JPWO2016103492A1 - Shape measuring method and apparatus - Google Patents

Abstract

Regardless of the shape and surface state of the target, it enables shape measurement that has the versatility of measuring large shapes, long shapes, and a wide range. A method and apparatus for measuring the shape of a measurement target is irradiated with a plurality of illumination lights emitted from a plurality of light sources on the measurement target, and an area irradiated with the plurality of illumination lights of the measurement target is imaged with a color camera, The color image to be inspected obtained by the color camera is separated into multiple images according to the wavelength, and each of the separated images is subjected to different image processing, and the images subjected to different image processing are combined. Thus, a composite image is created, and the shape of the measurement target is measured based on the created composite image.

Description

  The present invention relates to a shape measuring method and apparatus for measuring a three-dimensional shape of a measurement object optically in a non-contact manner.

  Various methods have been proposed as a method for optically measuring the three-dimensional shape of a measurement object in a non-contact manner.

  In Patent Document 1, light irradiation means for irradiating irradiation light to a three-dimensional shape measurement object, imaging means for imaging the measurement object irradiated with the irradiation light, and the imaging means In a three-dimensional shape measuring apparatus comprising an image processing means for calculating coordinates of the measurement object based on a light projection image, the light irradiation means includes a plurality of light irradiation means, and each of the light irradiation means is the measurement object. The three-dimensional measuring device is characterized in that the irradiation light is irradiated from different directions and the irradiation light irradiated from the respective light irradiation means is set to different wavelengths.

  In Patent Document 2, a constant luminance light and a density gradient pattern light are projected onto a measurement object that moves relatively continuously from a direction inclined by a predetermined angle with respect to a vertical direction by using different projectors. An image of the measurement object in each of a state in which the constant luminance light is projected, a state in which the density gradient pattern light is projected, and a state in which the light is not projected is obtained by at least three line sensors arranged in series. A shape measuring device using a line sensor that measures the luminance at the same position by photographing and measures the shape from the calculated luminance ratio at the same position, wherein the projection path of the constant luminance light and the density gradient pattern light or Wavelength limiting means for allowing only light in a part of the wavelength range to enter each line sensor in the reflection path by the measurement object is provided, and the optical axis of the projector is set to be perpendicular to the vertical direction Inclined at the same angle in the same direction to equalize the angle formed with the line of sight of the corresponding line sensor, linearize the relationship of output to the input light quantity between each line sensor, and set the linear gain coefficient equal A shape measuring device using a line sensor is described.

JP-A-11-63554 JP 2005-140537 A

  Patent Document 1 describes a shape measuring apparatus using illumination with different irradiation directions and wavelengths, but all use a shape measuring method generally called a light cutting method, and the shape of an object. There are weaknesses due to surface condition. In addition, since the optical cutting method measures only the portion irradiated with the laser line, it is not suitable for measuring large shapes, long shapes, and a wide range.

  In Patent Document 2, images under a plurality of different illuminations are acquired simultaneously by changing the wavelength of illumination. However, it is premised that the shape and reflectance of an object can be estimated in advance, and versatility is low.

  The present invention solves the above-mentioned problems of the prior art, and provides a versatile shape measuring method and apparatus capable of measuring a large shape, a long length, and a wide range regardless of the shape and surface state of an object. Is.

  In order to solve the above problems, in the present invention, in a method for measuring the shape of a measurement object, the measurement object is irradiated with a plurality of illumination lights emitted from a plurality of light sources, and the measurement object is irradiated with a plurality of illumination lights. The image area is imaged with a color camera, the color image to be inspected obtained with the color camera is separated into a plurality of images according to the wavelength, and each of the separated images is subjected to different image processing, A composite image is created by combining images subjected to different image processing, and the shape of the measurement object is measured based on the created composite image.

  In order to solve the above problem, in the present invention, in the method for measuring the shape of the measurement target, the measurement target is irradiated with a plurality of illumination lights having different wavelengths emitted from a plurality of light sources, and the measurement target wavelength is measured. The area irradiated with multiple different illumination lights was imaged with a color camera, and the color image of the measurement object obtained by imaging with the color camera was separated into multiple images according to different wavelengths, and separated according to the wavelengths Apply different image processing to multiple images, create a composite image by combining the images with different image processing, and compare the created composite image with the reference image to detect the measurement target defect in the composite image In addition, information on the composite image and the detected defect is output.

  Furthermore, in order to solve the above-described problems, in the present invention, an apparatus for measuring the shape of a measurement target includes a light irradiation unit including a plurality of light sources that irradiates a measurement target with a plurality of illumination lights, and light irradiation of the measurement target. An image acquisition unit that separates and outputs a color image to be inspected obtained by imaging a region irradiated with a plurality of illumination light by a unit, and outputs the separated color image from the image acquisition unit. Created by an image processing unit that performs different image processing on multiple images, a composite image creation unit that creates a composite image by combining images that have undergone different image processing by the image processing unit, and a composite image creation unit And a shape measuring unit that measures the shape of the measurement target based on the synthesized image, and an output unit that outputs the result of measuring the shape of the measurement target by the shape measuring unit.

  According to the present invention, it is possible to perform shape measurement having versatility that enables measurement of a large shape, a long length, and a wide range regardless of the shape and surface state of the target.

