KR102073711B1 - Method for inspecting thickness of rib mark - Google Patents

Abstract

The present invention provides a rib mark thickness inspection apparatus and method for automatically detecting the formation and thickness of rib marks formed on a cut surface that is an index for determining the result of scribing by scribing a brittle substrate scribed by a scribe device. It aims to do it.
In addition, in order to achieve the above object, the rib mark thickness inspection method according to the present invention, the first step (S100) for acquiring an image of the rib mark formed on the scribe surface of the brittle substrate through the camera and the obtained rib In the image of the mark, a second step (S200) of setting a first region of interest including a boundary line of an upper surface or a lower surface of the brittle substrate, and a line search in the selected first region of interest. A third step (S300) of detecting a first line by advancing a searching direction in an outer direction of the brittle substrate (the opposite direction to the scribe surface), and an inner surface of the brittle substrate based on the detected vertical axis of the first line; A fourth step S400 of resetting the second region of interest toward, and a line search direction in the internal direction of the brittle substrate (the direction of the scribe surface) based on the reset second region of interest. And a second step over the fifth to detect a two-line (S500) and the first line and the sixth step (S600) to measure the width between the second line measuring the thickness of the ribs mark.

Description

Rib mark thickness inspection method {METHOD FOR INSPECTING THICKNESS OF RIB MARK}

The present invention relates to a rib mark thickness inspection apparatus and method, and more particularly to a rib mark thickness inspection apparatus and method for automatically detecting the presence and thickness of rib marks formed on the cut surface.

A scriber with a cutting wheel is used as a tool for cutting various brittle substrates including a glass substrate into a required size. The scriber travels while applying a load while the cutting wheel is pressed against the surface of the substrate, thereby causing the rolling wheel to form a scribe line on the surface of the substrate. After such a scribe line is formed, a division process of cutting by applying a bending force to the substrate around the scribe line proceeds.

At this time, rib marks exist in the scribe line (the dividing groove). Generally, a rib mark is formed just below the groove, and a crack perpendicular to the thickness direction of the brittle substrate extends from the tip of the rib mark.

By forming the rib mark in the scribe line in this manner, it becomes possible to divide the brittle substrate with a relatively small force.

Recently, there has been a demand for a method of automatically detecting the presence and the thickness of such rib marks.

Japanese Laid-Open Patent Publication No. 2004-223799 Domestic Publication No. 10-2012-0032412

SUMMARY OF THE INVENTION The present invention has been proposed to solve the above-described demands, and its object is to form a rib mark formed on a cut surface which is an index for determining the result of scribing after breaking a brittle substrate scribed by a scribe device. And a rib mark thickness inspection apparatus and method for automatically detecting a thickness.

In order to achieve the above object, the rib mark thickness inspection apparatus according to the present invention includes a stage moving along a guide by a driving unit, and a pair of brittle substrates positioned at a predetermined interval on the stage. A brittle substrate fixed in a state where the scribe cross section is erected upward by the government unit, the brittle substrate fixing unit, and a camera for photographing the scribe cross section while moving from the circumferential direction to the cross section of the brittle substrate in a circumferential direction. Include.

In addition, the rib mark thickness inspection apparatus according to the present invention includes a stage, a brittle substrate fixing part positioned on the stage, a brittle substrate fixedly positioned in a lying state on the brittle substrate fixing part, and a lying state. And a camera moving along the cross section of the brittle substrate and photographing the scribe cross section.

In addition, in order to achieve the above object, the rib mark thickness inspection method according to the present invention, the first step (S100) for acquiring the image of the rib mark formed on the scribe surface of the brittle substrate through the camera and the obtained rib In the image of the mark, a second step S200 of setting a first region of interest including a boundary line of an upper surface or a lower surface of the brittle substrate and a line search in the selected first region of interest A third step (S300) of detecting a first line by advancing a searching direction in an outer direction of the brittle substrate (the opposite direction of the scribe surface), and an inner surface of the brittle substrate based on the detected vertical axis of the first line; A fourth step S400 of resetting the second region of interest toward, and a line search direction in the internal direction (the direction of the scribe surface) of the brittle substrate based on the reset second region of interest. And a second step over the fifth to detect a two-line (S500) and the first line and the sixth step (S600) to measure the width between the second line measuring the thickness of the ribs mark.

