CN101970363A - Scribing device and scribing method - Google Patents

Scribing device and scribing method Download PDF

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Publication number
CN101970363A
CN101970363A CN2009801029485A CN200980102948A CN101970363A CN 101970363 A CN101970363 A CN 101970363A CN 2009801029485 A CN2009801029485 A CN 2009801029485A CN 200980102948 A CN200980102948 A CN 200980102948A CN 101970363 A CN101970363 A CN 101970363A
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CN
China
Prior art keywords
line
substrate
panel substrate
scribe head
guide rail
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Granted
Application number
CN2009801029485A
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Chinese (zh)
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CN101970363B (en
Inventor
西尾仁孝
中田胜喜
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Mitsuboshi Diamond Industrial Co Ltd
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Mitsuboshi Diamond Industrial Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/027Scoring tool holders; Driving mechanisms therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/07Cutting armoured, multi-layered, coated or laminated, glass products
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs

Abstract

Each scribing wheel of a plurality of scribe heads is positioned accurately at a predetermined scribe start position of a panel substrate, and interpolation processing is performed with high precision. An upper guide rail (31) and a lower guide rail (32) are provided along the X direction orthogonally intersecting the Y direction along the conveyance direction of a bonding panel substrate (90) held by a substrate holding mechanism, and each of the upper guide rail (31) and the lower guide rail (32) is provided with a pair of slidable upper scribe heads (33) and a pair of slidable lower scribe heads (40). Each upper scribe head (33) and each lower scribe head (40) are provided, respectively, with an upper slide head portion (34) and a lower slide head portion (38) for respectively sliding in the Y direction an upper cutter head (35) and a lower cutter head (39) each having a scribing wheel.

Description

Chalker and scribble method
Technical field
The scribble method that the present invention relates to chalker and used this chalker, this chalker are used for ruling on the display panel substrate of the hard brittle materials such as display panel substrate that the FPD (flat-panel monitor) that with the liquid-crystal display is representative uses.
Background technology
For the display panel substrate that uses among the FPD such as liquid-crystal display,, thereby form many independently individual monitor substrates simultaneously usually by large-sized motherboard being rule and block.Being used for the chalker that the counter plate substrate rules for example has disclosed at patent documentation 1 (TOHKEMY 2002-20133 communique).
Fig. 7 represents disclosed chalker in this communique.Chalker shown in Figure 7 has: worktable 81, and the display panel substrate 70 that will form line with the horizontality mounting keeps this display panel substrate 70 afterwards; A plurality of scribe heads 82 are separately installed with the tracing wheel that the display panel substrate 70 that remains on this worktable 81 is rule on each scribe head 82; And build bridge 83, and being provided with guide rail 83a, each scribe head 82 is installed on this guide rail 83a in the mode that can slide independently respectively.
For the worktable 81 that display panel substrate 70 is remained horizontality, display panel substrate 70 is being held under the situation of horizontality, can promptly carry out positive and negative rotation around Z-axis around θ direction shown in Figure 7.Bridge formation 83 sets up in the mode of crossing over worktable 81, and guide rail 83a is configured in worktable 81 tops with horizontality.By linear motor mechanism, make each scribe head 82 of being installed on the guide rail 83a can be respectively in the enterprising line slip of directions X along the length direction of guide rail 83a.And worktable 81 can be the enterprising line slip of Y direction in the direction that is orthogonal to guide rail 83a.
The bottom of each scribe head 82 is respectively arranged with tracing wheel (break bar blade) 82a that can carry out lifting.On the display panel substrate 70 that each tracing wheel 82a is crimped on remain on the worktable 81, and relatively move, thereby on the predetermined position of display panel substrate 70, rule with respect to display panel substrate 70.Thus, on display panel substrate 70, form line.
In addition, chalker shown in Figure 7 is provided with: a pair of pick up camera 84, the calibration mark that is arranged on the display panel substrate 70 is made a video recording; And image display device 85, show the image of making a video recording by each pick up camera 84; Or the like.
In the chalker that constitutes like this, if on worktable 81, keep display panel substrate 70, then according to the calibration mark of making a video recording by a pair of pick up camera 84, worktable 81 is along θ direction rotation, and the relative position between the guide rail 83a that remains in display panel substrate 70 and bridge formation 83 on the worktable 81 is positioned.Then, each scribe head 82 slides on directions X respectively, makes that the tracing wheel 82a of each scribe head 82 is mutually opposed with the predetermined Y direction line zero position on the display panel substrate 70.And if the tracing wheel 82a of each scribe head 82 is mutually opposed with the Y direction line zero position on the display panel substrate 70, then each tracing wheel 82a descends respectively, is crimped on the Y direction line zero position of display panel substrate 70.
If be in this state, 83 integral body of then building bridge move on the Y direction, thereby the tracing wheel 82a of each scribe head 82 forms many line along the Y direction simultaneously.
As mentioned above, by a plurality of scribe heads 82 are set, for example can form many parallel line simultaneously along the Y direction.Therefore, can implement to be used for blocking out the line of a plurality of display panel substrates expeditiously from the generatrix base board.
On the other hand,, exist and adopt the trend of larger sized display panel substrate,, require the mounting bed dimension of chalker also to increase in order to tackle this demand as motherboard at the manufacturing workshop of FPD.But, if increase the mounting bed dimension, then by the scribing position precision that worktable is rotated keep the motherboard two ends difficulty more that will become.That is be to make worktable around the mechanism that turning axle rotates owing to what adopt,, so aspect the resolution that improves rotation angle, have the restriction in the mechanism to a certain degree by motor.And if the size of mounting worktable increases, then mounting worktable self becomes heavy, and its result causes rotating mechanism also will maximize.Because these problems, the mounting worktable that is used for the chalker of large size motherboard does not have to adopt the Machine Design that is assembled with rotating mechanism.
Under the non-rotary situation of mounting worktable of chalker, if motherboard in mounting a little obliquely under the state on the mounting worktable and rule, even the chalker of Fig. 7 only carries a scribe head, following problem still appears.That is, make after scribe head moves on directions X, from predetermined X position when the Y direction forms line, with the motherboard tilt quantity that is formed line accordingly, line also is formed obliquely.
