CN101969018A - Striping apparatus of protection adhesive tape - Google Patents
Striping apparatus of protection adhesive tape Download PDFInfo
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- CN101969018A CN101969018A CN2010102303814A CN201010230381A CN101969018A CN 101969018 A CN101969018 A CN 101969018A CN 2010102303814 A CN2010102303814 A CN 2010102303814A CN 201010230381 A CN201010230381 A CN 201010230381A CN 101969018 A CN101969018 A CN 101969018A
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- stripping
- protective tapes
- tape
- stripping tape
- roller
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Abstract
A striping apparatus of a protection adhesive tape comprises a striping platform (10) of a holding substrate (2), a roller-shaped supply mechanism (11) of a striping adhesive tape (5), a adhesive tape coiling mechanism (12), a sticking roller (27), a cutter (32) for cutting off the sticking rear side of a striping adhesive tape (5) after sticking the striping adhesive tape (5) onto a stripping front end side of the protection adhesive tape (4), a cutter platform (29) for holding the striping adhesive tape (5), and a striping adhesive tape holding mechanism (25) for holding the striping adhesive tape (5) at the rear part, wherein, the striping adhesive tape (5) is sticked to the stripping front end side of the protection adhesive tape (4) to strip the protection adhesive tape (4), the sticking rear side of the striping adhesive tape (5) can be cut off by the cutter (32), the front end part of the striping adhesive tape (5) with the cut rear side is sticked onto the striping rear end side of the protection adhesive tape (4), while the striping adhesive tape (5) is used to connected with the protection adhesive tape (4), the protection adhesive tape (4) can be striped by the striping adhesive tape (5).
Description
Technical field
The present invention relates to a kind of device of peeling off the protective tapes (tape) that attaches on the substrate.Relate in particular to a kind of use stripping tape and peel off the stripping off device of the protective tapes of the protective tapes that attaches for the surface of protecting semiconductor wafer substrates such as (wafer).
Background technology
Since existing, in semi-conductive manufacturing process, following operation is arranged: afterwards at the circuit forming surface pattern (pattern) of the semiconductor wafer that cuts out from crystal ingot (ingot) (hereinafter to be referred as making wafer), grind at the back side to wafer, so that described wafer reaches specific thickness, come thus wafer is carried out thinning.When carrying out the grinding of this chip back surface, can attach the protective tapes that is used to protect wafer surface, immerse and the pollution circuit pattern with circuit pattern or the lapping liquid of avoiding scratching wafer surface formation.
Ground after the back side of wafer, wafer, is being peeled off this protective tapes before chip (chip) change along circuit pattern from wafer surface, the wafer after again this being peeled off offers cuts crystalline substance (dicing) operation carry out chipization.
When the peeling off of above-mentioned protective tapes; the general known two kinds of methods that have; one of method is: wafer is become the mode of upper surface with this protective tapes face and remain on the stripping table; the stripping tape of extraction roller shape also supplies on the described protective tapes face; utilize on one side to attach roller and push this stripping tape one side it is attached on the protective tapes, again with stripping tape this protective tapes (for example patent documentation 1) of reeling integratedly.Thereby, the stripping tape above length of diameter of adhesive tape that needs protection at least, thus there is the more problem of the use amount waste of protective tapes (for example when from 8 time (inch) need the stripping tape about 230mm when wafer is peeled off protective tapes).
And; another kind method is: wafer is become the mode of upper surface with this protective tapes face and remain on the stripping table; the stripping tape that will have an end is supplied on this protective tapes face; keep this end by peeling off head on one side; only utilize the rear side that attaches described stripping tape from action that connects of heater on one side; cut off being attached to the rear side on the protective tapes of described stripping tape simultaneously and stripping tape is become after the short-movie shape; pull by an end of peeling off the stripping tape that head keeps, to peel off this protective tapes (for example patent documentation 2).
Yet; in the method for described patent documentation 2; only be attached on the part of protective tapes in order to peel off the employed stripping tape of protective tapes; therefore; get final product though the use amount of stripping tape is less; but the protective tapes of peeling off must be discarded in the waste part piecewise, thereby be existed the action of peeling off unit (unit) to become miscellaneous, and discarded protective tapes volume becomes the problem that causes high capacity greatly.