In addition, the rib mark thickness inspection method according to the present invention, in the fourth step (S400), the size of the second region of interest to be reset is located at a predetermined distance from the upper surface or the lower surface of the brittle substrate, The result corresponding to the selection function of the second ROI is calculated.

In addition, in the rib mark thickness inspection method according to the present invention, the selection function is the following equation 1

… 식 1,

… Equation 1

Where depth is the thickness of the brittle substrate 100, Pressure is the pressure at scribe, R is the angle of the scribe wheel used in the scribe, and e is the residual error.

According to the present invention, after breaking up the brittle substrate scribed by the scribing apparatus, there is an effect of automatically detecting the presence and absence of the formation of the rib marks formed on the cut surface serving as an index for the determination of the result of scribing.

1 is a photograph showing a cross section of a brittle substrate having a top surface scribed in the rib mark thickness inspection method according to an embodiment of the present invention.
Figure 2 is a photograph showing the detection result of the rib mark thickness in the rib mark thickness inspection method according to an embodiment of the present invention.
3 is a view showing a rib mark thickness inspection apparatus according to an embodiment of the present invention.
4 is a view showing a rib mark thickness inspection apparatus according to another embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a photograph showing a cross section of a scribed brittle substrate in the rib mark thickness inspection method according to an embodiment of the present invention.

Referring to FIG. 1, it is possible to check a cross section of the brittle substrate 100 on which the upper surface is scribed. In the brittle substrate 100, rib marks 200 are formed in a scribe line (divided groove).

Here, the formation position of the rib mark 200 is created in the cross section which scribed with the scribe wheel. That is, the rib mark 200 is formed inside the brittle substrate 100 from the scribed upper surface.

At this time, the thickness of the rib mark 200 varies depending on the angle of the scribe wheel used for scribing, the pressure of the scribe, and the material of the brittle substrate 100.

The expected thickness of the rib mark 200 is formed to within about 30% of the thickness of the brittle substrate 100.

Next, Figure 2 is a photograph showing the detection result of the rib mark thickness in the rib mark thickness inspection method according to an embodiment of the present invention.

Referring to Figure 2, the rib mark thickness inspection method according to an embodiment of the present invention, is performed in the following manner.

First, in the first step S100, an image of the rib mark 200 formed on the scribe surface of the brittle substrate 100 is acquired through the camera 10. For example, a machine vision camera may be used as the camera 10.

In this case, an apparatus for acquiring an image of the rib mark 200 through the camera 10 will be described with reference to FIGS. 3 and 4.

In the second step S200, the first region of interest 300 including the boundary line of the upper or lower surface of the brittle substrate 100 is set in the acquired image of the rib mark 200.

In the third step S300, in the selected first region of interest 300, the line search direction is advanced in the outer direction of the brittle substrate 100 (the direction opposite to the scribe surface) to the first line 310. ).

That is, in the selected first ROI 300, the line search direction is advanced toward the outside of the brittle substrate 100 to detect the top line of the brittle substrate 100, that is, the first line 310.

Next, in the fourth step S400, the second ROI 400 is reset toward the inner surface of the brittle substrate 100 based on the detected vertical axis (up and down direction) of the first line 310.

Here, the second region of interest 400 may include scribe information (scribing pressure during scribing of the brittle substrate 100, thickness of the brittle substrate 100, angle of the scribe wheel used for scribing, and brittle substrate ( 100) of the material).

In more detail, in the fourth step S400 of the rib mark thickness inspection method according to the present invention, the size of the second region of interest 400 to be reset is determined by a predetermined distance from the upper or lower surface of the brittle substrate 100. At a distant location, the size is calculated as a result corresponding to the selection function of the second region of interest 400. For example, the size calculation of the second region of interest 400 corresponds to a selection function of the second region of interest 400 at a position about 20 μm away from the top or bottom surface of the brittle substrate 100. Can be calculated as

The selection function is as shown in Equation 1 below.

