CN101565269B - Scribing equipment and scribing method for fragile substrate - Google Patents
Scribing equipment and scribing method for fragile substrate Download PDFInfo
- Publication number
- CN101565269B CN101565269B CN2008101851227A CN200810185122A CN101565269B CN 101565269 B CN101565269 B CN 101565269B CN 2008101851227 A CN2008101851227 A CN 2008101851227A CN 200810185122 A CN200810185122 A CN 200810185122A CN 101565269 B CN101565269 B CN 101565269B
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- China
- Prior art keywords
- alignment mark
- fragile substrate
- scribe head
- scribing
- sheet glass
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- Expired - Fee Related
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133354—Arrangements for aligning or assembling substrates
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Nonlinear Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The present invention provides scribing equipment and a scribing method for a fragile substrate. The equipment comprises a table station; a head guiding part; a scribing head slidably mounted on the head guiding part and provided with a scribing device on the end thereof; a camera arranged at the scribing head; and a control unit for controlling the scribing device and the scribing head. The control device controls the scribing head and the scribing device according to the X-coordinate and the Y-coordinate of the alignment mark shot by the camera so as to sequentially carry out scribing between the adjacent alignment marks. The control unit performs a linear interpolation on the error for each alignment mark caused by the bending of the head guiding part according to the captured images of the alignment marks. According to the scribing equipment and the scribing method for fragile substrate, even the head guiding part is bending, the scribing device is also controlled into the alignment marks sequentially formed at the top position of the unit glass board.
Description
The cross reference of related application
The application requires the rights and interests of the korean patent application No.2008-36772 of submission on April 21st, 2008, and the disclosure of this application is all incorporated the application at this through reference.
Technical field
The present invention relates to a kind of fragile substrate scoring equipment and scribble method that is used for depicting a plurality of unit sheet glass from frangible female sheet glass; More specifically, relate to fragile substrate scoring equipment and the scribble method of delineating when sequentially moving between a kind of alignment mark that is used for locating when the summit that is being formed at the unit sheet glass.
Background technology
The unit sheet glass of the predetermined size that employings such as the LCD that uses in the flat-panel monitor in general, (liquid-crystal display) or organic EL (electroluminescence) panel, inorganic EL panel, stereopticon panel, episcopic projector panel form from frangible female sheet glass (below be called " fragile substrate ") cutting.
Wherein, carry out the cutting of fragile substrate through following process: the laser knife through utilizing laser beam or exert pressure and move the process that race knife forms groove along the cutting plotted line of fragile substrate through giving by the race knife of processing such as materials such as diamonds; And disconnection process through after scratching process is accomplished, applying moment of flexure or cut through longitudinal crack being expanded with heating grooves such as steam to fragile substrate.The equipment that carries out scratching process is commonly referred to scoring equipment or scriber.
As shown in Figure 1, scoring equipment comprises: the tables 35 that support fragile substrate 10; Cross a guide member 31 of tables 35 top installation; Slidably be installed in the scribe head 32 on the guide member 31; And the pick up camera 33 and chalker 34 that are installed on scribe head 32.
Simultaneously, Fig. 2 illustrates the example of fragile substrate, below will describe the process through aforesaid device delineation fragile substrate.
As shown in Figure 2, a plurality of unit sheet glass 11 is arranged in the fragile substrate 10 with the lattice formation formula that has fixed intervals along directions X or Y direction.Before carrying out scratching process, scoring equipment 30 moves scribe head 32 and scribe head 32 is positioned at the edge of fragile substrate 10 along a guide member 31.In addition, after the position of the peripheral summit A of respect to one another, two unit sheet glass and B is measured, through delineating under with state through two summit A and B at control chalker 34 in scratching process formation groove 22.
For this reason; Two summit A before the scratching process on fragile substrate 10 and the position formation alignment mark 13 of B; Pick up camera 33 take fragile substrates 10 the periphery two alignment marks 13 respect to one another and the alignment mark that photographs outputed to the control unit (not shown), and the control unit X coordinate that detects alignment mark 13 and Y coordinate and this result moved scribe head 32 and chalker with the formation groove as benchmark.
When delineating as stated, ideally, the actual groove of cutting plotted line of fragile substrate (through the imaginary line of summit A and B) and chalker 34 formation should be identical.Yet in fact, As time goes on a guide member 31 warpages are cut plotted line and actual groove and inequality thereby cause.
