CN101970363B - Scribing device and scribing method - Google Patents

Scribing device and scribing method Download PDF

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Publication number
CN101970363B
CN101970363B CN2009801029485A CN200980102948A CN101970363B CN 101970363 B CN101970363 B CN 101970363B CN 2009801029485 A CN2009801029485 A CN 2009801029485A CN 200980102948 A CN200980102948 A CN 200980102948A CN 101970363 B CN101970363 B CN 101970363B
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Prior art keywords
scribe head
substrate
line
panel substrate
guide rail
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CN2009801029485A
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CN101970363A (en
Inventor
西尾仁孝
中田胜喜
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Mitsuboshi Diamond Industrial Co Ltd
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Mitsuboshi Diamond Industrial Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/027Scoring tool holders; Driving mechanisms therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/07Cutting armoured, multi-layered, coated or laminated, glass products
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs

Abstract

Each scribing wheel of a plurality of scribe heads is positioned accurately at a predetermined scribe start position of a panel substrate, and interpolation processing is performed with high precision. An upper guide rail (31) and a lower guide rail (32) are provided along the X direction orthogonally intersecting the Y direction along the conveyance direction of a bonding panel substrate (90) held by a substrate holding mechanism, and each of the upper guide rail (31) and the lower guide rail (32) is provided with a pair of slidable upper scribe heads (33) and a pair of slidable lower scribe heads (40). Each upper scribe head (33) and each lower scribe head (40) are provided, respectively, with an upper slide head portion (34) and a lower slide head portion (38) for respectively sliding in the Y direction an upper cutter head (35) and a lower cutter head (39) each having a scribing wheel.

Description

Chalker and scribble method
Technical field
The scribble method that the present invention relates to chalker and used this chalker, this chalker is for being rule take on the display panel substrate of the hard brittle materials such as display panel substrate of FPD (flat-panel monitor) use that liquid-crystal display is representative.
Background technology
For the display panel substrate used in the FPD such as liquid-crystal display, usually by large-sized motherboard is rule and blocked, thereby form multiple independently individual monitor substrates simultaneously.The chalker of being rule for the counter plate substrate for example has disclosed at patent documentation 1 (TOHKEMY 2002-20133 communique).
Fig. 7 means disclosed chalker in this communique.Chalker shown in Fig. 7 has: worktable 81, and the display panel substrate 70 that will form line with the horizontality mounting is kept this display panel substrate 70 afterwards; A plurality of scribe heads 82, be separately installed with the tracing wheel that the display panel substrate 70 to being held on this worktable 81 is rule on each scribe head 82; And build bridge 83, and being provided with guide rail 83a, each scribe head 82 is arranged on this guide rail 83a in the mode that can be slided independently respectively.
For display panel substrate 70 being remained to the worktable 81 of horizontality, in the situation that display panel substrate 70 is held in to horizontality, can around the θ direction shown in Fig. 7, carry out positive and negative rotation around Z-axis.Bridge formation 83 sets up in the mode of spanning operation platform 81, and guide rail 83a is configured in worktable 81 tops with horizontality.By linear motor mechanism, each scribe head 82 that makes to be arranged on guide rail 83a can be respectively in the enterprising line slip of the directions X of the length direction along guide rail 83a.And worktable 81 can be the enterprising line slip of Y-direction in the direction that is orthogonal to guide rail 83a.
The bottom of each scribe head 82 is respectively arranged with tracing wheel (break bar blade) 82a that can carry out lifting.On the display panel substrate 70 that each tracing wheel 82a is crimped on be held on worktable 81, and relatively moved with respect to display panel substrate 70, thereby rule on the predetermined position of display panel substrate 70.Thus, form line on display panel substrate 70.
In addition, on the chalker shown in Fig. 7, be provided with: a pair of pick up camera 84, the calibration mark be arranged on display panel substrate 70 is made a video recording; And image display device 85, show the image of being made a video recording by each pick up camera 84; Etc..
In the chalker formed like this, if keep display panel substrate 70 on worktable 81, according to the calibration mark of being made a video recording by a pair of pick up camera 84, worktable 81 is along the θ direction rotation, to be held in the display panel substrate 70 on worktable 81 and 83 the guide rail 83a of building bridge between relative position position.Then, each scribe head 82 slides respectively on directions X, makes the tracing wheel 82a of each scribe head 82 and the predetermined Y-direction line zero position on display panel substrate 70 opposite.And, if the line of the Y-direction on the tracing wheel 82a of each scribe head 82 and display panel substrate 70 zero position is opposite, each tracing wheel 82a descends respectively, be crimped on the Y-direction line zero position of display panel substrate 70.
If in this state, 83 integral body of building bridge move on Y-direction, thereby the tracing wheel 82a of each scribe head 82 forms many line along Y-direction simultaneously.
As mentioned above, by a plurality of scribe heads 82 are set, for example can form many parallel line along Y-direction simultaneously.Therefore, can implement expeditiously for block out the line of a plurality of display panel substrates from the generatrix base board.
On the other hand, at the manufacture workshop of FPD, exist and adopt the trend of larger sized display panel substrate as motherboard, in order to tackle this demand, require the mounting bed dimension of chalker also to increase.But, if increase the mounting bed dimension, by the scribing position precision that makes worktable rotary maintain the motherboard two ends, will become more difficult.That is due to what adopt, be, the mechanism that worktable is rotated by motor around turning axle, so, aspect the resolution that improves rotation angle, have the restriction in mechanism to a certain degree.And, if the size of mounting worktable increases, loading worktable self and become heavy, its result causes rotating mechanism also will maximize.Due to these problems, for the mounting worktable of the chalker of large size motherboard, there is no to adopt the Machine Design that is assembled with rotating mechanism.
In the non-rotary situation of mounting worktable of chalker, if motherboard is rule loading a little obliquely in mounting under the state on worktable, even the chalker of Fig. 7 only carries a scribe head, following problem still appears.That is, make scribe head mobile on directions X after, from predetermined X position when Y-direction forms line, with the motherboard tilt quantity that is formed line accordingly, line also is formed obliquely.
