TW201934959A - Device and method for inspecting thickness of rib mark wherein the rib mark serves as an index for determining the quality of a scribe result - Google Patents

Device and method for inspecting thickness of rib mark wherein the rib mark serves as an index for determining the quality of a scribe result Download PDF

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Publication number
TW201934959A
TW201934959A TW108104808A TW108104808A TW201934959A TW 201934959 A TW201934959 A TW 201934959A TW 108104808 A TW108104808 A TW 108104808A TW 108104808 A TW108104808 A TW 108104808A TW 201934959 A TW201934959 A TW 201934959A
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line
fragile substrate
substrate
stage
attention area
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TW108104808A
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Chinese (zh)
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許原康
崔宰赫
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日商三星鑽石工業股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/022Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Dicing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

An object of the present invention is to provide a device and a method thereof for inspecting the thickness of a rib mark, in which after a brittle substrate that is scribed by using a scribe device is cut, the presence or absence and the thickness of a rib mark, which is formed on the cutting surface and serves as an index for determining the quality of the scribe result, are automatically inspected. Further, in order to achieve the above object, the method for inspecting the thickness of a rib mark of the present invention includes: a first phase of obtaining an image corresponding to a rib mark formed on the scribed surface of a brittle substrate by a camera; a second phase of setting a first attention area which includes a boundary line of the upper surface or the lower surface of the brittle substrate in the image corresponding to the rib mark; a third phase of aligning and advancing a line searching direction in the outer direction of the brittle substrate (a direction opposite to the scribed surface) in the selected first attention area to inspect a first line; a fourth phase of setting a second attention area which faces the inner surface of the brittle substrate by using the vertical axis of the inspected first line as the basis; a fifth phase of aligning and advancing the line searching direction in the inner direction of the brittle substrate (the direction of the scribed surface) using the set second attention area as the basis to inspect a second line; and a sixth phase of inspecting the width between the first line and the second line to measure the thickness of the rib mark.

Description

肋紋厚度的檢查裝置及其方法Device and method for inspecting rib thickness

本發明係關於一種肋紋(RIB MARK)厚度的檢查裝置及方法,更詳細而言,係關於自動檢測形成於切斷面上之肋紋之形成之有無及厚度的肋紋厚度的檢查裝置及其方法。The present invention relates to a device and method for inspecting the thickness of a rib (RIB MARK). More specifically, the present invention relates to a device and method for automatically detecting the presence and thickness of ribs formed on a cut surface, and the thickness of a rib. Its method.

作為用以將包含玻璃基板之各種脆性基板切斷為所需尺寸之工具,使用具備切斷輪之刻劃器。該刻劃器係於使切斷輪壓接於基板之表面之狀態下,一面施加荷重一面移動,藉由轉動之切斷輪而於基板之表面形成刻劃線。形成此種刻劃線後,進行分斷過程,即,以刻劃線為中心,對基板施加彎曲力而切斷。As a tool for cutting various fragile substrates including a glass substrate to a desired size, a scriber equipped with a cutting wheel is used. This scriber is in a state where the cutting wheel is crimped to the surface of the substrate, and moves while applying a load, and a scribe line is formed on the surface of the substrate by rotating the cutting wheel. After the scribe line is formed, a cutting process is performed, that is, the substrate is cut with a bending force applied to the scribe line as a center.

此時,刻劃線(分斷用溝槽)上存在肋紋。通常,於溝槽之下方最近處形成肋紋,垂直之龜裂從肋紋之前端向脆性基板之厚度方向延伸。At this time, rib lines are present on the scribe lines (breaking grooves). Generally, ribs are formed nearest to the bottom of the groove, and vertical cracks extend from the front end of the ribs to the thickness direction of the brittle substrate.

如上所述,藉由在刻劃線上形成肋紋,可以比較小之力將脆性基板分斷。As described above, by forming ribs on the score line, the brittle substrate can be broken with a relatively small force.

近年來,謀求自動檢測上述肋紋之形成之有無及厚度的方式。In recent years, a method for automatically detecting the presence and thickness of the ribs has been sought.

