CN102007574A - 形成硫属化合物薄膜的方法 - Google Patents
形成硫属化合物薄膜的方法 Download PDFInfo
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- CN102007574A CN102007574A CN2009801135200A CN200980113520A CN102007574A CN 102007574 A CN102007574 A CN 102007574A CN 2009801135200 A CN2009801135200 A CN 2009801135200A CN 200980113520 A CN200980113520 A CN 200980113520A CN 102007574 A CN102007574 A CN 102007574A
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- gas
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- 238000000034 method Methods 0.000 title claims abstract description 45
- 150000004770 chalcogenides Chemical class 0.000 title abstract 4
- 239000010409 thin film Substances 0.000 title abstract 4
- 239000007789 gas Substances 0.000 claims abstract description 294
- 239000000758 substrate Substances 0.000 claims abstract description 95
- 230000008021 deposition Effects 0.000 claims abstract description 71
- 229910052732 germanium Inorganic materials 0.000 claims abstract description 7
- 229910052787 antimony Inorganic materials 0.000 claims abstract description 6
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims abstract description 6
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims abstract description 6
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052733 gallium Inorganic materials 0.000 claims abstract description 5
- 229910052738 indium Inorganic materials 0.000 claims abstract description 5
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 5
- 150000001875 compounds Chemical class 0.000 claims description 91
- 238000011010 flushing procedure Methods 0.000 claims description 66
- 150000001786 chalcogen compounds Chemical class 0.000 claims description 35
- 229910052799 carbon Inorganic materials 0.000 claims description 11
- 230000008859 change Effects 0.000 claims description 11
- 239000000428 dust Substances 0.000 claims description 9
- 230000014509 gene expression Effects 0.000 claims description 9
- 229910052739 hydrogen Inorganic materials 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 229910000763 AgInSbTe Inorganic materials 0.000 claims description 3
- 229910005542 GaSb Inorganic materials 0.000 claims description 3
- 229910005537 GaSeTe Inorganic materials 0.000 claims description 3
- 229910005872 GeSb Inorganic materials 0.000 claims description 3
- 229910005898 GeSn Inorganic materials 0.000 claims description 3
- 229910005900 GeTe Inorganic materials 0.000 claims description 3
- 229910018321 SbTe Inorganic materials 0.000 claims description 3
- 229910018219 SeTe Inorganic materials 0.000 claims description 3
- 229910004284 Te81Ge15Sb2S2 Inorganic materials 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 239000001307 helium Substances 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 claims description 3
- FESBVLZDDCQLFY-UHFFFAOYSA-N sete Chemical compound [Te]=[Se] FESBVLZDDCQLFY-UHFFFAOYSA-N 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 125000004646 sulfenyl group Chemical group S(*)* 0.000 claims 1
- 239000010408 film Substances 0.000 abstract description 121
- 239000011669 selenium Substances 0.000 abstract description 8
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 abstract description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 4
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052711 selenium Inorganic materials 0.000 abstract description 4
- 229910052709 silver Inorganic materials 0.000 abstract description 4
- 239000004332 silver Substances 0.000 abstract description 4
- 229910052714 tellurium Inorganic materials 0.000 abstract description 4
