WO2018016038A1 - Cutting device and cutting method - Google Patents

Cutting device and cutting method Download PDF

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Publication number
WO2018016038A1
WO2018016038A1 PCT/JP2016/071313 JP2016071313W WO2018016038A1 WO 2018016038 A1 WO2018016038 A1 WO 2018016038A1 JP 2016071313 W JP2016071313 W JP 2016071313W WO 2018016038 A1 WO2018016038 A1 WO 2018016038A1
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WO
WIPO (PCT)
Prior art keywords
cutting
unit
moving
scribe
glass substrate
Prior art date
Application number
PCT/JP2016/071313
Other languages
French (fr)
Japanese (ja)
Inventor
耕治 石田
Original Assignee
堺ディスプレイプロダクト株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 堺ディスプレイプロダクト株式会社 filed Critical 堺ディスプレイプロダクト株式会社
Priority to PCT/JP2016/071313 priority Critical patent/WO2018016038A1/en
Publication of WO2018016038A1 publication Critical patent/WO2018016038A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B26HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26DCUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D1/00Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
    • B26D1/01Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work
    • B26D1/12Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having a cutting member moving about an axis
    • B26D1/14Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having a cutting member moving about an axis with a circular cutting member, e.g. disc cutter
    • B26D1/157Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having a cutting member moving about an axis with a circular cutting member, e.g. disc cutter rotating about a movable axis
    • B26D1/18Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having a cutting member moving about an axis with a circular cutting member, e.g. disc cutter rotating about a movable axis mounted on a movable carriage
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B26HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26DCUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D1/00Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
    • B26D1/01Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work
    • B26D1/12Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having a cutting member moving about an axis
    • B26D1/14Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having a cutting member moving about an axis with a circular cutting member, e.g. disc cutter
    • B26D1/22Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having a cutting member moving about an axis with a circular cutting member, e.g. disc cutter coacting with a movable member, e.g. a roller
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/07Cutting armoured, multi-layered, coated or laminated, glass products