… 식 1

… Equation 1

Here, the thickness is the thickness of the brittle substrate 100, the pressure is the pressure at the scribe, R is the angle of the scribe wheel used for the scribe, and e is the residual error.

As described above, the size of the second ROI 400 that can estimate the penetration position of the rib mark 200 can be calculated from the scribe information.

In a fifth step S500, the line search direction is advanced in the inner direction of the brittle substrate 100 (the direction of the scribe surface) on the basis of the reset second region of interest 400 to detect the second line 410. .

That is, the line search direction is advanced in the inner direction of the brittle substrate 100 to detect the second line 410, that is, the lower line of the rib mark 200.

Finally, in the sixth step S600, the thickness of the rib mark 200 is measured by measuring the width between the first line 310 and the second line 410.

3 is a view showing a rib mark thickness inspection apparatus according to an embodiment of the present invention.

Referring to FIG. 3, a rib mark thickness inspection apparatus according to an exemplary embodiment of the present invention includes a stage 30, a brittle substrate fixing part 20, a brittle substrate 100, and a camera 10. It includes.

Here, the stage 30 serves as a guide unit moving along the guide 50 by the driving unit 40.

The brittle substrate fixing part 20 is paired and is spaced apart from each other at a predetermined interval on the stage 30.

By the brittle substrate fixing part 20, the brittle substrate 100 is fixed in a state in which the scribe cross section faces upward.

At this time, the camera 10 moves from the original direction toward the end surface of the brittle substrate 100 in the near direction (ie, moves up and down) and photographs the scribe cross section.

4 is a view showing a rib mark thickness inspection apparatus according to another embodiment of the present invention.

Referring to FIG. 4, a rib mark thickness inspection apparatus according to another embodiment of the present invention also includes a stage 30, a brittle substrate fixing part 20, a brittle substrate 100, and a camera 10. .

However, the difference from the method described with reference to FIG. 3 is that the brittle substrate 100 is fixed to the brittle substrate fixing part 20 in a lying down state, and that the stage 30 is fixed.

That is, the stage 30 is fixed to the floor.

The brittle substrate fixing part 20 is positioned on the stage 30.

In addition, the brittle substrate 100 is fixedly positioned in a lying down state on the brittle substrate fixing part 20.

In this case, the camera 10 moves along the cross section of the brittle substrate 100 in a state of lying about 90 degrees from the camera 10 shown in FIG. 3, and photographs the scribe cross section.

The above description is merely illustrative of the technical idea of the present invention, and those skilled in the art to which the present invention pertains may make various modifications and changes without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.

10: camera (machine vision camera)
20: brittle substrate fixing part
30: stage
40: drive unit
50: guide
100: brittle substrate
200: rib mark
300: first region of interest
310: first line
400: second area of interest
410: second line

Claims (5)

delete delete A first step (S100) of acquiring an image of the rib mark formed on the scribe surface of the brittle substrate through a camera;
A second step (S200) of setting a first region of interest including a boundary line of an upper surface or a lower surface of the brittle substrate in the acquired image of the rib mark;
A third step (S300) of detecting a first line by advancing a line search direction in an outer direction of the brittle substrate (the direction opposite to the scribe surface) in the selected first region of interest;
A fourth step (S400) of resetting a second ROI toward an inner surface of the brittle substrate based on the detected vertical axis of the first line;
A fifth step (S500) of detecting a second line by advancing a line search direction in the inner direction of the brittle substrate (the direction of the scribe surface) based on the reset second region of interest;
And a sixth step (S600) of measuring a thickness of the rib mark by measuring a width between the first line and the second line. The method of claim 3, wherein
In the fourth step (S400),
And calculating a size of the second region of interest to be reset as a result corresponding to a selection function of the second region of interest at a position spaced a predetermined distance from an upper surface or a lower surface of the brittle substrate. The method of claim 4, wherein
The selection function is a rib mark thickness test method of the following equation.

… Equation 1
Where depth is the thickness of the brittle substrate, Pressure is the scribe pressure, R is the angle of the scribe wheel used in the scribe, and e is the residual error.

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