Therefore; an end that cuts into the stripping tape of short-movie shape is attached to tabular component (be equivalent to wafer; be called wafer later on) the sheet material (sheet) of front (coiling leading section) upper surface (be equivalent to protective tapes; be called protective tapes later on) on; and the state that the stripping tape of short-movie shape is projected to the outside with a part and form non-bonded areas attaches on the protective tapes of rear end side (coiling rearward end) upper surface of wafer; pull described wafer front stripping tape and peel off this protective tapes towards the wafer rear end side; and the non-bonded areas of the stripping tape of wafer rear end side attached to become the next wafer front of peeling off the protective tapes of object; thereby one side links protective tapes via the stripping tape of short-movie shape successively, Yi Bian peel off protective tapes (for example patent documentation 3) continuously.In this way, need not discard piecewise and the protective tapes and discarded of can reeling continuously, thereby improve operating efficiency.
The prior art document
Patent documentation
Patent documentation 1: Japan Patent is opened flat 3-67442 communique in fact
Patent documentation 2: No. 4204653 communique of Japan Patent
Patent documentation 3: No. 4057478 communique of Japan Patent
But; the device of above-mentioned patent documentation 3 is before the protective tapes that is attached on the removed wafer; stripping tape need be cut into the short-movie shape; and keep becoming this short-movie shape stripping tape (after; the stripping tape that will become the short-movie shape is called and links adhesive tape) and attach on the protective tapes; thereby the binding tape shifter that need be used for that the stripping tape from the roller shape is cut out deliver to attach head laterally move with move up and down and be used to attach link adhesive tape move up and down different moving up and down with described, thereby have the complicated problem of action that attaches head.
And; the shut-off mechanism that make to link adhesive tape must be set respectively independently and keep linking adhesive tape and on one side, thereby have the problem of the complicated or maximization of device its mechanism for stripping portion that attaches to the attaching head of protective tapes and keeps the binding adhesive tape to peel off.
And then; in the device of above-mentioned patent documentation 3; peel off and winding reel (reel) side of the protective tapes of reeling is fully independently with the supply reel side of supplying with stripping tape; need respectively during initial setting with guiding (1ead) adhesive tape hang to the operation of winding reel side and with stripping tape hang to supply side (be not to use 1 continuous stripping tape to make the operation that links adhesive tape; and need be divided into the peeling off of the guiding adhesive tape of winding side and supply side with linking this two-part adhesive tape of adhesive tape), thereby there is the initial setting complicated problems that becomes.That is above-mentioned stripping off device needed to cut out earlier before attaching and links adhesive tape and attach on the protective tapes again, the problem that therefore exists the operation of setting initial condition to become very miscellaneous.
And then; when beginning the peeling off of protective tapes; if link adhesive tape the bonding of protective tapes is fully peeled off failure (miss) inadequately; then for device is restPosed; after must hanging the guiding adhesive tape till the absorption lattice (grid) of mechanism for stripping portion; make described guiding adhesive tape remain in absorption lattice lower surface and absorption lattice front end cut off; subsequently; described guiding adhesive tape changed be suspended to the attaching head side; peel off failure if in peeling off, take place because of what the bonding deficiency that links adhesive tape caused; then exist and recover very difficulty, resuming operation also needs the problem of time.
And; during the peeling off of the protective tapes that is used for attaching on the wafer when device with above-mentioned patent documentation 3; in the time will linking adhesive tape and be attached at protective tapes; must invest the protective tapes on the wafer by the binding adhesive tape pressing paster of the adsorbed maintenance of lower surface that attaches head; therefore; if pressing force a little less than, then exist to link adhesive tape and can break away from protective tapes, thereby can peel off the problem of failure.And then; protective tapes is for protective circuit pattern when the grinding back surface of wafer and be attached on the wafer; dirt during this grinding back surface etc. remains on the protective tapes face sometimes; if therefore only utilize pressing force to attach; the adhesion strength deficiency that causes because of dirt of existence meeting then, and cause peeling off failure.