Definitions

  • the present invention relates to a cutting device and a cutting method for cutting a plate-like member.
  • Patent Document 1 discloses a method of cutting a glass substrate (plate member) on which a TFT (Thin Film Transistor) substrate and a CF (Color Filter) substrate are bonded.
  • TFT Thin Film Transistor
  • CF Color Filter
  • Patent Document 1 In the cutting method disclosed in Patent Document 1, first, a glass substrate is placed on a stage with the TFT substrate facing upward. Then, the wheel cutter (cutting portion) moves on the TFT substrate, that is, scribes, whereby a scribe groove (cutting groove) is formed in the TFT substrate. Next, the glass substrate is placed on the stage with the CF substrate facing upward. Then, when the wheel cutter moves on the CF substrate, that is, scribes, a scribe groove is formed in the CF substrate. The scribe groove is formed perpendicular to the surface of each of the TFT substrate and the CF substrate, and the glass substrate is cut by the scribe groove extending in the depth direction. A liquid crystal panel is manufactured based on the cut glass substrate. Patent Document 1 also discloses scribing a glass substrate from below.
  • the TFT substrate and the CF substrate are simultaneously scribed using two wheel cutters, that is, the glass substrate is simultaneously scribed from both the upper and lower sides. It is possible.
  • the scribe position on the TFT substrate and the scribe position on the CF substrate are the same and the two wheel cutters are arranged to face each other through the glass substrate, the external forces applied from the two wheel cutters cancel each other out. Substrate bending is suppressed.
  • the scribe position on the TFT substrate and the scribe position on the CF substrate are different, the glass is caused by the downward external force applied to the glass substrate from the upper wheel cutter and the upward external force applied to the glass substrate from the lower wheel cutter. There is a possibility that the substrate bends. Note that, for example, in a portion where the terminal is provided, the scribe position on the TFT substrate is different from the scribe position on the CF substrate.
  • the scribe groove cannot be formed perpendicular to the surface of the glass substrate, and as a result, the scribe groove progresses in the depth direction. Thus, defects such as burrs or chips may occur in the glass substrate.
  • the problems as described above are not limited to glass substrates, and may occur when cutting a plate-like member formed by bonding one surface of two plate-like members having flexibility.
  • This invention is made
  • the main objective is to use a plate-shaped member at the time of cut
  • the cutting device is a cutting device that cuts a plate-like member formed by laminating a plate-like first member and a second member. What is the surface of the first member that faces the second member? By moving in contact with the first processing surface on the opposite side, a first cutting portion for forming a first cutting groove extending in the moving direction on the first processing surface, and the movement of the first cutting portion together with the first cutting portion.
  • One or more first moving parts that move in the moving direction while contacting one processing surface, and the second member that contacts the second processing surface opposite to the surface facing the first member in the movement direction
  • a second cutting portion that forms a second cutting groove extending in the moving direction on the second processing surface by moving in the direction, and the second cutting surface while contacting the second processing surface along with the movement of the second cutting portion.
  • One or more second moving parts moving in the moving direction, One cutting part and one second moving part are opposed to each other via the plate-like member, and the second cutting part and one first moving part are opposed to each other via the plate-like member. It is characterized by.
  • the cutting method according to the present embodiment is a cutting method for cutting a plate-like member formed by laminating a plate-like first member and a second member. What is the surface of the first member facing the second member? The first cutting portion for forming the first cutting groove on the first processing surface on the opposite side and the second processing surface on the opposite side to the surface of the second member facing the first member are in contact with each other. The second moving portion that moves is opposed to the second processing portion through the plate-like member, and moves while being in contact with the first processing surface and the second cutting portion for forming the second cutting groove on the second processing surface.
  • the first moving part is opposed to the first moving part via the plate-like member, and the first cutting part, the second cutting part, the first moving part, and the second moving part are moved in the same direction at the same speed.
  • the first cutting part extends in the moving direction to the first cutting part and the second cutting part. And wherein the to simultaneously form the second cutting grooves.
  • a cutting device and a cutting method capable of preventing the plate-like member from being defective when simultaneously cutting a plate-like member formed by bonding two members from both sides of the two members. Provided.
  • FIG. 3 is a cross-sectional view schematically showing a glass substrate cut by the cutting device according to Embodiment 1.
  • FIG. 2 is a front view which shows typically the structure of the cutting device which concerns on Embodiment 2.
  • the plate member cut by the cutting device is a glass substrate formed by bonding a CF substrate and a TFT substrate, and the two plate members constituting the plate member are a CF substrate and a TFT substrate. is there.
  • the two plate-like members constituting the plate-like member are not limited to glass, and may be made of, for example, a synthetic resin.
  • FIG. 1 is a front view schematically showing the configuration of the cutting device 1 according to the first embodiment.
  • FIG. 2 is a front view schematically showing the main configuration of the cutting device 1 according to the first embodiment.
  • the left-right direction in the figure is referred to as the left-right direction
  • the up-down direction in the figure is referred to as the up-down direction
  • the front-rear direction in the figure is referred to as the front-rear direction.
  • the cutting device 1 cuts a glass substrate 2 (plate-like member) on which a CF substrate 21 (first member) and a TFT substrate 22 (second member) are bonded, and a plurality of pieces (for example, six pieces) from the glass substrate 2. Take out the glass substrate.
  • a liquid crystal display panel is manufactured based on a glass substrate (hereinafter referred to as a unit glass substrate) that is finally taken out by cutting the glass substrate 2.
  • the glass substrate 2 includes a CF substrate 21 including a rectangular glass substrate and a TFT substrate 22 including a rectangular glass substrate.
  • a color filter (not shown) is formed on the surface of the CF substrate 21 facing the TFT substrate 22 (hereinafter referred to as a CF forming surface).
  • Scribe grooves 511 to 514 are formed on a surface (hereinafter referred to as a first processing surface) 211 opposite to the CF formation surface of the CF substrate 21.
  • a TFT array (not shown) is formed on the surface of the TFT substrate 22 facing the CF substrate 21 (hereinafter referred to as a TFT formation surface).
  • Scribe grooves 521 to 524 are formed on a surface 221 opposite to the TFT formation surface (hereinafter referred to as a second processing surface) 221 on the TFT substrate 22.
  • the CF substrate 21 and the TFT substrate 22 are bonded together via a plurality of sealing portions 23 in a state where the CF forming surface and the TFT forming surface are arranged to face each other with an appropriate distance therebetween.
  • Transparent spacers (not shown) are arranged inside each sealing portion 23 between the CF substrate 21 and the TFT substrate 22.
  • the sealing portion 23 is, for example, a hardened adhesive and has a rectangular ring shape. For example, when six unit glass substrates are taken out from the glass substrate 2, that is, when the number of chamfers is 6, for example, three sealing portions 23 in the front-rear direction and two sealing portions 23 in the left-right direction are arranged in a matrix. (See FIG. 3).
  • the cutting device 1 includes a plurality of (three in the present embodiment) mounting tables 10, a plurality (four in the present embodiment) guide rails 111, 112, 121, 122, a first unit 13, and a second unit. 14.
  • the cutting apparatus 1 includes two units of the first unit 13 and the second unit 14, but the number of the units is not limited to two, and may be one, There may be more than one.
  • the configurations of the first unit 13 and the second unit 14 are substantially the same except that the guide rails 111, 112, 121, and 122 to be attached are different.
  • the first unit 13 will be specifically described as a representative.
  • each mounting table 10 is a flat surface and is kept horizontal.
  • the mounting tables 10 are juxtaposed in the left-right direction so that the upper surfaces of the mounting tables 10 have the same height.
  • the glass substrate 2 is mounted on the mounting table 10 with the TFT substrate 22 facing down.
  • the upper surface of the mounting table 10 is in contact with the lower surface of the TFT substrate 22 on the glass substrate 2 mounted on the mounting table 10, that is, the second processing surface 221.
  • the glass substrate 2 is fixed to the mounting table 10 by, for example, vacuum suction.
  • Each of the guide rails 111, 112, 121, 122 is a rod-shaped member.
  • Each of the guide rails 111 and 112 is arranged on the upper side of the glass substrate 2 mounted on the mounting table 10 so that the longitudinal direction thereof faces the front-rear direction.
  • Each of the guide rails 111 and 112 is supported by a support (not shown).
  • the guide rail 111 is disposed on the left side of the guide rail 112 with an appropriate distance.
  • Each of the guide rails 121 and 122 is disposed on the lower side of the glass substrate 2 placed on the placing table 10 so that the longitudinal direction thereof faces the front-rear direction.
  • Each of the guide rails 121 and 122 is supported by a support (not shown).
  • the guide rail 121 is arranged on the left side of the guide rail 122 with an appropriate distance.
  • the first unit 13 includes movement support portions 31 and 41, wheel cutters 32 and 42, and rollers 33 and 43.
  • the movement support part 31 is a first movement support part in the present embodiment.
  • the movement support unit 31 is disposed above the glass substrate 2 placed on the placement table 10.
  • the movement support unit 31 supports the upper wheel cutter 32 and the roller 33 while moving them in the movement direction (front-rear direction).
  • the movement support unit 31 moves in the front-rear direction along the guide rail 111 by being given a thrust from a ball screw rotated by a motor, for example.
  • the movement support unit 31 includes a box 311 and a cutter holder 312.
  • the box 311 is attached to the guide rail 111.
  • the cutter holder 312 has a cylindrical shape extending downward from the lower end of the box 311. In the lower part of the cutter holder 312, there is an opening facing the first processing surface 211 of the glass substrate 2 placed on the placing table 10. Inside the cutter holder 312, a rotating shaft portion 321 that rotatably supports the wheel cutter 32 is provided. A rotating shaft portion 331 that rotatably supports the roller 33 is provided outside the cutter holder 312.
  • the rotation shaft portion 321 and the rotation shaft portion 331 are shafts extending in the left-right direction.
  • the rotating shaft part 331 may be provided not on the cutter holder 312 but on, for example, the box 311 or an arm provided on the box 311.
  • the wheel cutter 32 is the first cutting part in the present embodiment.
  • the wheel cutter 32 has a disk shape.
  • the wheel cutter 32 is rotatably supported by a rotating shaft portion 321 in the cutter holder 312 such that a part of the lower side of the wheel cutter 32 protrudes downward from the opening of the cutter holder 312.
  • the wheel cutter 32 rotates around the rotation shaft portion 321.
  • the wheel cutter 32 contacts the first processing surface 211 and moves while rotating to form scribe grooves 511 to 514 extending in the moving direction on the first processing surface 211.
  • the first unit 13 includes two rollers 33.
  • the two rollers 33 are arranged one on each of the left and right sides of the cutter holder 312.
  • Each roller 33 is a first moving unit in the present embodiment.
  • the two rollers 33 are juxtaposed in the left-right direction (direction intersecting the moving direction), and the wheel cutter 32 is disposed between the two rollers 33.
  • Each roller 33 is rotatably supported by a rotation shaft portion 331 and rotates around the rotation shaft portion 331.
  • Each roller 33 moves in the moving direction while rotating in contact with the first processing surface 211 as the wheel cutter 32 moves.
  • the movement support part 41 is a second movement support part in the present embodiment.
  • the movement support unit 41 is disposed below the glass substrate 2 placed on the placement table 10.
  • the movement support unit 41 supports the lower wheel cutter 42 and the roller 43 and moves them in the movement direction (front-rear direction).
  • the movement support unit 41 moves in the front-rear direction along the guide rail 121 by being given a thrust from a ball screw rotated by a motor, for example.
  • the movement support unit 41 includes a box body 411 and a cutter holder 412.
  • the box body 411 is attached to the guide rail 121.
  • the cutter holder 412 has a cylindrical shape extending upward from the upper end portion of the box body 411. In the upper part of the cutter holder 412, there is an opening facing the second processing surface 221 of the glass substrate 2 placed on the placing table 10. Inside the cutter holder 412, a rotating shaft portion 421 that rotatably supports the wheel cutter 42 is provided inside the cutter holder 412. A rotating shaft 431 that rotatably supports the roller 43 is provided outside the cutter holder 412.
  • the rotation shaft portion 421 and the rotation shaft portion 431 are shafts extending in the left-right direction.
  • the rotating shaft part 431 may be provided not on the cutter holder 412 but on, for example, the box 411 or an arm provided on the box 411.
  • the wheel cutter 42 is a second cutting part in the present embodiment.
  • the wheel cutter 42 has a disk shape.
  • the wheel cutter 42 is rotatably supported by a rotating shaft portion 421 in the cutter holder 412 so that a part of the upper portion thereof protrudes upward from the opening of the cutter holder 412.
  • the wheel cutter 42 rotates around the rotation shaft portion 421.
  • the wheel cutter 42 contacts the second processing surface 221 and moves while rotating, thereby forming scribe grooves 521 to 524 extending in the moving direction on the second processing surface 221.
  • the first unit 13 includes two rollers 43.
  • Two rollers 43 are arranged one on each of the left and right sides of the cutter holder 412.
  • Each roller 43 is a second moving unit in the present embodiment.
  • the two rollers 43 are juxtaposed in the left-right direction (direction intersecting the moving direction), and a wheel cutter 42 is disposed between the two rollers 43.
  • Each roller 43 is rotatably supported by a rotation shaft portion 431 and rotates around the rotation shaft portion 431.
  • Each roller 43 moves in the moving direction while rotating in contact with the second processing surface 221 as the wheel cutter 42 moves.
  • the upper wheel cutter 32 and the lower wheel cutter 42 are arranged at different positions in the left-right direction. That is, the first unit 13 is used for cutting a portion of the glass substrate 2 where the terminal is provided (a portion where the electrode terminal of the TFT array is provided).
  • the upper wheel cutter 32 and the lower wheel cutter 42 are arranged at the same position in the left-right direction, that is, opposed to each other via the glass substrate 2. That is, the second unit 14 is used for cutting a portion of the glass substrate 2 where no terminal is provided.
  • the upper wheel cutter 32 and one of the lower two rollers 43 are opposed to each other with the glass substrate 2 interposed therebetween, and the lower wheel cutter 42. And one of the upper two rollers 33 are opposed to each other with the glass substrate 2 interposed therebetween. Accordingly, the lower roller 43 facing the wheel cutter 32 can receive the downward external force applied to the glass substrate 2 from the upper wheel cutter 32 when the scribe grooves 511 to 514 are formed. Similarly, the upper roller 33 facing the wheel cutter 42 can receive the upward external force applied to the glass substrate 2 from the lower wheel cutter 42 when the scribe grooves 521 to 524 are formed. Therefore, the bending of the glass substrate 2 when the scribe grooves 511 to 514 and 521 to 524 are formed can be suppressed.
  • FIG. 3 is a plan view for explaining a cutting procedure by the cutting apparatus 1 according to the first embodiment.
  • FIG. 4 is a cross-sectional view for explaining a cutting procedure by the cutting apparatus 1 according to the first embodiment.
  • FIG. 5 is a cross-sectional view schematically showing the glass substrate 2 cut by the cutting device 1 according to the first embodiment. 4 and 5, as in FIGS. 1 and 2, the horizontal direction in the figure is referred to as the horizontal direction, the vertical direction in the figure is referred to as the vertical direction, and the front-rear direction in the figure is referred to as the front-rear direction. .
  • FIG. 1 the horizontal direction in the figure
  • the vertical direction in the figure is referred to as the vertical direction
  • the front-rear direction in the figure is referred to as the front-rear direction.
  • the left-right direction in the figure is referred to as the left-right direction
  • the up-down direction in the figure is referred to as the front-rear direction
  • the front-rear direction in the figure is referred to as the up-down direction.
  • the lower side of the glass substrate 2 in FIG. 3 is referred to as a front side
  • the upper side of the glass substrate 2 in FIG. 3 is referred to as a rear side.
  • reference numerals A1 to A4 are scribe positions on the CF substrate 21, respectively.
  • the scribe positions A1 to A4 are arranged in this order from right to left.
  • Reference numerals B 1 to B 4 are scribe positions on the TFT substrate 22.
  • the scribe positions B1 to B4 are arranged in this order from right to left.
  • a region (hereinafter referred to as a first region) 20A between the scribe positions A1, B1 and the scribe positions A2, B2 on the glass substrate 2, and a scribe position A3, B3 and the scribe position A4 on the glass substrate 2 are used.
  • B4, three sealing portions 23 are disposed in each of the regions 20B (hereinafter referred to as second regions) 20B.
  • the scribe positions A1 and B1 have the same horizontal position. That is, the scribe positions A1 and B1 are portions where the terminals are not provided, and the second unit 14 forms scribe grooves 511 and 521 at the scribe positions A1 and B1.
  • the horizontal positions of the scribe positions A2 and B2 are different. Specifically, the horizontal position of the scribe position A2 is on the right side of the horizontal position of the scribe position B2. That is, the scribe positions A2 and B2 are portions where terminals are led out, and the first unit 13 forms scribe grooves 512 and 522 at the scribe positions A2 and B2. Scribe grooves 511 and 512 are first cutting grooves in the present embodiment, and scribe grooves 521 and 522 are second cutting grooves in the present embodiment.
  • the horizontal positions of the scribe positions A3 and B3 are the same. That is, the scribe positions A3 and B3 are portions where the terminals are not provided, and the second unit 14 forms scribe grooves 513 and 523 at the scribe positions A3 and B3.
  • the positions in the left-right direction of the scribe positions A4 and B4 are different.
  • the horizontal position of the scribe position A4 is on the right side of the horizontal position of the scribe position B4. That is, the scribe positions A4 and B4 are portions where the terminals are led out, and the first unit 13 forms scribe grooves 514 and 524 at the scribe positions A4 and B4. Scribe grooves 513 and 514 are first cutting grooves in the present embodiment, and scribe grooves 523 and 524 are second cutting grooves in the present embodiment.
  • the cutting device 1 simultaneously cuts the glass substrate 2 at the scribe positions A1 and B1 and the scribe positions A2 and B2, and takes out a portion of the first region 20A from the glass substrate 2. Specifically, the cutting device 1 uses the second unit 14 to form scribe grooves 511 and 521 at the scribe positions A1 and B1, and cuts the glass substrate 2 at the scribe positions A1 and B1. At the same time, the cutting device 1 uses the first unit 13 to form scribe grooves 512 and 522 at the scribe positions A2 and B2, and cuts the glass substrate 2 at the scribe positions A2 and B2.
  • the cutting apparatus 1 simultaneously cuts the glass substrate 2 at the scribe positions A3 and B3 and the scribe positions A4 and B4, and takes out the portion of the second region 20B from the glass substrate 2.
  • the cutting device 1 uses the second unit 14 to form scribe grooves 513 and 523 at the scribe positions A3 and B3, and cuts the glass substrate 2 at the scribe positions A3 and B3.
  • the cutting device 1 uses the first unit 13 to form scribe grooves 514 and 524 at the scribe positions A4 and B4, and cuts the glass substrate 2 at the scribe positions A4 and B4.
  • the formation of the scribe grooves 511 and 521 at the scribe positions A1 and B1 and the formation of the scribe grooves 512 and 522 at the scribe positions A2 and B2 are not necessarily performed at the same time, and may be performed sequentially. Similarly, the formation of the scribe grooves 513 and 523 at the scribe positions A3 and B3 and the formation of the scribe grooves 514 and 524 at the scribe positions A4 and B4 may be performed sequentially instead of simultaneously.
  • the cutting procedure of the glass substrate 2 will be described in more detail.
  • the first unit 13 and the second unit 14 are located behind the glass substrate 2 mounted on the mounting table 10 (upper side in FIG. 3, rear side in FIG. 4). Side).