It is a block diagram which shows the schematic structure of the shape measuring apparatus which concerns on Example 1 of this invention. It is a flowchart which shows the flow of a measurement process of the shape measuring apparatus which concerns on Example 1 of this invention. It is a graph which shows the transmittance | permeability characteristic of the special transmission filter which concerns on Example 1 of this invention. It is a graph which shows the characteristic of the spectrum of the illumination part which concerns on Example 1 of this invention. It is a schematic diagram of the acquired image by the color camera which concerns on Example 1 of this invention. It is a schematic diagram of the image by the wavelength of R line segment among the acquisition images by the color camera which concerns on Example 1 of this invention. It is a schematic diagram of the image by the wavelength of G line segment among the acquisition images by the color camera which concerns on Example 1 of this invention. It is a schematic diagram of the image by the wavelength of B line segment among the images acquired by the color camera which concerns on Example 1 of this invention. It is a schematic diagram of an image obtained as a result of shape restoration from a G image according to Example 1 of the present invention. It is a perspective view which shows the schematic structure of the position and orientation measurement part which concerns on Example 1 of this invention. It is a flowchart which shows the flow of a process of the process part which concerns on Example 1 of this invention. It is a schematic diagram of the several G image which concerns on Example 1 of this invention. It is a schematic diagram of an image obtained as a result of shape restoration from a plurality of G images according to the first embodiment of the present invention. It is a schematic diagram of a plurality of R images according to Embodiment 1 of the present invention. It is a schematic diagram of the feature-value image obtained from the some R image which concerns on Example 1 of this invention. It is a schematic diagram which shows the shape restoration result obtained from the feature-value image of several R image which concerns on Example 1 of this invention. It is a schematic diagram which shows the result of having integrated the shape restoration result of the G and R image which concerns on Example 1 of this invention. It is a block diagram which shows the schematic structure of the shape measurement part which concerns on Example 2 of this invention. It is a block diagram which shows the schematic structure of the ring beam generation part of the shape measurement part which concerns on Example 2 of this invention. It is a graph which shows the transmittance | permeability characteristic of the special transmission filter which concerns on Example 2 of this invention. It is a graph which shows the characteristic of the spectrum of the illumination part which concerns on Example 2 of this invention. It is a block diagram which shows the schematic structure of the shape measurement part which concerns on Example 3 of this invention. It is a perspective view which shows the schematic structure of the shape measurement part which concerns on Example 4 of this invention. It is a perspective view which shows the schematic structure of the shape measurement part which concerns on Example 4 of this invention. It is a block diagram which shows the schematic structure of the shape measurement part which concerns on Example 5 of this invention. It is a perspective view which shows the schematic structure of the shape measurement part which concerns on Example 6 of this invention. It is a perspective view which shows the schematic structure of the shape measurement part which concerns on Example 6 of this invention.

The present invention separates the acquired color image into a plurality of images while moving the imaging means along the measurement object, and synthesizes each separated image after processing the image, thereby depending on the shape and surface state of the object. In particular, the present invention relates to a shape measuring method and apparatus that enable shape measurement having versatility that enables measurement of large shapes, long shapes, and a wide range.
Embodiments of the present invention will be described below with reference to the drawings.

  In this embodiment, it is possible to acquire high-precision and high-density shape information by applying different shape measurement methods for each of RGB acquired by one color camera. A first embodiment of the present invention will be described with reference to FIGS.

  FIG. 1 shows the configuration of a shape measuring apparatus 1000 according to this embodiment. As the measurement object 1, an internal shape of a train vehicle structure is assumed. The shape measuring apparatus 1000 according to this embodiment includes a measuring head 10 that measures the shape of the measuring object 1, a tracker unit 400 that measures the position and orientation of the measuring object 1, and a processing unit 500 that processes an output signal from the measuring head. A control unit 600 for controlling the whole is provided.

  The measuring head 10 that measures the shape of the measuring object 1 includes a shape measuring unit 100, a position / orientation measuring unit 200, and a conveying unit 300. The shape measuring unit 100 includes a laser beam source 111 and a cone mirror 112 to form a ring beam, a ring beam generating unit 110, an imaging lens 121, a special transmission filter 122, and an image detecting unit including a color camera 123. 120, configured to include an illumination unit 130 that uniformly illuminates the measurement target 1.

  A color camera 123 captures an image of a portion where the ring beam 115 generated from the ring beam generator 110 is irradiated on the measuring object 1. Further, the position and orientation of the measurement head 10 at that time is measured by the position and orientation measurement unit 200. The measuring head 10 performs imaging by the color camera 123 and position / orientation measurement by the position / orientation measurement unit 200 while moving by the transport unit 300. For example, the conveyance of the measurement head 10 by the conveyance unit 300 is configured to proceed on the wire 301 stretched in the measurement target 1.

  The position and orientation of the measuring head 10 being transported (moving) by the transport unit 300 is measured by the position / orientation measuring unit 200 in which the measuring head 10 is provided with a plurality of lasers irradiated from the tracker unit 400. This is done by detecting at. The controller 600 controls the position of the laser irradiated from the tracker unit 400 to the measuring head 10 so that the tracker unit 400 accurately tracks the position and orientation of the measuring head 10 according to the position of the measuring head 10.

