
Y·A·夏
J·K·尼尔迈耶
R·莫利卡
G·T·康纳
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Entegris Inc
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Entegris Inc
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/2319—Methods of introducing gases into liquid media
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/231—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids by bubbling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/231—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids by bubbling
    • B01F23/23105—Arrangement or manipulation of the gas bubbling devices
    • B01F23/2312—Diffusers
    • B01F23/23124—Diffusers consisting of flexible porous or perforated material, e.g. fabric
    • B01F23/231244—Dissolving, hollow fiber membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/29—Mixing systems, i.e. flow charts or diagrams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/213—Measuring of the properties of the mixtures, e.g. temperature, density or colour
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Degasification And Air Bubble Elimination (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Accessories For Mixers (AREA)
CN200980118387.8A 2008-05-19 2009-05-18 用于制备气体在液体中的无气泡溶液的气化系统和方法 Expired - Fee Related CN102036742B (zh)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
US5422308P 2008-05-19 2008-05-19
US61/054,223 2008-05-19
US8253508P 2008-07-22 2008-07-22
US61/082,535 2008-07-22
US9523008P 2008-09-08 2008-09-08
US61/095,230 2008-09-08
US10150108P 2008-09-30 2008-09-30
US61/101,501 2008-09-30
PCT/US2009/044343 WO2009143056A1 (en) 2008-05-19 2009-05-18 Gasification systems and methods for making bubble free solutions of gas in liquid

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201510020227.7A Division CN104722239A (zh) 2008-05-19 2009-05-18 用于制备气体在液体中的无气泡溶液的方法和气化设备

Publications (2)

Publication Number Publication Date
CN102036742A CN102036742A (zh) 2011-04-27
CN102036742B true CN102036742B (zh) 2015-02-11

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
CN201510020227.7A Pending CN104722239A (zh) 2008-05-19 2009-05-18 用于制备气体在液体中的无气泡溶液的方法和气化设备
CN200980118387.8A Expired - Fee Related CN102036742B (zh) 2008-05-19 2009-05-18 用于制备气体在液体中的无气泡溶液的气化系统和方法

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN201510020227.7A Pending CN104722239A (zh) 2008-05-19 2009-05-18 用于制备气体在液体中的无气泡溶液的方法和气化设备

Country Status (7)