In order to address this problem, to have and adopt disclosed line interpolation method in patent documentation 2 (Japanese Patent Publication 6-2597 communique) etc.
In the situation that carried the chalker of Fig. 7 of a scribe head, be held in display panel substrate 70 on worktable 81 and 83 the guide rail 83a of building bridge between relative position relation, carry out in advance image by the calibration mark according to being made a video recording by a pair of pick up camera 84 and process computing, so carry out linear interpolation according to this operation result, make the tracing wheel 82a be arranged under scribe head 82 move along each line preset lines along Y-direction on display panel substrate 70.This linear interpolation carries out in the following way, that is, whenever 83 integral body of building bridge move predetermined slight distance on Y-direction, make each tracing wheel 82a move predetermined slight distance on directions X, thereby carry out this linear interpolation.
And, also developed the cutting device up and down that the upper and lower surface of the generatrix base board of using at FPD is rule simultaneously and separated, still, in this device, directly motherboard is rule owing to being transferred at substrate under next state, therefore adopted above-mentioned linear interpolation gimmick.
Patent documentation 1: TOHKEMY 2002-20133 communique
Patent documentation 2: Japanese Patent Publication 6-2597 communique
In the chalker shown in Fig. 7, be equipped with a plurality of scribe heads 82.Therefore, when starting to rule, need the line zero position that will be arranged on the tracing wheel 82a on each scribe head to be configured under the state of correctly orientating same linearity as.But, because all scribe heads 82 all are arranged on bridge formation 83, thus once display panel substrate 70 is inconsistent with the rectilinear direction of bridge formation 83, and keep certain angle ground to tilt to load with this direction, the zero position that may not make to rule alignment.
Summary of the invention
The present invention proposes in order to address this is that, and its purpose is, chalker and scribble method on a kind of predetermined line zero position that each scribing unit of a plurality of scribe heads correctly can be positioned to the brittle substrates such as display panel substrate are provided.Another object of the present invention is to, provide a kind of can be rapidly and respectively each scribing unit of a plurality of scribe heads is carried out accurately chalker and the scribble method of linear interpolation.
Chalker of the present invention, is characterized in that, has: the substrate holding unit remains horizontality by brittle substrate; A plurality of scribe heads, each scribe head has respectively the scribing unit that the described brittle substrate to being kept by this substrate holding unit is rule; And guide rail, keep the plurality of scribe head, making each scribe head can be that directions X slides along the length direction of guide rail; The described brittle substrate and the described guide rail that by described substrate holding unit, are kept can be relatively moved along the Y-direction with described directions X quadrature, described each scribe head has sliding unit, and the described scribing unit that this sliding unit makes to be arranged on each scribe head slides along described Y-direction.
Preferred described substrate holding unit can be carried kept described brittle substrate on described Y-direction.
Preferred described guide rail is arranged at the top of the described brittle substrate kept by described substrate holding unit.
Preferred described brittle substrate is 1 display panel substrate.
Preferred described guide rail is arranged at respectively the above and below of the described brittle substrate kept by described substrate holding unit, is respectively arranged with described a plurality of scribe head on this guide rail.
Preferred described brittle substrate is the glue panel substrate be bonded by a pair of display panel substrate.
Be provided with roller on any one of the described scribe head preferably arranged on the described guide rail above described brittle substrate, this roll-in is connected on the upper surface of described glue panel substrate.
Preferred described scribing unit is tracing wheel.
Preferred described each scribe head also has makes described tracing wheel be crimped on the unit of described brittle substrate.
In addition, the present invention relates to scribble method, the method utilizes described chalker to be rule to described brittle substrate, and described scribble method comprises: the operation that described guide rail is positioned with respect to the described brittle substrate kept by described substrate holding unit; And, then make described each scribe head move on described directions X along described guide rail, and the described scribing unit of described each scribe head is moved on described Y-direction, make this scribing unit respectively with described brittle substrate on the opposed operation of line zero position.
Preferred described scribble method also comprises: make to be crimped on respectively on each described line zero position with opposed described each scribe head of each described line zero position respectively the operation that the described brittle substrate that kept by described substrate holding unit and described guide rail are relatively moved along described Y-direction.
Preferred described scribble method also comprises: make to be crimped on respectively on each described line zero position with opposed described each scribe head of each described line zero position respectively the operation that described each scribe head is moved on described directions X along described guide rail respectively.
Preferred described scribble method also comprises: during described each scribe head is moved on described directions X along described guide rail respectively, described scribing unit is moved on described Y-direction, carry out thus the operation of linear interpolation.
The invention effect
In chalker of the present invention and scribble method, even in the situation that the length direction of the guide rail that the line preset lines of brittle substrate keeps along its length slidably with respect to a plurality of scribe heads that will be configured in length direction and be configured in vergence direction (direction beyond parallel or vertical direction), make scribing unit independent mobile sliding unit on Y-direction by arranging respectively on a plurality of scribe heads, thereby can make the scribing unit of each scribe head correctly align with each line zero position on brittle substrate.That is,, when utilizing a plurality of scribing units to form a plurality of line along Y-direction on brittle substrate, can make the line zero position of each scribing unit in directions X (with the parallel direction of preset lines of ruling) proper alignment simultaneously.And, utilize a plurality of scribing units will be cut apart and while forming line (or simultaneously forming a plurality of line on 1 line that is arranged in directions X), can make the line zero position of each scribing unit in the upper proper alignment of directions X (on the line preset lines) simultaneously along 1 line of directions X on brittle substrate.Therefore, can shorten from brittle substrate (motherboard) and cut out rectangular blocking the required time of substrate.
The accompanying drawing explanation
Fig. 1 means the stereographic map of the Sketch of chalker of the present invention.
Fig. 2 amplifies by the Sketch of the major portion of chalker of the present invention the stereographic map meaned.
Fig. 3 is the stereographic map of the sliding snout that uses in chalker of the present invention.
Fig. 4 is the front view of the sliding snout that uses in chalker of the present invention.
Fig. 5 is the stereographic map of the cutterhead section that uses in chalker of the present invention.
Fig. 6 (a), (b) are respectively the vertical views of the sticking panel substrate of the action for chalker of the present invention is described.