  The processing unit 500 processes the output from the color camera 123 of the shape measuring unit 100 to generate a two-dimensional image, receives the output from the position / orientation measuring unit 200, and the position and orientation of the measuring head 10. The position / orientation measuring unit 502 for measuring the image and the image generated by the image generating unit 501 are corrected using the position / orientation information of the measuring head 10 measured by the position / orientation measuring unit 502, but the correction processing unit 503 and the correction process are corrected. The image data corrected by the unit 503 is processed to form a three-dimensional image of the measurement target 1. A three-dimensional image forming unit 504 that extracts a shape defect of the measurement target 1 from the three-dimensional image formed by the three-dimensional image formation unit 504. The defect extraction unit 505 includes an output unit 506 that displays the three-dimensional image formed by the three-dimensional image formation unit 504 and the defect information extracted by the defect extraction unit 504 on a screen.

  The control unit 600 controls the measurement head 10, the tracker unit 400, and the processing unit 500 in order to execute the three-dimensional shape measurement and defect detection of the measurement target 1.

  A measurement flow using the shape measuring apparatus 1000 is shown in FIG. First, shape conditions such as the moving speed, acceleration / deceleration, image acquisition rate, z-coordinate of the measurement end position, and the like are set in the control unit 600 from an input device (not shown) (S100). The measurement head 10 is started to move by controlling the unit 300, and measurement is started by the shape measuring unit 100 and the position / orientation measuring unit 200 (S101).

  While the measuring head 10 is moving, the color camera 123 acquires an image of the measuring object 1 (S102), and at the same time, the position / orientation measuring unit 502 of the processing unit 500 receives the output from the position / orientation measuring unit 200 and the measuring head. 10 positions and orientations are measured (S103). The control unit 600 tracks so that the position / orientation measurement laser emitted from the tracker unit 400 does not deviate from the position / orientation measurement unit 200 of the measurement head 10 (S104).

  The position / orientation measurement unit 502 of the processing unit 500 calculates the coordinates and inclination of the measurement head 10 from the position / orientation measurement result obtained by processing the signal detected by the position measurement unit 200 for the position / orientation measurement laser and the tracking result. (S105). In response to the output from the position / orientation measurement unit 200 irradiated with the position / orientation measurement laser, the position / orientation measurement unit 502 of the processing unit 500 constantly measures the position of the moving measurement head 10 on the z-axis. It is monitored whether or not the position exceeds the preset stop position of the measuring head 10 (S106), and S102 to S105 are repeated until the stop position is reached, and if the position of the measuring head 10 exceeds the stop position. The control unit 600 controls the transport unit 300 to stop the measuring head 10 (S107).

Next, the image data corrected by the correction processing unit 503 is processed by the three-dimensional image forming unit 504 from the images acquired in S102 and S105 and the position and orientation information of the measurement head, and the three-dimensional shape of the measurement target 1 is calculated. (S108). Here, the image captured by the color camera 123 and the measurement by the position / orientation measurement unit 200 are performed in synchronization. Although details will be described later, the correction processing unit 503 calculates a point cloud representing the shape of the measurement target 1 from a plurality of images captured by the color camera 123 and generated by the image generation unit 501, and the coordinates thereof are calculated. The position / orientation measurement unit 502 corrects the position / orientation measurement result with higher accuracy.
Details of each part will be described below.

(Shape measurement unit)
The feature of the shape measuring unit 100 in this embodiment is that a special transmission filter 122 is used between the lens 121 and the color camera 123. FIG. 3 shows the transmittance characteristic 122 a of the special transmission filter 122. 4A shows transmittance characteristics 123a to 123c of RGB (Green, Red, Blue) of the color camera 123 when only the lens 121 is attached and the special transmission filter 122 is not used. 3A and 4A, the horizontal axis indicates the wavelength, and the vertical axis indicates the transmittance. 3 shows the transmittance characteristics 123a to 123c of RGB of the color camera 123 when the special transmission filter 122 as shown in FIG. 4A is not used, and the transmission characteristics 122a of the special transmission filter 122. Overlaid.

  As shown in FIG. 3, the transmittance 122 a of the special transmission filter 122 has the following transmittance as compared to the RGB transmittance characteristics 123 a to 123 c of the color camera 123 when the special transmission filter 122 is not used. Give a characteristic. That is, the laser emitted from the laser light source 111 used in the ring beam generation unit 110 for forming the laser line 115a has the G wavelength band 122b, but the transmittance 122a of the special transmission filter 122 is in the G wavelength region 123b. Then, the transmittance is high with respect to the wavelength region 122b of the laser light source 111, the other wavelengths of the G wavelength region 123b are not passed, and the R wavelength region 123a and the B wavelength region 123c are transmitted again. . Further, as shown in FIG. 4, the spectrum 130a of the laser emitted from the illumination unit 130 does not include the wavelength in the G band for acquiring the laser line 115a, and has the wavelengths in the B and R bands. .

  Images acquired using the respective optical elements having the transmittance characteristics as described above are schematically shown in FIGS. 5A to 5D. As shown in FIG. 5A, in the acquired image 551 (color image), there is a laser line 115a generated when the ring beam 115 hits the measurement target 1, and the special transmission filter 122 covers a part of the B and R wavelength regions. Since the light is transmitted, not only the laser line 115a but also the area illuminated by the surrounding illumination unit 130 is imaged.