  • the glass substrate 2 is mounted and fixed on the mounting table 10 by, for example, a transfer robot.
  • the glass substrate 2 is disposed such that the scribe positions A1, A2, B1, and B2 are not placed on the placement table 10, that is, in a gap between the placement tables 10.
  • the left and right positions of the wheel cutter 32 on the upper side of the first unit 13 and the scribe position A2 coincide with each other, and the left and right wheel cutters 42 on the lower side of the first unit 13 and the scribe position B2
  • the positional relationship between the first unit 13 and the glass substrate 2 is adjusted so that the position in the direction matches. This adjustment may be performed, for example, by moving the guide rails 111 and 121, the movement support portions 31 and 41 of the first unit 13, and / or the mounting table 10 in the left-right direction, or transporting the glass substrate 2, for example. You may carry out by moving to the left-right direction using a robot.
  • the wheel cutter 32 on the upper side of the first unit 13 and one of the two rollers 43 on the lower side of the first unit 13 are arranged to face each other with the glass substrate 2 interposed therebetween.
  • the lower wheel cutter 42 of the first unit 13 and one of the two rollers 33 on the upper side of the first unit 13 are arranged to face each other with the glass substrate 2 interposed therebetween.
  • the left and right positions of the wheel cutter 32 on the upper side of the second unit 14 and the scribe position A1 coincide with each other, and the left and right direction of the wheel cutter 42 on the lower side of the second unit 14 and the scribe position B1.
  • the positional relationship between the second unit 14 and the glass substrate 2 is adjusted so that these positions coincide with each other. This adjustment may be performed, for example, by moving the guide rails 112 and 122, the movement support portions 31 and 41 of the second unit 14, and / or the mounting table 10 in the left-right direction, or transporting the glass substrate 2, for example. You may carry out by moving to the left-right direction using a robot.
  • Adjustment of the position of the 1st unit 13 and the 2nd unit 14 in the left-right direction is performed simultaneously, for example.
  • the wheel cutter 32 on the upper side of the second unit 14 and the wheel cutter 42 on the lower side of the second unit 14 are arranged to face each other with the glass substrate 2 interposed therebetween.
  • the cutting device 1 adjusts the positional relationship in the front-rear direction of the wheel cutters 32, 42 and the rollers 33, 43 and the positional relationship in the left-right direction of the wheel cutters 32, 42, rollers 33, 43, and the glass substrate 2.
  • the first unit 13 and the second unit 14 are moved forward (moved to the lower side in FIG. 3 and the front side in FIG. 4) while maintaining the subsequent positional relationship.
  • each of the wheel cutters 32 and 42 of the first unit 13 and the wheel cutters 32 and 42 of the second unit 14 is driven and rotated by a drive unit (not shown).
  • the cutting device 1 advances the first unit 13, the upper side movement support part 31 (wheel cutter 32 and roller 33) of the first unit 13 and the lower side movement support part 41 (wheel cutter 42) of the first unit 13. And the roller 43) are moved at the same speed in the same direction (forward). Further, when the cutting device 1 advances the second unit 14, the movement support portion 31 (wheel cutter 32 and roller 33) on the upper side of the second unit 14 and the movement support portion 41 (wheel on the lower side of the second unit 14). The cutter 42 and the roller 43) are moved in the same direction (forward) at the same speed. Furthermore, in the present embodiment, the cutting device 1 moves the first unit 13 and the second unit 14 in the same direction (forward) at the same speed.
  • the upper moving support portion 31 of the first unit 13 moves forward along the guide rail 111.
  • the wheel cutter 32 on the upper side of the first unit 13 advances while rotating in contact with the scribe position A2 on the first processing surface 211, and the roller 33 on the upper side of the first unit 13 moves on the first processing surface. It advances while rotating in contact with the left and right sides of the scribe position A2 at 211.
  • a scribe groove 512 is formed at the scribe position A ⁇ b> 2 on the first processing surface 211 of the CF substrate 21.
  • the lower movement support portion 41 of the first unit 13 moves forward along the guide rail 121.
  • the lower wheel cutter 42 of the first unit 13 advances while rotating in contact with the scribe position B2 on the second processing surface 221, and the lower roller 43 of the first unit 13
  • the processing surface 221 advances while contacting and rotating on both the left and right sides of the scribe position B2.
  • a scribe groove 522 is formed at the scribe position B ⁇ b> 2 on the second processing surface 221 of the TFT substrate 22.
  • the wheel cutter 32 on the upper side of the second unit 14 advances while rotating in contact with the scribe position A1 on the first processing surface 211, and the roller 33 on the upper side of the second unit 14 moves on the first processing surface. It advances while rotating in contact with the left and right sides of the scribe position A1 at 211.
  • a scribe groove 511 is formed at the scribe position A1 on the first processing surface 211 of the CF substrate 21.
  • the lower movement support portion 41 of the second unit 14 moves forward along the guide rail 122.
  • the lower wheel cutter 42 of the second unit 14 moves forward while rotating in contact with the scribe position B1 on the second processing surface 221, and the lower roller 43 of the second unit 14
  • the processing surface 221 advances while rotating in contact with the left and right sides of the scribe position B1.
  • a scribe groove 521 is formed at a scribe position B 1 on the second processing surface 221 of the TFT substrate 22.
  • the scribe grooves 511, 521, 512, and 522 each advance in the depth direction.
  • an external force is applied to the glass substrate 2, whereby each of the scribe grooves 511, 521, 512, 522 develops in the depth direction.
  • the glass substrate 2 is cut at the scribe positions A1, B1 and the scribe positions A2, B2, and a portion of the first region 20A is taken out from the glass substrate 2 (see FIG. 5).
  • the movement support portions 31 and 41 of the first unit 13 and the movement support portions 31 and 41 of the second unit 14 are moved simultaneously. Therefore, the scribe grooves 511, 521, 512, 522 are formed simultaneously. Since the scribe grooves 511, 521, 512, and 522 are formed at the same time, it is possible to shorten the time required to take out the portion of the first region 20 A from the glass substrate 2.
  • the scribe positions A1, A2, B1, and B2 on the glass substrate 2 are not supported by the mounting table 10.
  • the lower rollers 43 the right roller 43
  • the upper rollers 33 the left roller 33
  • the upward external force applied to the glass substrate 2 from the wheel cutter 42 of the first unit 13 is received by the upper roller 33 of the first unit 13. Therefore, the bending of the glass substrate 2 due to the external force applied to the glass substrate 2 from the wheel cutters 32 and 42 of the first unit 13 is suppressed.
  • the upper and lower wheel cutters 32 and 42 are disposed to face each other with the glass substrate 2 interposed therebetween. Accordingly, the external forces applied from the wheel cutters 32 and 42 cancel each other, so that the bending of the glass substrate 2 is suppressed.
  • the scribe grooves 511, 521, 512, 522 are respectively replaced with the first processing surface 211 and the second processing surface. 221 can be formed perpendicularly. Accordingly, the occurrence of defects such as burrs or chips on the glass substrate 2 is suppressed.
  • the cutting apparatus 1 moves the first unit 13 and the second unit 14 from the glass substrate 2 mounted on the mounting table 10. Also, the glass substrate 2 is released from the rear side and released. Thereafter, the portion of the first region 20A, the remaining glass substrate 2 (the portion on the left side of the scribe positions A2 and B2), and the end material generated at the time of cutting for taking out the portion of the first region 20A are cut. It is unloaded from the device 1.
  • the cutting device 1 takes out the portion of the second region 20B from the remaining glass substrate 2.
  • the process of taking out the part of the second area 20B is substantially the same as the process of taking out the part of the first area 20A.
  • a process for extracting the portion of the second region 20B will be briefly described.
  • the remaining glass substrate 2 is mounted again on the mounting table 10 by, for example, a transfer robot and fixed.
  • the remaining glass substrate 2 is arranged such that the scribe positions A3, A4, B3, and B4 are not placed on the placing table 10, that is, in the gap between the placing tables 10.
  • the positional relationship between the first unit 13 and the glass substrate 2 is adjusted so that the position in the direction matches.
  • the wheel cutter 32 on the upper side of the first unit 13 and one of the two rollers 43 on the lower side of the first unit 13 (the right side roller 43) are arranged to face each other with the glass substrate 2 interposed therebetween.
  • the lower wheel cutter 42 of the first unit 13 and one of the two rollers 33 on the upper side of the first unit 13 (the left roller 43) are arranged to face each other with the glass substrate 2 interposed therebetween. .
  • the left and right positions of the wheel cutter 32 on the upper side of the second unit 14 and the scribe position A3 coincide with each other, and the left and right direction of the wheel cutter 42 on the lower side of the second unit 14 and the scribe position B3.
  • the positional relationship between the second unit 14 and the glass substrate 2 is adjusted so that these positions coincide with each other.
  • the cutting device 1 adjusts the positional relationship in the front-rear direction of the wheel cutters 32, 42 and the rollers 33, 43 and the positional relationship in the left-right direction of the wheel cutters 32, 42, rollers 33, 43, and the glass substrate 2.
  • the first unit 13 and the second unit 14 are advanced at the same speed while maintaining the subsequent positional relationship.
  • a scribe groove 514 is formed at the scribe position A4 on the first processing surface 211 of the CF substrate 21, and the second processing of the TFT substrate 22 is performed.
  • a scribe groove 524 is formed at a scribe position B4 on the surface 221.
  • a scribe groove 513 is formed at the scribe position A ⁇ b> 3 on the first processing surface 211 of the CF substrate 21, and the second substrate 14 of the TFT substrate 22 is formed.
  • a scribe groove 523 is formed at a scribe position B3 on the processing surface 221.
  • the scribe grooves 513, 523, 514, and 524 each advance in the depth direction.
  • an external force is applied to the glass substrate 2, so that each of the scribe grooves 513, 523, 514, and 524 develops in the depth direction.
  • the glass substrate 2 is cut at the scribe positions A3 and B3 and the scribe positions A4 and B4, and a portion of the second region 20B is taken out from the glass substrate 2 (see FIG. 5).
  • the cutting device 1 retracts the first unit 13 and the second unit 14 to the rear side of the glass substrate 2 placed on the placement table 10 and releases the fixation of the glass substrate 2. Thereafter, the portion of the second region 20 ⁇ / b> B is unloaded from the cutting device 1.
  • the process of taking out the part of the first region 20A and the part of the second region 20B from the glass substrate 2 has been described.
  • the second unit 14 is used to form the first region 20A.
  • Cutting processing is performed on the portion and the portion of the second region 20B, and the unit glass substrate is taken out.
  • a liquid crystal display panel is manufactured based on the unit glass substrate.
  • the upper wheel cutter 32 and the lower roller 43 are The lower wheel cutter 42 and the upper roller 33 are arranged to face each other with the glass substrate 2 interposed therebetween.
  • the rollers 33 and 43 facing the wheel cutters 32 and 42 can receive the external force applied to the glass substrate 2 from the wheel cutters 32 and 42 when the scribe grooves 512 and 522 or the scribe grooves 514 and 524 are formed. .
  • the bending of the glass substrate 2 when forming the scribe grooves 512, 522 or the scribe grooves 514, 524 can be suppressed, and the scribe grooves 512, 522 or the scribe grooves 514, 524 can be arranged with respect to the surface of the glass substrate 2. It can be formed vertically. As a result, the occurrence of defects such as burrs or chips in the glass substrate 2 is suppressed.
  • the 1st cutting part or 2nd cutting part of embodiment is not limited to the wheel cutters 32 and 42,
  • channel in the glass substrate 2 without rotating may be sufficient.
  • the 1st moving part or 2nd moving part of embodiment is not limited to the rollers 33 and 43,
  • bowl rotating centering on the rotating shaft parts 331 and 431 may be sufficient.
  • the first moving unit or the second moving unit is not limited to the rotating unit, and may slide on the first processing surface 211 or the second processing surface 221 of the glass substrate 2, for example.
  • FIG. 6 is a front view schematically showing the configuration of the cutting device 1 according to the second embodiment.
  • the cutting device 1 according to the present embodiment is substantially the same as the cutting device 1 according to the first embodiment, except that each of the first unit 13 and the second unit 14 includes one roller 33 and one roller 43. It is a configuration.
  • differences from the first embodiment will be mainly described, and the same components as those in the first embodiment will be denoted by the same reference numerals and description thereof will be omitted.
  • each of the first unit 13 and the second unit 14 includes one roller 33 and one roller 43.
  • the upper roller 33 of the first unit 13 is disposed on the left side of the upper wheel cutter 32 of the first unit 13. Further, the lower roller 43 of the first unit 13 is disposed on the right side of the lower wheel cutter 42 of the first unit 13.
  • the wheel cutter 32 on the upper side of the first unit 13 and the roller 43 on the lower side of the first unit 13 face each other with the glass substrate 2 in between.
  • the lower wheel cutter 42 of the first unit 13 and the upper roller 33 of the first unit 13 are disposed to face each other with the glass substrate 2 interposed therebetween.
  • the portion where the terminal is led out is always on the right side of the scribe position A2 (A4) on the upper CF substrate 21 than the scribe position B2 (B4) on the lower TFT substrate 22. Therefore, as described above, the upper roller 33 is arranged on the left side of the upper wheel cutter 32, and the lower roller 43 is arranged on the right side of the lower wheel cutter 42, so that the terminal is provided. When scribing, the wheel cutters 32 and 42 and the rollers 33 and 43 can be arranged to face each other with the glass substrate 2 interposed therebetween.
  • the number of the rollers 33 and the rollers 43 is reduced to one as in the present embodiment. It can reduce, and the structure of the cutting device 1 can be simplified.
  • the cutting device 1 is a cutting device that cuts the plate-like member 2 in which the plate-like first member 21 and the second member 22 are bonded to each other.
  • First cutting grooves 511 to 514 extending in the moving direction are formed in the first processing surface 211 by moving in contact with the first processing surface 211 opposite to the surface facing the two members 22.
  • the second cutting grooves 521 to 524 extending in the moving direction are formed in the second processing surface 221 by contacting the second processing surface 221 opposite to the surface opposite to the surface 21 and moving in the moving direction.
  • the second cutting part 42 One or more second moving parts 43 that move in the moving direction while contacting the second processing surface 221 along with the movement of the second cutting part 42, and the second movement that is the same as the first cutting part 32
  • the portion 43 is opposed to the plate-like member 2, and the second cutting portion 42 and the one first moving portion 33 are opposed to each other via the plate-like member 2.
  • the second moving unit 43 receives the external force applied from the first cutting part 32 to the plate-like member 2, and the first moving part 33 receives the external force applied from the second cutting part 42 to the plate-like member 2. Since it receives, the bending of the plate-shaped member 2 can be suppressed. Accordingly, the first cutting grooves 511 to 514 can be formed perpendicular to the first processing surface 211, and the second cutting grooves 521 to 524 can be formed perpendicular to the second processing surface 221. It is possible to suppress the occurrence of defects such as burrs or chips in the shaped member 2.
  • first cutting grooves 511 to 514 by the first cutting portion 32 and the formation of the second cutting grooves 521 to 524 by the second cutting portion 42 are performed simultaneously, so that the plate-like member 2 is formed.
  • the time required for cutting can be shortened.
  • the cutting apparatus 1 includes a first movement support unit 31 that moves in the moving direction while supporting the first cutting unit 32 and the first moving unit 33, the second cutting unit 42, and the first moving unit 33. You may further provide the 2nd movement support part 41 which moves to the said moving direction, supporting the 2 movement part 43.
  • FIG. 1 is a first movement support unit 31 that moves in the moving direction while supporting the first cutting unit 32 and the first moving unit 33, the second cutting unit 42, and the first moving unit 33. You may further provide the 2nd movement support part 41 which moves to the said moving direction, supporting the 2 movement part 43.
  • the first movement support part 31 supports the first cutting part 32 and the first movement part 33
  • the first cutting part 32 and the first movement part 31 are moved by moving the first movement support part 31.
  • One moving part 33 can be moved in the same direction at the same speed.
  • the second movement support part 41 supports the second cutting part 42 and the second movement part 43
  • the second cutting part 42 and the second movement part are moved by moving the second movement support part 41. 43 can be moved in the same direction and at the same speed.
  • the cutting device 1 includes two each of the first moving unit 33 and the second moving unit 43, and the two first moving units 33 are juxtaposed in a direction intersecting the moving direction. And the first cutting part 32 is disposed between the two first moving parts 33 and faces one of the two second moving parts 43 via the plate-like member 2. The two second moving parts 43 are juxtaposed in a direction intersecting the moving direction, and the second cutting part 42 is disposed between the two second moving parts 43 and the two One of the first moving parts 33 faces the plate-like member 2.
  • the first cutting unit 32 and the second moving unit 43 are The second cutting part 42 and the first moving part 33 can be opposed to each other via the plate-like member 2 via the plate-like member 2. Accordingly, the relative positions of the first cutting grooves 511 to 514 formed on the first processing surface 211 and the second cutting grooves 521 to 524 formed on the second processing surface 221 in the direction intersecting the moving direction. Even when the relationship is changed, the first cutting unit 32 (second cutting unit 42) and the second moving unit 43 (first movement) are not changed without changing the arrangement of the first moving unit 33 and the second moving unit 43. A cutting process in which the moving part 33) is opposed to each other via the plate-like member 2 can be performed.
  • each of the first moving unit 33 and the second moving unit 43 may be a roller that rotates with movement in the moving direction. According to the above configuration, the first moving unit 33 and the second moving unit 43 can move smoothly while being in contact with the first processing surface 211 and the second processing surface 221.
  • the plate-like member 2 is a glass substrate formed by bonding two substrates, and the first cutting grooves 511 to 514 and the second cutting grooves 521 to 524 are used. May be a scribe groove.
  • the cutting method according to the embodiment is a cutting method in which the plate-like member 2 formed by bonding the plate-like first member 21 and the second member 22 is cut, and is opposed to the second member 22 in the first member 21.
  • the second moving portion 43 that moves while contacting the second processing surface 221 on the opposite side is opposed to the second processing surface 221 to form second cutting grooves 521 to 524 on the second processing surface 221.
  • the first cutting unit 32 and the second cutting unit 42 are opposed to each other via the plate-like member 2 with the second cutting unit 42 for moving and the first moving unit 33 moving while contacting the first processing surface 211.
  • Unit 42, first moving unit 33, and second moving unit 4. Are moved in the same direction at the same speed, so that the first cutting grooves 511 to 514 and the second cutting grooves 521 to 524 extending in the movement direction in the first cutting part 32 and the second cutting part 42 are provided. It is characterized by being formed simultaneously. According to the said structure, the effect similar to the cutting device 1 which concerns on embodiment is acquired.
  • the cutting device 1 may include components that are not disclosed in the first and second embodiments.
  • the constituent elements (technical features) disclosed in each embodiment can be combined with each other, and a new technical feature can be formed by the combination.
  • Cutting device Glass substrate (plate-like member) 21 CF substrate (first member) 211 First processing surface 22 TFT substrate (second member) 221 2nd processing surface 31 Movement support part (1st movement support part) 32 Wheel cutter (first cutting part) 33 Roller (first moving part) 41 Movement support part (second movement support part) 42 Wheel cutter (second cutting part) 43 Roller (second moving part) 511 to 514 Scribe groove (first cutting groove) 521 to 524 Scribe groove (second cutting groove)