In order to address this problem, to have and adopt disclosed line interpolation method in the patent documentation 2 (the special fair 6-2597 communique of Japan) etc.
Under the situation of the chalker of the Fig. 7 that has carried a scribe head, remain in the display panel substrate 70 on the worktable 81 and 83 the guide rail 83a of building bridge between relative position relation, come computing by carrying out picture processing in advance according to the calibration mark of making a video recording by a pair of pick up camera 84, so carry out linear interpolation according to this operation result, make the tracing wheel 82a be installed under the scribe head 82 move along each line preset lines on the display panel substrate 70 along the Y direction.This linear interpolation carries out in the following way, that is, whenever 83 integral body of building bridge move predetermined slight distance on the Y direction, make each tracing wheel 82a move predetermined slight distance on directions X, thereby carry out this linear interpolation.
And, also developed the upper and lower surface of the generatrix base board of using at FPD and rule simultaneously and isolating cutting device up and down, still, in this device, directly motherboard is rule owing to being transferred under the next state, therefore adopted above-mentioned linear interpolation gimmick at substrate.
Patent documentation 1: TOHKEMY 2002-20133 communique
Patent documentation 2: the special fair 6-2597 communique of Japan
In chalker shown in Figure 7, be equipped with a plurality of scribe heads 82.Therefore, when beginning to rule, the line zero position that needs to be installed in the tracing wheel 82a on each scribe head is configured under the state of correctly orientating same linearity as.But, owing to all scribe heads 82 all are installed on the bridge formation 83, thus in case display panel substrate 70 is inconsistent with the rectilinear direction of bridge formation 83, and keep certain angle ground inclination mounting with this direction, the zero position of ruling is alignd.
Summary of the invention
The present invention proposes in order to address this is that, and its purpose is, chalker and scribble method on a kind of predetermined line zero position that each scribing unit of a plurality of scribe heads correctly can be positioned at brittle substrates such as display panel substrate are provided.Another object of the present invention is to, provide a kind of can be rapidly and respectively each scribing unit of a plurality of scribe heads is carried out the chalker and the scribble method of linear interpolation accurately.
Chalker of the present invention is characterized in that, has: the substrate holding unit remains horizontality with brittle substrate; A plurality of scribe heads, each scribe head have the scribing unit that the described brittle substrate that is kept by this substrate holding unit is rule respectively; And guide rail, keep this a plurality of scribe heads, making each scribe head can be that directions X slides along the length direction of guide rail; Can be by described brittle substrate and described guide rail that described substrate holding unit keeps along relatively moving with the orthogonal Y direction of described directions X, described each scribe head has sliding unit, and this sliding unit makes the described scribing unit that is arranged on each scribe head slide along described Y direction.
Preferred described substrate holding unit can be carried the described brittle substrate that is kept on described Y direction.
Preferred described guide rail is arranged at the top of the described brittle substrate that is kept by described substrate holding unit.
Preferred described brittle substrate is 1 display panel substrate.
Preferred described guide rail is arranged at the above and below of the described brittle substrate that is kept by described substrate holding unit respectively, is respectively arranged with described a plurality of scribe head on this guide rail.
Preferred described brittle substrate is the glue panel substrate that is bonded by a pair of display panel substrate.
Any one of the described scribe head that is provided with on the described guide rail above the preferably described brittle substrate is provided with roller, and this roll-in is connected on the upper surface of described glue panel substrate.
Preferred described scribing unit is a tracing wheel.
Preferred described each scribe head also has makes described tracing wheel be crimped on the unit of described brittle substrate.
In addition, the present invention relates to scribble method, this method utilizes described chalker that described brittle substrate is rule, and described scribble method comprises: the operation that described guide rail is positioned with respect to the described brittle substrate that is kept by described substrate holding unit; And, described each scribe head is moved on described directions X along described guide rail, and the described scribing unit that makes described each scribe head moves on described Y direction, make this scribing unit respectively with described brittle substrate on the opposed operation of line zero position.
Preferred described scribble method also comprises: make respectively to be crimped on respectively on each described line zero position with opposed described each scribe head of each described line zero position the operation that the described brittle substrate that kept by described substrate holding unit and described guide rail are relatively moved along described Y direction.
Preferred described scribble method also comprises: make respectively to be crimped on respectively on each described line zero position with opposed described each scribe head of each described line zero position the operation that described each scribe head is moved on described directions X along described guide rail respectively.
Preferred described scribble method also comprises: make described each scribe head respectively along described guide rail during moving on the described directions X, described scribing unit is moved on described Y direction, carry out the operation of linear interpolation thus.
The invention effect
In chalker of the present invention and scribble method, even be configured at the length direction of the guide rail that the line preset lines of brittle substrate keeps along its length slidably with respect to a plurality of scribe heads that will be configured in length direction under the situation of vergence direction (direction beyond the parallel or vertical direction), by making scribing unit independent sliding unit that moves on the Y direction being provided with respectively on a plurality of scribe heads, thereby the scribing unit of each scribe head is correctly alignd with each zero position of ruling on the brittle substrate.That is, when utilizing a plurality of scribing units simultaneously in a plurality of line that forms on the brittle substrate along the Y direction, the line zero position that can make each scribing unit is in directions X (with the parallel direction of preset lines of ruling) proper alignment.And, when utilizing a plurality of scribing units to form line (or form simultaneously on 1 line that is arranged in directions X a plurality of line) simultaneously cutting apart along 1 line of directions X on the brittle substrate, can make the line zero position of each scribing unit go up proper alignment at directions X (on the line preset lines).Therefore, can shorten from brittle substrate (motherboard) and cut out rectangular blocking the required time of substrate.
Description of drawings
Fig. 1 is the stereographic map of the summary structure of expression chalker of the present invention.
Fig. 2 is the stereographic map that the summary structure of the major portion of chalker of the present invention is amplified expression.
Fig. 3 is the stereographic map of the sliding snout that uses in the chalker of the present invention.
Fig. 4 is the front view of the sliding snout that uses in the chalker of the present invention.
Fig. 5 is the stereographic map of the cutterhead portion that uses in the chalker of the present invention.
