KR102073767B1 - Method for inspecting thickness of rib mark - Google Patents

Abstract

An objective of the present invention is to provide an apparatus and a method for inspecting the thickness of a rib mark, which use a line scan camera to measure the entire area of a brittle substrate, divide the brittle substrate with a scribe line formed by a scriber, and then measure the formation and thickness of a rib mark on a dividing surface serving as an index of pass/fail determination for a scribe result. To achieve the objective, according to an embodiment of the present invention, the apparatus for inspecting the thickness of a rib mark comprises: a first transport unit (100) to transport a brittle substrate (10) with a scribe line; a dividing unit (200) to divide the scribe line of the brittle substrate (10) transported by the first transport unit (100); a second transport unit (300) to transport one of a plurality of brittle substrates (10, 11) divided by the dividing unit (200) to a predetermined distance; and a camera (400) to move along a dividing surface of the one brittle substrate and photograph the dividing surface of the brittle substrate.

Description

Rib mark thickness inspection method {METHOD FOR INSPECTING THICKNESS OF RIB MARK}

The present invention relates to a rib mark thickness inspection apparatus and method, and more particularly, to determine whether the rib mark formed on the split surface of the brittle substrate and the thickness of the rib mark thickness inspection apparatus using a line scan camera And to a method.

As a tool for dividing various brittle substrates including a glass substrate into a required size, a scriber having a dividing wheel is used. The scriber travels while applying a load while the dividing wheel is pressed against the surface of the substrate, thereby forming a scribe line on the surface of the substrate. After the scribe line is formed, a dividing process is performed in which a bending force is applied to the substrate with respect to the scribe line.

At this time, rib marks exist in the scribe line (the dividing groove). Generally, a rib mark is formed just below the groove, and a crack perpendicular to the thickness direction of the brittle substrate extends from the tip of the rib mark.

By forming the rib mark in the scribe line in this way, it becomes possible to divide the brittle substrate with a relatively small force.
In connection with the rib mark, a wheel cutter capable of carving the rib mark deeper is disclosed in Japanese Patent Laid-Open No. 2004-223799.

Recently, there has been a demand for a method of detecting the presence or absence of such rib marks, calculating the thickness of the rib marks, and using them as reference information for determining whether the scribe breaks successfully.

Japanese Laid-Open Patent Publication No. 2004-223799

Accordingly, the present invention has been proposed to meet the above-described demands, and its object is to measure the entire area of the brittle substrate using a line scan camera, and after dividing the brittle substrate having a scribe line formed by a scriber, The present invention provides a rib mark thickness inspection apparatus and method for measuring the thickness and the presence of rib marks formed on a divided section serving as an index of the scribing result.

In order to achieve the above object, the rib mark thickness inspection apparatus according to an embodiment of the present invention, the first transfer unit 100 for transferring the brittle substrate 10, the scribe line is formed, and the first transfer unit 100 The dividing unit 200 for dividing the scribe line of the brittle substrate 10 transferred by the) and the brittle substrate of one of the plurality of brittle substrates divided by the dividing unit 200 are transferred to a predetermined interval. And a second transfer unit 300 and a camera 400 that moves along the divided surface of one brittle substrate and photographs the divided surface of the brittle substrate.

In addition, in the rib mark thickness inspection apparatus according to another embodiment of the present invention, the camera 400 includes a 90 ° tilt mirror block capable of obtaining a horizontal image in the vertical direction.

In addition, the rib mark thickness inspection method according to an embodiment of the present invention, the first step (S100) for obtaining an image of the rib mark formed on the divided surface of the brittle substrate of one of the plurality of divided brittle substrates through the camera And a second step (S200) of detecting an outer line of the divided surface by performing a first line scan in one direction for all regions of the field of view (FOV), and brittleness in both directions from the center line of the FOV. A third step (S300) of selecting a region of interest by the thickness of the substrate, and in the selected region of interest, a second line scan is performed in the inner direction of the brittle substrate (the direction of the center line of the FOV). A fourth step S400 of providing a function for calculating an average value by summing up all of the intensity data acquired by the second line scan, and reflecting the average value of the provided function. And a sixth step S600 of designating an inner line through the graph, and a seventh step S700 of obtaining a thickness of the rib mark from the detected outer line and the designated inner line.

In addition, in the rib mark thickness inspection method according to another embodiment of the present invention, the function is the following equation (1).