Country Link
US (2) US8844909B2 (enExample)
JP (1) JP2011520609A (enExample)
KR (1) KR20110008319A (enExample)
CN (2) CN104722239A (enExample)
DE (1) DE112009001233T5 (enExample)
TW (1) TW201004707A (enExample)
WO (1) WO2009143056A1 (enExample)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010234298A (ja) * 2009-03-31 2010-10-21 Kurita Water Ind Ltd ガス溶解水供給装置及びガス溶解水の製造方法
US8438969B2 (en) * 2010-05-06 2013-05-14 Dr Pepper/Seven Up, Inc. Apparatus and method for dissolving gases in a beverage
US9403102B2 (en) * 2012-02-13 2016-08-02 United Technologies Corporation Heat exchange system configured with a membrane contactor
JP5914037B2 (ja) * 2012-02-23 2016-05-11 東京エレクトロン株式会社 冷却システム、冷却システムを備える基板処理装置及び冷却方法
CN102692926B (zh) * 2012-06-05 2014-10-22 哈尔滨工程大学 基于tms320c6713的船舶航向模糊pid融合控制器及控制方法
GB2506689A (en) * 2012-10-08 2014-04-09 Odour Services Internat Ltd Air pollution control apparatus and method of use
CA2902061C (en) * 2013-02-28 2023-08-08 New Health Sciences, Inc. Gas depletion and gas addition devices for blood treatment
WO2015175790A1 (en) * 2014-05-15 2015-11-19 Tokyo Electron Limited Method and apparatus for increased recirculation and filtration in a photoresist dispense system
AU2015100137A4 (en) * 2015-01-12 2015-03-05 Macau University Of Science And Technology Optimization of Start-up Transient Processes for Dual-Armed Cluster Tools with Wafer Revisiting
JP6993626B2 (ja) * 2015-04-10 2022-01-13 タカラベルモント株式会社 炭酸水生成装置
EP3284530A4 (en) * 2015-04-13 2018-12-19 DIC Corporation Device for adjusting specific resistance value and method for adjusting specific resistance value
FR3036629B1 (fr) 2015-05-29 2019-06-21 Nicolas POURTAUD Dispositif de regulation de la concentration d'un gaz dans un liquide
JP6761431B2 (ja) * 2016-01-06 2020-09-23 国立大学法人徳島大学 レーザ光を用いたガス分析装置及びガス分析方法
US10228355B2 (en) 2016-05-06 2019-03-12 Board Of Regents, The University Of Texas System Volatile eluent preparation
CN106474768B (zh) * 2016-09-12 2019-01-29 华中科技大学 一种高精度耐腐蚀的自动配液换液装置
WO2018085892A1 (en) * 2016-11-11 2018-05-17 PTI Pacific Pty Ltd Modular system for gassing and degassing liquids
CN110168713B (zh) * 2016-11-11 2023-08-08 Mks仪器有限公司 用于产生包括其中溶解有氨气的去离子水的导电液体的系统和方法
EP3601147A4 (en) * 2017-03-28 2021-01-06 Flow Control LLC. Gas/liquid infusion system with intelligent level management and adjustable absorption output
CN108854609B (zh) * 2017-05-10 2025-08-12 青岛经济技术开发区海尔热水器有限公司 一种微气泡水生产装置
JP7052423B2 (ja) * 2018-03-02 2022-04-12 栗田工業株式会社 オゾン溶解水の製造装置及びこれを用いたオゾン溶解水の製造方法
WO2020210243A1 (en) 2019-04-08 2020-10-15 Mks Instruments, Inc. Systems and methods for generating a dissolved ammonia solution with reduced dissolved carrier gas and oxygen content
JP7240260B2 (ja) 2019-06-04 2023-03-15 株式会社荏原製作所 ガス溶解液供給装置およびガス溶解液供給方法
CN110773012A (zh) * 2019-12-02 2020-02-11 杭州老板电器股份有限公司 微纳米气泡制备装置及其制备方法
JP2024546262A (ja) * 2021-12-14 2024-12-19 エムケーエス インストゥルメンツ，インコーポレイテッド 溶解アンモニアデリバリシステム及び使用方法
CN118893499B (zh) * 2024-09-12 2025-11-14 福建理工大学 一种基于pid控制气体辅助抛光系统的设计方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004094022A2 (en) * 2003-04-22 2004-11-04 Mykrolis Corporation Pleated construction for effecting gas transfer membrane
CN1642628A (zh) * 2002-03-19 2005-07-20 密科理股份有限公司 中空纤维膜接触装置及方法
US20070266632A1 (en) * 2006-05-05 2007-11-22 Andreas Tsangaris Gas Homogenization System
CN101121099A (zh) * 2006-06-05 2008-02-13 赛尔格有限责任公司 膜接触器