[所欲解決之課題][Questions to be solved]

本發明係為了消除上述要求而提出,其目的為提供一種將利用刻劃裝置而刻劃之脆性基板分斷後,自動檢測成為針對刻劃結果之良否判斷之指標的形成於切斷面上之肋紋之形成之有無及厚度的肋紋厚度的檢查裝置及其方法。
[課題之解決手段]
The present invention is made in order to eliminate the above-mentioned requirements, and its purpose is to provide a rib formed on a cutting surface that automatically detects a brittle substrate that is scored by a scoring device, and then automatically detects it as an index for judging whether the score is good or not. Device and method for inspecting formation of ribs and rib thickness thickness.
[Solution to the problem]

為達成上述目的,本發明之肋紋厚度的檢查裝置包含:平台(stage),其藉由驅動部而沿著導件移動;一對之脆性基板固定部,其於上述平台上隔開預先決定之間隔而分離;脆性基板,其藉由上述脆性基板固定部,於以刻劃剖面朝向上側之方式立起之狀態下固定;以及相機,其朝向上述脆性基板之剖面,一面從遠方向移動至近方向,一面拍攝上述刻劃剖面。In order to achieve the above object, the rib thickness inspection device of the present invention includes a stage that moves along a guide by a driving portion, and a pair of brittle substrate fixing portions that are determined in advance on the platform at intervals. The fragile substrate is fixed by the fragile substrate fixing portion in a state where the scored cross section faces the upper side, and the camera moves toward the cross section of the fragile substrate from a far side to a near side. Direction, taking the above-mentioned scribed section.

進而,本發明之肋紋厚度的檢查裝置包含:平台;脆性基板固定部,其位於上述平台上;脆性基板,其以成為橫向之狀態來固定而位於上述脆性基板固定部上;以及相機,其一面以成為橫向之狀態沿著上述脆性基板之剖面移動,一面拍攝刻劃剖面。Further, the rib thickness inspection device of the present invention includes: a platform; a fragile substrate fixing portion located on the platform; a fragile substrate fixed in a lateral state on the fragile substrate fixing portion; and a camera, which The cross section is taken along the cross section of the fragile substrate while the cross section is taken, and the cross section is photographed and scribed.

進而,為達成上述目的,本發明之肋紋厚度的檢查方法包含:第1階段,通過相機來取得與形成於脆性基板之刻劃面上之肋紋對應之影像;第2階段,於所取得之與上述肋紋對應之影像中,設定包含上述脆性基板之上表面或下表面之邊界線的第1注意區域(Region of Interest);第3階段,於所選定之第1注意區域中,使線搜尋(Line Searching)方向於上述脆性基板之外部方向(刻劃面之相反方向)推進,來檢測第1線;第4階段,以所檢測之上述第1線之垂直軸為基準,朝向上述脆性基板之內面而再設定第2注意區域;第5階段,以再設定之上述第2注意區域為基準,使線搜尋方向於上述脆性基板之內部方向(刻劃面之方向)推進,來檢測第2線;以及第6階段,測定上述第1線及上述第2線之間之寬度來測定上述肋紋厚度。Furthermore, in order to achieve the above-mentioned object, the rib thickness inspection method of the present invention includes: in a first stage, acquiring an image corresponding to the ribs formed on the scored surface of the fragile substrate with a camera; and in a second stage, the obtained In the image corresponding to the rib pattern, a first attention area (Region of Interest) including a boundary line of the upper surface or the lower surface of the fragile substrate is set; in the third stage, in the selected first attention area, The Line Searching direction is advanced in the outer direction of the fragile substrate (opposite to the scored surface) to detect the first line; in the fourth stage, the vertical axis of the first line is detected as the reference, and it is oriented toward the above. The second attention area is set again on the inner surface of the fragile substrate. In the fifth stage, the line search direction is advanced in the internal direction of the fragile substrate (the direction of the scored surface) based on the second attention area set above. The second line is detected; and in the sixth stage, the width between the first line and the second line is measured to measure the rib thickness.

進而,本發明之肋紋厚度的檢查方法於上述第4階段中,再設定之上述第2注意區域之大小估算係於從上述脆性基板之上表面或下表面離開預先決定之間隔之量之位置,根據與上述第2注意區域之選定函數相符之結果來估算。Furthermore, in the method for checking the thickness of the ribs of the present invention, in the fourth stage, the size estimation of the second attention area is set at a position separated from the upper or lower surface of the fragile substrate by a predetermined distance. , And is estimated based on the results consistent with the selected function of the second attention area.

進而,本發明之肋紋厚度的檢查方法中,上述選定函數為下述之式1。
Furthermore, in the rib thickness inspection method of the present invention, the selection function is represented by Equation 1 below.