That is to say that a guide member 31 is processed and is mounted to along the guide rail that is set in parallel in tables 35 both sides by foundry goods fully and slides, but an As time goes on guide member 31 distortion.For example, as shown in Figure 3, whole guide member 31 becomes curved between its two ends and As time goes on degree of crook aggravation.
As shown in Figure 4; If it is curved that a guide member 31 becomes by this way; Even so to respect to one another and be formed on the peripheral summit A of two unit sheet glass that are positioned at edge and their X coordinate and Y coordinates are accurately taken and obtained to the alignment mark 13 at B place; But in the scratching process of reality, scribe head 32 moves along a crooked guide member 31, makes groove only then depart from cutting plotted line with the cutting plotted line is crossing in other place at the alignment mark place that is formed at summit A and B place.
Therefore, the deviation of on-the-spot periodic measurement head guide member 31, and delineate through linear interpolation, scribe head 32 for example moves simultaneously according to the sinuousness that measures along directions X that chalker 34 moves along the Y direction thus.Yet,, can only make whole line pilot wire interrupt long time, so can not often do like this in the reality for the line linearity interpolation of going forward side by side of the accurate sinuousness of measuring head guide member 31.
It is even more serious that particularly the trend that increases day by day of flat-panel monitor makes the problem of bending of a guide member 31.In the tenth generation TFT-LCD (Thin Film Transistor-LCD), use 3,000 millimeters * 3,200 millimeters large-scale fragile substrate, and if the size of fragile substrate itself increases in this way, then a guide member 31 forms and sinuousness also increases longer.
Summary of the invention
The purpose of this invention is to provide vertex position that a kind of accurate measurement is arranged in the unit sheet glass in the fragile substrate then through fragile substrate scoring equipment and the scribble method of control chalker sequentially to delineate through the summit of unit sheet glass.
According to an aspect of the present invention, the fragile substrate scoring equipment comprises: tables, and said tables are used to place fragile substrate; Guide member, said guide member slides along the guide rail that is arranged in said tables both sides; Scribe head, said scribe head is installed on said guide member and on its end, has chalker with the mode that can slide; Pick up camera, said pick up camera is installed on said scribe head; And gear; Said gear is used to control said chalker and said scribe head; Wherein, Said pick up camera shooting is formed at the alignment mark at the vertex position place that is positioned at the unit sheet glass of arranging with lattice formation formula on the said fragile substrate and the result is outputed to said gear; And said gear is controlled said scribe head and said chalker sequentially between adjacent alignment mark, delineating based on the X coordinate of the alignment mark that photographs and Y coordinate, and said gear carries out linear interpolation according to the image of the alignment mark that photographs to the error that the bending by said guide member at each alignment mark place causes.
Wherein, before beginning delineation, pick up camera can be taken all alignment marks of the position that is positioned at the summit on the cutting plotted line that is formed at the unit sheet glass.
In addition, gear can carry out linear interpolation to the error that the bending by a guide member at each alignment mark place causes according to the image of the alignment mark that photographs.
According to a further aspect in the invention, the fragile substrate scribble method may further comprise the steps: (a) take and be positioned at the alignment mark that is arranged in the summit on the cutting plotted line of the unit sheet glass on the fragile substrate with lattice formation formula; And (b) use the X coordinate and the Y coordinate of the alignment mark photograph sequentially between two adjacent alignment marks, to delineate through linear interpolation.
Wherein, In step (a); When scribe head being moved through be formed on the alignment mark at the vertex position place that is positioned at the edge that is arranged to peripheral cell sheet glass respect to one another on the fragile substrate, can take the alignment mark between the said alignment mark through pick up camera.
In addition, in step (b), gear can carry out linear interpolation and control scribe head and the chalker that is installed on scribe head to alignment mark, and chalker can be delineated so that sequentially pass through adjacent alignment mark.
In addition, at completing steps (a) afterwards, scribe head can be in the position between the edge of alignment mark that is moved further shooting to the end before the delineation and fragile substrate; Perhaps, at completing steps (a) afterwards, scribe head can be in the position between the edge of alignment mark that turns back to shooting at first before the delineation and fragile substrate.
In addition, in said fragile substrate scribble method, can sequentially carry out step (a) and step (b), perhaps, carry out step (a) to all cutting plotted lines and carry out step (b) afterwards again to every cutting plotted line.