  Images obtained by decomposing the color image shown in FIG. 5A into RGB are shown in FIGS. 5B to 5D. As shown in FIG. 4B, the laser emitted from the illuminating unit 130 has a characteristic that it does not include the wavelength of the wavelength region component of G. Therefore, the laser shown in FIG. In an image formed using only the detection signal in the wavelength region (hereinafter referred to as G image), only the laser line 115a is captured. On the other hand, an image formed using only the detection signal of the B wavelength region 123c shown in FIG. 5B (hereinafter referred to as a B image) and the detection signal of the R wavelength region 123a shown in FIG. In the image (hereinafter referred to as “R image”), the laser line 115a is not displayed, and an image of the measurement object 1 in the visual field of the color camera 123 is captured.

  The details will be described later (processing unit), but from the G image shown in FIG. 5C, the cross-sectional shape 115b on the laser line 115a of the measuring object 1 is shown as shown in FIG. Can be calculated. On the other hand, the R image shown in FIG. 5B and the B image shown in FIG. 5D use the motion stereo method to calculate the shape of the measurement object 1 using a plurality of images acquired while moving the measurement head 10. Can be used.

(Position and orientation measurement unit)
FIG. 7 shows a configuration of the position / orientation measurement unit 200 and the tracker unit 400. The position / orientation measurement unit 200 includes a beam splitter 210 and two-dimensional detection elements 230a and 230b. The position / orientation measurement unit 200 measures the three degrees of freedom (x, y, z) and three degrees of freedom (θx, θy, θz) of the shape measurement unit. Measure 6 degrees of freedom. The tracker unit 400 includes a laser beam oscillation unit 410, an xy stage 430, and a reflected light detection unit 440, and position and orientation measurement lasers 410 a and 410 b and a distance measurement laser 420 are emitted from the laser beam oscillation unit 410.

  The position / orientation measurement lasers 410a and 410b output from the laser beam oscillation unit 410 are parallel beams, and enter the position / orientation measurement unit 200 and the beam splitter 210 causes the attitude measurement lasers 410a and 410b to be transmitted light. The distance measuring laser 420 is branched as reflected light. The attitude measurement lasers 410a and 410b that have passed through the beam splitter 210 are received by a two-dimensional detection element 230a such as a CCD or CMOS. On the other hand, the distance measuring laser 420 reflected by the beam splitter 210 is condensed on the two-dimensional detection element 230 b by the lens 204.

  The two-dimensional detection elements 230a and 230b serve to calculate the coordinates of the center of the received laser. On the two-dimensional detection element 230a, posture measurement lasers 410a and 410b are incident on different positions, and an image 231a having point images 410p and 410q corresponding to the posture measurement lasers 410a and 410b is obtained. Since the posture measuring lasers 410a and 410b are propagating in parallel, a straight line 232a connecting the center positions of the two point images 410p and 410q on the image 231a and a reference line 232b when the tracker unit 400 is not tilted. Is the angle, ie, the inclination is θz.

  Here, the respective centers of the point images 410p and 410q can be obtained by fitting a Gaussian function to the obtained luminance distribution or calculating the center of gravity of the point image. Further, from the deviations dx and dy from the reference point 233 of the point image 410r corresponding to the distance measuring laser 420 in the image 231b obtained from the two-dimensional detection element 230b.

Are used to calculate rotation angles θx and θy with the respective axes of x and y as rotation axes. Here, f is the distance between the lens 204 and the two-dimensional detection element 230b.

  As described above, the three-dimensional inclinations (θx, θy, θz) of the position / orientation measurement unit 200 can be calculated by using the attitude measurement lasers 410a and 410b, which are two parallel beams.

  Further, since the laser goes straight, a wire for moving the measuring head 10 using the position information of the point image 410p or the point image 410q on the image 231a and the information of the three-dimensional inclination (θx, θy, θz). The amount of translation of the position / orientation measurement unit 200 from the reference value in the x-axis and y-axis directions can also be calculated by the deflection and vibration of 301. The remaining distance in the z-axis direction is detected by the detector 440 of the Toccara section 400 by detecting the distance measuring laser 420 reflected by the surface of the two-dimensional detector 230b, reflected by the beam splitter 210 and incident on the tracker section 400 again. Calculation is performed using the obtained data, and all the three degrees of freedom (x, y, z) of the position are obtained.

  Here, the distance measuring laser 420 measures using the surface reflection of the two-dimensional detector 230b. However, a separate reflecting plate is prepared outside the optical system of the position / orientation measuring unit 200, and the distance from the reflecting plate is measured. May be measured.

(Tracker part)
As described above, the tracker unit 400 includes the laser beam oscillation unit 410, the xy stage 430, and the reflected light detection unit 440, and the position and orientation measurement used for the position and orientation measurement by the position and orientation measurement unit 200 from the laser beam oscillation unit 410. Lasers 410a and 410b and distance measuring laser 420 are emitted.

  Here, when the measurement head 10 is largely displaced in the xy plane while moving along the wire 301, the position / orientation measurement lasers 410a and 410b output from the laser beam oscillation unit 410 toward the position / orientation measurement unit 200 are detected. There is a possibility that the two-dimensional detection elements 230a and 230b of the position / orientation measurement unit 200 inside the measurement head 10 may come off.