Abstract

The cutting device according to the present embodiment is for cutting a plate-shaped member obtained by affixing a plate-shaped first member and second member to each other, wherein the cutting device is provided with: a first cutting part, which comes into contact with a first processing surface of the first member on the opposite side from the surface facing the second member and moves, thereby forming a first cutting groove extending in the movement direction on the first processing surface; one or more first movement parts, which move together with the movement of the first cutting part and move in the movement direction while being in contact with the first processing surface; a second cutting part, which comes into contact with a second processing surface of the second member on the opposite side from the surface facing the first member and moves in the movement direction, and thereby forms a second cutting groove extending in the movement direction on the second processing surface; and one or more second movement parts, which move together with the movement of the second cutting part and move in the movement direction while being in contact with the second processing surface. The first cutting part and one of the second movement parts face each other across the plate-shaped member, and the second cutting part and one of the first movement parts face each other across the plate-shaped member.

Description

切断装置及び切断方法Cutting apparatus and cutting method
 本発明は、板状部材を切断する切断装置及び切断方法に関する。 The present invention relates to a cutting device and a cutting method for cutting a plate-like member.
 例えば、特許文献1には、TFT(Thin Film Transistor)基板及びCF(Color Filter:カラーフィルタ)基板が貼り合わされたガラス基板(板状部材)を切断する方法が開示されている。 For example, Patent Document 1 discloses a method of cutting a glass substrate (plate member) on which a TFT (Thin Film Transistor) substrate and a CF (Color Filter) substrate are bonded.
 特許文献1に開示の切断方法において、まず、ガラス基板が、TFT基板を上側にして載物台に載置される。そして、ホイールカッタ(切断部)がTFT基板上を移動、即ちスクライブすることによって、TFT基板にスクライブ溝(切断用溝)が形成される。次に、ガラス基板が、CF基板を上側にして載物台に載置される。そして、ホイールカッタがCF基板上を移動、即ちスクライブすることによって、CF基板にスクライブ溝が形成される。スクライブ溝は、TFT基板及びCF基板夫々の表面に垂直に形成され、スクライブ溝が深さ方向に進展することによって、ガラス基板は切断される。切断されたガラス基板を基に、液晶パネルが製造される。なお、特許文献1は、ガラス基板を下側からスクライブすることについても開示している。 In the cutting method disclosed in Patent Document 1, first, a glass substrate is placed on a stage with the TFT substrate facing upward. Then, the wheel cutter (cutting portion) moves on the TFT substrate, that is, scribes, whereby a scribe groove (cutting groove) is formed in the TFT substrate. Next, the glass substrate is placed on the stage with the CF substrate facing upward. Then, when the wheel cutter moves on the CF substrate, that is, scribes, a scribe groove is formed in the CF substrate. The scribe groove is formed perpendicular to the surface of each of the TFT substrate and the CF substrate, and the glass substrate is cut by the scribe groove extending in the depth direction. A liquid crystal panel is manufactured based on the cut glass substrate. Patent Document 1 also discloses scribing a glass substrate from below.
 特許文献1に開示の切断方法において、ガラス基板を上側からスクライブする場合、ガラス基板は、載置台によって下側から支持されている。また、ガラス基板を下側からスクライブする場合、ガラス基板は、ホイールカッタに対向して配置された荷重バランス車輪によって上側から支持されている。故に、ホイールカッタからガラス基板に加えられる外力によってガラス基板が撓むことが抑制される。 In the cutting method disclosed in Patent Document 1, when the glass substrate is scribed from the upper side, the glass substrate is supported from the lower side by the mounting table. When the glass substrate is scribed from the lower side, the glass substrate is supported from the upper side by a load balance wheel arranged to face the wheel cutter. Therefore, it is suppressed that a glass substrate bends with the external force applied to a glass substrate from a wheel cutter.
特許第4885111号公報Japanese Patent No. 4885111
 ところで、ガラス基板の切断に要する時間を短縮するために、2つのホイールカッタを用いてTFT基板及びCF基板を同時的にスクライブする、即ちガラス基板を上側及び下側の両側から同時的にスクライブすることが考えられる。TFT基板におけるスクライブ位置とCF基板におけるスクライブ位置とが同じであり、2つのホイールカッタがガラス基板を介して対向して配置される場合、2つのホイールカッタから加えられる外力は互いに打ち消し合うので、ガラス基板の撓みが抑制される。一方で、TFT基板におけるスクライブ位置とCF基板におけるスクライブ位置とが異なる場合、上側のホイールカッタからガラス基板に加えられる下向きの外力及び下側のホイールカッタからガラス基板に加えられる上向きの外力によって、ガラス基板が撓む虞がある。なお、例えば端子出しを行なう部分において、TFT基板におけるスクライブ位置とCF基板におけるスクライブ位置とが異なる。 By the way, in order to shorten the time required for cutting the glass substrate, the TFT substrate and the CF substrate are simultaneously scribed using two wheel cutters, that is, the glass substrate is simultaneously scribed from both the upper and lower sides. It is possible. When the scribe position on the TFT substrate and the scribe position on the CF substrate are the same and the two wheel cutters are arranged to face each other through the glass substrate, the external forces applied from the two wheel cutters cancel each other out. Substrate bending is suppressed. On the other hand, when the scribe position on the TFT substrate and the scribe position on the CF substrate are different, the glass is caused by the downward external force applied to the glass substrate from the upper wheel cutter and the upward external force applied to the glass substrate from the lower wheel cutter. There is a possibility that the substrate bends. Note that, for example, in a portion where the terminal is provided, the scribe position on the TFT substrate is different from the scribe position on the CF substrate.
 ガラス基板をスクライブしているときにガラス基板に撓みが生じると、スクライブ溝をガラス基板の面に対して垂直に形成することができず、その結果、スクライブ溝の深さ方向への進展に伴って、ガラス基板にバリ又は欠け等の不具合が生じることがある。以上のような問題は、ガラス基板に限定されず、板状で可撓性を有する2枚の部材の一面同士が貼り合わされてなる板状部材を切断する場合に起こり得る。 If the glass substrate bends while the glass substrate is scribed, the scribe groove cannot be formed perpendicular to the surface of the glass substrate, and as a result, the scribe groove progresses in the depth direction. Thus, defects such as burrs or chips may occur in the glass substrate. The problems as described above are not limited to glass substrates, and may occur when cutting a plate-like member formed by bonding one surface of two plate-like members having flexibility.
 本発明は斯かる事情に鑑みてなされたものであり、その主たる目的は、2枚の部材が貼り合わされてなる板状部材を2つの部材の両側から同時的に切断する際に板状部材に不具合が生じることを防止し得る切断装置及び切断方法を提供することにある。 This invention is made | formed in view of such a situation, The main objective is to use a plate-shaped member at the time of cut | disconnecting the plate-shaped member by which two members are bonded together from both sides of two members simultaneously. It is an object of the present invention to provide a cutting device and a cutting method that can prevent the occurrence of defects.
 本実施の形態に係る切断装置は、板状の第1部材及び第2部材が貼り合わされてなる板状部材を切断する切断装置において、前記第1部材における前記第2部材に対向する面とは逆側の第1処理面に接触して移動することによって、移動方向に延びる第1切断用溝を前記第1処理面に形成する第1切断部と、前記第1切断部の移動と共に前記第1処理面に接触しながら前記移動方向に移動する1以上の第1移動部と、前記第2部材における前記第1部材に対向する面とは逆側の第2処理面に接触して前記移動方向に移動することによって、前記移動方向に延びる第2切断用溝を前記第2処理面に形成する第2切断部と、前記第2切断部の移動と共に前記第2処理面に接触しながら前記移動方向に移動する1以上の第2移動部とを備え、前記第1切断部と一の前記第2移動部とが前記板状部材を介して対向し、前記第2切断部と一の前記第1移動部とが前記板状部材を介して対向していることを特徴とする。 The cutting device according to the present embodiment is a cutting device that cuts a plate-like member formed by laminating a plate-like first member and a second member. What is the surface of the first member that faces the second member? By moving in contact with the first processing surface on the opposite side, a first cutting portion for forming a first cutting groove extending in the moving direction on the first processing surface, and the movement of the first cutting portion together with the first cutting portion. One or more first moving parts that move in the moving direction while contacting one processing surface, and the second member that contacts the second processing surface opposite to the surface facing the first member in the movement direction A second cutting portion that forms a second cutting groove extending in the moving direction on the second processing surface by moving in the direction, and the second cutting surface while contacting the second processing surface along with the movement of the second cutting portion. One or more second moving parts moving in the moving direction, One cutting part and one second moving part are opposed to each other via the plate-like member, and the second cutting part and one first moving part are opposed to each other via the plate-like member. It is characterized by.
 本実施の形態に係る切断方法は、板状の第1部材及び第2部材が貼り合わされてなる板状部材を切断する切断方法において、前記第1部材における前記第2部材に対向する面とは逆側の第1処理面に第1切断用溝を形成するための第1切断部と、前記第2部材における前記第1部材に対向する面とは逆側の第2処理面に接触しながら移動する第2移動部とを前記板状部材を介して対向させ、前記第2処理面に第2切断用溝を形成するための第2切断部と、前記第1処理面に接触しながら移動する第1移動部とを前記板状部材を介して対向させ、前記第1切断部、前記第2切断部、前記第1移動部、及び前記第2移動部を同じ方向に同じ速度で移動させることによって、前記第1切断部及び前記第2切断部に移動方向に延びる前記第1切断用溝及び前記第2切断用溝を同時的に形成させることを特徴とする。 The cutting method according to the present embodiment is a cutting method for cutting a plate-like member formed by laminating a plate-like first member and a second member. What is the surface of the first member facing the second member? The first cutting portion for forming the first cutting groove on the first processing surface on the opposite side and the second processing surface on the opposite side to the surface of the second member facing the first member are in contact with each other. The second moving portion that moves is opposed to the second processing portion through the plate-like member, and moves while being in contact with the first processing surface and the second cutting portion for forming the second cutting groove on the second processing surface. The first moving part is opposed to the first moving part via the plate-like member, and the first cutting part, the second cutting part, the first moving part, and the second moving part are moved in the same direction at the same speed. The first cutting part extends in the moving direction to the first cutting part and the second cutting part. And wherein the to simultaneously form the second cutting grooves.
 本発明によれば、2枚の部材が貼り合わされてなる板状部材を2つの部材の両側から同時的に切断する際に板状部材に不具合が生じることを防止し得る切断装置及び切断方法が提供される。 According to the present invention, there is provided a cutting device and a cutting method capable of preventing the plate-like member from being defective when simultaneously cutting a plate-like member formed by bonding two members from both sides of the two members. Provided.
実施の形態1に係る切断装置の構成を模式的に示す正面図である。It is a front view which shows typically the structure of the cutting device which concerns on Embodiment 1. FIG. 実施の形態1に係る切断装置の要部構成を模式的に示す正面図である。It is a front view which shows typically the principal part structure of the cutting device which concerns on Embodiment 1. FIG. 実施の形態1に係る切断装置による切断手順を説明するための平面図である。It is a top view for demonstrating the cutting procedure by the cutting device which concerns on Embodiment 1. FIG. 実施の形態1に係る切断装置による切断手順を説明するための断面図である。It is sectional drawing for demonstrating the cutting procedure by the cutting device which concerns on Embodiment 1. FIG. 実施の形態1に係る切断装置によって切断されたガラス基板を略示する断面図である。3 is a cross-sectional view schematically showing a glass substrate cut by the cutting device according to Embodiment 1. FIG. 実施の形態2に係る切断装置の構成を模式的に示す正面図である。It is a front view which shows typically the structure of the cutting device which concerns on Embodiment 2. FIG.
 以下、本発明の実施の形態について図面に基づいて詳述する。実施の形態において、切断装置が切断する板状部材は、CF基板及びTFT基板が貼り合わされてなるガラス基板であり、板状部材を構成する板状の2つの部材は、CF基板及びTFT基板である。なお、板状部材を構成する板状の2つの部材は、ガラス製に限定されず、例えば合成樹脂製であってもよい。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the embodiment, the plate member cut by the cutting device is a glass substrate formed by bonding a CF substrate and a TFT substrate, and the two plate members constituting the plate member are a CF substrate and a TFT substrate. is there. Note that the two plate-like members constituting the plate-like member are not limited to glass, and may be made of, for example, a synthetic resin.
(実施の形態1)
 まず、図1及び図2を参照して、本実施の形態に係る切断装置1及び板状部材としてのガラス基板2の構成を説明する。図1は、実施の形態1に係る切断装置1の構成を模式的に示す正面図である。図2は、実施の形態1に係る切断装置1の要部構成を模式的に示す正面図である。以下では、図中の左右方向を左右方向といい、図中の上下方向を上下方向といい、図中の前後方向を前後方向という。
(Embodiment 1)
First, with reference to FIG.1 and FIG.2, the structure of the glass substrate 2 as the cutting device 1 which concerns on this Embodiment, and a plate-shaped member is demonstrated. FIG. 1 is a front view schematically showing the configuration of the cutting device 1 according to the first embodiment. FIG. 2 is a front view schematically showing the main configuration of the cutting device 1 according to the first embodiment. Hereinafter, the left-right direction in the figure is referred to as the left-right direction, the up-down direction in the figure is referred to as the up-down direction, and the front-rear direction in the figure is referred to as the front-rear direction.
 切断装置1は、CF基板21(第1部材)及びTFT基板22(第2部材)が貼り合わされたガラス基板2(板状部材)を切断して、ガラス基板2から複数枚(例えば6枚)のガラス基板を取り出す。ガラス基板2を切断して最終的に取り出されたガラス基板(以下、単位ガラス基板という)を基に、液晶表示パネルが製造される。 The cutting device 1 cuts a glass substrate 2 (plate-like member) on which a CF substrate 21 (first member) and a TFT substrate 22 (second member) are bonded, and a plurality of pieces (for example, six pieces) from the glass substrate 2. Take out the glass substrate. A liquid crystal display panel is manufactured based on a glass substrate (hereinafter referred to as a unit glass substrate) that is finally taken out by cutting the glass substrate 2.
 ガラス基板2は、矩形状のガラス製の基板を含むCF基板21と矩形状のガラス製の基板を含むTFT基板22とを備える。CF基板21におけるTFT基板22に対向する面(以下、CF形成面という)には、図示しないカラーフィルタが形成されている。CF基板21におけるCF形成面とは逆側の面(以下、第1処理面という)211に、スクライブ溝511~514(図4参照)が形成される。TFT基板22のCF基板21に対向する面(以下、TFT形成面という)には、図示しないTFTアレイが形成されている。TFT基板22におけるTFT形成面とは逆側の面(以下、第2処理面という)221に、スクライブ溝521~524(図4参照)が形成される。 The glass substrate 2 includes a CF substrate 21 including a rectangular glass substrate and a TFT substrate 22 including a rectangular glass substrate. A color filter (not shown) is formed on the surface of the CF substrate 21 facing the TFT substrate 22 (hereinafter referred to as a CF forming surface). Scribe grooves 511 to 514 (see FIG. 4) are formed on a surface (hereinafter referred to as a first processing surface) 211 opposite to the CF formation surface of the CF substrate 21. A TFT array (not shown) is formed on the surface of the TFT substrate 22 facing the CF substrate 21 (hereinafter referred to as a TFT formation surface). Scribe grooves 521 to 524 (see FIG. 4) are formed on a surface 221 opposite to the TFT formation surface (hereinafter referred to as a second processing surface) 221 on the TFT substrate 22.
 CF基板21及びTFT基板22は、CF形成面とTFT形成面とが適長離隔して対向配置された状態で、複数の封止部23を介して貼り合わされている。CF基板21及びTFT基板22間における各封止部23の内部には、透明なスペーサ(不図示)が配されている。 The CF substrate 21 and the TFT substrate 22 are bonded together via a plurality of sealing portions 23 in a state where the CF forming surface and the TFT forming surface are arranged to face each other with an appropriate distance therebetween. Transparent spacers (not shown) are arranged inside each sealing portion 23 between the CF substrate 21 and the TFT substrate 22.
 封止部23は、例えば、硬化した接着剤であり、矩形環状をなす。例えば、ガラス基板2から6つの単位ガラス基板を取り出す場合、即ち面取り数が6の場合、ガラス基板2には、例えば前後方向に3つ、左右方向に2つの封止部23がマトリクス状に配される(図3参照)。 The sealing portion 23 is, for example, a hardened adhesive and has a rectangular ring shape. For example, when six unit glass substrates are taken out from the glass substrate 2, that is, when the number of chamfers is 6, for example, three sealing portions 23 in the front-rear direction and two sealing portions 23 in the left-right direction are arranged in a matrix. (See FIG. 3).
 切断装置1は、複数(本実施の形態では3つ)の載置台10、複数(本実施の形態では4本)のガイドレール111,112,121,122、第1ユニット13、及び第2ユニット14を備える。なお、本実施の形態において、切断装置1は、第1ユニット13及び第2ユニット14の2つのユニットを備えているが、該ユニットの数は2つに限られず、1つでもよいし、3つ以上でもよい。第1ユニット13及び第2ユニット14の構成は、取り付けられるガイドレール111,112,121,122が異なる点を除き、実質的に同じである。以下では、代表して第1ユニット13について具体的に説明する。 The cutting device 1 includes a plurality of (three in the present embodiment) mounting tables 10, a plurality (four in the present embodiment) guide rails 111, 112, 121, 122, a first unit 13, and a second unit. 14. In the present embodiment, the cutting apparatus 1 includes two units of the first unit 13 and the second unit 14, but the number of the units is not limited to two, and may be one, There may be more than one. The configurations of the first unit 13 and the second unit 14 are substantially the same except that the guide rails 111, 112, 121, and 122 to be attached are different. Hereinafter, the first unit 13 will be specifically described as a representative.
 各載置台10の上面は、平坦面であり水平に保たれている。載置台10は、夫々の上面が同じ高さになるようにして、左右方向に並置されている。ガラス基板2は、TFT基板22を下側にして、載置台10に載置される。載置台10の上面は、載置台10に載置されたガラス基板2におけるTFT基板22の下面、即ち第2処理面221に接触する。ガラス基板2は、例えば真空吸着によって、載置台10に固定される。 The upper surface of each mounting table 10 is a flat surface and is kept horizontal. The mounting tables 10 are juxtaposed in the left-right direction so that the upper surfaces of the mounting tables 10 have the same height. The glass substrate 2 is mounted on the mounting table 10 with the TFT substrate 22 facing down. The upper surface of the mounting table 10 is in contact with the lower surface of the TFT substrate 22 on the glass substrate 2 mounted on the mounting table 10, that is, the second processing surface 221. The glass substrate 2 is fixed to the mounting table 10 by, for example, vacuum suction.
 ガイドレール111,112,121,122夫々は棒状部材である。ガイドレール111,112夫々は、載置台10に載置されたガラス基板2よりも上側にて、その長手方向が前後方向を向くように配されている。ガイドレール111,112夫々は、支持体(不図示)に支持されている。ガイドレール111は、ガイドレール112の左側に適長離隔して配されている。ガイドレール121,122夫々は、載置台10に載置されたガラス基板2よりも下側にて、その長手方向が前後方向を向くように配されている。ガイドレール121,122夫々は、支持体(不図示)に支持されている。ガイドレール121は、ガイドレール122の左側に適長離隔して配されている。 Each of the guide rails 111, 112, 121, 122 is a rod-shaped member. Each of the guide rails 111 and 112 is arranged on the upper side of the glass substrate 2 mounted on the mounting table 10 so that the longitudinal direction thereof faces the front-rear direction. Each of the guide rails 111 and 112 is supported by a support (not shown). The guide rail 111 is disposed on the left side of the guide rail 112 with an appropriate distance. Each of the guide rails 121 and 122 is disposed on the lower side of the glass substrate 2 placed on the placing table 10 so that the longitudinal direction thereof faces the front-rear direction. Each of the guide rails 121 and 122 is supported by a support (not shown). The guide rail 121 is arranged on the left side of the guide rail 122 with an appropriate distance.