Description of drawings
According to the detailed description of making below in conjunction with accompanying drawing, above and other purpose of the present invention, feature and advantage will be clearer, in the accompanying drawing:
Fig. 1 is the plat and the side-view of conventional fragile substrate scoring equipment;
Fig. 2 is the view that has through the fragile substrate of the line of cut that utilizes scoring equipment shown in Figure 1 to delineate to form;
Fig. 3 is the plat of the crooked conventional scoring equipment of a guide member;
Fig. 4 is the view that has through the fragile substrate of the line of cut that utilizes scoring equipment shown in Figure 3 to delineate to form;
Fig. 5 illustrates the structure according to the scoring equipment of fragile substrate of the present invention;
Fig. 6 illustrates the fragile substrate that will delineate according to the present invention;
Fig. 7 illustrates the fragile substrate by the scoring equipment delineation of Fig. 5; And
Fig. 8 is the schema that is used to explain fragile substrate scribble method according to an illustrative embodiment of the invention.
Embodiment
Below, will describe illustrative embodiments of the present invention in detail with reference to accompanying drawing.In whole drawing and description, identical Reference numeral will be represented components identical and will omit repeatability and describe.
At first, will fragile substrate scoring equipment according to an illustrative embodiment of the invention be described with reference to Fig. 5 to Fig. 7.Wherein, Fig. 5 illustrates the structure according to fragile substrate scoring equipment of the present invention, and Fig. 6 illustrates the fragile substrate that will delineate according to the present invention, and Fig. 7 illustrates the fragile substrate by the scoring equipment delineation of Fig. 5.
As shown in Figure 5, comprise according to the fragile substrate scoring equipment 40 of an illustrative embodiments of the present invention: the tables 45 that are used to place fragile substrate 10; Guide member 41 along the guide rail (not shown) slip that is arranged in tables 45 both sides; Slidably be installed on the scribe head 42 of a guide member 41; Be installed on the pick up camera 43 of scribe head 42; And gear 46.
Wherein, a guide member 42 is mounted to the top of crossing the tables 45 that support fragile substrate 10, and chalker 44 is installed on scribe head 42.In addition, chalker 44, and---being used on fragile substrate 10, forming the device of groove 22---can use the diamond race knife, utilize the laser knife of laser beam etc.
Simultaneously, before describing pick up camera 43 and gear 46, will describe with reference to Fig. 6 will be by the fragile substrate 10 of scoring equipment 40 delineations.
As shown in Figure 6, a plurality of unit sheet glass 11 is arranged on the fragile substrate 10 with the lattice formation formula with predetermined space, and each unit sheet glass 11 all is the rectangle with four summits that are positioned at its corner.
In addition, in step, form alignment mark 13 such as spider at each vertex position place of each unit sheet glass 11 prior to scratching process.
Simultaneously, in Fig. 6 straight line shown in broken lines corresponding to the imaginary straight cutting plotted line 21 on the summit that extends through each unit sheet glass along directions X.If a guide member 41 is not crooked and remain accurate straight line; Even the X coordinate of the alignment mark 13 of the position so through only using respect to one another, two summit V0 being formed on the periphery place that is positioned at two unit sheet glass and V5 on the fragile substrate 10 and the linear interpolation of Y coordinate are delineated, actual groove also is identical with cutting plotted line 21., if even a guide member 41 has little amount of bow, so actual groove also will obviously depart from cutting plotted line 21.
In illustrative embodiments of the present invention; When being formed at two summit V0 and V5 (promptly; Be positioned to two summits at place, periphery respect to one another, as to be positioned at two unit sheet glass along the cutting plotted line of fragile substrate) when moving scribe head 42 between the alignment mark 13 of position; Along with scribe head 42 moves, pick up camera 43 is taken all alignment marks 13 of the summit V0 that is pre-formed the sheet glass 11 in the unit, V1, V2, V3, V4, V5 position.
If a guide member 41 is straight, pick up camera 43 will pass through the center of the alignment mark 13 at the summit V0 that is formed at unit sheet glass 11, V1, V2, V3, V4, V5 place so.Yet if even a guide member 41 is slight curving, pick up camera 43 also will depart from alignment mark 13 with the amount of bow of a guide member 41 so, thereby will shift to a side of picture centre by the alignment mark 13 that pick up camera 43 is taken.