此處,厚度(depth)為脆性基板之厚度,壓力(Pressure)為刻劃時之壓力,R為用於刻劃之刻劃輪之角度,e為殘留誤差。
[發明之效果]
Here, the depth is the thickness of the fragile substrate, the pressure is the pressure during the scoring, R is the angle of the scoring wheel used for scoring, and e is the residual error.
[Effect of the invention]

根據本發明,具有將利用刻劃裝置而刻劃之脆性基板分斷後,自動檢測成為針對刻劃結果之良否判斷之指標的形成於切斷面上之肋紋之形成之有無及厚度之效果。According to the present invention, there is an effect of automatically detecting the presence and thickness of the ribs formed on the cut surface, which is an index for judging whether the scribe is good or not, after the fragile substrate scribed by the scribe device is cut off.

以下,參照相關圖式,對本發明之實施例進行詳細說明。Hereinafter, embodiments of the present invention will be described in detail with reference to related drawings.

圖1係表示於本發明之一實施例之肋紋厚度的檢查方法中,經刻劃之脆性基板之剖面的照片。FIG. 1 is a photograph showing a cross section of a scored brittle substrate in a rib thickness inspection method according to an embodiment of the present invention.

參照圖1,可確認上表面經刻劃之脆性基板(100)之剖面。於脆性基板(100)之刻劃線(分斷用溝槽)中形成肋紋(200)。Referring to FIG. 1, the cross section of the frangible substrate (100) with the upper surface scratched can be confirmed. Ribs (200) are formed in the scribe lines (breaking grooves) of the brittle substrate (100).

此處,肋紋(200)之形成位置係於經刻劃輪進行刻劃之剖面上生成。即,從經刻劃之上表面向脆性基板(100)之內側形成肋紋(200)。Here, the formation position of the rib pattern (200) is generated on a cross section that is scribed by a scribe wheel. That is, ribs (200) are formed from the scratched upper surface to the inside of the fragile substrate (100).

此時,肋紋(200)之厚度係根據用於刻劃之刻劃輪之角度、刻劃時之壓力、及脆性基板(100)之材質而變化。At this time, the thickness of the ribs (200) varies according to the angle of the scribe wheel used for scoring, the pressure during scoring, and the material of the fragile substrate (100).

肋紋(200)之預想厚度為形成為脆性基板(100)之厚度之約30%以內程度。The expected thickness of the ribs (200) is within about 30% of the thickness of the brittle substrate (100).

圖2係表示於本發明之一實施例之肋紋厚度的檢查方法中,肋紋厚度之檢測結果之照片。FIG. 2 is a photograph showing a result of detecting a rib thickness in a method for inspecting a rib thickness according to an embodiment of the present invention.

參照圖2,本發明之一實施例之肋紋厚度的檢查方法係以如下方法來進行。Referring to FIG. 2, a rib thickness inspection method according to an embodiment of the present invention is performed as follows.

首先,第1階段中,通過相機(10)而取得與形成於脆性基板(100)之刻劃面上之肋紋(200)對應之影像。上述相機(10)例如可使用機器視覺相機。First, in the first stage, an image corresponding to the ribs (200) formed on the scored surface of the fragile substrate (100) is acquired by the camera (10). The camera (10) may be, for example, a machine vision camera.

此時,通過上述相機(10)而取得與肋紋(200)對應之影像之裝置係以圖3及圖4來說明。At this time, a device for obtaining an image corresponding to the ribs (200) through the camera (10) will be described with reference to FIGS. 3 and 4.

第2階段中,於所取得之與肋紋(200)對應之影像中,設定包含脆性基板(100)之上表面或下表面之邊界線的第1注意區域(Region of Interest)(300)。In the second stage, in the image corresponding to the ribs (200), a first region of interest (300) including a boundary line on the upper surface or the lower surface of the fragile substrate (100) is set (300).

第3階段中,於所選定之第1注意區域(300)中,使線搜尋(Line Searching)方向於脆性基板(100)之外部方向(刻劃面之相反方向)上推進,來檢測第1線(310)。In the third stage, in the selected first attention area (300), the Line Searching direction is advanced in the outer direction of the brittle substrate (100) (the opposite direction of the scored surface) to detect the first Line (310).

即,於所選定之第1注意區域(300)中,使線搜尋方向於脆性基板(100)之外部方向上推進,來檢測脆性基板(100)之上表面線即第1線(310)。That is, in the selected first attention area (300), the line search direction is advanced in the outer direction of the fragile substrate (100) to detect the first line (310) on the surface of the fragile substrate (100).