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 abstract description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract description 3
- 238000010926 purge Methods 0.000 abstract 6
- 239000012495 reaction gas Substances 0.000 abstract 2
- 239000011593 sulfur Substances 0.000 abstract 1
- 229910052717 sulfur Inorganic materials 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 67
- 238000000151 deposition Methods 0.000 description 66
- 238000005406 washing Methods 0.000 description 10
- 238000004626 scanning electron microscopy Methods 0.000 description 8
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 6
- 230000006866 deterioration Effects 0.000 description 5
- 125000002524 organometallic group Chemical group 0.000 description 5
- 239000002243 precursor Substances 0.000 description 5
- 239000005864 Sulphur Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000003795 desorption Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/305—Sulfides, selenides, or tellurides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
Claims (14)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20080035885 | 2008-04-18 | ||
KR10-2008-0035885 | 2008-04-18 | ||
PCT/KR2009/001959 WO2009128655A2 (ko) | 2008-04-18 | 2009-04-16 | 칼코제나이드 박막 형성방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102007574A true CN102007574A (zh) | 2011-04-06 |
CN102007574B CN102007574B (zh) | 2012-09-19 |
Family
ID=41199575
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009801135200A Expired - Fee Related CN102007574B (zh) | 2008-04-18 | 2009-04-16 | 形成硫属化合物薄膜的方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8772077B2 (zh) |
JP (1) | JP5373056B2 (zh) |
KR (1) | KR101515544B1 (zh) |
CN (1) | CN102007574B (zh) |
TW (1) | TWI426151B (zh) |
WO (1) | WO2009128655A2 (zh) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105070828A (zh) * | 2015-07-21 | 2015-11-18 | 同济大学 | 一种纳米复合堆叠相变薄膜及其制备方法和应用 |
CN105887045A (zh) * | 2015-02-16 | 2016-08-24 | 炬力奈米科技有限公司 | 二维层状硫族化合物的合成方法及工艺设备 |
CN106521452A (zh) * | 2015-09-15 | 2017-03-22 | 超科技公司 | 2d金属硫属化物膜的激光辅助原子层沉积 |
CN106555167A (zh) * | 2015-09-30 | 2017-04-05 | 阙郁伦 | 制备过渡金属硫族化物的方法 |
CN107818944A (zh) * | 2016-09-13 | 2018-03-20 | 东京毅力科创株式会社 | 使用钨填充衬底的凹部的方法 |
CN110268107A (zh) * | 2017-09-29 | 2019-09-20 | 株式会社Lg化学 | 含硫属元素的化合物、其制备方法和包含其的热电元件 |
CN112501583A (zh) * | 2020-11-26 | 2021-03-16 | 北京大学深圳研究生院 | 一种过渡金属二硒化物薄膜的制备方法 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
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US9000040B2 (en) | 2004-09-28 | 2015-04-07 | Atrium Medical Corporation | Cross-linked fatty acid-based biomaterials |
US8193027B2 (en) * | 2010-02-23 | 2012-06-05 | Air Products And Chemicals, Inc. | Method of making a multicomponent film |
US9428842B2 (en) * | 2012-12-20 | 2016-08-30 | Asm Ip Holding B.V. | Methods for increasing growth rate during atomic layer deposition of thin films |
KR101464173B1 (ko) * | 2013-07-23 | 2014-11-21 | 영남대학교 산학협력단 | 전이금속 칼코겐화합물 박막 형성 방법 |
KR102144999B1 (ko) * | 2013-11-05 | 2020-08-14 | 삼성전자주식회사 | 이차원 물질과 그 형성방법 및 이차원 물질을 포함하는 소자 |
JP6306386B2 (ja) * | 2014-03-20 | 2018-04-04 | 株式会社日立国際電気 | 基板処理方法、基板処理装置およびプログラム |
KR101738214B1 (ko) * | 2014-06-17 | 2017-05-30 | 한양대학교 산학협력단 | 2차원 주석 구조체 및 그 제조 방법 |
WO2017018834A1 (ko) * | 2015-07-29 | 2017-02-02 | 한국표준과학연구원 | 2차원 전이금속 디칼코지나이드 박막의 제조 방법 |
JP6616365B2 (ja) * | 2017-09-11 | 2019-12-04 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理装置、プログラムおよび記録媒体 |
KR102214902B1 (ko) * | 2017-10-18 | 2021-02-15 | 한양대학교 산학협력단 | Tmdc 막 제조방법 및 그 제조장치 |
KR102414102B1 (ko) * | 2018-11-08 | 2022-06-30 | 주식회사 원익아이피에스 | 박막 증착 방법 |
Family Cites Families (14)