  Therefore, while constantly monitoring the position and orientation of the position and orientation measurement unit 200, the position and orientation measurement lasers 410a and 410b emitted from the laser beam oscillation unit 410 do not come off from the two-dimensional detection elements 230a and 230b of the position and orientation measurement unit 200. The xy stage 430 mounted on the laser beam oscillation unit 410 in the tracker unit 400 is controlled to follow the movement of the measurement head 10.

  For example, when the point image position 410p deviates from a region (not shown) set in the two-dimensional detection element 230a, feedback processing is applied to the xy stage 430 so as to return to the setting region. The movement amount of the xy stage 430 is added to the position coordinates obtained from the output from the position / orientation measurement unit 200 to obtain the final position coordinates.

(Processing part)
In the processing unit 500, the position and orientation measurement lasers 410a and 410b, the distance measurement laser 420 are emitted, the position and orientation measurement laser positions are controlled, and the shape is calculated from the measurement results. The position / orientation measurement lasers 410a and 410b and the distance measurement laser 420 have been described in the description of the position / orientation measurement unit 200 described above. The control of the position and orientation measurement laser positions has been described with reference to FIG. Hereinafter, a method of calculating the shape of the measuring object 1 from the shape measurement result measured by the shape measuring unit 100 will be described with reference to the flow of FIG. 8 and FIGS. 9A to 9C, FIGS. 10A, 10B, and 11.

  First, the image of the measuring object 1 acquired by the color camera 123 of the shape measuring unit 100 is decomposed into RGB components (S200). Next, among the three types of images obtained by decomposing into RGB components, the laser formed on the measuring object 1 by irradiating the G component ring beam to the wavelength region generated by the ring beam generator 110. For the G image 901 as shown in FIG. 9A in which the line 115a is captured, the cross-sectional shape is calculated using the light cutting method (S201), and the coordinates of the cross-sectional shape calculated in S201 are input to the position / orientation measuring unit 200. Correction is performed using the measurement result measured in step S202. By performing these operations for each of the acquired images while moving the measuring head 10 along the wire 301, the shape data 902 of the cross section of the measuring object 1 as shown in FIG. 9B is acquired.

  Next, in order to calculate the shape of the R image and the B image, the feature points in the image 1001 as shown in FIG. 10A (showing the case of the R image) are calculated, and the features as shown in FIG. 10B are obtained. An image 1002 is obtained (S203). As a method of obtaining the feature image 1002, for example, edge extraction processing is performed. A schematic diagram 1003 is shown in FIG. 10C.

  A shape is calculated using a motion stereo method using a plurality of images acquired while moving the measuring head 10 along the wire 301. The plurality of images 1001 acquired while the measurement head 10 as shown in FIG. 10A is moving has different measurement positions, and therefore the parallax is different when the same part is captured in different images. As shown in FIG. 10B using the position / orientation measurement result 801 calculated by the position / orientation measuring unit 502 for the position / orientation information of the measuring head 10 obtained by measuring the parallax with the position / orientation measuring unit 200 and the tracker unit 400. Corresponding points between the feature amounts between the images are calculated from the feature amount image 1002 (S204), and a shape 1003 as shown in FIG. 10C is calculated based on the stereo method (S205). Finally, as shown in FIG. 11, the shape image 1100 is obtained by integrating the shapes calculated from the G image, the R image, and the B image (S206).

  Next, the shape image 1100 integrated and formed in S206 is compared with the design data of the measurement object 1 stored in the CAD 802 to detect a difference (S207), and the difference between the shape image 1100 and the design data is detected in advance. A location larger than the set reference is extracted as a defect (S208), and the positional information of the extracted defect 1102 is displayed on the display 506 in a superimposed manner with the shape image 1100 formed by integrating in S206 (S209).

  The stereo method has a drawback that when there is no feature on the surface of the measurement object 1, there is no feature point in the image, so that the corresponding point cannot be detected and the shape cannot be calculated. On the other hand, the optical cutting method can calculate the shape from the laser line even if the surface has no feature. By using a plurality of methods in this way, it is possible to compensate for the drawbacks of the measurement method and realize more accurate shape measurement. In addition, the light cutting method measures only the portion irradiated with the laser line. In the stereo method, if there is a characteristic point in the image, the shape of a wider region can be calculated at a time. In the present embodiment, the simultaneous measurement of the plurality of measurement methods is realized by using a special transmission filter and a color camera.

  According to the present embodiment, a plurality of images based on a plurality of measurement prescriptions can be obtained at the same time, so that no positional deviation occurs between the images obtained by each measurement technique, and each image is superimposed without correcting the position. By combining them, highly accurate shape measurement can be realized in a relatively short time.

(Transport section)
As a method of transporting the measuring head 10 including the shape measuring unit 100, the ring beam generating unit 110, the illumination unit 130, the position / orientation measuring unit 200, and the transporting unit 300, FIG. The technique of this embodiment has a feature that the apparatus can be downsized because a plurality of techniques can be realized by providing one color camera 123 in the shape measuring unit 100. Therefore, in place of the conveyance by the conveyance unit 300, various conveyance methods such as hand-held, traveling by wheels, and mounting on a UAV (Unmanned Aerial Vehicle) can be used.

  A second embodiment of the present invention will be described with reference to FIGS.

  The difference from the first embodiment is that there are two types of ring beams for light cutting with different wavelengths and irradiation directions, and accordingly, the transmission characteristics of the special transmission filter 1222 and the spectrum of the illumination 1230 are different. Other configurations are the same as the configuration of the shape measuring apparatus 1000 according to the first embodiment described with reference to FIG.