 第1ユニット13は、移動支持部31,41、ホイールカッタ32,42、及びローラ33,43を備える。移動支持部31は、本実施の形態における第1移動支持部である。移動支持部31は、載置台10に載置されたガラス基板2よりも上側に配されている。移動支持部31は、上側のホイールカッタ32及びローラ33を支持しつつ、それらを移動方向(前後方向)に移動させる。移動支持部31は、例えばモータによって回転するボールねじから推力を与えられることによって、ガイドレール111に沿って前後方向に移動する。移動支持部31の移動に伴って、ホイールカッタ32及びローラ33が前後方向に移動する。移動支持部31は、箱体311及びカッタホルダ312を有する。 The first unit 13 includes movement support portions 31 and 41, wheel cutters 32 and 42, and rollers 33 and 43. The movement support part 31 is a first movement support part in the present embodiment. The movement support unit 31 is disposed above the glass substrate 2 placed on the placement table 10. The movement support unit 31 supports the upper wheel cutter 32 and the roller 33 while moving them in the movement direction (front-rear direction). The movement support unit 31 moves in the front-rear direction along the guide rail 111 by being given a thrust from a ball screw rotated by a motor, for example. As the movement support unit 31 moves, the wheel cutter 32 and the roller 33 move in the front-rear direction. The movement support unit 31 includes a box 311 and a cutter holder 312.
 箱体311は、ガイドレール111に取り付けられている。カッタホルダ312は、箱体311の下端部から下向きに延びた筒状をなす。カッタホルダ312の下部には、載置台10に載置されたガラス基板2の第1処理面211に臨む開口がある。カッタホルダ312の内側には、ホイールカッタ32を回転可能に支持する回転軸部321が設けられている。また、カッタホルダ312の外側には、ローラ33を回転可能に支持する回転軸部331が設けられている。回転軸部321及び回転軸部331は、左右方向に延びる軸である。なお、回転軸部331は、カッタホルダ312ではなく、例えば箱体311又は箱体311に設けられたアームに設けられてもよい。 The box 311 is attached to the guide rail 111. The cutter holder 312 has a cylindrical shape extending downward from the lower end of the box 311. In the lower part of the cutter holder 312, there is an opening facing the first processing surface 211 of the glass substrate 2 placed on the placing table 10. Inside the cutter holder 312, a rotating shaft portion 321 that rotatably supports the wheel cutter 32 is provided. A rotating shaft portion 331 that rotatably supports the roller 33 is provided outside the cutter holder 312. The rotation shaft portion 321 and the rotation shaft portion 331 are shafts extending in the left-right direction. In addition, the rotating shaft part 331 may be provided not on the cutter holder 312 but on, for example, the box 311 or an arm provided on the box 311.
 ホイールカッタ32は、本実施の形態における第1切断部である。ホイールカッタ32は円盤状をなす。ホイールカッタ32は、その下側の一部がカッタホルダ312の開口から下側に突出するように、カッタホルダ312内の回転軸部321によって回転可能に支持されている。ホイールカッタ32は、回転軸部321を中心に回転する。ホイールカッタ32は、第1処理面211に接触して回転しながら移動することによって、移動方向に延びるスクライブ溝511~514を第1処理面211に形成する。 The wheel cutter 32 is the first cutting part in the present embodiment. The wheel cutter 32 has a disk shape. The wheel cutter 32 is rotatably supported by a rotating shaft portion 321 in the cutter holder 312 such that a part of the lower side of the wheel cutter 32 protrudes downward from the opening of the cutter holder 312. The wheel cutter 32 rotates around the rotation shaft portion 321. The wheel cutter 32 contacts the first processing surface 211 and moves while rotating to form scribe grooves 511 to 514 extending in the moving direction on the first processing surface 211.
 本実施の形態において、第1ユニット13は、2つのローラ33を備えている。2つのローラ33は、カッタホルダ312の左右両側に1つずつ配されている。各ローラ33は、本実施の形態における第1移動部である。2つのローラ33は左右方向(移動方向に交差する方向)に並置してあり、2つのローラ33の中間にホイールカッタ32が配されている。各ローラ33は、回転軸部331によって回転可能に支持されており、回転軸部331を中心に回転する。各ローラ33は、ホイールカッタ32の移動と共に第1処理面211に接触して回転しながら移動方向に移動する。 In the present embodiment, the first unit 13 includes two rollers 33. The two rollers 33 are arranged one on each of the left and right sides of the cutter holder 312. Each roller 33 is a first moving unit in the present embodiment. The two rollers 33 are juxtaposed in the left-right direction (direction intersecting the moving direction), and the wheel cutter 32 is disposed between the two rollers 33. Each roller 33 is rotatably supported by a rotation shaft portion 331 and rotates around the rotation shaft portion 331. Each roller 33 moves in the moving direction while rotating in contact with the first processing surface 211 as the wheel cutter 32 moves.
 移動支持部41は、本実施の形態における第2移動支持部である。移動支持部41は、載置台10に載置されたガラス基板2よりも下側に配されている。移動支持部41は、下側のホイールカッタ42及びローラ43を支持しつつ、それらを移動方向(前後方向)に移動させる。移動支持部41は、例えばモータによって回転するボールねじから推力を与えられることによって、ガイドレール121に沿って前後方向に移動する。移動支持部41の移動に伴って、ホイールカッタ42及びローラ43が前後方向に移動する。移動支持部41は、箱体411及びカッタホルダ412を有する。 The movement support part 41 is a second movement support part in the present embodiment. The movement support unit 41 is disposed below the glass substrate 2 placed on the placement table 10. The movement support unit 41 supports the lower wheel cutter 42 and the roller 43 and moves them in the movement direction (front-rear direction). The movement support unit 41 moves in the front-rear direction along the guide rail 121 by being given a thrust from a ball screw rotated by a motor, for example. As the movement support unit 41 moves, the wheel cutter 42 and the roller 43 move in the front-rear direction. The movement support unit 41 includes a box body 411 and a cutter holder 412.
 箱体411は、ガイドレール121に取り付けられている。カッタホルダ412は、箱体411の上端部から上向きに延びた筒状をなす。カッタホルダ412の上部には、載置台10に載置されたガラス基板2の第2処理面221に臨む開口がある。カッタホルダ412の内側には、ホイールカッタ42を回転可能に支持する回転軸部421が設けられている。また、カッタホルダ412の外側には、ローラ43を回転可能に支持する回転軸部431が設けられている。回転軸部421及び回転軸部431は、左右方向に延びる軸である。なお、回転軸部431は、カッタホルダ412ではなく、例えば箱体411又は箱体411に設けられたアームに設けられてもよい。 The box body 411 is attached to the guide rail 121. The cutter holder 412 has a cylindrical shape extending upward from the upper end portion of the box body 411. In the upper part of the cutter holder 412, there is an opening facing the second processing surface 221 of the glass substrate 2 placed on the placing table 10. Inside the cutter holder 412, a rotating shaft portion 421 that rotatably supports the wheel cutter 42 is provided. A rotating shaft 431 that rotatably supports the roller 43 is provided outside the cutter holder 412. The rotation shaft portion 421 and the rotation shaft portion 431 are shafts extending in the left-right direction. In addition, the rotating shaft part 431 may be provided not on the cutter holder 412 but on, for example, the box 411 or an arm provided on the box 411.
 ホイールカッタ42は、本実施の形態における第2切断部である。ホイールカッタ42は円盤状をなす。ホイールカッタ42は、その上部の一部がカッタホルダ412の開口から上側に突出するように、カッタホルダ412内の回転軸部421によって回転可能に支持されている。ホイールカッタ42は、回転軸部421を中心に回転する。ホイールカッタ42は、第2処理面221に接触して回転しながら移動することによって、移動方向に延びるスクライブ溝521~524を第2処理面221に形成する。 The wheel cutter 42 is a second cutting part in the present embodiment. The wheel cutter 42 has a disk shape. The wheel cutter 42 is rotatably supported by a rotating shaft portion 421 in the cutter holder 412 so that a part of the upper portion thereof protrudes upward from the opening of the cutter holder 412. The wheel cutter 42 rotates around the rotation shaft portion 421. The wheel cutter 42 contacts the second processing surface 221 and moves while rotating, thereby forming scribe grooves 521 to 524 extending in the moving direction on the second processing surface 221.
 本実施の形態において、第1ユニット13は、2つのローラ43を備えている。2つのローラ43は、カッタホルダ412の左右両側に1つずつ配されている。各ローラ43は、本実施の形態における第2移動部である。2つのローラ43は左右方向(移動方向に交差する方向)に並置してあり、2つのローラ43の中間にホイールカッタ42が配されている。各ローラ43は、回転軸部431によって回転可能に支持されており、回転軸部431を中心に回転する。各ローラ43は、ホイールカッタ42の移動と共に第2処理面221に接触して回転しながら移動方向に移動する。 In the present embodiment, the first unit 13 includes two rollers 43. Two rollers 43 are arranged one on each of the left and right sides of the cutter holder 412. Each roller 43 is a second moving unit in the present embodiment. The two rollers 43 are juxtaposed in the left-right direction (direction intersecting the moving direction), and a wheel cutter 42 is disposed between the two rollers 43. Each roller 43 is rotatably supported by a rotation shaft portion 431 and rotates around the rotation shaft portion 431. Each roller 43 moves in the moving direction while rotating in contact with the second processing surface 221 as the wheel cutter 42 moves.
 図1に示すように、第1ユニット13は、上側のホイールカッタ32と下側のホイールカッタ42とが左右方向において異なる位置に配置されている。即ち、第1ユニット13は、ガラス基板2における端子出しを行なう部分(TFTアレイの電極端子を出す部分)の切断に用いられる。一方、第2ユニット14は、上側のホイールカッタ32と下側のホイールカッタ42とが左右方向において同じ位置に配置、即ちガラス基板2を介して対向配置されている。即ち、第2ユニット14は、ガラス基板2における端子出しを行なわない部分の切断に用いられる。 As shown in FIG. 1, in the first unit 13, the upper wheel cutter 32 and the lower wheel cutter 42 are arranged at different positions in the left-right direction. That is, the first unit 13 is used for cutting a portion of the glass substrate 2 where the terminal is provided (a portion where the electrode terminal of the TFT array is provided). On the other hand, in the second unit 14, the upper wheel cutter 32 and the lower wheel cutter 42 are arranged at the same position in the left-right direction, that is, opposed to each other via the glass substrate 2. That is, the second unit 14 is used for cutting a portion of the glass substrate 2 where no terminal is provided.
 端子出しを行なう部分の切断に用いられる第1ユニット13は、上側のホイールカッタ32と下側の2つのローラ43のうちの一方とがガラス基板2を介して対向し、下側のホイールカッタ42と上側の2つのローラ33のうちの一方とがガラス基板2を介して対向している。これにより、スクライブ溝511~514を形成する際に上側のホイールカッタ32からガラス基板2に加えられる下向きの外力を、ホイールカッタ32に対向する下側のローラ43が受け止めることができる。同様に、スクライブ溝521~524を形成する際に下側のホイールカッタ42からガラス基板2に加えられる上向きの外力を、ホイールカッタ42に対向する上側のローラ33が受け止めることができる。よって、スクライブ溝511~514、521~524を形成する際のガラス基板2の撓みを抑制することができる。 In the first unit 13 used for cutting a portion to be connected to the terminal, the upper wheel cutter 32 and one of the lower two rollers 43 are opposed to each other with the glass substrate 2 interposed therebetween, and the lower wheel cutter 42. And one of the upper two rollers 33 are opposed to each other with the glass substrate 2 interposed therebetween. Accordingly, the lower roller 43 facing the wheel cutter 32 can receive the downward external force applied to the glass substrate 2 from the upper wheel cutter 32 when the scribe grooves 511 to 514 are formed. Similarly, the upper roller 33 facing the wheel cutter 42 can receive the upward external force applied to the glass substrate 2 from the lower wheel cutter 42 when the scribe grooves 521 to 524 are formed. Therefore, the bending of the glass substrate 2 when the scribe grooves 511 to 514 and 521 to 524 are formed can be suppressed.
 次に、図1及び図2に加えて図3~図5を参照して、ガラス基板2の切断手順を説明する。図3は、実施の形態1に係る切断装置1による切断手順を説明するための平面図である。図4は、実施の形態1に係る切断装置1による切断手順を説明するための断面図である。図5は、実施の形態1に係る切断装置1によって切断されたガラス基板2を略示する断面図である。図4及び図5においては、図1及び図2の場合と同様に、図中の左右方向を左右方向といい、図中の上下方向を上下方向といい、図中の前後方向を前後方向という。図3においては、図中の左右方向を左右方向といい、図中の上下方向を前後方向といい、図中の前後方向を上下方向という。また、ガラス基板2の図3中下側の一辺部を前辺部といい、ガラス基板2の図3中上側の一辺部を後辺部という。 Next, the cutting procedure of the glass substrate 2 will be described with reference to FIGS. 3 to 5 in addition to FIGS. FIG. 3 is a plan view for explaining a cutting procedure by the cutting apparatus 1 according to the first embodiment. FIG. 4 is a cross-sectional view for explaining a cutting procedure by the cutting apparatus 1 according to the first embodiment. FIG. 5 is a cross-sectional view schematically showing the glass substrate 2 cut by the cutting device 1 according to the first embodiment. 4 and 5, as in FIGS. 1 and 2, the horizontal direction in the figure is referred to as the horizontal direction, the vertical direction in the figure is referred to as the vertical direction, and the front-rear direction in the figure is referred to as the front-rear direction. . In FIG. 3, the left-right direction in the figure is referred to as the left-right direction, the up-down direction in the figure is referred to as the front-rear direction, and the front-rear direction in the figure is referred to as the up-down direction. Further, the lower side of the glass substrate 2 in FIG. 3 is referred to as a front side, and the upper side of the glass substrate 2 in FIG. 3 is referred to as a rear side.
 図3及び図4において、符号A1~A4夫々は、CF基板21上のスクライブ位置である。スクライブ位置A1~A4は、右から左へこの順に並ぶ。また、符号B1~B4夫々は、TFT基板22上のスクライブ位置である。スクライブ位置B1~B4は、右から左へこの順に並ぶ。本実施の形態において、ガラス基板2におけるスクライブ位置A1,B1とスクライブ位置A2,B2との間の領域(以下、第1領域という)20A、及びガラス基板2におけるスクライブ位置A3,B3とスクライブ位置A4,B4との間の領域(以下、第2領域という)20Bの夫々には、3つの封止部23が配されている。 3 and 4, reference numerals A1 to A4 are scribe positions on the CF substrate 21, respectively. The scribe positions A1 to A4 are arranged in this order from right to left. Reference numerals B 1 to B 4 are scribe positions on the TFT substrate 22. The scribe positions B1 to B4 are arranged in this order from right to left. In the present embodiment, a region (hereinafter referred to as a first region) 20A between the scribe positions A1, B1 and the scribe positions A2, B2 on the glass substrate 2, and a scribe position A3, B3 and the scribe position A4 on the glass substrate 2 are used. , B4, three sealing portions 23 are disposed in each of the regions 20B (hereinafter referred to as second regions) 20B.
 スクライブ位置A1,B1夫々の左右方向の位置は同じである。即ち、スクライブ位置A1,B1は、端子出しを行なわない部分であり、第2ユニット14によって該スクライブ位置A1,B1にスクライブ溝511,521が形成される。一方、スクライブ位置A2,B2夫々の左右方向の位置は異なっている。具体的には、スクライブ位置A2の左右方向の位置は、スクライブ位置B2の左右方向の位置よりも右側にある。即ち、スクライブ位置A2,B2は、端子出しを行なう部分であり、第1ユニット13によって該スクライブ位置A2,B2にスクライブ溝512,522が形成される。スクライブ溝511,512は、本実施の形態における第1切断用溝であり、スクライブ溝521,522は、本実施の形態における第2切断用溝である。 The scribe positions A1 and B1 have the same horizontal position. That is, the scribe positions A1 and B1 are portions where the terminals are not provided, and the second unit 14 forms scribe grooves 511 and 521 at the scribe positions A1 and B1. On the other hand, the horizontal positions of the scribe positions A2 and B2 are different. Specifically, the horizontal position of the scribe position A2 is on the right side of the horizontal position of the scribe position B2. That is, the scribe positions A2 and B2 are portions where terminals are led out, and the first unit 13 forms scribe grooves 512 and 522 at the scribe positions A2 and B2. Scribe grooves 511 and 512 are first cutting grooves in the present embodiment, and scribe grooves 521 and 522 are second cutting grooves in the present embodiment.
 スクライブ位置A1,B1と同様に、スクライブ位置A3,B3夫々の左右方向の位置は同じである。即ち、スクライブ位置A3,B3は、端子出しを行なわない部分であり、第2ユニット14によって該スクライブ位置A3,B3にスクライブ溝513,523が形成される。一方、スクライブ位置A2,B2と同様に、スクライブ位置A4,B4夫々の左右方向の位置は異なっている。具体的には、スクライブ位置A4の左右方向の位置は、スクライブ位置B4の左右方向の位置よりも右側にある。即ち、スクライブ位置A4,B4は、端子出しを行なう部分であり、第1ユニット13によって該スクライブ位置A4,B4にスクライブ溝514,524が形成される。スクライブ溝513,514は、本実施の形態における第1切断用溝であり、スクライブ溝523,524は、本実施の形態における第2切断用溝である。 As in the scribe positions A1 and B1, the horizontal positions of the scribe positions A3 and B3 are the same. That is, the scribe positions A3 and B3 are portions where the terminals are not provided, and the second unit 14 forms scribe grooves 513 and 523 at the scribe positions A3 and B3. On the other hand, as in the scribe positions A2 and B2, the positions in the left-right direction of the scribe positions A4 and B4 are different. Specifically, the horizontal position of the scribe position A4 is on the right side of the horizontal position of the scribe position B4. That is, the scribe positions A4 and B4 are portions where the terminals are led out, and the first unit 13 forms scribe grooves 514 and 524 at the scribe positions A4 and B4. Scribe grooves 513 and 514 are first cutting grooves in the present embodiment, and scribe grooves 523 and 524 are second cutting grooves in the present embodiment.
 切断装置1は、まず、ガラス基板2をスクライブ位置A1,B1及びスクライブ位置A2,B2にて同時に切断し、ガラス基板2から第1領域20Aの部分を取り出す。具体的には、切断装置1は、第2ユニット14を用いてスクライブ位置A1,B1にスクライブ溝511,521を形成し、ガラス基板2をスクライブ位置A1,B1にて切断する。これと同時に、切断装置1は、第1ユニット13を用いてスクライブ位置A2,B2にスクライブ溝512,522を形成し、ガラス基板2をスクライブ位置A2,B2にて切断する。 First, the cutting device 1 simultaneously cuts the glass substrate 2 at the scribe positions A1 and B1 and the scribe positions A2 and B2, and takes out a portion of the first region 20A from the glass substrate 2. Specifically, the cutting device 1 uses the second unit 14 to form scribe grooves 511 and 521 at the scribe positions A1 and B1, and cuts the glass substrate 2 at the scribe positions A1 and B1. At the same time, the cutting device 1 uses the first unit 13 to form scribe grooves 512 and 522 at the scribe positions A2 and B2, and cuts the glass substrate 2 at the scribe positions A2 and B2.
 次に、切断装置1は、ガラス基板2をスクライブ位置A3,B3及びスクライブ位置A4,B4にて同時に切断し、ガラス基板2から第2領域20Bの部分を取り出す。具体的には、切断装置1は、第2ユニット14を用いてスクライブ位置A3,B3にスクライブ溝513,523を形成し、ガラス基板2をスクライブ位置A3,B3にて切断する。これと同時に、切断装置1は、第1ユニット13を用いてスクライブ位置A4,B4にスクライブ溝514,524を形成し、ガラス基板2をスクライブ位置A4,B4にて切断する。 Next, the cutting apparatus 1 simultaneously cuts the glass substrate 2 at the scribe positions A3 and B3 and the scribe positions A4 and B4, and takes out the portion of the second region 20B from the glass substrate 2. Specifically, the cutting device 1 uses the second unit 14 to form scribe grooves 513 and 523 at the scribe positions A3 and B3, and cuts the glass substrate 2 at the scribe positions A3 and B3. At the same time, the cutting device 1 uses the first unit 13 to form scribe grooves 514 and 524 at the scribe positions A4 and B4, and cuts the glass substrate 2 at the scribe positions A4 and B4.
 なお、スクライブ位置A1,B1へのスクライブ溝511,521の形成と、スクライブ位置A2,B2へのスクライブ溝512,522の形成とは、必ずしも同時に行なう必要はなく、順番に行なってもよい。同様に、スクライブ位置A3,B3へのスクライブ溝513,523の形成と、スクライブ位置A4,B4へのスクライブ溝514,524の形成とを同時ではなく、順番に行なってもよい。以下、ガラス基板2の切断手順をより詳細に説明する。 The formation of the scribe grooves 511 and 521 at the scribe positions A1 and B1 and the formation of the scribe grooves 512 and 522 at the scribe positions A2 and B2 are not necessarily performed at the same time, and may be performed sequentially. Similarly, the formation of the scribe grooves 513 and 523 at the scribe positions A3 and B3 and the formation of the scribe grooves 514 and 524 at the scribe positions A4 and B4 may be performed sequentially instead of simultaneously. Hereinafter, the cutting procedure of the glass substrate 2 will be described in more detail.
 載置台10にガラス基板2が載置される前、第1ユニット13及び第2ユニット14は、載置台10に載置されるガラス基板2よりも後側(図3における上側、図4における奥側)に退避している。この状態にて、ガラス基板2が、例えば搬送ロボットによって載置台10に載置され、固定される。ガラス基板2は、スクライブ位置A1,A2,B1,B2が載置台10に載置されない位置、即ち載置台10間の隙間に位置するように配置される。 Before the glass substrate 2 is mounted on the mounting table 10, the first unit 13 and the second unit 14 are located behind the glass substrate 2 mounted on the mounting table 10 (upper side in FIG. 3, rear side in FIG. 4). Side). In this state, the glass substrate 2 is mounted and fixed on the mounting table 10 by, for example, a transfer robot. The glass substrate 2 is disposed such that the scribe positions A1, A2, B1, and B2 are not placed on the placement table 10, that is, in a gap between the placement tables 10.