Fig. 7 means the stereographic map of the Sketch of existing chalker.
Description of reference numerals
10 carry supporting device (base supporting mechanism); 30 line members; 31 upper ralls; 32 lower guide; 33 top scribe heads; 34 top sliding snouts; The 34m servomotor; The 34n synchronizing wheel; The 34p synchronizing wheel; The 34q Timing Belt; 35 top cutterhead sections; The 35a servomotor; The 35m tool parts; The 35n holding member; The 35p tracing wheel; 36 roller heads; 37 shooting heads; 38 bottom sliding snouts; 39 bottom cutterhead sections; 40 bottom scribe heads
Embodiment
Below, with reference to the accompanying drawings, embodiments of the present invention are described.
Fig. 1 means the stereographic map of the Sketch of chalker of the present invention, and Fig. 2 amplifies by its major portion the stereographic map meaned.This chalker for example blocks into pre-sizing for the glue panel substrate 90 that display panels is used.Glue panel substrate 90 is mutually bonding and be filled with liquid crystal and form with the state across predetermined space each other by a pair of display panel substrate.As shown in Figure 1, chalker of the present invention possesses: a pair of base supporting mechanism 10, the glue panel substrate 90 that will be truncated with the horizontality mounting; And line member 30, be configured between two base supporting mechanisms.
Each base supporting mechanism 10 is configured to according to horizontality and carries the display panel substrate 90 loaded with horizontality, and the glue panel substrate 90 that 30 pairs of line members remain horizontality by two base supporting mechanisms is blocked.
A pair of base supporting mechanism 10 consists of a plurality of travelling belts 11 respectively, this travelling belt 11 will be held in horizontality with the glue panel substrate 90 of horizontality mounting, and this glue panel substrate 90 be carried pre-determined direction (with the direction of the length direction quadrature of line member 30) is upper.
Below, as shown in Figure 1, to be made as Y-direction by the direction of base supporting mechanism 10 transportation panel substrates 90, will be made as directions X with the horizontal direction (length direction of line member 30) of Y-direction quadrature, will be made as the Z direction with the above-below direction of Y-direction and directions X quadrature.
As shown in Figure 2, the line member 30 be disposed between a pair of base supporting mechanism 10 has upper rall 31 and lower guide 32, and this upper rall 31 and lower guide 32 are respectively along with base supporting mechanism 10, carrying the direction (directions X) of the direction quadrature of glue panel substrate 90 to configure with horizontality.Upper rall 31 and lower guide 32 are integrated with the state across appropriate intervals on above-below direction.The glue panel substrate 90 that base supporting mechanism 10 is carried to+Y-direction is by the gap between upper rall 31 and lower guide 32.
Be provided with a pair of top scribe head 33 on upper rall 31, this pair of top scribe head 33 can slide along upper rall 31 respectively.Each top scribe head 33 has respectively top sliding snout 34, and this top sliding snout 34 can slide on the directions X of the length direction along upper rall 31.Each top sliding snout 34 is configured to and can slides on directions X by linear motor mechanism, is respectively arranged with the slide block 31a of the linear motor mechanism that can slide along upper rall 31 on upper rall 31.With plumbness, web 31b is installed respectively on each slide block 31a, on this web 31b, is separately installed with top sliding snout 34.By a pair of top scribe head 33, can be formed at the upper surface of glue panel substrate 90 line of the pair of parallel on the Y-direction of predetermined space on directions X simultaneously.And, can be formed on directions X simultaneously and be positioned at a plurality of line (or 1 line 2 is cut apart and formation line simultaneously) on 1 line.
And, being separately installed with shooting head 37 on each web 31b, this shooting head 37 is integral with each top sliding snout 34, and can slide along upper rall 31.Be provided with the pick up camera that the calibration mark to being arranged on glue panel substrate 90 is made a video recording on each shooting head 37, if glue panel substrate 90 is transported between upper rall 31 and lower guide 32, by each pick up camera, respectively the calibration mark be arranged on glue panel substrate 90 is made a video recording.
And, be separately installed with (the cutter head) 35 of top cutterhead section and roller head (roller head) 36 on each top sliding snout 34.For roller head 36, be equipped with to be shaped as even substitute the tracing wheel in cutterhead section and be pressed against the roller that also can not form line on substrate, structure in addition is identical with cutterhead section.
Be provided with a pair of bottom scribe head 40 on lower guide 32, this pair of bottom scribe head 40 can slide on directions X along lower guide 32 respectively, on each bottom scribe head 40, is respectively arranged with bottom sliding snout 38.Each bottom sliding snout 38 is arranged on the slide block (not shown) of the linear motor mechanism that can slide along the length direction of lower guide 32.Be separately installed with bottom cutterhead section 39 on each bottom sliding snout 38.
By a pair of bottom scribe head 40, can be formed at the lower surface of glue panel substrate 90 line of the pair of parallel on the Y-direction of predetermined space on directions X simultaneously.And, can be formed on directions X simultaneously and be positioned at a plurality of line (or 1 line 2 is cut apart and formation line simultaneously) on 1 line.
And, by top scribe head 33 and bottom scribe head 40, can form line at upper surface and the lower surface of glue panel substrate 90 simultaneously.In this situation, the top cutterhead section 35 be arranged on top scribe head 33 is opposite across glue panel substrate 90 with the bottom cutterhead section 39 be arranged on bottom scribe head 40.
Be arranged on roller head 36 on top scribe head 33 only in the situation that the lower surface of glue panel substrate 90 forms line, as required, according to the state of the upper surface to press the glue panel substrate across glue panel substrate 90 and bottom cutterhead section 39 opposed modes, be used.For example, only when the lower surface of glue panel substrate 90 forms line, the roller head 36 be arranged on top scribe head 33 if do not use, according to characteristics such as the size of glue panel substrate 90, thickness rigidity, sometimes from the pressing force of bottom cutterhead section 39, can cause substrate 90 crooked and hinder and form suitable line.By using roller head 36, make top cutterhead section 35 and bottom cutterhead section 39 opposite across glue panel substrate 90, can form under the situation that the situation of line is identical at the upper surface with at glue panel substrate 90 and lower surface simultaneously, only at lower surface, form line.