Fig. 6 (a) and (b) are respectively the vertical views of sticking panel substrate that is used to illustrate the action of chalker of the present invention.
Fig. 7 is the stereographic map of the summary structure of the existing chalker of expression.
Description of reference numerals
10 carry supporting device (base supporting mechanism); 30 line members; 31 upper ralls; 32 lower guide; 33 top scribe heads; 34 top sliding snouts; The 34m servomotor; The 34n synchronizing wheel; The 34p synchronizing wheel; 34q is with synchronously; 35 top cutterhead portions; The 35a servomotor; The 35m tool parts; The 35n holding member; The 35p tracing wheel; 36 roller heads; 37 shooting heads; 38 bottom sliding snouts; 39 bottom cutterhead portions; 40 bottom scribe heads
Embodiment
Below, with reference to the accompanying drawings, embodiments of the present invention are described.
Fig. 1 is the stereographic map of the summary structure of expression chalker of the present invention, and Fig. 2 is the stereographic map that its major portion is amplified expression.The glue panel substrate 90 that this chalker for example is used for display panels is used blocks into pre-sizing.Glue panel substrate 90 by a pair of display panel substrate each other with bonding mutually across the state of predetermined space and be filled with liquid crystal and form.As shown in Figure 1, chalker of the present invention possesses: a pair of base supporting mechanism 10, want intercepted glue panel substrate 90 with the horizontality mounting; And line member 30, be configured between two base supporting mechanisms.
Each base supporting mechanism 10 constitutes according to horizontality and carries with horizontality by the display panel substrate 90 of mounting, and 30 pairs of line members are blocked by the glue panel substrate 90 that two base supporting mechanisms remain horizontality.
A pair of base supporting mechanism 10 is made of a plurality of travelling belts 11 respectively, this travelling belt 11 will be held in horizontality with the glue panel substrate 90 of horizontality mounting, and go up this glue panel substrate 90 is carried at pre-determined direction (with the orthogonal direction of length direction of line member 30).
Below, as shown in Figure 1, to be made as the Y direction by the direction of base supporting mechanism 10 transportation panel substrates 90, will be made as directions X, will be made as the Z direction with Y direction and the orthogonal above-below direction of directions X with the orthogonal horizontal direction of Y direction (length direction of line member 30).
As shown in Figure 2, the line member 30 that is disposed between a pair of base supporting mechanism 10 has upper rall 31 and lower guide 32, and this upper rall 31 and lower guide 32 are respectively along carrying the orthogonal direction of direction (directions X) of glue panel substrate 90 to dispose with horizontality with base supporting mechanism 10.Upper rall 31 and lower guide 32 are integrated with the state across appropriate intervals on above-below direction.Base supporting mechanism 10 to glue panel substrate 90 that+Y direction is carried by the gap between upper rall 31 and the lower guide 32.
Upper rall 31 is provided with a pair of top scribe head 33, and this a pair of top scribe head 33 can slide along upper rall 31 respectively.Each top scribe head 33 has top sliding snout 34 respectively, and this top sliding snout 34 can slide on the directions X of the length direction of upper rall 31.Each top sliding snout 34 constitutes and can slide on directions X by linear motor mechanism, is respectively arranged with the slide block 31a of the linear motor mechanism that can slide along upper rall 31 on the upper rall 31.With plumbness web 31b is installed respectively on each slide block 31a, is separately installed with top sliding snout 34 on this web 31b.By a pair of top scribe head 33, can be formed on the line of the pair of parallel on the Y of predetermined space direction on the directions X simultaneously at the upper surface of glue panel substrate 90.And, can be formed on directions X simultaneously and be positioned at a plurality of line on 1 line (or 1 line 2 cut apart and form simultaneously line).
And, being separately installed with shooting head 37 on each web 31b, this shooting head 37 is integral with each top sliding snout 34, and can slide along upper rall 31.Each shooting head 37 is provided with the pick up camera that the calibration mark that is arranged on the glue panel substrate 90 is made a video recording, if glue panel substrate 90 is transported between upper rall 31 and the lower guide 32, then respectively the calibration mark that is arranged on the glue panel substrate 90 is made a video recording by each pick up camera.
And, be separately installed with (cutter head) 35 of top cutterhead portion and roller head (roller head) 36 on each top sliding snout 34.For roller head 36, be equipped with to be shaped as even substitute the tracing wheel in the cutterhead portion and be pressed against the roller that also can not form line on the substrate, structure in addition is identical with cutterhead portion.
Lower guide 32 is provided with a pair of bottom scribe head 40, and this a pair of bottom scribe head 40 can slide on directions X along lower guide 32 respectively, is respectively arranged with bottom sliding snout 38 on each bottom scribe head 40.Each bottom sliding snout 38 is installed on the slide block (not shown) of the linear motor mechanism that can slide along the length direction of lower guide 32.Be separately installed with bottom cutterhead portion 39 on each bottom sliding snout 38.
By a pair of bottom scribe head 40, can be formed on the line of the pair of parallel on the Y of predetermined space direction on the directions X simultaneously at the lower surface of glue panel substrate 90.And, can be formed on directions X simultaneously and be positioned at a plurality of line on 1 line (or 1 line 2 cut apart and form simultaneously line).
And,, can form line simultaneously at the upper surface and the lower surface of glue panel substrate 90 by top scribe head 33 and bottom scribe head 40.Under this situation, the top cutterhead portion 35 that is installed on the top scribe head 33 is mutually opposed across glue panel substrate 90 with the bottom cutterhead portion 39 on being installed in bottom scribe head 40.
The roller head 36 that is installed on the top scribe head 33 is only forming under the situation of line at the lower surface of glue panel substrate 90, as required, according to being used with the state of the upper surface of pushing the glue panel substrate across glue panel substrate 90 and bottom cutterhead portion 39 opposed modes.For example, only when the lower surface of glue panel substrate 90 forms line, if do not use the roller head 36 that is installed on the top scribe head 33, then according to characteristics such as the size of glue panel substrate 90, thickness rigidity, can cause substrate 90 crooked and hinder and form suitable line from the pressing force of bottom cutterhead portion 39 sometimes.By using roller head 36, make top cutterhead portion 35 mutually opposed across glue panel substrate 90 with bottom cutterhead portion 39, can under the identical situation of the situation that forms line simultaneously with upper surface and lower surface, only form line at lower surface at glue panel substrate 90.