其次,第4階段中,以所檢測之第1線(310)之垂直軸(上下方向)為基準,朝向脆性基板(100)之內面而再設定第2注意區域(400)。Next, in the fourth stage, the second attention area (400) is set toward the inner surface of the fragile substrate (100) based on the vertical axis (up and down direction) of the detected first line (310).

此處,第2注意區域(400)可通過脆性基板(100)之刻劃時之刻劃資訊(刻劃時之壓力、脆性基板(100)之厚度、用於刻劃之刻劃輪之角度、及脆性基板(100)之材質)來估算。Here, the second attention area (400) can pass the scribe information during the scribe of the brittle substrate (100) (the pressure during scribe, the thickness of the brittle substrate (100), and the angle of the scribe wheel for scribe). , And the material of the brittle substrate (100)).

若更詳細說明,則本發明之肋紋厚度的檢查方法之第4階段中再設定之第2注意區域(400)之大小估算係於從脆性基板(100)之上表面或下表面離開預先決定之間隔之量之位置,根據與第2注意區域(400)之選定函數相符之結果來估算大小。例如,上述第2注意區域(400)之大小估算可於從上述脆性基板(100)之上表面或下表面離開約20 μm左右之位置,根據與上述第2注意區域(400)之選定函數相符之結果來估算。In more detail, the size estimation of the second attention area (400) set in the fourth stage of the rib thickness inspection method of the present invention is determined in advance from the upper or lower surface of the brittle substrate (100). The position of the interval amount is estimated based on the result corresponding to the selected function of the second attention area (400). For example, the size estimation of the second attention area (400) may be located at a distance of about 20 μm from the upper or lower surface of the brittle substrate (100), according to the selection function of the second attention area (400). The results are estimated.

此時,選定函數係如下述式1所述。
In this case, the selected function is as described in the following Equation 1.

此處,厚度(depth)為脆性基板(100)之厚度,壓力(Pressure)為刻劃時之壓力,R為用於刻劃之刻劃輪之角度,e為殘留誤差。Here, the thickness (depth) is the thickness of the brittle substrate (100), the pressure (pressure) is the pressure at the time of scoring, R is the angle of the scoring wheel used for scoring, and e is the residual error.

如上所述,能夠估算可根據刻劃資訊來推定判斷肋紋(200)之滲透位置的第2注意區域(400)之大小。As described above, it is possible to estimate the size of the second attention area (400) that can estimate the penetration position of the ribs (200) based on the scribe information.

第5階段中,以再設定之第2注意區域(400)為基準,使線搜尋方向於脆性基板(100)之內部方向(刻劃面之方向)上推進,來檢測第2線(410)。In the fifth stage, the second line of attention (400) is set as a reference, and the line search direction is advanced in the internal direction (the direction of the scored surface) of the fragile substrate (100) to detect the second line (410). .

即,使線搜尋方向於脆性基板(100)之內部方向上推進,來檢測第2線(410)、即肋紋(200)之下部線。That is, the line search direction is advanced in the internal direction of the fragile substrate (100) to detect the second line (410), that is, the lower line of the rib (200).

最後,第6階段中,測定第1線(310)及第2線(410)之間之寬度來測定肋紋(200)之厚度。Finally, in the sixth stage, the width between the first line (310) and the second line (410) is measured to measure the thickness of the ribs (200).

圖3係表示本發明之一實施例之肋紋厚度的檢查裝置之圖。FIG. 3 is a diagram showing a rib thickness inspection device according to an embodiment of the present invention.

參照圖3,本發明之一實施例之肋紋厚度的檢查裝置包含:平台(stage)(30)、脆性基板固定部(20)、脆性基板(100)、及相機(10)。Referring to FIG. 3, a rib thickness inspection device according to an embodiment of the present invention includes a stage (30), a fragile substrate fixing portion (20), a fragile substrate (100), and a camera (10).

此處,平台(30)發揮藉由驅動部(40)而沿著導件(50)移動之導件部之作用。Here, the platform (30) functions as a guide part that moves along the guide (50) by the drive part (40).

脆性基板固定部(20)形成一對,於平台(30)上隔開預先決定之間隔而分離。The brittle substrate fixing portions (20) form a pair, and are separated on the platform (30) at predetermined intervals.

藉由此種脆性基板固定部(20),於以刻劃剖面朝向上側之方式立起之狀態下固定脆性基板(100)。With such a fragile substrate fixing portion (20), the fragile substrate (100) is fixed in a state where the scored cross section faces the upper side.