Fig. 3 be top sliding snout 34 on the top scribe head 33 be arranged on upper rall 31 (be configured in shown in Fig. 1+directions X is rightabout-the directions X side) stereographic map, Fig. 4 is the front view of this top sliding snout 34.This top sliding snout 34 has on above-below direction the upside module 34a of section and the downside module 34b of section across suitable arranged spaced, it is upper that these upside modules 34a of section and the downside module 34b of section are arranged on web 31b, and this web 31b is arranged on the slide block 31a of linear motor mechanism.Slip direction at the upside module 34a of section is the both sides of directions X, is respectively arranged with the slide rail 34c extended with horizontality along Y-direction, is respectively arranged with the upside orienting lug 34d that can slide on each slide rail 34c.Slip direction at the downside module 34b of section is the both sides of directions X, also is respectively arranged with the slide rail 34e extended with horizontality along Y-direction, is respectively arranged with the downside orienting lug 34f that can slide on each slide rail 34e.
Be arranged on the upside orienting lug 34d of top sliding snout 34 both sides and downside orienting lug 34f and with plumbness, mounting plate 34g be installed respectively.And, on that be disposed at this top sliding snout 34 and the mounting plate 34g opposed side of another sliding snout 34 (Fig. 2+directions X side), top cutterhead section 35 (referring to Fig. 2) is installed, be disposed at this top sliding snout 34 with another sliding snout 34 away from side (with Fig. 2+side ,-directions X side that the directions X side is contrary) mounting plate 34g upper, roller head 36 (referring to Fig. 2) is installed.
Between the upside module 34a of section and the downside module 34b of section, dispose ball screw 34h along Y-direction with horizontality, on this ball screw 34h, be screwed with and each mounting plate 34g all-in-one-piece slide block 34.By rotating and reverse of ball screw 34h, the slide block 34i that one is arranged on each mounting plate 34g slides along Y-direction, follows the slip that slide block 34i carries out along Y-direction, and each mounting plate 34g is slided.Thus, the top cutterhead section 35 and the roller head 36 that are arranged on each mounting plate 34g slide along Y-direction with being integral.
The top of the upside module 34a of section is provided with servomotor 34m.The turning axle of servomotor 34m with shown in Fig. 2+direction (Y-direction) that Y-direction is contrary is upper extends with horizontality, the leading section one of servomotor 34m is equipped with synchronizing wheel 34n.The below of synchronizing wheel 34n disposes the synchronizing wheel 34p of the slave end that is installed in ball screw 34h leading section.And two synchronizing wheel 34n, 34p are upper can be wound with Timing Belt 34q movably around week.
Servomotor 34m can be rotated and reverse, and the rotation of servomotor 34m is delivered to downside synchronizing wheel 34p by Timing Belt 34q from upside synchronizing wheel 34n, makes one be arranged on the ball screw 34h rotation on downside synchronizing wheel 34p.And, by ball screw 34h rotation, slide block 34i slides along Y-direction, each mounting plate 34g be arranged on slide block 34i slides along Y-direction respectively.Thus, the top cutterhead section 35 and the roller head 36 that are arranged on each mounting plate 34g slide along Y-direction.
Fig. 5 is the stereographic map of top cutterhead section 35.In top cutterhead section 35, on the top that is arranged at a mounting plate 34g on sliding snout 34, servomotor 35a is installed.The handstand state that servomotor 35a extends with plumbness according to the axial rotary downside is arranged on mounting plate 34g.Druum cam 35b is installed, this druum cam 35b and the rotation of turning axle one on the turning axle of servomotor 35a.The lower surface of druum cam 35b is for becoming the cam surface 35c of heeling condition with respect to horizontality.
And top cutterhead section 35 has the linear bearing 35k that is arranged at mounting plate 34g bottom, this linear bearing 35k is upper maintains holding member 35n in the mode that direction is slided up and down.The bottom of holding member 35n maintains for form the tool parts 35m of line on glue panel substrate 90.The bottom of tool parts 35m is provided with tracing wheel 35p.On holding member 35n, keeping bottom to be provided with the tool parts 35m of tracing wheel 35p, this tool parts 35 can be around vertical axis revolving.Between holding member 35n and mounting plate 34g, be provided with as elastomeric whisker 35s, this whisker 35s to holding member 35n with respect to mounting plate 34g towards the top application of force.
In addition, the tool parts 35m that bottom is provided with tracing wheel 35p be configured to can with respect to holding member (below, be called again the cutter holding member.) 35n dismantled, for example, disclosed in the WO2007/063979 communique, tool parts 35m can be configured to and can easily be loaded and unloaded with respect to cutter holding member 35n by magnetite.And, as tracing wheel 35p, also can use in No. 3074143 communiques of Japanese Patent disclosed tracing wheel etc. in disclosed break bar, WO2007/063979 communique.
On the top of cutter holding member 35n, with cam follower 35d and the cutter holding member 35n of the cam surface 35c butt of druum cam 35b, be wholely set.Cam follower 35d forms the roll shape that can rotate, and cutter holding member 35n is by the whisker 35S application of force upward, thus with the cam surface 35c crimping of druum cam 35b.
As shown in Figure 2, be provided with roller head 36 on another mounting plate 34g of top sliding snout 34, this roller head 36 only is with the difference of the structure of top cutterhead section 35, the holding member 35n of top cutterhead section 35 keeps tool parts 35m, and the holding member of roller head 36 keeps roller member, other structures are identical with the structure of top cutterhead section 35.The effect of roller member is, for example, only, when the lower surface of display panel substrate forms line, with the upper surface across the opposed mode counter plate substrate of display panel substrate and bottom cutterhead section 39, exerts pressure.
Be respectively arranged with bottom sliding snout 38 on each bottom scribe head 40 that can slide along lower guide 32 as shown in Figure 2.Each bottom sliding snout 38 forms reversedly with top sliding snout 34 above-below directions respectively, and in addition, structure is identical with top sliding snout 34.
And, the outside separately of each bottom sliding snout 38 (with respect to another bottom sliding snout 38 away from side) bottom cutterhead section 39 only is installed respectively.Each bottom cutterhead section 39 puts upside down with top cutterhead section 35 above-below directions, and in addition, structure is identical with top cutterhead section 35.