Therefore, in gear 46, confirm the deviation of each alignment mark 13, confirm promptly how many each alignment marks 13 departed from respect to the picture centre of being taken by pick up camera 43 with respect to a guide member 41, and, those Δs x, Δ y value are input to input unit.
In addition, in scratching process, when gear 46 is delineated through scribe head 42 and chalker 44, carry out linear interpolation along directions X and Y direction, make chalker 44 pass through the center of alignment marks 13 to each alignment mark 13.
That is to say; Under the control of gear 46; After chalker 44 was delineated when the line zero position from the cutting plotted line moves to the alignment mark 13 of position of the first summit V0 of peripheral cell sheet glass, the alignment mark that chalker 44 delineates at the alignment mark that sequentially alignment mark of V0 moves to next adjacent vertex V1 from the summit then, then the alignment mark of V1 moves to next adjacent vertex V2 from the summit was delineated the alignment mark of summit V5 so to the last once more.Then, scribe head 42 moves into place between the edge of the alignment mark of summit V5 and fragile substrate 10 or exceeds the delineation end position at fragile substrate 10 edges, thereby has accomplished the delineation to a cutting plotted line.
Fig. 7 illustrates as stated in the example of carrying out to alignment mark 13 delineating after the linear interpolation.
As shown in Figure 7, when after carrying out linear interpolation to each alignment mark 13, delineating, the groove of representing with solid line 22 is carved in the fragile substrate 10.
Therefore; Although accurately through the center of the alignment mark 13 of the summit V0, the V1 that are formed at unit sheet glass 11, V2, V3, V4, V5 position, groove 22 still departs from cutting plotted line 21 with the amount of bow of a guide member 41 to groove 22 between each alignment mark.
At this moment, groove 22 is Δ y with respect to the maximum deviation of cutting plotted line 21, but the maximum deviation Δ y of groove 22 is far smaller than the maximum deviation of groove according to conventional scoring equipment 30 shown in Figure 4.Its reason is in routine techniques; Alignment mark based on being formed at place, two peripheral summits is delineated; And in the present invention; Alignment mark based on being formed at the adjacent vertex place is delineated, make delineation based on alignment mark between the interval obviously shorter, and then correspondingly reduced the groove error that the bending by a guide member 41 causes.
Next, will fragile substrate scribble method according to an illustrative embodiment of the invention be described with reference to Fig. 8.As a reference, Fig. 8 is the schema that is used to explain fragile substrate scribble method according to an illustrative embodiment of the invention.
Fragile substrate scribble method according to an illustrative embodiment of the invention may further comprise the steps: the alignment mark (S11) of (a) taking the summit on the cutting plotted line that is located at the unit sheet glass of arranging with lattice formation formula on the fragile substrate; And (b) use the X coordinate and the Y coordinate of the alignment mark photograph sequentially between two adjacent alignment marks, to delineate (S12) through carrying out linear interpolation.
Wherein, In step S11; When moving scribe head 42 along a guide member 41, take the also departure of each alignment mark 13 of image measurement of photographing of use of each alignment mark of being formed on the cutting plotted line through pick up camera 43 with when being formed at the alignment mark 13 at peripheral summit V0 and V5 place on the fragile substrate 10.
When completing steps S11; In step S12; Gear 46 carries out linear interpolation to alignment mark 13 and controls scribe head 42 and be installed in chalker 44 on the scribe head 42 sequentially to delineate, and makes the center of chalker 44 through adjacent alignment mark 13.
At this moment; After completing steps S11; Promptly pick up camera 43 is taken after the last alignment mark, in step S12, preferably in step S11; Scribe head 42 moves slightly further and moves to the position between the edge of last alignment mark and fragile substrate 10, delineates when mobile reverse then.Yet the present invention is not limited to delineate by this way.
That is to say, after completing steps S11, also can make scribe head 42 turn back to it and delineate then at alignment mark of taking at first and the zero position between fragile substrate 10 edges.
When the delineation accomplished by this way to a cutting plotted line, through moving to next cutting plotted line 21 and repeating above-mentioned steps S11 and S12 delineates.
Certainly, although in above-mentioned illustrative embodiments, description be sequentially to carry out step S11 and S12 to every cutting plotted line 21, fully can be for example carry out step S12 again after having carried out step S11 all being cut plotted lines 21.