此時,上述相機(10)朝向脆性基板(100)之剖面,一面從遠方向移動至近方向(即,上下移動),一面拍攝刻劃剖面。At this time, the camera (10) faces the cross section of the fragile substrate (100), and while it is moving from the far direction to the near direction (that is, moving up and down), it captures and scratches the cross section.

圖4係表示本發明之其他實施例之肋紋厚度之檢查裝置的圖。FIG. 4 is a view showing a rib thickness inspection device according to another embodiment of the present invention.

參照圖4,本發明之其他實施例之肋紋厚度之檢查裝置亦包含:平台(30)、脆性基板固定部(20)、脆性基板(100)、及相機(10)。Referring to FIG. 4, the rib thickness inspection device according to another embodiment of the present invention also includes a platform (30), a fragile substrate fixing portion (20), a fragile substrate (100), and a camera (10).

但,與圖3中所說明之方式之不同點為:於脆性基板(100)成為橫向之狀態下固定於脆性基板固定部(20)上之方面、以及平台(30)被固定之方面。However, the difference from the method described in FIG. 3 is that the fragile substrate (100) is fixed to the fragile substrate fixing portion (20) in a state where the fragile substrate (100) is horizontal, and the platform (30) is fixed.

即,平台(30)固定於地面上。That is, the platform (30) is fixed on the ground.

脆性基板固定部(20)位於上述平台(30)上。The brittle substrate fixing portion (20) is located on the platform (30).

又,脆性基板(100)係以成為橫向之狀態固定而位於脆性基板固定部(20)上。In addition, the fragile substrate (100) is fixed in a lateral state and is located on the fragile substrate fixing portion (20).

此時,相機(10)係於成為橫向而與圖3所圖示之相機(10)形成約90度左右之狀態下,一面沿著脆性基板(100)之剖面移動,一面拍攝刻劃剖面。At this time, the camera (10) is in a state of about 90 degrees with the camera (10) shown in FIG. 3 in a horizontal direction, while moving along the cross section of the fragile substrate (100), and photographing and scoring the cross section.

以上之說明僅對本發明之技術思想進行例示性說明,於本發明所屬之技術領域中,若為具有通常知識者,則可於不脫離本發明之本質性特性之範圍內進行各種修正及變形。因此,本發明中所揭示之實施例並非用以限定本發明之技術思想,而是用以進行說明者,並非由該等實施例來限定本發明之技術思想之範圍。本發明之保護範圍應由下述請求範圍來解釋,處於與其同等之範圍內之所有技術思想均應作為本發明之權利範圍中所含者來解釋。The above description is only illustrative of the technical idea of the present invention. In the technical field to which the present invention belongs, if it is a person with ordinary knowledge, various modifications and changes can be made without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are not used to limit the technical idea of the present invention, but are used for explanation, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the scope equivalent thereto should be interpreted as included in the scope of rights of the present invention.

10‧‧‧相機(機器視覺相機)10‧‧‧ Camera (Machine Vision Camera)

20‧‧‧脆性基板固定部 20‧‧‧Fragile substrate fixing part

30‧‧‧平台 30‧‧‧platform

40‧‧‧驅動部 40‧‧‧Driver

50‧‧‧導件 50‧‧‧Guide

100‧‧‧脆性基板 100‧‧‧ Brittle substrate

200‧‧‧肋紋 200‧‧‧ rib

300‧‧‧第1注意區域 300‧‧‧The first attention area

310‧‧‧第1線 310‧‧‧Line 1

400‧‧‧第2注意區域 400‧‧‧ 2nd attention area

410‧‧‧第2線 410‧‧‧line 2

圖1係表示於本發明之一實施例之肋紋厚度的檢查方法中,上表面經刻劃之脆性基板之剖面的照片。FIG. 1 is a photograph showing a cross-section of a brittle substrate with a scored upper surface in a rib thickness inspection method according to an embodiment of the present invention.

圖2係表示於本發明之一實施例之肋紋厚度的檢查方法中,肋紋厚度之檢測結果的照片。 FIG. 2 is a photograph showing a rib thickness detection result in a rib thickness inspection method according to an embodiment of the present invention.

圖3係表示本發明之一實施例之肋紋厚度的檢查裝置之圖。 FIG. 3 is a diagram showing a rib thickness inspection device according to an embodiment of the present invention.

圖4係表示本發明之其他實施例之肋紋厚度的檢查裝置之圖。 FIG. 4 is a diagram showing a rib thickness inspection apparatus according to another embodiment of the present invention.