The control of the driving of each top slip-on head 34 under the linear motor mechanism effect and slip, the servomotor 34m in each top slip-on head 34 and the servomotor in each bottom slip-on head 38 of each bottom slip-on head 40, the driving of the servomotor in servomotor 35a, each roller head 36 and each bottom slip-on head 39 in each top cutterhead section 35, the driving of substrate holding mechanism etc. is undertaken by not shown s operation control section.
The action that chalker of the present invention by such formation is rule on glue panel substrate 90 describes.Below, as shown in Fig. 6 (a), (b), illustrate by chalker of the present invention, block out 8 scribble methods while blocking glue panel substrate 91 from 1 glue panel substrate 90.As shown in Fig. 6 (a), from large-sized glue panel substrate 90, block out 4 of the length directions (Y-direction) along this glue panel substrate 90, the glue panel substrate 91 of 2 of broad ways (directions X).In this situation, as shown in Fig. 6 (a), the upper panel substrate in glue panel substrate 90 and downside base board are blocked by 4 Y-direction line preset lines 90a, 90b, 90c, 90d alongst.In addition, 4 line are followed successively by the 1st line preset lines 90a, the 2nd line preset lines 90b, the 3rd line preset lines 90c, the 4th line preset lines 90d from-directions X side.
In addition, the 1st line preset lines 90a of the upper panel substrate in glue panel substrate 90 and the position of the 3rd line preset lines 90c,, there is a little difference in the position with the 1st line preset lines 90a and the 3rd line preset lines 90c of downside base board.The position of on the downside base board the 1st line preset lines 90a is than the 1st line preset lines 90a on the upper panel substrate (+directions X side) in the inner part, and the position of the 3rd on downside base board line preset lines 90c is than the 3rd line preset lines 90c on the upper panel substrate (+directions X side) in the inner part.This is because, while on the upper panel substrate in blocking glue panel substrate 91, electrode wires being set, the terminal of this electrode wires etc. need to be arranged on a side edge part of upper panel substrate, so will increase the area of upper panel substrate.In addition, in Fig. 6 (a), (b), for the purpose of facilitating, the upper panel substrate is expressed as consistent with each line preset lines on the downside base board.
In addition, in each line preset lines of broad ways on glue panel substrate 90 (directions X), by the line preset lines of the most close+Y-direction side from-directions X side, be made as respectively the 5th line preset lines 90e and the 6th line preset lines 90f, will with respect to the 5th line preset lines 90e and the 6th line preset lines 90f in-Y-direction side adjacent line preset lines respectively, be made as respectively the 7th line preset lines 90g and the 8th line preset lines 90h.
In chalker of the present invention, each tracing wheel (break bar blade) 35p by each top cutterhead section 35 in a pair of top scribe head 34, the 1st line preset lines 90a and the 3rd line preset lines 90c on the upper panel substrate form line simultaneously, and, by each tracing wheel of each bottom cutterhead section 39 in a pair of bottom scribe head 40, along with the upper panel substrate on the 1st line preset lines 90a and the 3rd line preset lines 90c is opposed, 2 not shown lines on downside base board lower surface form line simultaneously.Now, the scribing position formed on downside base board lower surface, than the line preset lines 90a of the 1st on the downside base board and the 3rd line preset lines 90c, (directions X side) skew laterally.This be because, as mentioned above, be provided with the terminal of electrode wires etc. on a side edge part of upper panel substrate, the position of on the upper panel substrate the 1st line preset lines 90a and the position of the 3rd line preset lines 90c, respectively than the position of the line of the 1st on downside base board preset lines 90a and the position of the 3rd line preset lines 90c, (directions X side) skew laterally.
Then, by each tracing wheel 35p of each bottom cutterhead section 39 in a pair of bottom scribe head 40, the 1st line preset lines 90a and the 3rd line preset lines 90c on the downside base board form line simultaneously.Now, each roller head 36 is rotated, make in the opposed mode of each tracing wheel 35p across glue panel substrate and each bottom cutterhead section 39 and press each roller head 36 from the upper surface side of upper panel substrate.
Afterwards, each tracing wheel 35p by a pair of top cutterhead section 35, the 2nd line preset lines 90b and the 4th line preset lines 90d on the upper panel substrate form line simultaneously, and, by each tracing wheel of a pair of bottom cutterhead section 39, the 2nd line preset lines 90b and the 4th line preset lines 90d on the downside base board form line simultaneously.After this, each tracing wheel 35p by a pair of top cutterhead section 35, the 5th line preset lines 90e and the 6th line preset lines 90f on the upper panel substrate form line simultaneously, and, by each tracing wheel of a pair of bottom cutterhead section 39, the 5th line preset lines 90e and the 6th line preset lines 90f on the downside base board form line simultaneously.Then, along with respect to the 5th line preset lines 90e and the 6th line preset lines 90f on-Y-direction respectively adjacent the 7th line preset lines 90g along directions X and the 7th line preset lines 90h form line, then, along with respect to formed line adjacent each line preset lines along directions X on-Y-direction, forming successively line.
Below this scribble method further is elaborated.At first, if mounting glue panel substrate 90 on a base supporting mechanism 10 on be positioned at-Y-direction, this base supporting mechanism 10 remains on horizontality by glue panel substrate 90.In this situation, base supporting mechanism 10 is not correctly located on directions X and Y-direction glue panel substrate 90, and the length direction that remains on glue panel substrate 90 is substantially along the state of Y-direction.Then, base supporting mechanism 10 is carried kept glue panel substrate 90 on+Y-direction, and the end of+Y-direction side is inserted between upper rall 31 and lower guide 32.
If in this state,, for the calibration mark on the predetermined position that is arranged on glue panel substrate 90 by being arranged at each camera photography of making a video recording head 37, each scribe head 33 that makes to be arranged on upper rall 31 slides along the length direction of upper rall 31 respectively.In this situation, to be arranged at the calibration mark on glue panel substrate 90 in order making a video recording, as required, by base supporting mechanism 10, glue panel substrate 90 to be moved on Y-direction.