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JP2772416B2 (ja) * | 1990-03-13 | 1998-07-02 | 東京エレクトロン株式会社 | 成膜方法 |
TW417249B (en) * | 1997-05-14 | 2001-01-01 | Applied Materials Inc | Reliability barrier integration for cu application |
JP2004179426A (ja) | 2002-11-27 | 2004-06-24 | Tokyo Electron Ltd | 基板処理装置のクリーニング方法 |
US20060172068A1 (en) * | 2005-01-28 | 2006-08-03 | Ovshinsky Stanford R | Deposition of multilayer structures including layers of germanium and/or germanium alloys |
KR100585175B1 (ko) * | 2005-01-31 | 2006-05-30 | 삼성전자주식회사 | 화학 기상 증착법에 의한 GeSbTe 박막의 제조방법 |
KR100962623B1 (ko) * | 2005-09-03 | 2010-06-11 | 삼성전자주식회사 | 상변화 물질층 형성 방법, 이를 이용한 상변화 메모리 유닛및 상변화 메모리 장치의 제조 방법 |
CN1952222A (zh) * | 2005-10-20 | 2007-04-25 | 中国科学院福建物质结构研究所 | 含碱金属、镓或铟的硫属化合物晶体的生长方法 |
KR100717286B1 (ko) * | 2006-04-21 | 2007-05-15 | 삼성전자주식회사 | 상변화 물질층의 형성 방법과, 그 방법을 이용한 상변화기억 소자의 형성 방법 및 상변화 기억 소자 |
KR101499260B1 (ko) * | 2006-05-12 | 2015-03-05 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 상 변화 메모리 재료의 저온 증착 |
KR20060076262A (ko) * | 2006-06-14 | 2006-07-04 | 삼성전자주식회사 | 상변화 메모리 제조 장치 및 이를 이용한 상변화 메모리장치 제조 방법 |
KR100807223B1 (ko) * | 2006-07-12 | 2008-02-28 | 삼성전자주식회사 | 상변화 물질층, 상변화 물질층 형성 방법 및 이를 이용한상변화 메모리 장치의 제조 방법 |
KR100773753B1 (ko) * | 2006-07-25 | 2007-11-09 | 주식회사 아이피에스 | 상변화 메모리용 칼코제나이드막 증착 방법 |
KR100791477B1 (ko) * | 2006-08-08 | 2008-01-03 | 삼성전자주식회사 | 상변화 메모리 유닛, 이의 제조 방법, 이를 포함하는상변화 메모리 장치 및 그 제조 방법 |
KR101169395B1 (ko) * | 2006-10-13 | 2012-07-30 | 삼성전자주식회사 | 상변화층의 표면처리공정을 포함하는 상변화 메모리 소자의제조방법 |
-
2009
- 2009-04-15 KR KR1020090032730A patent/KR101515544B1/ko not_active IP Right Cessation
- 2009-04-16 TW TW098112672A patent/TWI426151B/zh not_active IP Right Cessation
- 2009-04-16 US US12/936,563 patent/US8772077B2/en not_active Expired - Fee Related
- 2009-04-16 WO PCT/KR2009/001959 patent/WO2009128655A2/ko active Application Filing
- 2009-04-16 CN CN2009801135200A patent/CN102007574B/zh not_active Expired - Fee Related
- 2009-04-16 JP JP2011504925A patent/JP5373056B2/ja not_active Expired - Fee Related
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105887045A (zh) * | 2015-02-16 | 2016-08-24 | 炬力奈米科技有限公司 | 二维层状硫族化合物的合成方法及工艺设备 |
CN105070828A (zh) * | 2015-07-21 | 2015-11-18 | 同济大学 | 一种纳米复合堆叠相变薄膜及其制备方法和应用 |
CN105070828B (zh) * | 2015-07-21 | 2017-08-25 | 同济大学 | 一种纳米复合堆叠相变薄膜及其制备方法和应用 |
CN106521452A (zh) * | 2015-09-15 | 2017-03-22 | 超科技公司 | 2d金属硫属化物膜的激光辅助原子层沉积 |
CN106555167A (zh) * | 2015-09-30 | 2017-04-05 | 阙郁伦 | 制备过渡金属硫族化物的方法 |
CN106555167B (zh) * | 2015-09-30 | 2019-10-15 | 阙郁伦 | 制备过渡金属硫族化物的方法 |
CN107818944A (zh) * | 2016-09-13 | 2018-03-20 | 东京毅力科创株式会社 | 使用钨填充衬底的凹部的方法 |
CN107818944B (zh) * | 2016-09-13 | 2021-09-10 | 东京毅力科创株式会社 | 使用钨填充衬底的凹部的方法 |
CN110268107A (zh) * | 2017-09-29 | 2019-09-20 | 株式会社Lg化学 | 含硫属元素的化合物、其制备方法和包含其的热电元件 |
CN110268107B (zh) * | 2017-09-29 | 2021-07-06 | 株式会社Lg化学 | 含硫属元素的化合物、其制备方法和包含其的热电元件 |
US11097947B2 (en) | 2017-09-29 | 2021-08-24 | Lg Chem, Ltd. | Chalcogen-containing compound, its preparation method and thermoelectric element comprising the same |
CN112501583A (zh) * | 2020-11-26 | 2021-03-16 | 北京大学深圳研究生院 | 一种过渡金属二硒化物薄膜的制备方法 |
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WO2009128655A3 (ko) | 2010-01-21 |
US8772077B2 (en) | 2014-07-08 |
US20110027976A1 (en) | 2011-02-03 |
KR20090110788A (ko) | 2009-10-22 |
TWI426151B (zh) | 2014-02-11 |
WO2009128655A2 (ko) | 2009-10-22 |
CN102007574B (zh) | 2012-09-19 |
TW201000666A (en) | 2010-01-01 |
KR101515544B1 (ko) | 2015-04-30 |
JP2011521443A (ja) | 2011-07-21 |
JP5373056B2 (ja) | 2013-12-18 |
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