  FIG. 12A shows an outline of the shape measuring unit 1200 according to this embodiment. In the present embodiment, the ring beam generator 1210 irradiates the measurement object 1 with the ring beam 115 described in the first embodiment, and also irradiates the measurement object 1 with the ring beam 116 inclined with respect to the ring beam 115. . The wavelength of the ring beam 115 is near the center of the G band, and the wavelength of the ring beam 116 is near the center of the R band.

  FIG. 12B shows a schematic configuration of the ring beam generator 1210. The ring beam generator 1210 includes a combination of a laser light source 1211 that emits a laser having a wavelength in the G band and a cone mirror 1212 that forms a ring-shaped beam, and a laser light source 1213 that emits a laser having a wavelength in the R band. And a cone mirror 1214 that forms a ring-shaped beam.

  The transmission characteristics of the special transmission filter 1222 are shown in FIG. The special transmission filter 1222 in this embodiment has a wavelength in the G band formed by a combination of the laser light source 1211 and the cone mirror 1212 in addition to the transmission characteristic 1222a that transmits light in the B band and shorter wavelengths. Reflected light from the measuring object 1 by the ring beam 116 having an R band wavelength formed by a combination of the transmission characteristic 1223b that transmits the reflected light from the measuring object 1 by the ring beam 115 and the laser light source 1213 and the cone mirror 1214. Transmission characteristic 1223a.

  FIG. 14A shows transmittance characteristics 1223a to 1223c with respect to each wavelength region of RGB of the color camera 123 when only the lens 121 is attached and the special transmission filter 1222 is not used.

  FIG. 13 shows the transmittance characteristics 1223 to 1223c of RGB of the color camera 123 when the special transmission filter 1222 as shown in FIG. 14A is not used, the transmittance characteristics 1222a of the special transmission filter 1222, 1223a and 1223b are displayed in an overlapping manner.

  Further, FIG. 14B shows a spectrum 1230a of illumination light emitted from the illumination unit 1230 to the measurement object 1. The spectrum 1230a matches the B band 1223c of the color camera 123, and an image can be acquired using light having a wavelength in the B band.

  By irradiating two-wave ring beams in different directions, one ring beam can detect the beam irradiation position, or the area that becomes a blind spot due to the positional relationship between the beam irradiation position and the camera, and the other ring beam can detect it. The detection range is expanded. Furthermore, by performing stereo measurement using an image acquired with light of a wavelength in the B band, it is possible to perform measurement with fewer blind spots during measurement with one camera.

A third embodiment of the present invention will be described with reference to FIG.
The difference from the first embodiment is that a shape measurement method using random dot illumination is simultaneously performed in addition to the light cutting method using ring beam illumination and the stereo method using images. FIG. 15 shows a shape measuring unit 1500. For each band RGB of the color camera 123, random dot illumination is performed in the R band, a light cutting method is performed in the G band, and a stereo method is performed in the B band. The random dot illumination unit 1540 irradiates the measurement target 1 with illumination light having an R band wavelength. The transmission characteristics of the special transmission filter 1522 have the same transmittance characteristics as the special transmission filter 1222 described with reference to FIG. Further, the spectrum of the illumination unit 1530 is the same as the characteristic shown in FIG.

  In the present embodiment, three different shape measurement methods can be independently implemented for each of the RGB bands of the color camera 123. Random dot illumination by the random dot illumination unit 1540 can be used even when the surface of the measurement object 1 has few features. In addition, the ring beam generated by the ring beam generation unit 1510 in the light cutting method measures one section with high accuracy by one measurement, but random dot illumination illuminates a wide range, so the measurement range is wide. There are features. By performing a combination of a plurality of these measurement methods at the same time, measurement with a small blind spot at the time of measurement can be performed with one camera.

  Also, pattern illumination can be used instead of random dot illumination. Even in this case, high-precision and wide-range measurement is possible by compensating for the disadvantages of each shape measurement method.

A fourth embodiment of the present invention will be described with reference to FIG.
The shape measuring unit 1600 is placed on the carriage 50 and moved while measuring the surrounding shape. The configurations of the ring beam generation unit 110, the color camera 123, and the illumination unit 130 included in the shape measurement unit 1600 are the same as those described in the first embodiment. By using SLAM (SIMULTA NEOUS Localization and Mapping), which is a technology that measures surrounding shapes in an unknown environment, constructs a map, and performs self-position estimation, it can be applied to a position identification system.

  The accuracy of map construction and self-position estimation in SLAM largely depends on the shape measurement accuracy itself. The shape measuring unit 100 equipped with the multiple methods of the present invention realizes high accuracy of SLAM by simultaneously measuring walls and obstacles by light cutting and measuring surrounding feature patterns by image / stereo measurement. To do. In addition, as shown in FIG. 17, the shape measuring unit 1700 can be installed upward. The shape measuring unit 100 is installed so that the field of view of the camera faces in the direction with many feature points according to the environment such as the floor and the ceiling.

  A fifth embodiment of the present invention will be described with reference to FIG. In the present embodiment, an example of a shape measuring apparatus capable of measuring a shape even when the long axis of the measurement target is inclined obliquely with respect to the ground will be described.