Fig. 3 be on the top scribe head 33 that is arranged on the upper rall 31 top sliding snout 34 (be configured in shown in Figure 1+directions X rightabout-the directions X side) stereographic map, Fig. 4 is the front view of this top sliding snout 34.This top sliding snout 34 has upside module 34a of portion and the downside module 34b of portion that disposes across proper spacing on above-below direction, these upside modules 34a of portion and the downside module 34b of portion are installed on the web 31b, and this web 31b is installed on the slide block 31a of linear motor mechanism.Slip direction at the upside module 34a of portion is the both sides of directions X, is respectively arranged with the slide rail 34c that extends with horizontality along the Y direction, is respectively arranged with the upside orienting lug 34d that can slide on each slide rail 34c.Slip direction at the downside module 34b of portion is the both sides of directions X, also is respectively arranged with the slide rail 34e that extends with horizontality along the Y direction, is respectively arranged with the downside orienting lug 34f that can slide on each slide rail 34e.
Be arranged on the upside orienting lug 34d of top sliding snout 34 both sides and the downside orienting lug 34f and with plumbness mounting plate 34g be installed respectively.And, on that be disposed at this top sliding snout 34 and mounting plate 34g another sliding snout 34 opposed sides (Fig. 2+directions X side), top cutterhead portion 35 (referring to Fig. 2) is installed, be disposed at this top sliding snout 34 with another sliding snout 34 away from side (with Fig. 2+a side that the directions X side is opposite, promptly-directions X side) mounting plate 34g on, roller head 36 (referring to Fig. 2) is installed.
Between upside module 34a of portion and the downside module 34b of portion, dispose ball screw 34h along the Y direction with horizontality, screwed togather on this ball screw 34h and each mounting plate 34g all-in-one-piece slide block 34.By rotating and reverse of ball screw 34h, the slide block 34i that one is installed on each mounting plate 34g slides along the Y direction, follows the slip that slide block 34i carries out along the Y direction, and each mounting plate 34g slides.Thus, top cutterhead portion 35 and the roller head 36 that is installed on each mounting plate 34g slides along the Y direction with being integral.
The top of the upside module 34a of portion is provided with servomotor 34m.The turning axle of servomotor 34m is extending with horizontality on (Y direction) in the opposite direction with shown in Figure 2+Y side, and the leading section one of servomotor 34m is equipped with synchronizing wheel 34n.The below of synchronizing wheel 34n disposes the synchronizing wheel 34p of the slave end that is installed in ball screw 34h leading section.And two synchronizing wheel 34n, 34p are last can be around being wound with synchronous band 34q week movably.
Servomotor 34m can rotate and reverse, and the rotation of servomotor 34m is delivered to downside synchronizing wheel 34p by synchronous band 34q from upside synchronizing wheel 34n, and the ball screw 34h that one is installed on the downside synchronizing wheel 34p rotates.And by ball screw 34h rotation, slide block 34i slides along the Y direction, and each mounting plate 34g that is installed on the slide block 34i slides along the Y direction respectively.Thus, top cutterhead portion 35 and the roller head 36 that is arranged on each mounting plate 34g slides along the Y direction.
Fig. 5 is the stereographic map of top cutterhead portion 35.In top cutterhead portion 35, servomotor 35a is installed on the top that is arranged at a mounting plate 34g on the sliding snout 34.Servomotor 35a is installed on the mounting plate 34g according to the handstand state that the axial rotary downside extends with plumbness.Druum cam 35b is installed, this druum cam 35b and the rotation of turning axle one on the turning axle of servomotor 35a.The lower surface of druum cam 35b is for becoming the cam surface 35c of heeling condition with respect to horizontality.
And top cutterhead portion 35 has the linear bearing 35k that is arranged at mounting plate 34g bottom, and the mode that this linear bearing 35k goes up with direction slip up and down maintains holding member 35n.The bottom of holding member 35n maintains the tool parts 35m that is used for forming line on glue panel substrate 90.The bottom of tool parts 35m is provided with tracing wheel 35p.Keeping the bottom to be provided with the tool parts 35m of tracing wheel 35p on the holding member 35n, this tool parts 35 can rotate around Z-axis.Be provided with between holding member 35n and the mounting plate 34g as elastomeric whisker 35s, this whisker 35s to holding member 35n with respect to mounting plate 34g towards the top application of force.
In addition, the tool parts 35m that the bottom is provided with tracing wheel 35p constitute can with respect to holding member (below, be called the cutter holding member again.) 35n dismantles, for example disclosed in the WO2007/063979 communique, tool parts 35m can constitute and can easily load and unload with respect to cutter holding member 35n by magnetite.And,, also can use in No. 3074143 communiques of Japanese Patent disclosed tracing wheel etc. in disclosed break bar, the WO2007/063979 communique as tracing wheel 35p.
On the top of cutter holding member 35n, be wholely set with the cam follower 35d and the cutter holding member 35n of the cam surface 35c butt of druum cam 35b.Cam follower 35d forms the roll shape that can rotate, and cutter holding member 35n is by the whisker 35S application of force upward, thus with the cam surface 35c crimping of druum cam 35b.
As shown in Figure 2, another mounting plate 34g of top sliding snout 34 is provided with roller head 36, this roller head 36 only is with the difference of the structure of top cutterhead portion 35, the holding member 35n of top cutterhead portion 35 keeps tool parts 35m, and the holding member of roller head 36 keeps roller member, and other structures are identical with the structure of top cutterhead portion 35.The effect of roller member is, for example, and only when the lower surface of display panel substrate forms line, to exert pressure across the upper surface of display panel substrate and bottom cutterhead portion 39 opposed mode counter plate substrates.
As shown in Figure 2, can be along being respectively arranged with bottom sliding snout 38 on each bottom scribe head 40 of lower guide 32 slips.Each bottom sliding snout 38 constitutes reversedly with top sliding snout 34 above-below directions respectively, and in addition, structure is identical with top sliding snout 34.