And; the device of above-mentioned patent documentation 2; only the stripping tape (being equivalent to adhesive tape) that will cut into the short-movie shape from action that connects by heater attaches on the protective tapes; and pull this stripping tape and it is peeled off; therefore; if it is abundant inadequately to bond, then the problem of failure is frequently peeled off in the existence meeting.Especially when being applicable to above-mentioned wafer; for only utilizing the connecing for the attaching carried out of action of heater; because the bond area of protective tapes and adhesive tape is less; therefore; if the dirt of the protective tapes as described above during grinding back surface part is overlapping with binding part, then can exist to attach undercapacity and peel off the problem of failure.
Summary of the invention
Therefore; the object of the present invention is to provide a kind of feed mechanism of simplifying stripping tape; cut down the use amount of stripping tape; thereby the device that is of value to environment; and provide a kind of generation that prevents to peel off failure; and then, even peel off failure, the raising that the recovery of stripping off device also can be carried out automatically the stripping off device of protective tapes of operating efficiency.
Therefore, the 1st invention is a kind of stripping off device of protective tapes, with the stripping tape of short-movie shape linking the protective tapes that be attached to substrate surface on one side, the protective tapes of described binding is reeled so that it is peeled off in one side, and this stripping off device comprises:
Stripping table is kept with this protective tapes face the substrate that is pasted with described protective tapes, and is relatively moved horizontally with respect to described stripping tape as upper surface;
The stripping tape feed mechanism is supplied to the stripping tape of roller shape on the described protective tapes;
The adhesive tape winding mechanism, reeling is linked to the protective tapes of described stripping tape;
Attach roller, on described protective tapes, push rotation, thus stripping tape is attached near the peripheral end of protective tapes across described stripping tape;
Cutting knife attaches to peeling off after the front of described protective tapes at stripping tape, cuts off the attaching rear side of this stripping tape;
The cutting knife platform is positioned at the place ahead of described attaching roller, is provided with the cutting knife groove of advancing for described cutting knife, and absorption keeps the rear side of the stripping tape that cut off by described cutting knife; And
The stripping tape maintaining body is positioned at the rear of described attaching roller, and absorption keeps this stripping tape when described cutting knife cuts off stripping tape,
Utilize on one side and attach the front of peeling off that roller attaches to described stripping tape protective tapes; and the described stripping tape of reeling; peel off protective tapes with this from peeling off front; and utilize described cutting knife platform and stripping tape maintaining body to adsorb the maintenance stripping tape; utilize described cutting knife to cut off the attaching rear side of described stripping tape on one side; reel by the adhesive tape winding mechanism again and be pasted with the protective tapes of stripping tape; peel off protective tapes thus; then; the leading section that utilize to attach the stripping tape that roller will keep by the absorption of stripping tape maintaining body attaches to the rear end side of peeling off of described protective tapes, thereby while utilizes stripping tape to link protective tapes successively it is peeled off.
And; the 2nd invention is the stripping off device according to the protective tapes of the 1st invention; its part in the periphery of described attaching roller is provided with heater, thereby utilizes 1 to attach stripping tape that roller carries out being undertaken by the rotation of described attaching roller to the attaching of protective tapes with utilize stripping tape that described heater carries out that the heating of protective tapes is attached.
And the 3rd invention is according to the stripping off device of the protective tapes of the 1st invention and the 2nd invention, between the described adhesive tape winding mechanism and the first stripping tape maintaining body detecting mechanism is set, and has or not the protective tapes of being stripped from detecting.In addition, for detecting mechanism, preferably can use the optical pickocff of reflection-type, transmission-type etc.
The effect of invention
As mentioned above; the stripping tape of roller shape is attached to peeling off after the front of protective tapes; cut off the attaching rear side of stripping tape; then; the leading section that is adsorbed maintenance of the protective tapes that cuts off is attached to the rear end side of peeling off of protective tapes, while utilize stripping tape to link protective tapes it is peeled off, so a kind of use amount that reduces stripping tape can be provided; thereby the device that is of value to environment, and can not cause discarded protective tapes volume to become big.