 次に、切断装置1は、第1ユニット13の上側のホイールカッタ32とスクライブ位置A2との左右方向の位置が一致し、第1ユニット13の下側のホイールカッタ42とスクライブ位置B2との左右方向の位置が一致するように、第1ユニット13とガラス基板2との位置関係を調整する。この調整は、例えば、ガイドレール111,121、第1ユニット13の移動支持部31,41、及び/又は載置台10を左右方向へ移動させることにより行なってもよいし、ガラス基板2を例えば搬送ロボットを用いて左右方向へ移動させることにより行なってもよい。ここで、第1ユニット13の上側のホイールカッタ32と第1ユニット13の下側の2つのローラ43のうちの一方(右側のローラ43)とが、ガラス基板2を介して対向して配置される。また、第1ユニット13の下側のホイールカッタ42と第1ユニット13の上側の2つのローラ33のうちの一方(左側のローラ33)とが、ガラス基板2を介して対向して配置される。 Next, in the cutting device 1, the left and right positions of the wheel cutter 32 on the upper side of the first unit 13 and the scribe position A2 coincide with each other, and the left and right wheel cutters 42 on the lower side of the first unit 13 and the scribe position B2 The positional relationship between the first unit 13 and the glass substrate 2 is adjusted so that the position in the direction matches. This adjustment may be performed, for example, by moving the guide rails 111 and 121, the movement support portions 31 and 41 of the first unit 13, and / or the mounting table 10 in the left-right direction, or transporting the glass substrate 2, for example. You may carry out by moving to the left-right direction using a robot. Here, the wheel cutter 32 on the upper side of the first unit 13 and one of the two rollers 43 on the lower side of the first unit 13 (the right side roller 43) are arranged to face each other with the glass substrate 2 interposed therebetween. The Further, the lower wheel cutter 42 of the first unit 13 and one of the two rollers 33 on the upper side of the first unit 13 (the left roller 33) are arranged to face each other with the glass substrate 2 interposed therebetween. .
 また、切断装置1は、第2ユニット14の上側のホイールカッタ32とスクライブ位置A1との左右方向の位置が一致し、第2ユニット14の下側のホイールカッタ42とスクライブ位置B1との左右方向の位置が一致するように、第2ユニット14とガラス基板2との位置関係を調整する。この調整は、例えば、ガイドレール112,122、第2ユニット14の移動支持部31,41、及び/又は載置台10を左右方向へ移動させることにより行なってもよいし、ガラス基板2を例えば搬送ロボットを用いて左右方向へ移動させることにより行なってもよい。第1ユニット13及び第2ユニット14の左右方向の位置の調整は、例えば同時に行なわれる。ここで、第2ユニット14の上側のホイールカッタ32と第2ユニット14の下側のホイールカッタ42とが、ガラス基板2を介して対向して配置される。 Further, in the cutting device 1, the left and right positions of the wheel cutter 32 on the upper side of the second unit 14 and the scribe position A1 coincide with each other, and the left and right direction of the wheel cutter 42 on the lower side of the second unit 14 and the scribe position B1. The positional relationship between the second unit 14 and the glass substrate 2 is adjusted so that these positions coincide with each other. This adjustment may be performed, for example, by moving the guide rails 112 and 122, the movement support portions 31 and 41 of the second unit 14, and / or the mounting table 10 in the left-right direction, or transporting the glass substrate 2, for example. You may carry out by moving to the left-right direction using a robot. Adjustment of the position of the 1st unit 13 and the 2nd unit 14 in the left-right direction is performed simultaneously, for example. Here, the wheel cutter 32 on the upper side of the second unit 14 and the wheel cutter 42 on the lower side of the second unit 14 are arranged to face each other with the glass substrate 2 interposed therebetween.
 次に、切断装置1は、ホイールカッタ32,42及びローラ33,43の前後方向の位置関係、並びに、ホイールカッタ32,42、ローラ33,43、及びガラス基板2の左右方向の位置関係を調整後の位置関係に保った状態で、第1ユニット13及び第2ユニット14を前進(図3における下側、図4における手前側へ移動)させる。このとき、第1ユニット13のホイールカッタ32,42及び第2ユニット14のホイールカッタ32,42の夫々は、図示しない駆動部によって駆動されて回転する。 Next, the cutting device 1 adjusts the positional relationship in the front-rear direction of the wheel cutters 32, 42 and the rollers 33, 43 and the positional relationship in the left-right direction of the wheel cutters 32, 42, rollers 33, 43, and the glass substrate 2. The first unit 13 and the second unit 14 are moved forward (moved to the lower side in FIG. 3 and the front side in FIG. 4) while maintaining the subsequent positional relationship. At this time, each of the wheel cutters 32 and 42 of the first unit 13 and the wheel cutters 32 and 42 of the second unit 14 is driven and rotated by a drive unit (not shown).
 切断装置1は、第1ユニット13を前進させる際、第1ユニット13の上側の移動支持部31(ホイールカッタ32及びローラ33)と第1ユニット13の下側の移動支持部41(ホイールカッタ42及びローラ43)とを、同じ方向(前方)に同じ速度で移動させる。また、切断装置1は、第2ユニット14を前進させる際、第2ユニット14の上側の移動支持部31(ホイールカッタ32及びローラ33)と第2ユニット14の下側の移動支持部41(ホイールカッタ42及びローラ43)とを、同じ方向(前方)に同じ速度で移動させる。更に、本実施の形態では、切断装置1は、第1ユニット13と第2ユニット14とを、同じ方向(前方)に同じ速度で移動させる。 When the cutting device 1 advances the first unit 13, the upper side movement support part 31 (wheel cutter 32 and roller 33) of the first unit 13 and the lower side movement support part 41 (wheel cutter 42) of the first unit 13. And the roller 43) are moved at the same speed in the same direction (forward). Further, when the cutting device 1 advances the second unit 14, the movement support portion 31 (wheel cutter 32 and roller 33) on the upper side of the second unit 14 and the movement support portion 41 (wheel on the lower side of the second unit 14). The cutter 42 and the roller 43) are moved in the same direction (forward) at the same speed. Furthermore, in the present embodiment, the cutting device 1 moves the first unit 13 and the second unit 14 in the same direction (forward) at the same speed.
 第1ユニット13の前進時、第1ユニット13の上側の移動支持部31は、ガイドレール111に沿って前進する。このとき、第1ユニット13の上側のホイールカッタ32が、第1処理面211におけるスクライブ位置A2に接触して回転しながら前進すると共に、第1ユニット13の上側のローラ33が、第1処理面211におけるスクライブ位置A2の左右両側に接触して回転しながら前進する。第1ユニット13のホイールカッタ32がCF基板21の後辺部から前辺部まで移動することによって、CF基板21の第1処理面211におけるスクライブ位置A2に、スクライブ溝512が形成される。 When the first unit 13 moves forward, the upper moving support portion 31 of the first unit 13 moves forward along the guide rail 111. At this time, the wheel cutter 32 on the upper side of the first unit 13 advances while rotating in contact with the scribe position A2 on the first processing surface 211, and the roller 33 on the upper side of the first unit 13 moves on the first processing surface. It advances while rotating in contact with the left and right sides of the scribe position A2 at 211. As the wheel cutter 32 of the first unit 13 moves from the rear side portion to the front side portion of the CF substrate 21, a scribe groove 512 is formed at the scribe position A <b> 2 on the first processing surface 211 of the CF substrate 21.
 また、第1ユニット13の前進時、第1ユニット13の下側の移動支持部41は、ガイドレール121に沿って前進する。このとき、第1ユニット13の下側のホイールカッタ42が、第2処理面221におけるスクライブ位置B2に接触して回転しながら前進すると共に、第1ユニット13の下側のローラ43が、第2処理面221におけるスクライブ位置B2の左右両側に接触して回転しながら前進する。第1ユニット13のホイールカッタ42がTFT基板22の後辺部から前辺部まで移動することによって、TFT基板22の第2処理面221におけるスクライブ位置B2に、スクライブ溝522が形成される。 Also, when the first unit 13 moves forward, the lower movement support portion 41 of the first unit 13 moves forward along the guide rail 121. At this time, the lower wheel cutter 42 of the first unit 13 advances while rotating in contact with the scribe position B2 on the second processing surface 221, and the lower roller 43 of the first unit 13 The processing surface 221 advances while contacting and rotating on both the left and right sides of the scribe position B2. As the wheel cutter 42 of the first unit 13 moves from the rear side portion to the front side portion of the TFT substrate 22, a scribe groove 522 is formed at the scribe position B <b> 2 on the second processing surface 221 of the TFT substrate 22.
 第2ユニット14の前進時、第2ユニット14の上側の移動支持部31は、ガイドレール112に沿って前進する。このとき、第2ユニット14の上側のホイールカッタ32が、第1処理面211におけるスクライブ位置A1に接触して回転しながら前進すると共に、第2ユニット14の上側のローラ33が、第1処理面211におけるスクライブ位置A1の左右両側に接触して回転しながら前進する。第2ユニット14のホイールカッタ32がCF基板21の後辺部から前辺部まで移動することによって、CF基板21の第1処理面211におけるスクライブ位置A1に、スクライブ溝511が形成される。 When the second unit 14 moves forward, the upper moving support portion 31 of the second unit 14 moves forward along the guide rail 112. At this time, the wheel cutter 32 on the upper side of the second unit 14 advances while rotating in contact with the scribe position A1 on the first processing surface 211, and the roller 33 on the upper side of the second unit 14 moves on the first processing surface. It advances while rotating in contact with the left and right sides of the scribe position A1 at 211. As the wheel cutter 32 of the second unit 14 moves from the rear side portion to the front side portion of the CF substrate 21, a scribe groove 511 is formed at the scribe position A1 on the first processing surface 211 of the CF substrate 21.
 また、第2ユニット14の前進時、第2ユニット14の下側の移動支持部41は、ガイドレール122に沿って前進する。このとき、第2ユニット14の下側のホイールカッタ42が、第2処理面221におけるスクライブ位置B1に接触して回転しながら前進すると共に、第2ユニット14の下側のローラ43が、第2処理面221におけるスクライブ位置B1の左右両側に接触して回転しながら前進する。第2ユニット14のホイールカッタ42がTFT基板22の後辺部から前辺部まで移動することによって、TFT基板22の第2処理面221におけるスクライブ位置B1に、スクライブ溝521が形成される。 Also, when the second unit 14 moves forward, the lower movement support portion 41 of the second unit 14 moves forward along the guide rail 122. At this time, the lower wheel cutter 42 of the second unit 14 moves forward while rotating in contact with the scribe position B1 on the second processing surface 221, and the lower roller 43 of the second unit 14 The processing surface 221 advances while rotating in contact with the left and right sides of the scribe position B1. As the wheel cutter 42 of the second unit 14 moves from the rear side portion to the front side portion of the TFT substrate 22, a scribe groove 521 is formed at a scribe position B 1 on the second processing surface 221 of the TFT substrate 22.
 スクライブ溝511,521,512,522の形成に伴って、スクライブ溝511,521,512,522夫々は深さ方向に進展する。又は、スクライブ溝511,521,512,522の形成後、ガラス基板2に外力が加えられることによって、スクライブ溝511,521,512,522夫々が深さ方向に進展する。この結果、ガラス基板2が、スクライブ位置A1,B1及びスクライブ位置A2,B2において切断され、ガラス基板2から第1領域20Aの部分が取り出される(図5参照)。 As the scribe grooves 511, 521, 512, and 522 are formed, the scribe grooves 511, 521, 512, and 522 each advance in the depth direction. Alternatively, after the scribe grooves 511, 521, 512, 522 are formed, an external force is applied to the glass substrate 2, whereby each of the scribe grooves 511, 521, 512, 522 develops in the depth direction. As a result, the glass substrate 2 is cut at the scribe positions A1, B1 and the scribe positions A2, B2, and a portion of the first region 20A is taken out from the glass substrate 2 (see FIG. 5).
 このように、第1ユニット13の移動支持部31,41及び第2ユニット14の移動支持部31,41夫々の移動は同時的に行なわれる。従って、スクライブ溝511,521,512,522は同時的に形成される。スクライブ溝511,521,512,522の形成が同時的に行なわれるので、ガラス基板2から第1領域20Aの部分を取り出すまでに要する時間を短縮することができる。 As described above, the movement support portions 31 and 41 of the first unit 13 and the movement support portions 31 and 41 of the second unit 14 are moved simultaneously. Therefore, the scribe grooves 511, 521, 512, 522 are formed simultaneously. Since the scribe grooves 511, 521, 512, and 522 are formed at the same time, it is possible to shorten the time required to take out the portion of the first region 20 A from the glass substrate 2.
 また、ガラス基板2におけるスクライブ位置A1,A2,B1,B2は、載置台10に支持されていない。しかしながら、第1ユニット13の上側のホイールカッタ32の下方には、下側のローラ43の一方(右側のローラ43)がある。故に、第1ユニット13のホイールカッタ32からガラス基板2に加えられる下向きの外力は、第1ユニット13の下側のローラ43によって受け止められる。また、第1ユニット13のホイールカッタ42の上方には、上側のローラ33の一方(左側のローラ33)がある。故に、第1ユニット13のホイールカッタ42からガラス基板2に加えられる上向きの外力は、第1ユニット13の上側のローラ33によって受け止められる。従って、第1ユニット13のホイールカッタ32,42夫々からガラス基板2に加えられる外力に起因するガラス基板2の撓みが抑制される。 Further, the scribe positions A1, A2, B1, and B2 on the glass substrate 2 are not supported by the mounting table 10. However, below the wheel cutter 32 on the upper side of the first unit 13, there is one of the lower rollers 43 (the right roller 43). Therefore, the downward external force applied to the glass substrate 2 from the wheel cutter 32 of the first unit 13 is received by the lower roller 43 of the first unit 13. In addition, above the wheel cutter 42 of the first unit 13, there is one of the upper rollers 33 (the left roller 33). Therefore, the upward external force applied to the glass substrate 2 from the wheel cutter 42 of the first unit 13 is received by the upper roller 33 of the first unit 13. Therefore, the bending of the glass substrate 2 due to the external force applied to the glass substrate 2 from the wheel cutters 32 and 42 of the first unit 13 is suppressed.
 なお、第2ユニット14については、上下のホイールカッタ32,42がガラス基板2を介して対向して配置されている。従って、ホイールカッタ32,42から加えられる外力は互いに打ち消し合うので、ガラス基板2の撓みが抑制される。 For the second unit 14, the upper and lower wheel cutters 32 and 42 are disposed to face each other with the glass substrate 2 interposed therebetween. Accordingly, the external forces applied from the wheel cutters 32 and 42 cancel each other, so that the bending of the glass substrate 2 is suppressed.
 このように、スクライブ溝511,521,512,522を形成する際のガラス基板2の撓みが抑制されるので、スクライブ溝511,521,512,522夫々を第1処理面211及び第2処理面221に垂直に形成することができる。従って、ガラス基板2にバリ又は欠け等の不具合が生じることが抑制される。 Thus, since the bending of the glass substrate 2 at the time of forming the scribe grooves 511, 521, 512, 522 is suppressed, the scribe grooves 511, 521, 512, 522 are respectively replaced with the first processing surface 211 and the second processing surface. 221 can be formed perpendicularly. Accordingly, the occurrence of defects such as burrs or chips on the glass substrate 2 is suppressed.
 ガラス基板2がスクライブ位置A1,B1及びスクライブ位置A2,B2において切断された後、切断装置1は、第1ユニット13及び第2ユニット14を、載置台10に載置されているガラス基板2よりも後側に退避させ、ガラス基板2の固定を解除する。その後、第1領域20Aの部分と、残ったガラス基板2(スクライブ位置A2,B2よりも左側の部分)と、第1領域20Aの部分の取り出しのための切断時に生じた端材とが、切断装置1から搬出される。 After the glass substrate 2 is cut at the scribe positions A 1 and B 1 and the scribe positions A 2 and B 2, the cutting apparatus 1 moves the first unit 13 and the second unit 14 from the glass substrate 2 mounted on the mounting table 10. Also, the glass substrate 2 is released from the rear side and released. Thereafter, the portion of the first region 20A, the remaining glass substrate 2 (the portion on the left side of the scribe positions A2 and B2), and the end material generated at the time of cutting for taking out the portion of the first region 20A are cut. It is unloaded from the device 1.
 次いで、切断装置1は、残ったガラス基板2からの第2領域20Bの部分の取り出しを行なう。第2領域20Bの部分を取り出す処理は、第1領域20Aの部分を取り出す処理と実質的に同じである。以下、第2領域20Bの部分を取り出す処理について、簡単に説明する。 Next, the cutting device 1 takes out the portion of the second region 20B from the remaining glass substrate 2. The process of taking out the part of the second area 20B is substantially the same as the process of taking out the part of the first area 20A. Hereinafter, a process for extracting the portion of the second region 20B will be briefly described.
 即ち、残ったガラス基板2が、例えば搬送ロボットによって載置台10に再び載置され、固定される。残ったガラス基板2は、スクライブ位置A3,A4,B3,B4が載置台10に載置されない位置、即ち載置台10間の隙間に位置するように配置される。 That is, the remaining glass substrate 2 is mounted again on the mounting table 10 by, for example, a transfer robot and fixed. The remaining glass substrate 2 is arranged such that the scribe positions A3, A4, B3, and B4 are not placed on the placing table 10, that is, in the gap between the placing tables 10.
 次に、切断装置1は、第1ユニット13の上側のホイールカッタ32とスクライブ位置A4との左右方向の位置が一致し、第1ユニット13の下側のホイールカッタ42とスクライブ位置B4との左右方向の位置が一致するように、第1ユニット13とガラス基板2との位置関係を調整する。ここで、第1ユニット13の上側のホイールカッタ32と第1ユニット13の下側の2つのローラ43のうちの一方(右側のローラ43)とが、ガラス基板2を介して対向して配置される。また、第1ユニット13の下側のホイールカッタ42と第1ユニット13の上側の2つのローラ33のうちの一方(左側のローラ43)とが、ガラス基板2を介して対向して配置される。 Next, in the cutting device 1, the left and right positions of the wheel cutter 32 on the upper side of the first unit 13 and the scribe position A4 coincide, and the left and right positions of the wheel cutter 42 on the lower side of the first unit 13 and the scribe position B4 are aligned. The positional relationship between the first unit 13 and the glass substrate 2 is adjusted so that the position in the direction matches. Here, the wheel cutter 32 on the upper side of the first unit 13 and one of the two rollers 43 on the lower side of the first unit 13 (the right side roller 43) are arranged to face each other with the glass substrate 2 interposed therebetween. The Further, the lower wheel cutter 42 of the first unit 13 and one of the two rollers 33 on the upper side of the first unit 13 (the left roller 43) are arranged to face each other with the glass substrate 2 interposed therebetween. .
 また、切断装置1は、第2ユニット14の上側のホイールカッタ32とスクライブ位置A3との左右方向の位置が一致し、第2ユニット14の下側のホイールカッタ42とスクライブ位置B3との左右方向の位置が一致するように、第2ユニット14とガラス基板2との位置関係を調整する。 Further, in the cutting device 1, the left and right positions of the wheel cutter 32 on the upper side of the second unit 14 and the scribe position A3 coincide with each other, and the left and right direction of the wheel cutter 42 on the lower side of the second unit 14 and the scribe position B3. The positional relationship between the second unit 14 and the glass substrate 2 is adjusted so that these positions coincide with each other.
 次に、切断装置1は、ホイールカッタ32,42及びローラ33,43の前後方向の位置関係、並びに、ホイールカッタ32,42、ローラ33,43、及びガラス基板2の左右方向の位置関係を調整後の位置関係に保った状態で、第1ユニット13及び第2ユニット14を同じ速度で前進させる。 Next, the cutting device 1 adjusts the positional relationship in the front-rear direction of the wheel cutters 32, 42 and the rollers 33, 43 and the positional relationship in the left-right direction of the wheel cutters 32, 42, rollers 33, 43, and the glass substrate 2. The first unit 13 and the second unit 14 are advanced at the same speed while maintaining the subsequent positional relationship.
 第1ユニット13がガラス基板2の後辺部から前辺部まで移動することによって、CF基板21の第1処理面211におけるスクライブ位置A4にスクライブ溝514が形成され、TFT基板22の第2処理面221におけるスクライブ位置B4にスクライブ溝524が形成される。また、第2ユニット14がガラス基板2の後辺部から前辺部まで移動することによって、CF基板21の第1処理面211におけるスクライブ位置A3にスクライブ溝513が形成され、TFT基板22の第2処理面221におけるスクライブ位置B3にスクライブ溝523が形成される。 As the first unit 13 moves from the rear side of the glass substrate 2 to the front side, a scribe groove 514 is formed at the scribe position A4 on the first processing surface 211 of the CF substrate 21, and the second processing of the TFT substrate 22 is performed. A scribe groove 524 is formed at a scribe position B4 on the surface 221. Further, as the second unit 14 moves from the rear side portion to the front side portion of the glass substrate 2, a scribe groove 513 is formed at the scribe position A <b> 3 on the first processing surface 211 of the CF substrate 21, and the second substrate 14 of the TFT substrate 22 is formed. 2 A scribe groove 523 is formed at a scribe position B3 on the processing surface 221.
 その後、スクライブ溝513,523,514,524の形成に伴って、スクライブ溝513,523,514,524夫々は深さ方向に進展する。又は、スクライブ溝513,523,514,524の形成後、ガラス基板2に外力が加えられることによって、スクライブ溝513,523,514,524夫々が深さ方向に進展する。この結果、ガラス基板2が、スクライブ位置A3,B3及びスクライブ位置A4,B4において切断され、ガラス基板2から第2領域20Bの部分が取り出される(図5参照)。 Thereafter, with the formation of the scribe grooves 513, 523, 514, and 524, the scribe grooves 513, 523, 514, and 524 each advance in the depth direction. Alternatively, after the scribe grooves 513, 523, 514, and 524 are formed, an external force is applied to the glass substrate 2, so that each of the scribe grooves 513, 523, 514, and 524 develops in the depth direction. As a result, the glass substrate 2 is cut at the scribe positions A3 and B3 and the scribe positions A4 and B4, and a portion of the second region 20B is taken out from the glass substrate 2 (see FIG. 5).