And, the outside separately of each bottom sliding snout 38 (with respect to another bottom sliding snout 38 away from side) bottom cutterhead portion 39 only is installed respectively.Each bottom cutterhead portion 39 puts upside down with top cutterhead portion 35 above-below directions, and in addition, structure is identical with top cutterhead portion 35.
The control of the driving of each top slip-on head 34 under the linear motor mechanism effect and slip, the servomotor 34m in each top slip-on head 34 and the servomotor in each bottom slip-on head 38 of each bottom slip-on head 40, the driving of the servomotor in servomotor 35a, each roller head 36 and each bottom slip-on head 39 in each top cutterhead portion 35, the driving of substrate holding mechanism etc. is undertaken by not shown s operation control portion.
The action of ruling on glue panel substrate 90 by the chalker of the present invention of such formation is described.Below, shown in Fig. 6 (a) and (b), illustrate by chalker of the present invention, block out 8 scribble methods when blocking glue panel substrate 91 from 1 glue panel substrate 90.Shown in Fig. 6 (a),, block out 4 of length directions (Y direction) along this glue panel substrate 90, the glue panel substrate 91 of 2 of broad ways (directions X) from large-sized glue panel substrate 90.Under this situation, shown in Fig. 6 (a), upper panel substrate in the glue panel substrate 90 and downside base board are blocked by 4 Y direction line preset lines 90a, 90b, 90c, 90d alongst.In addition, 4 line are followed successively by the 1st line preset lines 90a, the 2nd line preset lines 90b, the 3rd line preset lines 90c, the 4th line preset lines 90d from-directions X side.
In addition, the 1st line preset lines 90a of the upper panel substrate in the glue panel substrate 90 and the position of the 3rd line preset lines 90c, there is a little difference in the position with the 1st line preset lines 90a and the 3rd line preset lines 90c of downside base board.The 1st line preset lines 90a of the position of on the downside base board the 1st line preset lines 90a on the upper panel substrate be (+directions X side) in the inner part, and the 3rd line preset lines 90c of the position of the 3rd on downside base board line preset lines 90c on the upper panel substrate be (+directions X side) in the inner part.This is because when on the upper panel substrate in blocking glue panel substrate 91 electrode wires being set, the terminal of this electrode wires etc. need be arranged on the side edge part of upper panel substrate, so will increase the area of upper panel substrate.In addition, in Fig. 6 (a) and (b), convenient for the purpose of, the upper panel substrate is expressed as consistent with each line preset lines on the downside base board.
In addition, in each line preset lines of broad ways on the glue panel substrate 90 (directions X), with the line preset lines of the most close+Y direction side from-directions X side, be made as the 5th line preset lines 90e and the 6th line preset lines 90f respectively, will with respect to the 5th line preset lines 90e and the 6th line preset lines 90f in-line preset lines that Y direction side is adjacent respectively, be made as the 7th line preset lines 90g and the 8th line preset lines 90h respectively.
In chalker of the present invention, each tracing wheel (break bar blade) 35p by each top cutterhead portion 35 in a pair of top scribe head 34, the 1st line preset lines 90a and the 3rd line preset lines 90c on the upper panel substrate form line simultaneously, and, by each tracing wheel of each bottom cutterhead portion 39 in a pair of bottom scribe head 40, along with the upper panel substrate on the 1st line preset lines 90a and the 3rd line preset lines 90c is opposed, 2 not shown lines on the downside base board lower surface form line simultaneously.At this moment, the scribing position that on downside base board lower surface, forms, the 1st line preset lines 90a on the downside base board and the 3rd line preset lines 90c, (directions X side) skew laterally.This be because, as mentioned above, a side edge part of upper panel substrate is provided with the terminal of electrode wires etc., the position of on the upper panel substrate the 1st line preset lines 90a and the position of the 3rd line preset lines 90c, the position of the position of the 1st line preset lines 90a on the downside base board and the 3rd line preset lines 90c respectively, (directions X side) skew laterally.
Then, by each tracing wheel 35p of each bottom cutterhead portion 39 in a pair of bottom scribe head 40, the 1st line preset lines 90a and the 3rd line preset lines 90c on the downside base board form line simultaneously.At this moment, each roller head 36 is rotated, make to push each roller head 36 from the upper surface side of upper panel substrate across the opposed mode of each tracing wheel 35p of glue panel substrate and each bottom cutterhead portion 39.
Afterwards, each tracing wheel 35p by a pair of top cutterhead portion 35, the 2nd line preset lines 90b and the 4th line preset lines 90d on the upper panel substrate form line simultaneously, and, by each tracing wheel of a pair of bottom cutterhead portion 39, the 2nd line preset lines 90b and the 4th line preset lines 90d on the downside base board form line simultaneously.After this, each tracing wheel 35p by a pair of top cutterhead portion 35, the 5th line preset lines 90e and the 6th line preset lines 90f on the upper panel substrate form line simultaneously, and, by each tracing wheel of a pair of bottom cutterhead portion 39, the 5th line preset lines 90e and the 6th line preset lines 90f on the downside base board form line simultaneously.Then, along forming line with respect to the 5th line preset lines 90e and the 6th line preset lines 90f adjacent respectively the 7th line preset lines 90g and the 7th line preset lines 90h on-Y direction along directions X, then, along forming line successively with respect to formed line adjacent each line preset lines on-Y direction along directions X.
Below this scribble method further is elaborated.At first, if be positioned at-a base supporting mechanism 10 on the Y direction on mounting glue panel substrate 90, then this base supporting mechanism 10 remains on horizontality with glue panel substrate 90.Under this situation, base supporting mechanism 10 is not correctly located on directions X and Y direction glue panel substrate 90, and the length direction that remains on glue panel substrate 90 is substantially along the state of Y direction.Then, base supporting mechanism 10 is carried the glue panel substrate 90 that is kept on+Y direction, and the end of+Y direction side is inserted between upper rall 31 and the lower guide 32.