And; earlier 1 continuous stripping tape is attached on the protective tapes; cut off the rear end part that is attached to the stripping tape on the protective tapes then; therefore as long as reel is disposable to hang along the path till the winding reel from supplying with stripping tape when initial setting; stripping process subsequently just can carry out automatically; do not need manually to make in advance the stripping tape of short-movie shape, so operating efficiency obtains the leap raising.
And; part in the periphery that attaches roller; built-in heater; therefore has fusible stripping tape at normal temperatures as long as use; just can utilize 1 to attach roller and carry out by attaching stripping tape that pushing of roller carried out to the attaching of protective tapes with utilize heater these two kinds of attachings of attaching that thermo-compressed is carried out that add at assigned position; even the attaching face of protective tapes pollutes to some extent; owing to be to bond by two kinds of adhesive methods; therefore can guarantee adhesion strength, peel off failure and significantly reduce.And, because the attaching roller also is the linking part of stripping tape to the area of pushing of wafer surface, therefore with utilizes the attaching roller to push the situation that entire wafer attaches on one side to compare, can make the attaching roller that pushing of wafer is Min., thereby can damage wafers.
And then; when the peeling off of the protective tapes that utilizes stripping tape to carry out; whether the detecting protective tapes is peeled off; even therefore the imperfect bonding of protective tapes is peeled off failure because of stripping tape; also be to cut off before stripping tape forms the short-movie shape, therefore do not needing to change the extension stripping tape, as long as the coiling of stripping tape and stripping table etc. are restPosed; just can restore (that is device is restored automatically).
And, the portion of attaching mechanism of stripping tape and shut-off mechanism portion are constituted integratedly, and can use 1 continuous stripping tape, therefore can simplification device, the miniaturization that can implement device and the reduction of cost.
Description of drawings
Fig. 1 is the front elevation of stripping off device of the protective tapes of expression one embodiment of the present invention.
Fig. 2 is the arrow plane graph of observing from the A-A direction of Fig. 1.
Fig. 3 is the arrow side view of observing from the B-B direction of Fig. 1.
Fig. 4 is the stereogram that attaching roller used among the present invention is described.
Fig. 5 (a)～Fig. 5 (c) is the action specification figure of protective tapes stripping off device of the present invention.
Fig. 6 (a)～Fig. 6 (c) is the action specification figure of protective tapes stripping off device of the present invention.
Fig. 7 (a)～Fig. 7 (c) is the action specification figure of protective tapes stripping off device of the present invention.
Fig. 8 utilizes the stripping off device of protective tapes of the present invention and the key diagram of the protective tapes peeled off.
The explanation of symbol:
1: the protective tapes stripping off device
2: wafer
3: circuit pattern
4: protective tapes
5: stripping tape
6: pedestal
7: machine frame
8: track
9: slide block
10: stripping table
11: stripping tape is supplied with reel
12: the adhesive tape winding reel
13: deflector roll
14: the folder rod
15: cylinder
16: the folder rod
17: deflector roll
18: the roller carriage
19: cylinder
20: pressure roller
21: supporting bracket
22: cylinder
23: cylinder
24: cylinder
25: the stripping tape maintaining body
26: adsorption hole
27: attach roller
28: heater
29: the cutting knife platform
30: the cutting knife groove
31: adsorption hole
32: cutting knife
33: the cutting knife carriage
34: the roller carriage
35: with the motor of clutch
36: the machine frame peristome
37: rod-free cylinder
38: slide block
39: guide rail
40: the protective tapes detection sensor
41: the sensor support frame
42: guide rod
43: front attaching portion
44: the heater pressure contact portion
45: rear end side attaching portion
46: the protective tapes detecting part
Embodiment
Below, according to Fig. 1 to Fig. 4, an execution mode of protective tapes stripping off device of the present invention is described.
Fig. 1 is the front elevation that the part of protective tapes stripping off device of the present invention is cut, and major part is described by the part exaggeration.And Fig. 2 is the arrow plane graph of observing from the A-A direction of Fig. 1, and Fig. 3 is the arrow side view of observing from the B-B direction of Fig. 1.