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3751879A (en) * 1971-04-26 1973-08-14 Instrumentation Specialties Co Apparatus for reducing the dissolved gas concentration in a liquid
DE68926421T2 (de) * 1988-08-20 1996-09-12 Nitto Denko Corp Verfahren zur Entfernung von gelösten Gasen aus einer Flüssigkeit
US5565149A (en) 1995-03-15 1996-10-15 Permea, Inc. Control of dissolved gases in liquids
US5766479A (en) 1995-08-07 1998-06-16 Zenon Environmental Inc. Production of high purity water using reverse osmosis
JPH10324502A (ja) 1997-05-21 1998-12-08 Dainippon Ink & Chem Inc 超純水の炭酸ガス付加装置及び付加方法
US6582496B1 (en) 2000-01-28 2003-06-24 Mykrolis Corporation Hollow fiber membrane contactor
US6328905B1 (en) 1999-08-12 2001-12-11 Advanced Micro Devices, Inc. Residue removal by CO2 water rinse in conjunction with post metal etch plasma strip
US6982006B1 (en) * 1999-10-19 2006-01-03 Boyers David G Method and apparatus for treating a substrate with an ozone-solvent solution
US6805791B2 (en) 2000-09-01 2004-10-19 Applied Science And Technology, Inc. Ozonated water flow and concentration control apparatus
US6884359B2 (en) 2000-09-27 2005-04-26 Dainippon Ink And Chemicals, Inc. Apparatus and method for controlling resistivity of ultra pure water
JP2002233878A (ja) * 2001-02-06 2002-08-20 Roki Techno Co Ltd 給水配管の殺菌洗浄方法
CN100469425C (zh) * 2001-08-28 2009-03-18 三菱丽阳株式会社 碳酸泉和碳酸水的制造装置及制造方法、及其应用的气体浓度控制方法和膜组件
JP2003154242A (ja) * 2001-11-26 2003-05-27 Texas Instr Japan Ltd 流体混合装置
JP4319445B2 (ja) 2002-06-20 2009-08-26 大日本スクリーン製造株式会社 基板処理装置
JP2004130205A (ja) * 2002-10-10 2004-04-30 Fuji Electric Systems Co Ltd オゾン含有水を用いたろ過膜の逆洗方法および逆洗装置
JP4330959B2 (ja) 2003-09-05 2009-09-16 株式会社東芝 半導体基板の洗浄方法および洗浄装置、半導体基板、ならびに半導体装置
US7273549B2 (en) 2004-01-23 2007-09-25 Geoscience Support Services Inc. Membrane contactor apparatus including a module having hollow fiber membranes
CN1913946A (zh) 2004-01-27 2007-02-14 安格斯公司 由液体中除去微气泡的方法
JP4470101B2 (ja) 2004-03-24 2010-06-02 栗田工業株式会社 窒素溶解超純水の製造方法
US20050279207A1 (en) 2004-06-16 2005-12-22 Advanced Technology Materials, Inc. Liquid delivery system
CN101479365A (zh) * 2006-05-05 2009-07-08 普拉斯科能源Ip控股公司毕尔巴鄂-沙夫豪森分公司 用于与气化器一起使用的热量回收系统
JP2007319843A (ja) 2006-06-05 2007-12-13 Kurita Water Ind Ltd 気体溶解モジュール
JP2009545136A (ja) * 2006-07-21 2009-12-17 インテグリス・インコーポレーテッド 浸漬流体を調整するための装置および方法
JP4931201B2 (ja) 2006-10-13 2012-05-16 独立行政法人産業技術総合研究所 極微小気泡を含む水の製造方法および極微小気泡を含む水
EP2104648B1 (en) 2006-10-17 2013-04-17 MKS Instruments, Inc. System and method for carbonation of deionized water
JP2008155186A (ja) * 2006-12-26 2008-07-10 Nomura Micro Sci Co Ltd オゾン水の製造方法及び製造装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1642628A (zh) * 2002-03-19 2005-07-20 密科理股份有限公司 中空纤维膜接触装置及方法
WO2004094022A2 (en) * 2003-04-22 2004-11-04 Mykrolis Corporation Pleated construction for effecting gas transfer membrane
US20070266632A1 (en) * 2006-05-05 2007-11-22 Andreas Tsangaris Gas Homogenization System
CN101121099A (zh) * 2006-06-05 2008-02-13 赛尔格有限责任公司 膜接触器

Also Published As

Publication number Publication date
DE112009001233T5 (de) 2011-07-21
JP2011520609A (ja) 2011-07-21
US8844909B2 (en) 2014-09-30
CN102036742A (zh) 2011-04-27
US20140357734A1 (en) 2014-12-04
CN104722239A (zh) 2015-06-24
TW201004707A (en) 2010-02-01
KR20110008319A (ko) 2011-01-26
WO2009143056A1 (en) 2009-11-26
US20110180148A1 (en) 2011-07-28

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