CN101995680B - Lcd检测设备的校准台 - Google Patents

Lcd检测设备的校准台 Download PDF

Info

Publication number
CN101995680B
CN101995680B CN2009101784316A CN200910178431A CN101995680B CN 101995680 B CN101995680 B CN 101995680B CN 2009101784316 A CN2009101784316 A CN 2009101784316A CN 200910178431 A CN200910178431 A CN 200910178431A CN 101995680 B CN101995680 B CN 101995680B
Authority
CN
China
Prior art keywords
platform
lcd
worktable
support
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009101784316A
Other languages
English (en)
Chinese (zh)
Other versions
CN101995680A (zh
Inventor
李相龙
朴玄相
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLT
Original Assignee
UBPRECISION CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UBPRECISION CO Ltd filed Critical UBPRECISION CO Ltd
Publication of CN101995680A publication Critical patent/CN101995680A/zh
Application granted granted Critical
Publication of CN101995680B publication Critical patent/CN101995680B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Liquid Crystal (AREA)
CN2009101784316A 2009-08-27 2009-09-24 Lcd检测设备的校准台 Expired - Fee Related CN101995680B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020090079668A KR101017626B1 (ko) 2009-08-27 2009-08-27 Ｌｃｄ검사 장비용 얼라인먼트 스테이지
KR10-2009-0079668 2009-08-27

Publications (2)

Publication Number Publication Date
CN101995680A CN101995680A (zh) 2011-03-30
CN101995680B true CN101995680B (zh) 2013-04-24

Family

ID=43777959

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009101784316A Expired - Fee Related CN101995680B (zh) 2009-08-27 2009-09-24 Lcd检测设备的校准台

Country Status (2)

Country Link
KR (1) KR101017626B1 (ko)
CN (1) CN101995680B (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102184167B1 (ko) * 2020-04-29 2020-11-27 가온솔루션 주식회사 검사장비용 워크 스테이지
CN113092019B (zh) * 2021-03-30 2023-12-22 深圳市善之能科技有限公司 一种高清显示屏生产成品测试系统及测试方法

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1263693A (zh) * 1998-02-07 2000-08-16 洛氏两合公司里塔尔工厂 带有对自身内部空间中热气进行冷却的装置的开关柜
CN2627501Y (zh) * 2003-05-26 2004-07-21 由田新技股份有限公司 液晶显示器面板点灯后显像品质自动检测装置
CN1661465A (zh) * 2004-02-24 2005-08-31 乐金电子（沈阳）有限公司 液晶显示投影仪的抽／排气栅结构
CN2727794Y (zh) * 2004-07-07 2005-09-21 晶彩科技股份有限公司 Tft lcd面板制程生产线的自动光学检测机台
CN1731203A (zh) * 2005-03-09 2006-02-08 飞而康公司 液晶显示器面板的检查装置及其检查方法
CN1776526A (zh) * 2005-11-10 2006-05-24 中国科学院光电技术研究所 加温闪光两用纳米压印装置
CN1916734A (zh) * 2005-08-18 2007-02-21 飞而康公司 背光装置
CN1967319A (zh) * 2005-11-18 2007-05-23 飞而康公司 液晶显示面板检查设备的检查台
CN1971343A (zh) * 2006-12-05 2007-05-30 友达光电股份有限公司 检查机台及应用该检查机台的检查方法
KR20070103093A (ko) * 2006-04-18 2007-10-23 (주)구일엔지니어링 엘씨디 패널 검사장치
KR20080016295A (ko) * 2006-08-18 2008-02-21 주식회사 파이컴 액정표시패널 검사 장비의 검사 스테이지
CN101388356A (zh) * 2007-09-14 2009-03-18 住友重机械工业株式会社 载物台装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06151532A (ja) 1992-11-13 1994-05-31 Tokyo Electron Yamanashi Kk プローブ装置
JP4702083B2 (ja) * 2006-02-10 2011-06-15 ウシオ電機株式会社 ＸＹθ移動ステージ