 その後、切断装置1は、第1ユニット13及び第2ユニット14を、載置台10に載置されているガラス基板2よりも後側に退避させ、ガラス基板2の固定を解除する。その後、第2領域20Bの部分が、切断装置1から搬出される。 Thereafter, the cutting device 1 retracts the first unit 13 and the second unit 14 to the rear side of the glass substrate 2 placed on the placement table 10 and releases the fixation of the glass substrate 2. Thereafter, the portion of the second region 20 </ b> B is unloaded from the cutting device 1.
 本実施の形態では、ガラス基板2から第1領域20Aの部分及び第2領域20Bの部分を取り出す処理について説明したが、該処理の後、例えば第2ユニット14を用いて、第1領域20Aの部分及び第2領域20Bの部分に対して切断処理が行なわれ、単位ガラス基板が取り出される。その後、単位ガラス基板を基に、液晶表示パネルが製造される。 In the present embodiment, the process of taking out the part of the first region 20A and the part of the second region 20B from the glass substrate 2 has been described. After the process, for example, the second unit 14 is used to form the first region 20A. Cutting processing is performed on the portion and the portion of the second region 20B, and the unit glass substrate is taken out. Thereafter, a liquid crystal display panel is manufactured based on the unit glass substrate.
 このように、本実施の形態によれば、ガラス基板2における端子出しを行なう部分を上側及び下側の両側から同時的にスクライブする場合に、上側のホイールカッタ32と下側のローラ43とがガラス基板2を介して対向して配置され、下側のホイールカッタ42と上側のローラ33とがガラス基板2を介して対向して配置される。これにより、スクライブ溝512,522又はスクライブ溝514,524を形成する際にホイールカッタ32,42からガラス基板2に加えられる外力をホイールカッタ32,42に対向するローラ33,43が受け止めることができる。従って、スクライブ溝512,522又はスクライブ溝514,524を形成する際のガラス基板2の撓みを抑制することができ、スクライブ溝512,522又はスクライブ溝514,524をガラス基板2の面に対して垂直に形成することができる。その結果、ガラス基板2にバリ又は欠け等の不具合が生じることが抑制される。 As described above, according to the present embodiment, when the portion of the glass substrate 2 where the terminal is placed is scribed simultaneously from both the upper and lower sides, the upper wheel cutter 32 and the lower roller 43 are The lower wheel cutter 42 and the upper roller 33 are arranged to face each other with the glass substrate 2 interposed therebetween. Thereby, the rollers 33 and 43 facing the wheel cutters 32 and 42 can receive the external force applied to the glass substrate 2 from the wheel cutters 32 and 42 when the scribe grooves 512 and 522 or the scribe grooves 514 and 524 are formed. . Therefore, the bending of the glass substrate 2 when forming the scribe grooves 512, 522 or the scribe grooves 514, 524 can be suppressed, and the scribe grooves 512, 522 or the scribe grooves 514, 524 can be arranged with respect to the surface of the glass substrate 2. It can be formed vertically. As a result, the occurrence of defects such as burrs or chips in the glass substrate 2 is suppressed.
 なお、実施の形態の第1切断部又は第2切断部は、ホイールカッタ32,42に限定されず、例えば回転せずにガラス基板2にスクライブ溝を形成するガラスカッタでもよい。また、実施の形態の第1移動部又は第2移動部は、ローラ33,43に限定されず、例えば回転軸部331,431を中心に回転する輪又は球でもよい。また、第1移動部又は第2移動部は、回転するものに限定されず、例えばガラス基板2の第1処理面211又は第2処理面221上を摺動するものでもよい。 In addition, the 1st cutting part or 2nd cutting part of embodiment is not limited to the wheel cutters 32 and 42, For example, the glass cutter which forms a scribe groove | channel in the glass substrate 2 without rotating may be sufficient. Moreover, the 1st moving part or 2nd moving part of embodiment is not limited to the rollers 33 and 43, For example, the ring | wheel or ball | bowl rotating centering on the rotating shaft parts 331 and 431 may be sufficient. Further, the first moving unit or the second moving unit is not limited to the rotating unit, and may slide on the first processing surface 211 or the second processing surface 221 of the glass substrate 2, for example.
(実施の形態2)
 図6は、実施の形態2に係る切断装置1の構成を模式的に示す正面図である。本実施の形態の切断装置1は、第1ユニット13及び第2ユニット14夫々がローラ33及びローラ43を1つずつ備えている点を除き、実施の形態1の切断装置1と実質的に同じ構成である。以下では、主に実施の形態1との差異について説明し、実施の形態1と同一の構成要素には同一符号を付して説明を省略する。
(Embodiment 2)
FIG. 6 is a front view schematically showing the configuration of the cutting device 1 according to the second embodiment. The cutting device 1 according to the present embodiment is substantially the same as the cutting device 1 according to the first embodiment, except that each of the first unit 13 and the second unit 14 includes one roller 33 and one roller 43. It is a configuration. In the following, differences from the first embodiment will be mainly described, and the same components as those in the first embodiment will be denoted by the same reference numerals and description thereof will be omitted.
 本実施の形態の切断装置1は、第1ユニット13及び第2ユニット14夫々がローラ33及びローラ43を1つずつ備えている。第1ユニット13の上側のローラ33は、第1ユニット13の上側のホイールカッタ32よりも左側に配置されている。また、第1ユニット13の下側のローラ43は、第1ユニット13の下側のホイールカッタ42よりも右側に配置されている。 In the cutting device 1 of the present embodiment, each of the first unit 13 and the second unit 14 includes one roller 33 and one roller 43. The upper roller 33 of the first unit 13 is disposed on the left side of the upper wheel cutter 32 of the first unit 13. Further, the lower roller 43 of the first unit 13 is disposed on the right side of the lower wheel cutter 42 of the first unit 13.
 第1ユニット13がガラス基板2の端子出しを行なう部分をスクライブする場合、第1ユニット13の上側のホイールカッタ32と第1ユニット13の下側のローラ43とが、ガラス基板2を介して対向して配置される。また、第1ユニット13の下側のホイールカッタ42と第1ユニット13の上側のローラ33とが、ガラス基板2を介して対向して配置される。これにより、実施の形態1と同様に、スクライブ溝512,522又はスクライブ溝514,524を形成する際のガラス基板2の撓みを抑制することができ、スクライブ溝512,522又はスクライブ溝514,524をガラス基板2の面に対して垂直に形成することができる。その結果、ガラス基板2にバリ又は欠け等の不具合が生じることが抑制される。 When the first unit 13 scribes the portion of the glass substrate 2 that leads out, the wheel cutter 32 on the upper side of the first unit 13 and the roller 43 on the lower side of the first unit 13 face each other with the glass substrate 2 in between. Arranged. Further, the lower wheel cutter 42 of the first unit 13 and the upper roller 33 of the first unit 13 are disposed to face each other with the glass substrate 2 interposed therebetween. Thereby, like Embodiment 1, the bending of the glass substrate 2 at the time of forming the scribe groove | channel 512,522 or the scribe groove | channel 514,524 can be suppressed, and the scribe groove | channel 512,522 or the scribe groove | channel 514,524 is possible. Can be formed perpendicular to the surface of the glass substrate 2. As a result, the occurrence of defects such as burrs or chips in the glass substrate 2 is suppressed.
 本実施の形態において、端子出しを行なう部分は、必ず、上側のCF基板21上のスクライブ位置A2(A4)が、下側のTFT基板22上のスクライブ位置B2(B4)よりも右側にある。従って、上述したように、上側のローラ33を上側のホイールカッタ32よりも左側に配置し、下側のローラ43を下側のホイールカッタ42よりも右側に配置することで、端子出しを行なう部分をスクライブする場合に、ホイールカッタ32,42とローラ33,43とをガラス基板2を介して対向して配置させることができる。 In the present embodiment, the portion where the terminal is led out is always on the right side of the scribe position A2 (A4) on the upper CF substrate 21 than the scribe position B2 (B4) on the lower TFT substrate 22. Therefore, as described above, the upper roller 33 is arranged on the left side of the upper wheel cutter 32, and the lower roller 43 is arranged on the right side of the lower wheel cutter 42, so that the terminal is provided. When scribing, the wheel cutters 32 and 42 and the rollers 33 and 43 can be arranged to face each other with the glass substrate 2 interposed therebetween.
 このように、端子出しを行なう部分における上側のスクライブ位置と下側のスクライブ位置との位置関係が一定である場合は、本実施の形態のようにローラ33及びローラ43夫々の個数を1つに減らすことができ、切断装置1の構成を簡略化できる。 As described above, when the positional relationship between the upper scribe position and the lower scribe position in the portion where the terminal is to be extended is constant, the number of the rollers 33 and the rollers 43 is reduced to one as in the present embodiment. It can reduce, and the structure of the cutting device 1 can be simplified.
 以上、本発明の幾つかの実施の形態について説明した。このように、実施の形態に係る切断装置1は、板状の第1部材21及び第2部材22が貼り合わされてなる板状部材2を切断する切断装置において、前記第1部材21における前記第2部材22に対向する面とは逆側の第1処理面211に接触して移動することによって、移動方向に延びる第1切断用溝511~514を前記第1処理面211に形成する第1切断部32と、前記第1切断部32の移動と共に前記第1処理面211に接触しながら前記移動方向に移動する1以上の第1移動部33と、前記第2部材22における前記第1部材21に対向する面とは逆側の第2処理面221に接触して前記移動方向に移動することによって、前記移動方向に延びる第2切断用溝521~524を前記第2処理面221に形成する第2切断部42と、前記第2切断部42の移動と共に前記第2処理面221に接触しながら前記移動方向に移動する1以上の第2移動部43とを備え、前記第1切断部32と一の前記第2移動部43とが前記板状部材2を介して対向し、前記第2切断部42と一の前記第1移動部33とが前記板状部材2を介して対向していることを特徴とする。 In the above, several embodiments of the present invention have been described. As described above, the cutting device 1 according to the embodiment is a cutting device that cuts the plate-like member 2 in which the plate-like first member 21 and the second member 22 are bonded to each other. First cutting grooves 511 to 514 extending in the moving direction are formed in the first processing surface 211 by moving in contact with the first processing surface 211 opposite to the surface facing the two members 22. The cutting unit 32, one or more first moving units 33 that move in the moving direction while contacting the first processing surface 211 as the first cutting unit 32 moves, and the first member of the second member 22 The second cutting grooves 521 to 524 extending in the moving direction are formed in the second processing surface 221 by contacting the second processing surface 221 opposite to the surface opposite to the surface 21 and moving in the moving direction. The second cutting part 42 One or more second moving parts 43 that move in the moving direction while contacting the second processing surface 221 along with the movement of the second cutting part 42, and the second movement that is the same as the first cutting part 32 The portion 43 is opposed to the plate-like member 2, and the second cutting portion 42 and the one first moving portion 33 are opposed to each other via the plate-like member 2.
 上記構成によれば、第1切断部32から板状部材2に加えられる外力を第2移動部43が受け止め、第2切断部42から板状部材2に加えられる外力を第1移動部33が受け止めるので、板状部材2の撓みを抑制することができる。従って、第1切断用溝511~514を第1処理面211に垂直に形成することができ、第2切断用溝521~524を第2処理面221に垂直に形成することができるので、板状部材2にバリ又は欠け等の不具合が生じることを抑制できる。また、第1切断部32による第1切断用溝511~514の形成と第2切断部42による第2切断用溝521~524の形成とが同時的に行なわれることによって、板状部材2の切断に要する時間を短縮することができる。 According to the above configuration, the second moving unit 43 receives the external force applied from the first cutting part 32 to the plate-like member 2, and the first moving part 33 receives the external force applied from the second cutting part 42 to the plate-like member 2. Since it receives, the bending of the plate-shaped member 2 can be suppressed. Accordingly, the first cutting grooves 511 to 514 can be formed perpendicular to the first processing surface 211, and the second cutting grooves 521 to 524 can be formed perpendicular to the second processing surface 221. It is possible to suppress the occurrence of defects such as burrs or chips in the shaped member 2. Further, the formation of the first cutting grooves 511 to 514 by the first cutting portion 32 and the formation of the second cutting grooves 521 to 524 by the second cutting portion 42 are performed simultaneously, so that the plate-like member 2 is formed. The time required for cutting can be shortened.
 実施の形態に係る切断装置1は、前記第1切断部32及び前記第1移動部33を支持しつつ前記移動方向に移動させる第1移動支持部31と、前記第2切断部42及び前記第2移動部43を支持しつつ前記移動方向に移動させる第2移動支持部41とを更に備えてもよい。 The cutting apparatus 1 according to the embodiment includes a first movement support unit 31 that moves in the moving direction while supporting the first cutting unit 32 and the first moving unit 33, the second cutting unit 42, and the first moving unit 33. You may further provide the 2nd movement support part 41 which moves to the said moving direction, supporting the 2 movement part 43. FIG.
 上記構成によれば、第1移動支持部31が第1切断部32及び第1移動部33を支持しているので、第1移動支持部31を移動させることによって、第1切断部32及び第1移動部33を同じ方向に同じ速度で移動させることができる。同様に、第2移動支持部41が第2切断部42及び第2移動部43を支持しているので、第2移動支持部41を移動させることによって、第2切断部42及び第2移動部43を同じ方向に同じ速度で移動させることができる。 According to the above configuration, since the first movement support part 31 supports the first cutting part 32 and the first movement part 33, the first cutting part 32 and the first movement part 31 are moved by moving the first movement support part 31. One moving part 33 can be moved in the same direction at the same speed. Similarly, since the second movement support part 41 supports the second cutting part 42 and the second movement part 43, the second cutting part 42 and the second movement part are moved by moving the second movement support part 41. 43 can be moved in the same direction and at the same speed.
 実施の形態に係る切断装置1は、前記第1移動部33及び前記第2移動部43を2つずつ備え、2つの前記第1移動部33は、前記移動方向に交差する方向に並置してあり、前記第1切断部32は、2つの前記第1移動部33の間に配されると共に、2つの前記第2移動部43のうちの一方に前記板状部材2を介して対向し、2つの前記第2移動部43は、前記移動方向に交差する方向に並置してあり、前記第2切断部42は、2つの前記第2移動部43の間に配されると共に、2つの前記第1移動部33のうちの一方に前記板状部材2を介して対向している。 The cutting device 1 according to the embodiment includes two each of the first moving unit 33 and the second moving unit 43, and the two first moving units 33 are juxtaposed in a direction intersecting the moving direction. And the first cutting part 32 is disposed between the two first moving parts 33 and faces one of the two second moving parts 43 via the plate-like member 2. The two second moving parts 43 are juxtaposed in a direction intersecting the moving direction, and the second cutting part 42 is disposed between the two second moving parts 43 and the two One of the first moving parts 33 faces the plate-like member 2.
 上記構成によれば、第1切断部32と第2切断部42との移動方向に交差する方向の相対的な位置関係を変更した場合でも、第1切断部32と第2移動部43とを板状部材2を介して対向させ、第2切断部42と第1移動部33とを板状部材2を介して対向させることができる。従って、第1処理面211に形成される第1切断用溝511~514と第2処理面221に形成される第2切断用溝521~524との移動方向に交差する方向の相対的な位置関係が変更された場合でも、第1移動部33及び第2移動部43の配置の変更等をすることなく、第1切断部32(第2切断部42)と第2移動部43(第1移動部33)とを板状部材2を介して対向させた切断処理を行うことができる。 According to the above configuration, even when the relative positional relationship in the direction intersecting the moving direction of the first cutting unit 32 and the second cutting unit 42 is changed, the first cutting unit 32 and the second moving unit 43 are The second cutting part 42 and the first moving part 33 can be opposed to each other via the plate-like member 2 via the plate-like member 2. Accordingly, the relative positions of the first cutting grooves 511 to 514 formed on the first processing surface 211 and the second cutting grooves 521 to 524 formed on the second processing surface 221 in the direction intersecting the moving direction. Even when the relationship is changed, the first cutting unit 32 (second cutting unit 42) and the second moving unit 43 (first movement) are not changed without changing the arrangement of the first moving unit 33 and the second moving unit 43. A cutting process in which the moving part 33) is opposed to each other via the plate-like member 2 can be performed.
 実施の形態に係る切断装置1において、前記第1移動部33及び前記第2移動部43夫々は、前記移動方向への移動に伴って回転するローラであってもよい。上記構成によれば、第1移動部33及び第2移動部43は、第1処理面211及び第2処理面221に接触しながら滑らかに移動することができる。 In the cutting device 1 according to the embodiment, each of the first moving unit 33 and the second moving unit 43 may be a roller that rotates with movement in the moving direction. According to the above configuration, the first moving unit 33 and the second moving unit 43 can move smoothly while being in contact with the first processing surface 211 and the second processing surface 221.
 実施の形態に係る切断装置1において、前記板状部材2は、2枚の基板が貼り合わされてなるガラス基板であり、前記第1切断用溝511~514及び前記第2切断用溝521~524は、スクライブ溝であってもよい。 In the cutting apparatus 1 according to the embodiment, the plate-like member 2 is a glass substrate formed by bonding two substrates, and the first cutting grooves 511 to 514 and the second cutting grooves 521 to 524 are used. May be a scribe groove.
 実施の形態に係る切断方法は、板状の第1部材21及び第2部材22が貼り合わされてなる板状部材2を切断する切断方法において、前記第1部材21における前記第2部材22に対向する面とは逆側の第1処理面211に第1切断用溝511~514を形成するための第1切断部32と、前記第2部材22における前記第1部材21に対向する面とは逆側の第2処理面221に接触しながら移動する第2移動部43とを前記板状部材2を介して対向させ、前記第2処理面221に第2切断用溝521~524を形成するための第2切断部42と、前記第1処理面211に接触しながら移動する第1移動部33とを前記板状部材2を介して対向させ、前記第1切断部32、前記第2切断部42、前記第1移動部33、及び前記第2移動部43を同じ方向に同じ速度で移動させることによって、前記第1切断部32及び前記第2切断部42に移動方向に延びる前記第1切断用溝511~514及び前記第2切断用溝521~524を同時的に形成させることを特徴とする。上記構成によれば、実施の形態に係る切断装置1と同様の効果が得られる。 The cutting method according to the embodiment is a cutting method in which the plate-like member 2 formed by bonding the plate-like first member 21 and the second member 22 is cut, and is opposed to the second member 22 in the first member 21. The first cutting portion 32 for forming the first cutting grooves 511 to 514 on the first processing surface 211 opposite to the surface to be processed, and the surface of the second member 22 facing the first member 21 The second moving portion 43 that moves while contacting the second processing surface 221 on the opposite side is opposed to the second processing surface 221 to form second cutting grooves 521 to 524 on the second processing surface 221. The first cutting unit 32 and the second cutting unit 42 are opposed to each other via the plate-like member 2 with the second cutting unit 42 for moving and the first moving unit 33 moving while contacting the first processing surface 211. Unit 42, first moving unit 33, and second moving unit 4. Are moved in the same direction at the same speed, so that the first cutting grooves 511 to 514 and the second cutting grooves 521 to 524 extending in the movement direction in the first cutting part 32 and the second cutting part 42 are provided. It is characterized by being formed simultaneously. According to the said structure, the effect similar to the cutting device 1 which concerns on embodiment is acquired.
 今回開示された実施の形態は、全ての点で例示であって、制限的なものではないと考えられるべきである。本発明の範囲は、上述した意味ではなく、請求の範囲と均等の意味及び請求の範囲内での全ての変更が含まれることが意図される。
 また、本発明の効果がある限りにおいて、切断装置1に、実施の形態1,2に開示されていない構成要素が含まれていてもよい。
 各実施の形態に開示されている構成要件(技術的特徴)はお互いに組み合わせ可能であり、組み合わせによって新しい技術的特徴を形成することができる。
The embodiment disclosed this time is to be considered as illustrative in all points and not restrictive. The scope of the present invention is not intended to include the above-described meaning, but is intended to include meanings equivalent to the scope of the claims and all modifications within the scope of the claims.
Moreover, as long as the effect of the present invention is obtained, the cutting device 1 may include components that are not disclosed in the first and second embodiments.
The constituent elements (technical features) disclosed in each embodiment can be combined with each other, and a new technical feature can be formed by the combination.
 1   切断装置
 2   ガラス基板(板状部材)
 21  CF基板(第1部材)
 211 第1処理面
 22  TFT基板(第2部材)
 221 第2処理面
 31 移動支持部(第1移動支持部)
 32 ホイールカッタ(第1切断部)
 33 ローラ(第1移動部)
 41 移動支持部(第2移動支持部)
 42 ホイールカッタ(第2切断部)
 43 ローラ(第2移動部)
 511~514 スクライブ溝(第1切断用溝)
 521~524 スクライブ溝(第2切断用溝)
1 Cutting device 2 Glass substrate (plate-like member)
21 CF substrate (first member)
211 First processing surface 22 TFT substrate (second member)
221 2nd processing surface 31 Movement support part (1st movement support part)
32 Wheel cutter (first cutting part)
33 Roller (first moving part)
41 Movement support part (second movement support part)
42 Wheel cutter (second cutting part)
43 Roller (second moving part)
511 to 514 Scribe groove (first cutting groove)
521 to 524 Scribe groove (second cutting groove)