Then, if making a video recording respectively, the pick up camera arranged on each shooting head 37 by each scribe head 33 is arranged at the calibration mark on glue panel substrate 90, the calibration mark arrived according to shooting, move glue panel substrate 90 by base supporting mechanism 10, make glue panel substrate 90 with respect to the member 30 of ruling in predetermined position.And, if glue panel substrate 90 with respect to line member 30 in predetermined position, glue panel substrate 90 stops mobile.
If in this state, the length direction of the width by s operation control section computing glue panel substrate 90 and upper rall 31 and lower guide 32, be the angle of inclination between directions X, and, the upper panel substrate of computing glue panel substrate 90 and each line zero position S1, S2 on the downside base board (on the 1st line preset lines 90a and the 1st line preset lines 90c+position of the end of Y-direction, referring to Fig. 6 (a)).And, according to this operation result, respectively computing for line zero position S1, the S2 top that the tracing wheel 35p that makes each top cutterhead section 35 lays respectively at the upper panel substrate is required, each top scribe head 33 is along the miles of relative movement of directions X and Y-direction, and, computing for line zero position S1, the S2 below that the tracing wheel that makes each bottom cutterhead section 39 is positioned at the downside base board is required, each bottom scribe head 40 is along the miles of relative movement of directions X and Y-direction.
Then, according to each operation result, by linear motor mechanism, make each top scribe head 33 along upper rall 31 mobile miles of relative movement calculated on directions X, and, rotarily actuate and be arranged at the servomotor 34m on each top sliding snout 34 respectively, make each top cutterhead section 35 be arranged on each top sliding snout 34 move the miles of relative movement calculated along Y-direction.The rotation of servomotor 34m is passed to ball screw 34h by a pair of synchronizing wheel 34n, 34p, thereby makes ball screw 34h rotation.Thus, each top cutterhead section 35 be arranged on each top sliding snout 34 moves on Y-direction.
Thus, each top scribe head 33 moves on directions X by linear motor mechanism, and, the top cutterhead section 35 of each top scribe head 33 moves on Y-direction, thus the tracing wheel 35p of this top cutterhead section 35 respectively correctly with the upper panel substrate on the top of line zero position S1, S2 opposite.
Similarly, each bottom scribe head 40 moves along lower guide 32 by linear motor mechanism, and, the bottom cutterhead section 39 of each bottom scribe head 40 moves along Y-direction, thus the tracing wheel of bottom cutterhead section 39 respectively correctly with the downside base board on the below of line zero position S1, S2 opposite.
If in this state, the servomotor 35a of each top cutterhead section 35 rotation, thereby druum cam 35b rotation, the cam follower 35d be crimped on the cam surface 35c of druum cam 35b descends.Thus, the application of force of holding member 35n opposing whisker 35s moves downwards.And, holding member 35n decline predetermined amount, thus each tracing wheel 35p is crimped on line zero position S1, the S2 of the upper panel substrate in glue panel substrate 90 with predetermined pressure respectively.
Similarly, for each bottom cutterhead section 38, by servomotor, rotate, holding member is moved upward, and each tracing wheel is crimped on line zero position S1, the S2 of the downside base board in glue panel substrate 90 with predetermined pressure respectively.
If in this state, pass through base supporting mechanism, glue panel substrate 90 moves on+Y-direction, and by the tracing wheel 35p of each top cutterhead section 35, the 1st line preset lines 90a and the 3rd line preset lines 90c on the upper panel substrate of glue panel substrate 90 form line.Similarly, by the tracing wheel of each bottom cutterhead section 39, the 2 not shown lines on, downside base board lower surface opposed along the line preset lines 90a of the 1st on the upper panel substrate with glue panel substrate 90 and the 3rd line preset lines 90c form line.Now, the position of the line formed on downside base board lower surface, than the line preset lines 90a of the 1st on the downside base board and the 3rd line preset lines 90c, (directions X side) skew laterally.This be because, as mentioned above, the side edge part at the upper panel substrate is provided with terminal of electrode wires etc., so the position of the line of the 1st on upper panel substrate preset lines 90a and the position of the 3rd line preset lines 90c, respectively than the position of the line of the 1st on downside base board preset lines 90a and the position of the 3rd line preset lines 90c, (directions X side) skew laterally.
In this situation, because s operation control section has calculated the width of glue panel substrate 90 and the length direction of upper rall 31 and lower guide 32 is the angle of inclination between directions X in advance, so angle of inclination calculated according to this, computing the 1st line preset lines 90a and the 3rd line preset lines 90c are with respect to the angle of inclination of Y-direction, when to+Y-direction, glue panel substrate 90 being carried to predetermined distance, each top scribe head 33 mobile predetermined distance on directions X, so that the tracing wheel 35p of each top cutterhead section 35 moves along the 1st line preset lines 90a and the 3rd line preset lines 90c respectively.Thus, by base supporting mechanism 10, on Y-direction, carry glue panel substrate 90 during carry out linear interpolation so that the tracing wheel 35p of each top cutterhead section 35 moves along the 1st line preset lines 90a and the 3rd line preset lines 90c respectively.Its result, the tracing wheel 35p of each top cutterhead section 35 can correctly form line along the 1st line preset lines 90a and the 3rd line preset lines 90c of upper panel substrate.
Similarly, by base supporting mechanism 10 on Y-direction, carry glue panel substrate 90 during, the tracing wheel of each bottom cutterhead section 39 also moves on directions X by linear motor mechanism, thereby carry out linear interpolation, so as respectively along with the upper panel substrate on the 1st line preset lines 90a and the 3rd line preset lines 90c is opposed, 2 not shown lines on downside base board lower surface are moved.Thus, the tracing wheel of each bottom cutterhead section 39 also can correctly form line along described 2 lines of downside base board.