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1263693A (zh) * 1998-02-07 2000-08-16 洛氏两合公司里塔尔工厂 带有对自身内部空间中热气进行冷却的装置的开关柜
CN2627501Y (zh) * 2003-05-26 2004-07-21 由田新技股份有限公司 液晶显示器面板点灯后显像品质自动检测装置
CN1661465A (zh) * 2004-02-24 2005-08-31 乐金电子（沈阳）有限公司 液晶显示投影仪的抽／排气栅结构
CN2727794Y (zh) * 2004-07-07 2005-09-21 晶彩科技股份有限公司 Tft lcd面板制程生产线的自动光学检测机台
CN1731203A (zh) * 2005-03-09 2006-02-08 飞而康公司 液晶显示器面板的检查装置及其检查方法
CN1916734A (zh) * 2005-08-18 2007-02-21 飞而康公司 背光装置
CN1776526A (zh) * 2005-11-10 2006-05-24 中国科学院光电技术研究所 加温闪光两用纳米压印装置
CN1967319A (zh) * 2005-11-18 2007-05-23 飞而康公司 液晶显示面板检查设备的检查台
KR20070103093A (ko) * 2006-04-18 2007-10-23 (주)구일엔지니어링 엘씨디 패널 검사장치
KR20080016295A (ko) * 2006-08-18 2008-02-21 주식회사 파이컴 액정표시패널 검사 장비의 검사 스테이지
CN1971343A (zh) * 2006-12-05 2007-05-30 友达光电股份有限公司 检查机台及应用该检查机台的检查方法
CN101388356A (zh) * 2007-09-14 2009-03-18 住友重机械工业株式会社 载物台装置

Also Published As

Publication number Publication date
CN101995680A (zh) 2011-03-30
KR101017626B1 (ko) 2011-02-28

Similar Documents

Publication Publication Date Title
CN101571452B (zh) 显示面板检测装置用工作台的多规格面板支撑装置
KR20100023258A (ko) 평판디스플레이 패널 검사 장비 및 방법
CN105445972B (zh) 探针移动装置
CN106501974B (zh) 液晶显示面板检查装置的探头单元位置调整装置
JP2005017179A (ja) 表示パネルの検査装置および検査方法
CN101995679B (zh) 多探头单元
TWI328121B (en) Apparatus for inspecting display panel and method for inspecting display panel using the same
CN108957802B (zh) 一种用于lcd的视觉检测设备
TWI258591B (en) Flat display panel tester
KR20070103990A (ko) 표시 패널의 검사 장치 및 검사 방법
CN101995680B (zh) Lcd检测设备的校准台
KR101663755B1 (ko) 인덱스형 액정 셀 검사장치
JP2010014552A (ja) アレイテスト装備
KR20080098087A (ko) 회로기판의 검사장치
TWI741333B (zh) 印刷電路板之孔位資訊的檢測方法及設備
JP2001296547A (ja) 液晶基板用プローバ
KR101977305B1 (ko) 셀 얼라인을 통한 디스플레이 패널의 열화상 검사장치
JP3407341B2 (ja) 表示デバイス検査装置
JP3288568B2 (ja) アライメント装置および方法
KR100797571B1 (ko) 복합 검사기
KR100522752B1 (ko) 에이.오.아이 기능을 구비한 엘시디 리페어 장비 및 리페어방법
JPH08115954A (ja) 検査装置
KR20030018265A (ko) 액정디스플레이 패널 검사장치
KR20130013286A (ko) 연성기판 검사장치
JP2002098934A (ja) 検査装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C56 Change in the name or address of the patentee

Owner name: KLT

Free format text: FORMER NAME: UBPREC CO., LTD.

CP01 Change in the name or title of a patent holder

Address after: Gyeonggi Do, South Korea

Patentee after: KLT

Address before: Gyeonggi Do, South Korea

Patentee before: Ubprec Co., Ltd.

CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130424

Termination date: 20150924

EXPY Termination of patent right or utility model