  FIG. 18 shows the apparatus configuration. The shape measurement of the escalator 2 will be described as an example. The escalator 2 is fixed to the pedestal 20. The shape measuring device includes a shape measuring unit 100, a position / orientation measuring unit 200, a mounting unit 314, a mounting wire 310 connected to the mounting unit 314, a moving wire 311, a tracker unit 400, and a processing unit 500. It has. The tilt table 431 serves to change the direction of the tracker unit 400 mounted on the XY stage 430. It is only necessary to measure the relative position and orientation of the shape measurement unit, and the tilt table 431 does not need to measure the tilt angle, and the position and orientation measurement lasers 410a and 410b in FIG. What is necessary is just to adjust an angle so that it may inject substantially perpendicularly with respect to element 230a, 230b.

  Further, the mounting position of the adapter 330 can be changed to make the inclination of the shape measuring unit 100 and the mounting unit 314 equal, and the configuration can be made without using the tilting table 430. The mounting portion 314 plays a role of mounting the measuring head 10 on the mounting wire 310 fixed to the support column 313. The motor 321 is disposed in the winding unit 320 and serves to move the shape measuring unit using the moving wire 311. The measurement method is the same as the method described in the first embodiment.

  According to the present embodiment, the shape can be measured even when the measuring object is inclined obliquely with respect to the direction of gravity, such as an escalator.

  As a result, in the present invention, for example, a large object to be measured can be measured with high accuracy regardless of the accuracy of the moving means by a method with less man-hours for installation and measurement. For example, it is possible to provide a measurement shape measurement system that can measure the shape of a measurement object exceeding 10 m with an accuracy of, for example, 1 mm or less.

  A sixth embodiment of the present invention will be described with reference to FIG. In the present embodiment, an example of a shape measurement system that can perform shape measurement even when the long axis of a measurement target is perpendicular to the ground will be described by taking the shape measurement of an elevator rail as an example.

  The elevator 3 includes a rail 31, a lifting unit 801, an elevator control unit 802, and a car for a riding portion. FIG. 19 shows an example of shape measurement of the rail 31 in which a shape measuring device 800 is mounted instead of a cage. The position / orientation measurement sensor unit 200 is attached to the top plate 803, and the position and orientation of the shape measuring unit 100 are measured. The measuring head 10 is lifted by the hanging wire 317. The shape measuring head 10 is moved up and down by winding the suspension wire 317 at the winding unit 801 and adjusting the length.

  FIG. 20 is a configuration example of a shape measurement system 900 that performs shape measurement while moving on the guide rail 901 without using the hanging wire 317. A wheel 902 is attached to the shape measuring head 10 and the shape is measured while moving on the rail with its own weight. Moreover, it is good also as a structure which drives the wheel 901 using drive mechanisms, such as a motor.

  The embodiments described so far are merely examples of implementation in carrying out the present invention, and the technical scope of the present invention is not limitedly interpreted by these. That is, the present invention can be implemented in various forms without departing from the technical idea or the main features thereof.

  DESCRIPTION OF SYMBOLS 1 ... Measuring object 2 ... Escalator 3 ... Elevator 10 ... Measuring head 20 ... Base 31 ... Rail 50 ... Carriage 100 ... Shape measuring part 110 ... Ring beam Generating unit 111... Laser light source 112... Cone mirror 115 and 116... Ring beam 115 a... Laser line 120. ... Color camera 130 ... Illumination unit 140 ... Random dot illumination unit 200 ... Position and orientation measurement unit 230a, 230b ... Two-dimensional detection element 232 ... Reference line 233 ... Reference point 300 ... Conveying part 301 ... Wire 310 ... Mounting wire 31 ... Moving wire 313 ... Post 314 ... Mounting part 317 ... Hanging wire 320 ... Winding part 321 ... Motor 330 ... Adapter 400 ... Tracker part 410a, 410b ... Position and orientation measurement laser 420 ... Distance measurement laser 430 ... Tilting table 500 ... Processing unit 800 ... Shape measuring device 801 ... Lifting unit 802 ... Elevator control unit.

In order to solve the above problems, in the present invention, in a method for measuring the shape of a measurement object, the measurement object is irradiated with a plurality of illumination lights emitted from a plurality of light sources, and the measurement object is irradiated with a plurality of illumination lights. The color image of the measurement object obtained by imaging with the color camera and the image captured with the color camera is separated into a plurality of images according to the wavelength, and each of the separated images is subjected to different image processing, A composite image is created by combining images subjected to different image processing, and the shape of the measurement object is measured based on the created composite image.

Furthermore, in order to solve the above-described problems, in the present invention, an apparatus for measuring the shape of a measurement target includes a light irradiation unit including a plurality of light sources that irradiates a measurement target with a plurality of illumination lights, and light irradiation of the measurement target. An image acquisition unit that separates and outputs a color image of a measurement target acquired by imaging a region irradiated with a plurality of illumination lights into a plurality of images according to wavelength, and is output separately from the image acquisition unit Created by an image processing unit that performs different image processing on multiple images, a composite image creation unit that creates a composite image by combining images that have undergone different image processing by the image processing unit, and a composite image creation unit And a shape measuring unit that measures the shape of the measurement target based on the synthesized image, and an output unit that outputs the result of measuring the shape of the measurement target by the shape measuring unit.