Then, during being rule along the 1st line preset lines 90a of downside base board at the tracing wheel of each bottom cutterhead section 39, the roll-in of roller head 36 be connected on the upper panel substrate with the 1st line opposed upper surface of preset lines 90a position.In this situation, each top scribe head 33 moves predetermined distance along directions X and Y-direction respectively, thereby the roller head 36 of each top scribe head 33 also moves predetermined distance along directions X and Y-direction respectively.Thus, the roller of each roller head 36 is in the opposed state of tracing wheel across upper panel substrate and downside base board and each bottom cutterhead section 39.Like this, the tracing wheel 35p of bottom cutterhead section 35 is crimped on the 1st on downside base board lower surface line preset lines 90a's+the Y-direction side end on the time, by servomotor, rotate, the holding member of roller head 36 moves downwards, and the roll-in that holding member keeps is connected on the upper surface of glue panel substrate 90.In this situation, roller is crimped on the upper surface with the opposed upper panel substrate of line zero position of downside base board with predetermined pressure respectively.
If the 1st line preset lines 90a alongst gone up on upper panel substrate and downside base board so as mentioned above and the 3rd line preset lines 90c form line, the tracing wheel 35p of each top cutterhead section 35 is moved upward respectively, the state of the upper surface in leaving the upper panel substrate.Similarly, the tracing wheel of each bottom cutterhead section 39 also moves downwards respectively, the state of the lower surface in leaving the downside base board.Afterwards, by base supporting mechanism 10, carry glue panel substrate 90 on Y-direction, and, mobile each top scribe head 33 and each bottom scribe head 40 on directions X so that the tracing wheel of the tracing wheel 35p of each top cutterhead section 35 and each bottom cutterhead section 39 respectively with glue panel substrate 90 on the 2nd line preset lines 90b and line zero position S3, the S4 of the 4th line preset lines 90d opposite.
And, if the tracing wheel of the tracing wheel 35p of each top cutterhead section 35 and each bottom cutterhead section 39 respectively with glue panel substrate 90 on the 2nd line preset lines 90b and the line zero position S3 of the 4th line preset lines 90d, S4 is opposite, with above-mentioned line, move in the same manner, the tracing wheel of the tracing wheel 35p of each top cutterhead section 35 and each bottom cutterhead section 39 moves (rotation) along the 2nd line preset lines 90b and the 4th line preset lines 90d of upper panel substrate and downside base board with crimped status, thereby form along each line of the 2nd line preset lines 90b and the 4th line preset lines 90d simultaneously.
If formed so as mentioned above the whole line alongst on glue panel substrate 90, carry glue panel substrate 90, and mobile each top scribe head 33 and each bottom scribe head 40 on directions X, mobile each top cutterhead section 35 and bottom cutterhead section 39 on this external Y-direction, so that the tracing wheel 35p of each top cutterhead section 35 is opposite with the line zero position S2 of the line zero position S 1 of the 5th line preset lines 90e of glue panel substrate 90 and the 6th line preset lines 90f respectively, and the tracing wheel of each bottom cutterhead section 39 similarly respectively with line zero position S1, S2 is opposite.
Then, it is upper that the tracing wheel of the tracing wheel 35p of each top cutterhead section 35 and each bottom cutterhead section 39 is crimped on respectively line zero position S1, S2, along the 5th line preset lines 90e and the 6th line preset lines 90f, moves respectively.In this situation, whenever each top scribe head 33 and each bottom scribe head 40 on directions X during mobile predetermined distance, by base supporting mechanism 10, on Y-direction, glue panel substrate 90 is carried to predetermined distance, perhaps make to be arranged at each top cutterhead section 35 and the bottom cutterhead section 39 mobile predetermined distance on Y-direction on each top scribe head 33 and each bottom scribe head 40, the glue panel substrate 90 that carries out thus being undertaken by base supporting mechanism 10 is carried, the linear interpolation of tracing wheel on directions X of the tracing wheel 35p of each top cutterhead section 35 and each bottom cutterhead section 39.Thus, the tracing wheel of the tracing wheel 35p of each top cutterhead section 35 and each bottom cutterhead section 39 can correctly form and be carried out linear interpolation and along the line of the 5th line preset lines 90e and the 6th line preset lines 90f.
If each line preset lines 90e along upper panel substrate and downside base board, 90f forms line, to the conveying of glue panel substrate 90, each top scribe head 33 and each bottom scribe head 40 movement on directions X, the movement on Y-direction of each top cutterhead section 35 and bottom cutterhead section 39 is controlled, the tracing wheel that makes the tracing wheel 35p of each top cutterhead section 35 and each bottom cutterhead section 39 respectively with glue panel substrate 90 on the 7th line preset lines 90g along width and the line zero position S5 of the 8th line preset lines 90h, S6 is opposite.
Then, it is upper that the tracing wheel of the tracing wheel 35p of each top cutterhead section 35 and each bottom cutterhead section 39 is crimped on respectively line zero position S5, S6, along the 7th line preset lines 90g and the 8th line preset lines 90h, moves respectively.Line action in this situation is identical with the line action along the 5th line preset lines 90e and the 6th line preset lines 90f.
Afterwards, repeatedly carry out same action, thereby implement the line action along each line preset lines of extending on the width at glue panel substrate 90.And, form line by whole line preset lines of extending on the width along at glue panel substrate 90, thereby finish crossed process.
If form line along the whole line preset lines on glue panel substrate 90 so as mentioned above, glue panel substrate 90 is transported to the predetermined operation of blocking, and blocks into each and blocks glue panel substrate 91.
In this situation, the line formed along the line preset lines 90a of the 1st on the downside base board and the 3rd line preset lines 90c, line than the 1st line preset lines 90a on the upper panel substrate and the 3rd line preset lines 90d formation, near inboard (+directions X), so for example by absorbing unit, from the upper panel upper surface of base plate side of each truncation surface base board, keep substrate and mention upward, thereby unwanted part can be retained on substrate holding unit 10, can easily unwanted part be removed.
As mentioned above, in chalker of the present invention, by a pair of top scribe head 33 and a pair of bottom scribe head 40 are set, can be respectively on the upper panel substrate of glue panel substrate 90 and downside base board, form a pair of line, so can significantly improve the line operating efficiency simultaneously.