…… 식(1)

… … Formula (1)

Where the convolution mask is

이며, 또한, VM은 수직 마스크(Vertical Mask)이고, HM은 수평 마스크(Horizontal Mask)이며,

Also, VM is a vertical mask, HM is a horizontal mask,

Pn (n is 0 to 8) is a pixel, Gx is a horizontal differential function, Gy is a vertical differential function, and G is a corner detection value by the first derivative −

In addition, the rib mark thickness inspection method according to another embodiment of the present invention designates the position of the second peak in the graph as an inner line.

According to the present invention, the entire area of the brittle substrate is measured using a line scan camera, the brittle substrate on which the scribe line is formed by the scriber is divided, and then ribs formed on the divided surface serving as an index for the determination of the scribing result. There is an effect of measuring the presence and absence of the formation of the mark.

1 is a perspective view showing the overall configuration of the rib mark thickness inspection apparatus according to an embodiment of the present invention.
Figure 2 is a photograph showing a cut surface of the brittle substrate obtained by the rib mark thickness inspection apparatus according to an embodiment of the present invention.
Figure 3 is a photograph showing the detection result of the rib mark thickness in the rib mark thickness inspection method according to an embodiment of the present invention.
4 is a graph reflecting an average value of a function of calculating an average value by summing all brightness data obtained by a second line scan in the rib mark thickness inspection method according to an exemplary embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing the overall configuration of the rib mark thickness inspection apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the rib mark thickness inspection apparatus 1000 according to an exemplary embodiment of the present invention may include a first transfer unit 100, a dividing unit 200, a second transfer unit 300, and a camera. 400.

Here, the first transfer unit 100 serves to transfer the brittle substrate 10 on which the scribe line is formed.

First, a scribe line is previously formed in the brittle substrate 10 along the cutting schedule line of the brittle substrate 10.

In the present embodiment, the method of forming the scribe line on the brittle substrate 10 need not be limited to a specific processing method, and a process using a wheel cutter or a process using a laser may be used.

In addition, the first transfer unit 100 may be a belt-shaped conveyor, and provides a horizontal transfer surface having a constant height relative to the ground.

This transfer surface refers to a portion for moving the brittle substrate 10 in the upper portion of the belt circulating along a predetermined path.

At the time of conveying the brittle substrate 10, the brittle substrate 10 is supported on the conveying surface so as not to be separated from the first conveying unit 100.

On the other hand, the first transfer unit 100 is driven by a driving unit (not shown) and serves as a guide unit for guiding the brittle substrate 10 to the dividing unit 200.

Next, the dividing unit 200 divides the scribe line of the brittle substrate 10 transferred by the first transfer unit 100.

Here, the dividing unit 200 serves to divide the brittle substrate 10 on which the scribe line is formed, and the dividing unit 200 may be, for example, the first transfer unit 100 and the second transfer unit (to be described later) ( The air blowing unit may be positioned between the 300 to eject air toward the brittle substrate 10.

Alternatively, the adsorption unit may include a plurality of adsorption holes positioned between the first transfer unit 100 and the second transfer unit 300 to adsorb a portion of the brittle substrate 10.

In other words, there is no need to limit to a specific processing method for dividing the brittle substrate 10, and any method capable of dividing the brittle substrate 10 by applying a force to the formed scribe line may be used.

Next, the second transfer unit 300 serves to transfer one of the brittle substrates 11 of the plurality of brittle substrates 10 and 11 divided by the dividing unit 200 to a predetermined interval.

The second conveying unit 300 may also be a belt conveyor and provides a horizontal conveying surface having a constant height with respect to the ground.

Similarly, even when the brittle substrate 11 is transferred, the brittle substrate 11 is supported on the transfer surface so as not to be separated from the second transfer unit 300.

The heights of the first transfer unit 100 and the second transfer unit 300 are basically the same, but the heights of the first transfer unit 100 and the second transfer unit 300 are such that the brittle substrate 10 is easily divided. May be applied differently.

As described above, when the heights of the first transfer unit 100 and the second transfer unit 300 are different from each other, the dividing unit 200 may more easily divide the brittle substrate 10.

In addition, the second transfer unit 300 is driven and moved by a driving unit (not shown) and serves as a guide unit for guiding the brittle substrate 11 from the dividing unit 200 to a predetermined position.