Claims (6)

  1.  板状の第1部材及び第2部材が貼り合わされてなる板状部材を切断する切断装置において、
     前記第1部材における前記第2部材に対向する面とは逆側の第1処理面に接触して移動することによって、移動方向に延びる第1切断用溝を前記第1処理面に形成する第1切断部と、
     前記第1切断部の移動と共に前記第1処理面に接触しながら前記移動方向に移動する1以上の第1移動部と、
     前記第2部材における前記第1部材に対向する面とは逆側の第2処理面に接触して前記移動方向に移動することによって、前記移動方向に延びる第2切断用溝を前記第2処理面に形成する第2切断部と、
     前記第2切断部の移動と共に前記第2処理面に接触しながら前記移動方向に移動する1以上の第2移動部とを備え、
     前記第1切断部と一の前記第2移動部とが前記板状部材を介して対向し、
     前記第2切断部と一の前記第1移動部とが前記板状部材を介して対向していることを特徴とする切断装置。
    In a cutting device for cutting a plate-like member formed by laminating a plate-like first member and a second member,
    A first cutting groove extending in the moving direction is formed in the first processing surface by moving in contact with the first processing surface opposite to the surface facing the second member of the first member. 1 cutting part,
    One or more first moving parts that move in the moving direction while contacting the first processing surface along with the movement of the first cutting part;
    A second cutting groove extending in the moving direction is moved in the second direction by contacting the second processing surface opposite to the surface facing the first member in the second member and moving in the moving direction. A second cutting portion formed on the surface;
    And one or more second moving parts that move in the moving direction while contacting the second processing surface along with the movement of the second cutting part,
    The first cutting part and the one second moving part are opposed to each other via the plate-like member,
    The cutting apparatus, wherein the second cutting part and the one first moving part are opposed to each other via the plate-like member.
  2.  前記第1切断部及び前記第1移動部を支持しつつ前記移動方向に移動させる第1移動支持部と、
     前記第2切断部及び前記第2移動部を支持しつつ前記移動方向に移動させる第2移動支持部と
     を更に備えることを特徴とする請求項1に記載の切断装置。
    A first movement support section that moves in the movement direction while supporting the first cutting section and the first movement section;
    The cutting apparatus according to claim 1, further comprising: a second movement support unit configured to move in the movement direction while supporting the second cutting unit and the second movement unit.
  3.  前記第1移動部及び前記第2移動部を2つずつ備え、
     2つの前記第1移動部は、前記移動方向に交差する方向に並置してあり、
     前記第1切断部は、2つの前記第1移動部の間に配されると共に、2つの前記第2移動部のうちの一方に前記板状部材を介して対向し、
     2つの前記第2移動部は、前記移動方向に交差する方向に並置してあり、
     前記第2切断部は、2つの前記第2移動部の間に配されると共に、2つの前記第1移動部のうちの一方に前記板状部材を介して対向していることを特徴とする請求項1又は2に記載の切断装置。
    Two each of the first moving unit and the second moving unit,
    The two first moving parts are juxtaposed in a direction intersecting the moving direction,
    The first cutting part is disposed between the two first moving parts and is opposed to one of the two second moving parts via the plate-like member,
    The two second moving parts are juxtaposed in a direction intersecting the moving direction,
    The second cutting part is disposed between two second moving parts, and faces one of the two first moving parts via the plate-like member. The cutting device according to claim 1 or 2.
  4.  前記第1移動部及び前記第2移動部夫々は、前記移動方向への移動に伴って回転するローラであることを特徴とする請求項1から3の何れか一項に記載の切断装置。 The cutting apparatus according to any one of claims 1 to 3, wherein each of the first moving unit and the second moving unit is a roller that rotates with movement in the moving direction.
  5.  前記板状部材は、2枚の基板が貼り合わされてなるガラス基板であり、
     前記第1切断用溝及び前記第2切断用溝は、スクライブ溝であることを特徴とする請求項1から4の何れか一項に記載の切断装置。
    The plate member is a glass substrate in which two substrates are bonded together,
    The cutting device according to any one of claims 1 to 4, wherein the first cutting groove and the second cutting groove are scribe grooves.
  6.  板状の第1部材及び第2部材が貼り合わされてなる板状部材を切断する切断方法において、
     前記第1部材における前記第2部材に対向する面とは逆側の第1処理面に第1切断用溝を形成するための第1切断部と、前記第2部材における前記第1部材に対向する面とは逆側の第2処理面に接触しながら移動する第2移動部とを前記板状部材を介して対向させ、
     前記第2処理面に第2切断用溝を形成するための第2切断部と、前記第1処理面に接触しながら移動する第1移動部とを前記板状部材を介して対向させ、
     前記第1切断部、前記第2切断部、前記第1移動部、及び前記第2移動部を同じ方向に同じ速度で移動させることによって、前記第1切断部及び前記第2切断部に移動方向に延びる前記第1切断用溝及び前記第2切断用溝を同時的に形成させることを特徴とする切断方法。
    In the cutting method of cutting the plate-like member formed by bonding the plate-like first member and the second member,
    A first cutting portion for forming a first cutting groove on a first processing surface opposite to a surface facing the second member in the first member, and facing the first member in the second member The second moving part that moves while contacting the second processing surface opposite to the surface to be opposed is opposed to the plate-like member,
    A second cutting portion for forming a second cutting groove on the second processing surface and a first moving portion that moves while contacting the first processing surface are opposed to each other via the plate-like member,
    The first cutting unit, the second cutting unit, the first moving unit, and the second moving unit are moved in the same direction at the same speed, thereby moving the first cutting unit and the second cutting unit in the moving direction. The first cutting groove and the second cutting groove extending simultaneously are formed simultaneously.
PCT/JP2016/071313 2016-07-20 2016-07-20 Cutting device and cutting method WO2018016038A1 (en)

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CN109794984A (en) * 2018-12-26 2019-05-24 惠科股份有限公司 Cutting mechanism, cutting method and display panel
CN110193857A (en) * 2018-02-27 2019-09-03 三星钻石工业株式会社 Break bar and cutting-off method

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JP2014200940A (en) * 2013-04-02 2014-10-27 三星ダイヤモンド工業株式会社 Break device
JP2016037413A (en) * 2014-08-07 2016-03-22 三星ダイヤモンド工業株式会社 Scribing method and scribing apparatus

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JP2008094632A (en) * 2006-10-05 2008-04-24 Sharp Corp Panel parting method and device therefor
JP2013121913A (en) * 2008-06-18 2013-06-20 Mitsuboshi Diamond Industrial Co Ltd Laminated substrate-scribing apparatus
JP2014200940A (en) * 2013-04-02 2014-10-27 三星ダイヤモンド工業株式会社 Break device
JP2016037413A (en) * 2014-08-07 2016-03-22 三星ダイヤモンド工業株式会社 Scribing method and scribing apparatus

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110193857A (en) * 2018-02-27 2019-09-03 三星钻石工业株式会社 Break bar and cutting-off method
CN109794984A (en) * 2018-12-26 2019-05-24 惠科股份有限公司 Cutting mechanism, cutting method and display panel

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