And, the unit that each top cutterhead section 35 and each bottom cutterhead section 39 are moved on Y-direction is set respectively on a pair of top scribe head 33 and a pair of bottom scribe head 40, even thereby the length direction (directions X) of the guide rail kept slidably along directions X with respect to a pair of top scribe head 33 that will be configured on length direction (directions X) at the glue panel substrate, and length direction (directions X) tilted configuration that will be configured in the guide rail that a pair of bottom scribe head 40 on length direction (directions X) keeps slidably along directions X, also can make each top cutterhead section 35 of cutterhead and each bottom cutterhead section 39 correctly with glue panel substrate 90 on the line zero position opposite.Therefore, can correctly form along the line of each line preset lines.In addition, while each top cutterhead section 35 and each bottom cutterhead section 39 are moved on directions X, forming the linear interpolation while ruling, by only making each top cutterhead section 35 and each bottom cutterhead section 39 move on Y-direction, even thereby do not make upper rall 31 and lower guide 32 integral body move on Y-direction, even not mobile glue panel substrate, also can be rapidly and carry out accurately the linear interpolation along directions X, can according to circumstances select suitable linear interpolation unit.
In addition, in the above-described embodiment, a pair of top scribe head 33 and a pair of bottom scribe head 40 are set respectively on upper rall 31 and lower guide 32, but also can on upper rall 31 and lower guide 32, the scribe head more than 3 be set respectively.And, also can 2 above scribe heads only be set on upper rall 31, be formed for blocking out from 1 large-sized generatrix base board the line of a plurality of truncation surface base boards.
And, also upper rall 31 or lower guide 32 can only be set, a plurality of tops scribe head 33 is set on this upper rall 31 or lower guide 32.
And the brittle substrate as forming line, be not limited to the glue panel substrate, can be 1 display panel substrate, and can not be also display panel substrate.
As mentioned above, use the preferred embodiment of the present invention exemplified with the present invention, but the present invention should not be defined and is interpreted as this embodiment.Scope of the present invention should make an explanation according to the claim scope.Those skilled in the art can, by the record of concrete preferred implementation of the present invention, according to record of the present invention and technology general knowledge, implement in full scope of equivalents.For the patent of quoting in this specification sheets, patent application and document, as the concrete record in this manual of its content itself, quote the reference of its content as this specification sheets.
Utilizability on industry
Chalker and the scribble method for being rule on the brittle substrates such as display panel substrate in uses such as liquid crystal panels that the present invention relates to, can easily make the scribing unit of a plurality of scribe heads align with predetermined line zero position respectively.

Claims (13)

1. a chalker is characterized in that having:
The substrate holding unit, remain horizontality by brittle substrate;
A plurality of scribe heads, each scribe head has respectively the scribing unit that the described brittle substrate to being kept by this substrate holding unit is rule; And
Guide rail, keep the plurality of scribe head so that each scribe head can be the mode that directions X slides along the length direction of guide rail;
The described brittle substrate and the described guide rail that by described substrate holding unit, are kept can be relatively moved along the Y-direction with described directions X quadrature,
Described each scribe head has sliding unit, the described scribing unit that this sliding unit makes to be arranged on each scribe head slides independently along described Y-direction, thereby can make the scribing unit of each scribe head correctly align with each line zero position on brittle substrate;
Wherein, this sliding unit comprises servomotor, and this servomotor is controlled to drive described each scribe head to move; Described chalker also comprises control part, this control part is arranged to the angle of inclination between the length direction of the width of the line zero position of computing on described substrate and described substrate and guide rail, the described scribe head of computing is along the miles of relative movement of directions X and Y-direction, and controls the described scribe head of described servo motor driven and move along directions X and Y-direction the miles of relative movement calculated.
2. chalker according to claim 1, wherein,
Described substrate holding unit can be carried kept described brittle substrate on described Y-direction.
3. chalker according to claim 1, wherein,
Described guide rail is arranged at the top of the described brittle substrate kept by described substrate holding unit.
4. chalker according to claim 3, wherein,
Described brittle substrate is 1 display panel substrate.
5. chalker according to claim 1, wherein,
Described guide rail is arranged at respectively the above and below of the described brittle substrate kept by described substrate holding unit, is respectively arranged with described a plurality of scribe head on this guide rail.
6. chalker according to claim 5, wherein,
Described brittle substrate is the glue panel substrate be bonded by a pair of display panel substrate.
7. chalker according to claim 6, wherein,
Be arranged on described brittle substrate above described guide rail on any one of described scribe head on, be provided with the roller on the upper surface that is crimped on described glue panel substrate.
8. chalker according to claim 1, wherein,
Described scribing unit is tracing wheel.
9. chalker according to claim 8, wherein,
Described each scribe head also has makes described tracing wheel be crimped on the unit on described brittle substrate.
10. a scribble method, the method is rule to described brittle substrate by chalker claimed in claim 1, and wherein, described scribble method comprises:
The operation that described guide rail is positioned with respect to the described brittle substrate kept by described substrate holding unit;
Described each scribe head is moved on described directions X along described guide rail, and the described scribing unit of described each scribe head is moved independently on described Y-direction, thereby the operation that the scribing unit that can make each scribe head correctly aligns with each line zero position on described brittle substrate respectively;
Angle of inclination between the width of the line zero position of computing on described substrate and described substrate and the length direction of guide rail;
The described scribe head of computing is along the miles of relative movement of directions X and Y-direction; And
Control the described scribe head of described servo motor driven and move along directions X and Y-direction the miles of relative movement calculated.
11. scribble method according to claim 10, wherein,
Also comprise:
Make to be crimped on respectively on each described line zero position with opposed described each scribe head of each described line zero position respectively the operation that the described brittle substrate that kept by described substrate holding unit and described guide rail are relatively moved along described Y-direction.
12. scribble method according to claim 10, wherein,
Also comprise:
Make to be crimped on respectively on each described line zero position with opposed described each scribe head of each described line zero position respectively the operation that described each scribe head is moved on described directions X along described guide rail respectively.
13. scribble method according to claim 12, wherein,
During described each scribe head is moved on described directions X along described guide rail respectively, described scribing unit is moved on described Y-direction, carry out thus linear interpolation.
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KR20100114523A (en) 2010-10-25
TW200936518A (en) 2009-09-01
JPWO2009093619A1 (en) 2011-05-26
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TWI435850B (en) 2014-05-01
CN101970363A (en) 2011-02-09

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