If be in this state, then, each scribe head 33 that is arranged on the upper rall 31 is slided respectively along the length direction of upper rall 31 for the calibration mark on the predetermined position that is arranged on glue panel substrate 90 by the camera photography that is arranged at each shooting head 37.Under this situation, to be arranged at the calibration mark on the glue panel substrate 90 in order making a video recording, as required, glue panel substrate 90 to be moved on the Y direction by base supporting mechanism 10.
Then, if making a video recording respectively, the pick up camera that is provided with on each shooting head 37 by each scribe head 33 is arranged at calibration mark on the glue panel substrate 90, then according to the calibration mark of making a video recording, move glue panel substrate 90 by base supporting mechanism 10, make glue panel substrate 90 be in the predetermined position with respect to line member 30.And if glue panel substrate 90 is in the predetermined position with respect to line member 30, then glue panel substrate 90 stops to move.
If be in this state, then the length direction of the width by s operation control portion computing glue panel substrate 90 and upper rall 31 and lower guide 32, be the angle of inclination between the directions X, and, the upper panel substrate of computing glue panel substrate 90 and each line zero position S1, S2 on the downside base board (on the 1st line preset lines 90a and the 1st line preset lines 90c+position of the end of Y direction, referring to Fig. 6 (a)).And, according to this operation result, computing, each top scribe head 33 required for line zero position S1, the S2 top that the tracing wheel 35p that makes each top cutterhead portion 35 lays respectively at the upper panel substrate is along the miles of relative movement of directions X and Y direction respectively, and computing is required for line zero position S1, the S2 below that the tracing wheel that makes each bottom cutterhead portion 39 is positioned at the downside base board, each bottom scribe head 40 is along the miles of relative movement of directions X and Y direction.
Then, according to each operation result, make each top scribe head 33 on directions X, move the miles of relative movement that calculates by linear motor mechanism along upper rall 31, and, rotation drives the servomotor 34m be arranged on each top sliding snout 34 respectively, makes each top cutterhead portion 35 that is installed on each top sliding snout 34 move the miles of relative movement that calculates along the Y direction.The rotation of servomotor 34m is passed to ball screw 34h by a pair of synchronizing wheel 34n, 34p, thereby makes ball screw 34h rotation.Thus, each top cutterhead portion 35 that is installed on each top sliding snout 34 moves on the Y direction.
Thus, each top scribe head 33 moves on directions X by linear motor mechanism, and, the top cutterhead portion 35 of each top scribe head 33 moves on the Y direction, thus the tracing wheel 35p of this top cutterhead portion 35 respectively correctly with the upper panel substrate on the top of line zero position S1, S2 mutually opposed.
Similarly, each bottom scribe head 40 moves along lower guide 32 by linear motor mechanism, and, the bottom cutterhead portion 39 of each bottom scribe head 40 moves along the Y direction, thus the tracing wheel of bottom cutterhead portion 39 respectively correctly with the downside base board on the below of line zero position S1, S2 mutually opposed.
If be in this state, the then servomotor 35a of each top cutterhead portion 35 rotation, thereby druum cam 35b rotation, the cam follower 35d that is crimped on the cam surface 35c of druum cam 35b descends.Thus, the application of force of holding member 35n opposing whisker 35s moves downwards.And, holding member 35n decline predetermined amount, thus each tracing wheel 35p is crimped on line zero position S1, the S2 of the upper panel substrate in the glue panel substrate 90 with predetermined pressure respectively.
Similarly, for each bottom cutterhead portion 38, by the servomotor rotation, holding member is moved upward, and each tracing wheel is crimped on line zero position S1, the S2 of the downside base board in the glue panel substrate 90 with predetermined pressure respectively.
If be in this state, then pass through base supporting mechanism, glue panel substrate 90 moves on+Y direction, and by the tracing wheel 35p of each top cutterhead portion 35, the 1st line preset lines 90a and the 3rd line preset lines 90c on the upper panel substrate of glue panel substrate 90 form line.Similarly, by the tracing wheel of each bottom cutterhead portion 39, along with the upper panel substrate of glue panel substrate 90 on the 1st line preset lines 90a and the 3rd line preset lines 90c is opposed, 2 not shown lines on the downside base board lower surface form line.At this moment, the position of the line that forms on the downside base board lower surface, the 1st line preset lines 90a on the downside base board and the 3rd line preset lines 90c, (directions X side) skew laterally.This be because, as mentioned above, a side edge part at the upper panel substrate is provided with terminal of electrode wires etc., so the position of the line of the 1st on upper panel substrate preset lines 90a and the position of the 3rd line preset lines 90c, the position of the position of the 1st line preset lines 90a on the downside base board and the 3rd line preset lines 90c respectively, (directions X side) skew laterally.
Under this situation, because it is angle of inclination between the directions X that s operation control portion has calculated the length direction of the width of glue panel substrate 90 and upper rall 31 and lower guide 32 in advance, so according to this angle of inclination that calculates, computing the 1st line preset lines 90a and the 3rd line preset lines 90c are with respect to the angle of inclination of Y direction, whenever when+Y direction is carried predetermined distances with glue panel substrate 90, each top scribe head 33 mobile predetermined distance on directions X is so that the tracing wheel 35p of each top cutterhead portion 35 moves along the 1st line preset lines 90a and the 3rd line preset lines 90c respectively.Thus, during conveying glue panel substrate 90 on the Y direction, carrying out linear interpolation, so that the tracing wheel 35p of each top cutterhead portion 35 moves along the 1st line preset lines 90a and the 3rd line preset lines 90c respectively by base supporting mechanism 10.Its result, the tracing wheel 35p of each top cutterhead portion 35 can correctly form line along the 1st line preset lines 90a and the 3rd line preset lines 90c of upper panel substrate.
Similarly, passing through base supporting mechanism 10 during conveying glue panel substrate 90 on the Y direction, the tracing wheel of each bottom cutterhead portion 39 also moves on directions X by linear motor mechanism, thereby carry out linear interpolation, so as respectively along with the upper panel substrate on the 1st line preset lines 90a and the 3rd line preset lines 90c is opposed, 2 not shown lines on the downside base board lower surface move.Thus, the tracing wheel of each bottom cutterhead portion 39 also can correctly form line along described 2 lines of downside base board.