According to fragile substrate scoring equipment of the present invention and scribble method, even a guide member bending, chalker still is controlled so as to the alignment mark that sequentially streaks the vertex position place that is formed at the unit sheet glass.This has can reduce the beneficial effect of actual groove with respect to the error of cutting plotted line.
Although below according to an illustrative embodiment of the invention the present invention is specifically described, the present invention is confined to said illustrative embodiments by no means, but can under the situation that does not deviate from the spirit and scope of the present invention, make various remodeling.
Thereby, although what in illustrative embodiments of the present invention, describe is to take each alignment mark by pick up camera, can use any device that can discern alignment mark to substitute pick up camera in the present invention.
The present invention may be used on being used for depicting from fragile substrate in the manufacturing processed of flat-panel monitors (FPD) such as TFT-LCD, OLED (OLED), PDP (plasma display), EL (electroluminescence) indicating meter the scoring equipment of a plurality of unit sheet glass.
Claims (9)
1. fragile substrate scoring equipment comprises:
Tables, said tables are used to place fragile substrate;
Guide member, said guide member slides along the guide rail that is arranged in said tables both sides;
Scribe head, said scribe head is installed on said guide member and on its end, has chalker with the mode that can slide;
Pick up camera, said pick up camera is installed on said scribe head; And
Gear, said gear are used to control said chalker and said scribe head,
Wherein, said pick up camera shooting is formed at the alignment mark at the vertex position place that is positioned at the unit sheet glass of arranging with lattice formation formula on the said fragile substrate and the result is outputed to said gear, and
Said gear is controlled said scribe head and said chalker sequentially between adjacent alignment mark, delineating based on the X coordinate of the alignment mark that photographs and Y coordinate, and
Said gear carries out linear interpolation according to the image of the alignment mark that photographs to the error that the bending by said guide member at each alignment mark place causes.
2. fragile substrate scoring equipment as claimed in claim 1, wherein, before beginning delineation, said pick up camera is taken all alignment marks of the position that is positioned at the summit on the cutting plotted line that is formed at the unit sheet glass.
3. fragile substrate scribble method may further comprise the steps:
(a) take the alignment mark on the summit on the cutting plotted line be positioned at the unit sheet glass, wherein said unit sheet glass is arranged on the fragile substrate with lattice formation formula; And
(b) use the X coordinate and the Y coordinate of the alignment mark that photographs sequentially between two adjacent alignment marks, to delineate through linear interpolation.
4. fragile substrate scribble method as claimed in claim 3; Wherein, In step (a); When scribe head being moved through be formed on the alignment mark at the vertex position place that is positioned at the edge that is arranged to peripheral cell sheet glass respect to one another on the said fragile substrate, take the alignment mark between the said alignment mark through pick up camera.
5. fragile substrate scribble method as claimed in claim 4; Wherein, In step (b); Gear carries out linear interpolation to said alignment mark and controls said scribe head and be installed on the chalker of said scribe head, thereby and said chalker delineate and sequentially pass through adjacent alignment mark.
6. fragile substrate scribble method as claimed in claim 5, wherein, at completing steps (a) afterwards, delineate then the position that said scribe head is moved further to the end between the edge of the alignment mark taken and said fragile substrate.
7. fragile substrate scribble method as claimed in claim 5, wherein, at completing steps (a) afterwards, delineate then the position that said scribe head turns back at first between the edge of the alignment mark taken and said fragile substrate.
8. like each described fragile substrate scribble method in the claim 3 to 7, wherein, sequentially carry out step (a) and step (b) to every cutting plotted line.