On the other hand, the camera 400 moves along the divided surface of the brittle substrate 11 and photographs the divided surface of the brittle substrate 11.

Of course, the camera 400 moves along the divided surface of the brittle substrate 10, and the divided surface of the brittle substrate 10 may be photographed.

However, one brittle substrate 10 of the plurality of brittle substrates 10 and 11 divided by the dividing unit 200 is a practical brittle substrate used for display of electronic products, and the other brittle substrate 11 is used. Is a dummy brittle substrate that is a magnetic substrate rather than a practical brittle substrate.

In this embodiment, the thickness of the rib mark 4 is inspected using the dummy brittle substrate 11.

As a result, by dividing the brittle substrate 10, the actual brittle substrate is obtained, and the thickness inspection of the rib mark (Fig. 3) is performed.

Meanwhile, the camera 400 may move through the rail 410 illustrated in FIG. 3 and may photograph cross sections of all regions of the dummy brittle substrate 11.

In addition, the camera 400 includes a 90 ° tilt mirror block capable of obtaining an image in a horizontal direction in a vertical direction.

In more detail, the dummy brittle substrate 11 is supported on the transfer surface of the second transfer unit 300 in a lying down state.

At this time, the camera 400 moving through the rail 410 photographs all the divided surfaces of the dummy brittle substrate 11 in the lying state.

The image of the image photographed by this is an image of a horizontal direction. The horizontal image is obtained as an image in the vertical direction by a 90 ° tilt mirror block installed in the camera 400.

That is, the divided surface of the dummy brittle substrate 11 obtained as the image in the vertical direction may be confirmed through FIGS. 2 and 3.

Conventionally, in order to acquire the divided surface of the brittle substrate in the lying state as a vertical image, the divided surface of the brittle substrate is photographed with the camera lying about 90 degrees or the brittle substrate in the lying state is vertically The divided surface of the brittle substrate was photographed in the upright state.

In this manner, in order to acquire an image in the vertical direction, there was an inconvenience to vertically erect the brittle substrate, and there was also a problem that it took a long time to erect the brittle substrate vertically.

As a result, although the image of the vertical direction with respect to the divided surface of the brittle substrate has not been obtained in the past, the inspection of the rib mark 4 was performed by acquiring the image in the horizontal direction. The mirror block acquires the image in the horizontal direction as the image in the vertical direction.

As a result, an image of the captured image of the divided surface of the brittle substrate in the lying state is easily obtained as an image in the vertical direction, thereby performing inspection of the rib mark 4.

Next, Figure 2 is a photograph showing a cut surface of the brittle substrate obtained by the rib mark thickness inspection apparatus according to an embodiment of the present invention.

Referring to FIG. 2, the divided surface of the dummy brittle substrate 11 may be confirmed.

Here, the rib mark 4 is formed inwardly from one side edge portion (scribe line portion) of the dummy brittle substrate 11.

That is, such rib marks 4 are generated inward from one side edge portion (scribe line portion) of the dividing surface of the dummy brittle substrate 11 divided by the dividing portion 200.

Of course, the rib mark 4 is similarly formed in the one side edge part of the divided surface of the brittle board | substrate 10 which is a practical brittle board | substrate.

However, in the present invention, in order to obtain a practical brittle substrate by dividing the brittle substrate 10 and to inspect the thickness of the rib mark 4, the brittle substrate 10 is formed at one edge portion of the divided surface of the dummy brittle substrate 11. The photographed video image for the rib mark 4 to be used is used.

At this time, the thickness d of the rib mark 4 varies depending on the angle of the scribe wheel used for scribing, the pressure of the scribe, and the material of the brittle substrate 10.

The usual thickness of this rib mark 4 is formed to within about 30% of the thickness of the brittle substrate 10.

Next, Figure 3 is a photograph showing the detection result of the rib mark thickness in the rib mark thickness inspection method according to an embodiment of the present invention.

3, the rib mark thickness inspection method according to another embodiment of the present invention is performed in the following manner.

First, in the first step S100, an image of the rib mark 4 formed on the divided surface of the brittle substrate of one of the plurality of divided brittle substrates is acquired through the camera 400.

In the present embodiment, description will be made using the dummy brittle substrate 11 which is one of the plurality of brittle substrates 10 and 11.

Also, for example, a line scan camera including a 90 ° tilt mirror block may be used as the camera 400.