Claims (15)

A method for measuring the shape of a measurement object,
Irradiate multiple illumination lights emitted from multiple light sources onto the measurement target,
The area irradiated with the plurality of illumination lights of the measurement object is imaged with a color camera,
The color image of the inspection object obtained by imaging with the color camera is separated into a plurality of images according to the wavelength,
Each of the separated images is subjected to different image processing,
A composite image is created by combining the images subjected to the different image processing,
A shape measuring method, wherein the shape of the measurement target is measured based on the created composite image.   2. The shape measurement method according to claim 1, wherein the area of the measurement object irradiated with the plurality of illumination lights is imaged with a color camera, and the color camera is moved along the measurement object. A shape measuring method comprising: imaging a region irradiated with the plurality of illumination lights to be measured with a color camera at a position.   2. The shape measurement method according to claim 1, wherein the first illumination light emitted from the first light source to a relatively wide area of the measurement target is used to irradiate the irradiation target with the plurality of illumination lights. The second illumination light having a wavelength different from that of the first illumination light emitted from the second light source is irradiated on the region irradiated with the first illumination light emitted from the first light source to be measured. A shape measurement method characterized by irradiating illumination light on a relatively narrow region of the measurement target.   The shape measurement method according to claim 1, wherein the area to which the plurality of illumination lights to be measured is irradiated is imaged with a color camera via an optical filter that blocks light in a specific wavelength range. A shape measuring method characterized by capturing an image with a color camera.   The shape measurement method according to claim 1, wherein different image processing is performed on each of the plurality of separated images, and a light cutting method, a stereo method, and a pattern are performed on each of the plurality of separated images. A shape measuring method characterized by performing different image processing of any one of a projection method and a random dot method. A method for measuring the shape of a measurement object,
Irradiate multiple illumination lights with different wavelengths emitted from multiple light sources to the measurement target,
Image a region irradiated with a plurality of illumination lights having different wavelengths of the measurement target with a color camera,
Separating the color image of the measurement object obtained by imaging with the color camera into a plurality of images according to the different wavelengths;
Each of the plurality of images separated according to the wavelength is subjected to different image processing,
A composite image is created by combining the images subjected to the different image processing,
Detecting the measurement target defect in the composite image by comparing the created composite image with a reference image;
Information on the synthesized image and the detected defect is output. A shape measuring method.   The shape measurement method according to claim 6, wherein the reference image to be compared is a CAD image to be measured.   The shape measurement method according to claim 6, wherein the measurement object is irradiated with a plurality of illumination lights having different wavelengths from the first light source emitted from a first light source in a relatively wide area of the measurement object. What is the first illumination light emitted from the second light source to the region irradiated with the illumination light of the wavelength and irradiated with the illumination light of the first wavelength emitted from the first light source to be measured? A shape measuring method comprising irradiating a second illumination light having a different wavelength in a relatively narrow region of the measurement target.   The shape measurement method according to claim 6, wherein the area to which the plurality of illumination lights of the measurement target is irradiated is imaged by a color camera through an optical filter that blocks light in a specific wavelength range. A shape measuring method characterized by capturing an image with a color camera.   The shape measurement method according to claim 6, wherein different image processing is performed on each of the plurality of separated images, and a light cutting method, a stereo method, and a pattern are performed on each of the plurality of separated images. A shape measuring method characterized by performing different image processing of any one of a projection method and a random dot method. An apparatus for measuring the shape of a measurement object,
A light irradiation unit comprising a plurality of light sources for irradiating a measurement object with a plurality of illumination lights;
An image acquisition unit that separates and outputs a color image of the inspection target obtained by imaging and acquiring a region irradiated with a plurality of illumination lights by the light irradiation unit of the measurement target; and
An image processing unit that performs different image processing on each of the plurality of images output separately from the image acquisition unit;
A composite image creation unit that creates a composite image by combining images subjected to different image processing in the image processing unit;
A shape measuring unit that measures the shape of the measurement target based on the composite image created by the composite image creating unit;
An output unit that outputs a result of measuring the shape of the measurement target by the shape measurement unit.   The shape measurement apparatus according to claim 11, further comprising a transport unit configured to transport the image acquisition unit, and imaging the region irradiated with the plurality of illumination lights to be measured by the image acquisition unit. A shape measuring apparatus that images a region irradiated with a plurality of illumination lights by the light irradiation unit of the measurement target at a plurality of positions while moving the image acquisition unit along the measurement target by a transport unit. .   The shape measuring apparatus according to claim 11, wherein the illumination unit irradiates a first illumination light emitted from a first light source onto a relatively wide region of the measurement target; The second illumination light having a wavelength different from that of the first illumination light emitted from the second light source is applied to the region irradiated with the first illumination light emitted from the first light source to be measured. A shape measuring apparatus comprising: a second light irradiation unit configured to irradiate a relatively narrow region to be measured.   The shape measurement apparatus according to claim 11, wherein the image acquisition unit uses an optical filter that blocks light in a specific wavelength region, and an area of the measurement target irradiated with the plurality of illumination lights. A shape measuring apparatus comprising: a color camera that picks up images.   The shape measuring apparatus according to claim 11, wherein the image processing unit performs different image processing on each of the plurality of separated images, and performs optical cutting on each of the plurality of separated images. A shape measuring device that performs image processing using any one of a method, a stereo method, a pattern projection method, and a random dot method.

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