9. like each described fragile substrate scribble method in the claim 3 to 7, wherein, carry out step (a) to all cutting plotted lines and carry out step (b) afterwards again.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020080036772 | 2008-04-21 | ||
| KR10-2008-0036772 | 2008-04-21 | ||
| KR1020080036772A KR100848854B1 (en) | 2008-04-21 | 2008-04-21 | Scribing apparatus of fragile substrate and method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101565269A CN101565269A (en) | 2009-10-28 |
| CN101565269B true CN101565269B (en) | 2012-08-29 |
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ID=39825350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101851227A Expired - Fee Related CN101565269B (en) | 2008-04-21 | 2008-12-09 | Scribing equipment and scribing method for fragile substrate |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR100848854B1 (en) |
| CN (1) | CN101565269B (en) |
| TW (1) | TW200944482A (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101066140B1 (en) | 2009-06-30 | 2011-09-20 | 한국산업기술대학교산학협력단 | Method and apparatus for scribing substrate |
| TWI448353B (en) * | 2010-12-09 | 2014-08-11 | Ind Tech Res Inst | Method and apparatus of machine tools for intelligently compensating thermal error |
| CN103562984B (en) * | 2011-11-21 | 2016-04-27 | 住友化学株式会社 | The manufacturing system of optical component fitting body |
| KR101973832B1 (en) * | 2012-02-29 | 2019-04-29 | 수미토모 케미칼 컴퍼니 리미티드 | Optical display device production system, and optical display device production method |
| CN105102171B (en) * | 2013-02-13 | 2018-01-30 | 住友化学株式会社 | The manufacture device of optical member adhering body |
| JP6120161B2 (en) * | 2013-04-08 | 2017-04-26 | 住友化学株式会社 | Laser processing apparatus and optical display device production system |
| KR101568012B1 (en) * | 2014-02-14 | 2015-11-12 | 유엠메카닉스 주식회사 | LCD panel cutting device |
| KR102073767B1 (en) * | 2018-10-30 | 2020-02-05 | 한국미쯔보시다이아몬드공업(주) | Method for inspecting thickness of rib mark |
| KR102286476B1 (en) * | 2019-05-23 | 2021-08-06 | 코닝 인코포레이티드 | Glass substrate cutting method and light guide plate manufacturing method |
| KR102148100B1 (en) | 2019-08-26 | 2020-08-25 | (주)네온테크 | Hybrid dicing apparatus and cutting method for the same |
| CN110981175A (en) * | 2019-12-27 | 2020-04-10 | 黄石瑞视光电技术股份有限公司 | Ultrathin ITO glass cutting process of touch screen |
| KR102148117B1 (en) | 2020-03-26 | 2020-08-26 | (주)네온테크 | Apparatus comprising multi router spinndle and processing method for the same |
| KR102550583B1 (en) | 2022-06-17 | 2023-07-03 | (주)네온테크 | Processing and checking methods by auto alignment after loading substrate |
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| CN1649799A (en) * | 2002-01-16 | 2005-08-03 | 三星钻石工业股份有限公司 | Fragile material substrate scriber, fragile material substrate processing machine, fragile material substrate polishing device, and fragile material substrate parting system |
| EP1579970A1 (en) * | 2002-11-06 | 2005-09-28 | Mitsuboshi Diamond Industrial Co., Ltd. | Scribe line forming device and scribe line forming method |
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| KR100990307B1 (en) * | 2003-06-24 | 2010-10-26 | 엘지디스플레이 주식회사 | Method for cutting liquid crystal display panel |
| EP1806202B1 (en) * | 2004-10-25 | 2011-08-17 | Mitsuboshi Diamond Industrial Co., Ltd. | Method and device for forming crack |
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2008
- 2008-04-21 KR KR1020080036772A patent/KR100848854B1/en active IP Right Grant
- 2008-12-08 TW TW097147659A patent/TW200944482A/en unknown
- 2008-12-09 CN CN2008101851227A patent/CN101565269B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4698088A (en) * | 1985-09-30 | 1987-10-06 | Bando Kiko Co., Ltd. | Glass plate fabrication machine under automatic control |
| CN1649799A (en) * | 2002-01-16 | 2005-08-03 | 三星钻石工业股份有限公司 | Fragile material substrate scriber, fragile material substrate processing machine, fragile material substrate polishing device, and fragile material substrate parting system |
| EP1579970A1 (en) * | 2002-11-06 | 2005-09-28 | Mitsuboshi Diamond Industrial Co., Ltd. | Scribe line forming device and scribe line forming method |
| CN1953857A (en) * | 2004-05-20 | 2007-04-25 | 三星钻石工业股份有限公司 | Motherboard cutting method, motherboard scribing apparatus, program and recording medium |
| CN1868943A (en) * | 2005-05-27 | 2006-11-29 | 肖特股份有限公司 | Method of mechanically breaking a scribed flat workpiece of brittle fracturing material |
Non-Patent Citations (1)
| Title |
|---|
| JP昭64-9826A 1989.01.13 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101565269A (en) | 2009-10-28 |
| TW200944482A (en) | 2009-11-01 |
| KR100848854B1 (en) | 2008-07-30 |
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