In the second step S200, the first line scan in one direction is performed on all areas of the field of view (FOV) from the image acquired through the camera 400 to detect the outer line 1 of the divided surface. do. This can be confirmed through FIG. 2.

In the third step S300, a region of interest 2 is selected by the thickness of the dummy brittle substrate 11 in both directions from the center line of the FOV.

In the fourth step S400, in the selected region of interest 2, a second line scan is performed in the inner direction of the dummy brittle substrate 11 (the center line direction of the FOV).

In a fifth step S500, a function of calculating an average value by summing all of the intensity data acquired by the second line scan is provided.

At this time, a function for calculating the average value is as follows.

…… 식(1)

… … Formula (1)

Here, the convolution mask is

임

being

In addition, VM is a vertical mask, HM is a horizontal mask, Pn (n is 0 to 8) is a pixel, Gx is a horizontal differential function, and Gy is a vertical differential. G is the edge detection value by the first derivative.

In this way, the average value may be calculated by summing all the intensity data acquired by the second line scan by Equation (1).

In a sixth step S600, the inner line 3 is designated through a graph reflecting the average value of the provided function.

At this time, the inner line 3 designates the position of the second peak as the inner line in the graph. This can be confirmed through FIG. 4.

4 is a graph reflecting an average value of a function in which an average value is calculated by summing all brightness data obtained by the second line scan.

Referring to FIG. 4, the graph having a constant average value along the X axis causes a sudden graph change in brightness at the circle of blue 5, that is, the first peak.

In addition, a sharp graph change in brightness occurs from the red circle 6, that is, the second peak.

This results in a first peak between the region of interest 2 of black (B) and the rib mark 4 of gray (G), and a dummy brittle substrate of gray (G) rib mark 4 and approximately white (W). It can be seen that a second peak occurs between the cut surfaces of (11).

Thus, it can be specified from the graph that the first peak is the outer line 1 and the second peak is the inner line 2.

Finally, in the seventh step S700, the thickness of the rib mark 4 is obtained from the detected outer line 1 and the designated inner line 3.

In this manner, the rib mark 4 formed on the cut surface of the dummy brittle substrate 11 on which the scribe line is formed is acquired by using the camera 400 to obtain an image of an image, and the outer line 1 of the brittle substrate 11 After detecting the boundary line of the inner line 3, through the formation position information of the rib mark 4 (outer line 1 or inner line 3) and the estimated thickness (d) information (proportional to the scribe pressure) After estimating the expected position and area of the rib mark 4 and detecting the inner line 3 using the sum of the line components in the perpendicular direction from the measured outer line 1, the outer line 1 and the inner line By obtaining the distance (3) to calculate the thickness d of the rib mark 4 and making it data, there is an effect that it can be utilized as reference information for determining whether the scribe division is successful.

The above description is merely illustrative of the technical idea of the present invention, and those skilled in the art to which the present invention pertains may make various modifications and changes without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.

1: outside line
2: area of interest
3: inner line
4: rib mark
d: thickness
10: brittle substrate
11: dummy brittle substrate
100: first transfer unit
200: dividing unit
300: second transfer unit
400: camera
410: rail

Claims (5)

delete delete A first step (S100) of acquiring an image of a rib mark formed on a divided surface of one of the divided brittle substrates 10 and 11 through a camera;
A second step (S200) of detecting an outer line of the divided surface by performing a first line scan in one direction on all areas of a field of view (FOV),
A third step (S300) of selecting a region of interest by the thickness of the brittle substrate in both directions from the center line of the FOV;
In the selected region of interest, a fourth step (S400) of performing a second line scan in the inner direction of the brittle substrate (direction of the center line of the FOV),
A fifth step (S500) of providing a function of calculating an average value by summing all the intensity data acquired by the second line scan;
A sixth step (S600) of designating an inner line through a graph reflecting an average value of the provided function;
And a seventh step (S700) of obtaining the thickness of the rib mark from the detected outer line and the designated inner line. The method of claim 3, wherein
The said function is a rib mark thickness test method of following formula (1).

… … Formula (1)
Where the convolution mask is

Also, VM is a vertical mask, HM is a horizontal mask,
Pn (n is 0 to 8) is a pixel, Gx is a horizontal differential function, Gy is a vertical differential function, and G is a corner detection value by the first derivative. The method of claim 3, wherein
In the graph, the rib mark thickness inspection method of designating the position of the second peak to the inner line.

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