Claims (5)

一種肋紋厚度的檢查裝置,其包含: 平台(stage),其藉由驅動部而沿著導件移動; 一對之脆性基板固定部,其於上述平台上隔開預先決定之間隔而分離; 脆性基板,其藉由上述脆性基板固定部,於以刻劃剖面朝向上側之方式立起之狀態下固定;以及 相機,其朝向上述脆性基板之剖面,一面從遠方向移動至近方向,一面拍攝上述刻劃剖面。A rib thickness inspection device includes: A stage, which moves along the guide by a driving part; A pair of fragile substrate fixing portions are separated on the platform by a predetermined interval; A fragile substrate, which is fixed in a state where the scored cross section faces the upper side by the fragile substrate fixing portion; and The camera faces the cross section of the fragile substrate, and moves from the far direction to the near direction while taking a picture of the scribed section. 一種肋紋厚度的檢查裝置,其中包含: 平台; 脆性基板固定部,其位於上述平台上; 脆性基板,其以成為橫向之狀態來固定而位於上述脆性基板固定部上;以及 相機,其一面以成為橫向之狀態沿著上述脆性基板之剖面移動,一面拍攝刻劃剖面。A rib thickness inspection device including: platform; A brittle substrate fixing portion, which is located on the platform; A fragile substrate fixed on the fragile substrate fixing portion in a lateral state; and The camera moves along the cross-section of the fragile substrate in a lateral state, and captures and scribes the cross-section. 一種肋紋厚度的檢查方法,其包含: 第1階段,通過相機來取得與形成於脆性基板之刻劃面上之肋紋對應之影像; 第2階段,於所取得之與上述肋紋對應之影像中,設定包含上述脆性基板之上表面或下表面之邊界線的第1注意區域(Region of Interest); 第3階段,於所選定之第1注意區域中,使線搜尋(Line Searching)方向於上述脆性基板之外部方向(刻劃面之相反方向)推進,來檢測第1線; 第4階段,以所檢測之上述第1線之垂直軸為基準,朝向上述脆性基板之內面而再設定第2注意區域; 第5階段,以再設定之上述第2注意區域為基準,使線搜尋方向於上述脆性基板之內部方向(刻劃面之方向)推進,來檢測第2線;以及 第6階段,測定上述第1線及上述第2線之間之寬度來測定上述肋紋厚度。A rib thickness inspection method includes: In the first stage, an image corresponding to the ribs formed on the scribed surface of the fragile substrate is obtained by a camera; In the second stage, a first attention area (Region of Interest) including a boundary line of the upper surface or the lower surface of the fragile substrate is set in the obtained image corresponding to the ribs; In the third stage, in the selected first attention area, the Line Searching direction is advanced in the outer direction of the brittle substrate (the opposite direction of the scored surface) to detect the first line; In the fourth stage, based on the vertical axis of the detected first line as a reference, a second attention area is set toward the inner surface of the fragile substrate; In the fifth stage, the second search area is set as a reference, and the line search direction is advanced in the internal direction of the fragile substrate (the direction of the scribed surface) to detect the second line; and In the sixth stage, the width between the first line and the second line is measured to measure the rib thickness. 如請求項3所述之肋紋厚度的檢查方法,其中 於上述第4階段中, 再設定之上述第2注意區域之大小估算係於從上述脆性基板之上表面或下表面離開預先決定之間隔之量之位置,利用與上述第2注意區域之選定函數相符之結果來估算。The method for checking the rib thickness according to claim 3, wherein In phase 4 above, The size estimation of the second attention area is set at a position separated from the upper or lower surface of the fragile substrate by a predetermined interval, and is estimated by using a result consistent with the selection function of the second attention area. 如請求項4所述之肋紋厚度的檢查方法,其中 上述選定函數為下述式(1), 此處,厚度(depth)為脆性基板之厚度,壓力(Pressure)為刻劃時之壓力,R為用於刻劃之刻劃輪之角度,e為殘留誤差。The rib thickness inspection method according to claim 4, wherein the selected function is the following formula (1), Here, the depth is the thickness of the fragile substrate, the pressure is the pressure during the scoring, R is the angle of the scoring wheel used for scoring, and e is the residual error.
TW108104808A 2018-02-14 2019-02-13 Device and method for inspecting thickness of rib mark wherein the rib mark serves as an index for determining the quality of a scribe result TW201934959A (en)

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