Then, the tracing wheel of each bottom cutterhead portion 39 rule along the 1st line preset lines 90a of downside base board during, the roll-in of roller head 36 be connected on the upper panel substrate with the opposed upper surface of the 1st line preset lines 90a position.Under this situation, each top scribe head 33 moves predetermined distance along directions X and Y direction respectively, thereby the roller head 36 of each top scribe head 33 also moves predetermined distance along directions X and Y direction respectively.Thus, the roller of each roller head 36 is in the opposed state of tracing wheel across upper panel substrate and downside base board and each bottom cutterhead portion 39.Like this, the tracing wheel 35p of bottom cutterhead portion 35 is crimped on the 1st on downside base board lower surface line preset lines 90a's+Y direction side end on the time, rotate by servomotor, the holding member of roller head 36 moves downwards, and the roll-in that holding member kept is connected on the upper surface of glue panel substrate 90.Under this situation, roller is crimped on the upper surface with the opposed upper panel substrate of line zero position of downside base board with predetermined pressure respectively.
If the 1st line preset lines 90a that alongst goes up on upper panel substrate and downside base board so as mentioned above and the 3rd line preset lines 90c form line, then the tracing wheel 35p of each top cutterhead portion 35 is moved upward respectively, is in the state of the upper surface that leaves the upper panel substrate.Similarly, the tracing wheel of each bottom cutterhead portion 39 also moves downwards respectively, is in the state of the lower surface that leaves the downside base board.Afterwards, by base supporting mechanism 10, on the Y direction, carry glue panel substrate 90, and, on directions X, move each top scribe head 33 and each bottom scribe head 40 so that the tracing wheel of the tracing wheel 35p of each top cutterhead portion 35 and each bottom cutterhead portion 39 respectively with glue panel substrate 90 on rule line zero position S3, the S4 of preset lines 90d of the 2nd line preset lines 90b and the 4th mutually opposed.
And, if the tracing wheel of the tracing wheel 35p of each top cutterhead portion 35 and each bottom cutterhead portion 39 respectively with glue panel substrate 90 on the 2nd line preset lines 90b and the line zero position S3 of the 4th line preset lines 90d, S4 is mutually opposed, then move in the same manner with above-mentioned line, the tracing wheel of the tracing wheel 35p of each top cutterhead portion 35 and each bottom cutterhead portion 39 moves (rotation) along the 2nd line preset lines 90b and the 4th line preset lines 90d of upper panel substrate and downside base board with crimped status, thereby forms simultaneously along each line of the 2nd line preset lines 90b and the 4th line preset lines 90d.
If formed the whole line alongst on the glue panel substrate 90 as mentioned above like this, then carry glue panel substrate 90, and on directions X, move each top scribe head 33 and each bottom scribe head 40, move each top cutterhead portion 35 and bottom cutterhead portion 39 on this external Y direction, so that the tracing wheel 35p of each top cutterhead portion 35 is mutually opposed with the line zero position S2 of the line zero position S 1 of the 5th line preset lines 90e of glue panel substrate 90 and the 6th line preset lines 90f respectively, and the tracing wheel of each bottom cutterhead portion 39 similarly respectively with line zero position S1, S2 is mutually opposed.
Then, the tracing wheel of the tracing wheel 35p of each top cutterhead portion 35 and each bottom cutterhead portion 39 is crimped on respectively on line zero position S1, the S2, moves along the 5th line preset lines 90e and the 6th line preset lines 90f respectively.Under this situation, whenever each top scribe head 33 and each bottom scribe head 40 on directions X during mobile predetermined distance, by base supporting mechanism 10, on the Y direction, glue panel substrate 90 is carried predetermined distance, perhaps make each top cutterhead portion 35 and the bottom cutterhead portion 39 mobile predetermined distance on the Y direction that is arranged on each top scribe head 33 and each bottom scribe head 40, the glue panel substrate 90 that carries out thus being undertaken by base supporting mechanism 10 is carried, the linear interpolation of tracing wheel on directions X of the tracing wheel 35p of each top cutterhead portion 35 and each bottom cutterhead portion 39.Thus, the tracing wheel of the tracing wheel 35p of each top cutterhead portion 35 and each bottom cutterhead portion 39 can correctly form and be carried out linear interpolation and along the line of the 5th line preset lines 90e and the 6th line preset lines 90f.
If each line preset lines 90e along upper panel substrate and downside base board, 90f forms line, then to the conveying of glue panel substrate 90, each top scribe head 33 and each bottom scribe head 40 moving on directions X, each top cutterhead portion 35 and bottom cutterhead portion 39 mobile control on the Y direction, make the tracing wheel 35p of each top cutterhead portion 35 and each bottom cutterhead portion 39 tracing wheel respectively with glue panel substrate 90 on along the 7th line preset lines 90g of width and the line zero position S5 of the 8th line preset lines 90h, S6 is mutually opposed.
Then, the tracing wheel of the tracing wheel 35p of each top cutterhead portion 35 and each bottom cutterhead portion 39 is crimped on respectively on line zero position S5, the S6, moves along the 7th line preset lines 90g and the 8th line preset lines 90h respectively.Line action under this situation is with identical along the line action of the 5th line preset lines 90e and the 6th line preset lines 90f.
Afterwards, carry out same action repeatedly, thereby implement the line action along each line preset lines of on the width of glue panel substrate 90, extending.And, rule by forming, thereby finish crossed process along whole line preset lines of on the width of glue panel substrate 90, extending.
If the whole line preset lines on the glue panel substrate 90 form line so as mentioned above, then glue panel substrate 90 is transported to the predetermined operation of blocking, and blocks into each and blocks glue panel substrate 91.
Under this situation, the line that the 1st line preset lines 90a on the downside base board and the 3rd line preset lines 90c form, line than the 1st line preset lines 90a on the upper panel substrate and the 3rd line preset lines 90d formation, near inboard (+directions X), so for example also mention upward from the upper panel upper surface of base plate side maintenance substrate of each truncation surface base board by absorbing unit, thereby unwanted part can be retained on the substrate holding unit 10, can easily unwanted part be removed.
As mentioned above, in chalker of the present invention, by a pair of top scribe head 33 and a pair of bottom scribe head 40 are set, can be respectively on the upper panel substrate of glue panel substrate 90 and downside base board, form a pair of line simultaneously, so can significantly improve the line operating efficiency.
And, the unit that each top cutterhead portion 35 and each bottom cutterhead portion 39 are moved on the Y direction is set respectively on a pair of top scribe head 33 and a pair of bottom scribe head 40, even thereby the length direction (directions X) of the guide rail that keeps slidably along directions X with respect to a pair of top scribe head 33 that will be configured on the length direction (directions X) at the glue panel substrate, and length direction (directions X) tilted configuration that will be configured in the guide rail that a pair of bottom scribe head 40 on the length direction (directions X) keeps slidably along directions X, each top cutterhead portion 35 that also can make cutterhead and each bottom cutterhead portion 39 correctly with glue panel substrate 90 on the line zero position mutually opposed.Therefore, can correctly form along the line of each line preset lines.In addition, during linear interpolation when forming line on directions X in that each top cutterhead portion 35 and each bottom cutterhead portion 39 are moved, by each top cutterhead portion 35 and each bottom cutterhead portion 39 are moved on the Y direction, even thereby upper rall 31 and lower guide 32 integral body are moved on the Y direction, even not mobile glue panel substrate, also can be rapidly and carry out linear interpolation accurately along directions X, can according to circumstances select suitable linear interpolation unit.
In addition, in the above-described embodiment, a pair of top scribe head 33 and a pair of bottom scribe head 40 are set respectively on upper rall 31 and lower guide 32, but also the scribe head more than 3 can be set respectively on upper rall 31 and lower guide 32.And, also can 2 above scribe heads only be set on upper rall 31, be formed for blocking out the line of a plurality of truncation surface base boards from the generatrix base board of 1 big size.
And, also upper rall 31 or lower guide 32 can only be set, a plurality of tops scribe head 33 is set on this upper rall 31 or lower guide 32.
And the brittle substrate as forming line is not limited to the glue panel substrate, can be 1 display panel substrate, and can not be display panel substrate also.
As mentioned above, the present invention that used preferred implementation illustration of the present invention, but the present invention should not be defined and is interpreted as this embodiment.Scope of the present invention should make an explanation according to the claim scope.Those skilled in the art can according to record of the present invention and technology general knowledge, be implemented in full scope of equivalents by the record of concrete preferred implementation of the present invention.For the patent of quoting in this specification sheets, patent application and document, as the concrete record of its content itself in this manual, quote of the reference of its content as this specification sheets.
Utilizability on the industry
Chalker and scribble method that being used for of the present invention relates to rules at the brittle substrates such as display panel substrate of the uses such as liquid crystal panel can easily make the scribing unit of a plurality of scribe heads align with the line original position of being scheduled to respectively.

Claims (13)

1. chalker is characterized in that having:
The substrate holding unit remains horizontality with brittle substrate;
A plurality of scribe heads, each scribe head have the scribing unit that the described brittle substrate that is kept by this substrate holding unit is rule respectively; And
Guide rail keeps this a plurality of scribe heads so that each scribe head can be the mode that directions X slides along the length direction of guide rail;
Described brittle substrate that is kept by described substrate holding unit and described guide rail can be along relatively moving with the orthogonal Y direction of described directions X,
Described each scribe head has sliding unit, and this sliding unit makes the described scribing unit that is arranged on each scribe head slide along described Y direction.
2. chalker according to claim 1, wherein,
Described substrate holding unit can be carried the described brittle substrate that is kept on described Y direction.
3. chalker according to claim 1, wherein,
Described guide rail is arranged at the top of the described brittle substrate that is kept by described substrate holding unit.
4. chalker according to claim 3, wherein,
Described brittle substrate is 1 display panel substrate.
5. chalker according to claim 1, wherein,
Described guide rail is arranged at the above and below of the described brittle substrate that is kept by described substrate holding unit respectively, is respectively arranged with described a plurality of scribe head on this guide rail.
6. chalker according to claim 5, wherein,
Described brittle substrate is the glue panel substrate that is bonded by a pair of display panel substrate.
7. chalker according to claim 6, wherein,
Be arranged on described brittle substrate above described guide rail on any one of described scribe head on, be provided with the roller on the upper surface that is crimped on described glue panel substrate.
8. chalker according to claim 1, wherein,
Described scribing unit is a tracing wheel.
9. chalker according to claim 8, wherein,
Described each scribe head also has makes described tracing wheel be crimped on unit on the described brittle substrate.
10. scribble method, this method is rule to described brittle substrate by the described chalker of claim 1, and wherein, described scribble method comprises:
The operation that described guide rail is positioned with respect to the described brittle substrate that is kept by described substrate holding unit; Then,
Described each scribe head is moved on described directions X along described guide rail, and the described scribing unit that makes described each scribe head moves on described Y direction, make this scribing unit respectively with described brittle substrate on the opposed operation of line zero position.
11. scribble method according to claim 10, wherein,
Also comprise:
Make respectively to be crimped on respectively on each described line zero position the operation that the described brittle substrate that kept by described substrate holding unit and described guide rail are relatively moved along described Y direction with opposed described each scribe head of each described line zero position.
12. scribble method according to claim 10, wherein,
Also comprise:
Make respectively to be crimped on respectively on each described line zero position the operation that described each scribe head is moved on described directions X along described guide rail respectively with opposed described each scribe head of each described line zero position.
13. scribble method according to claim 12, wherein,
Make described each scribe head respectively along described guide rail during moving on the described directions X, described scribing unit is moved on described Y direction, carry out linear interpolation thus.
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CN109824261A (en) * 2017-11-23 2019-05-31 塔工程有限公司 Cutter for substrate and method for dividing substrate
CN109824255A (en) * 2017-11-23 2019-05-31 塔工程有限公司 Cutter for substrate
CN109824261B (en) * 2017-11-23 2022-12-02 塔工程有限公司 Substrate cutting device and substrate cutting method

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JPWO2009093619A1 (en) 2011-05-26
CN101970363B (en) 2013-12-04
TWI435850B (en) 2014-05-01
JP5473129B2 (en) 2014-04-16
KR101164487B1 (en) 2012-07-18

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