As shown in Figure 1 to Figure 3, on the pedestal 6 of protective tapes stripping off device 1, stand and be provided with machine frame 7, on this pedestal 6, laying two tracks (rail) 8,8 abreast with machine frame 7.On described two tracks 8,8, chimeric slidably slide block (slider) 9,9 on described slide block 9,9, can be provided with stripping table 10 along track 8,8 by not shown suitable drive source with moving horizontally.
Described stripping table 10 surface thereon is provided with not shown a plurality of adsorption holes, and these adsorption holes are connected with same not shown suitable vacuum source, with the generation absorption affinity.And the wafer 2 that will locate by suitable mechanism utilizes suitable mechanism, be attached to protective tapes 4 on circuit pattern 3 that its surface forms be upper surface and mounting on stripping table 10, and adsorb by described adsorption hole and to keep.
Above the described stripping table 10 and machine frame 7 above, be provided with and supply with stripping tape that single face has the stripping tape 5 of fusible roller shape and supply with reel 11, and the adhesive tape winding reel 12 of the protective tapes 4 peeled off by described stripping tape 5 of reeling.
Described stripping tape 5 is wound to adhesive tape winding reel 12 in its adhesive surface mode relative with the upper surface of described stripping table 10 via a plurality of deflector rolls 13, folder rod (nip roller) 14,16 and a plurality of deflector roll 17.In addition, be preferably, in folder rod 14,16 and the deflector roll 17, the side that the adhesive surface of stripping tape 5 contacted has been carried out non-adhesion process by fluorine processing etc.
And; the both sides of described folder rod 16 and a plurality of deflector roll 17 are rotated by roller carriage 18 to be supported freely; at this roller carriage 18 bottom; supporting pressure roller 20 to be free rotation mode; this pressure roller 20 is used for when protective tapes 4 is peeled off, and protective tapes 4 is peeled off to the turnover of acute angle direction.In addition, be preferably, the length of described folder rod 16, deflector roll 17, pressure roller 20 is more than the diameter of protective tapes 4, the protective tapes 4 of being stripped from coiling.
And described pressure roller 20 is provided with the gap in the part of machine frame 7 sides as shown in Figure 2, and protective tapes detection sensor described later (sensor) 40 is detected the protective tapes of peeling off 4 from this gap.
And two roller carriages 18 are hung up and are integrally formed, at this upper section that hangs, cylinder (cylinder) 19 are installed.
And, in described folder rod 14,16, be provided with the drive source of not shown impulse motor (pulse motor) etc., with the supply and the coiling amount of control adhesive tape.And; supply with in the reel 11 at stripping tape, be provided with not shown known torque limiter (torque keeper), to extract stripping tape 5 out with fixing power; in adhesive tape winding reel 12, the not shown suitable motor of the protective tapes 4 that being provided with forces to reel is stripped from.
And described folder rod 14,16 opens and closes freely by cylinder 15,19, usually, is peeling off when moving, and described folder rod 14,16 is closed with the clamping adhesive tape, then opens when the replacing of adhesive tape or when protective tapes stripping off device 1 is stopped for a long time.Whereby, prevent to descend because of the cohesive force that the distortion of the adhesive surface of stripping tape 5 etc. causes.
Above the described stripping table 10 and near the central authorities of machine frame 7, to project to the mode in the place ahead and supporting bracket 21 be set from machine frame 7, on this supporting bracket 21, fixing cylinder 22,23,24 successively down from the supply side of stripping tape 5, this cylinder axis can be stretched towards the below.
Below described supporting bracket 21, each cylinder 22,23,24 the axle front end, stripping tape maintaining body 25 that absorption keeps stripping tape 5 is installed, is supporting the roller carriage 34 that attaches roller 27, the adsorption hole 31 that is provided with absorption maintenance stripping tape 5 and the cutting knife platform 29 of cutting knife groove 30, cylinder axis by each cylinder 22,23,24 flexible, stripping tape maintaining body 25, liftings are freely respectively to attach roller 27, cutting knife platform 29.In addition, as shown in Figure 3,, be provided with guide rod (guide) 42 slidably in the both sides of cylinder 24, though not shown, in the both sides of cylinder 22,23 similarly, be provided with guide rod 42 slidably.
Described stripping tape maintaining body 25 is located at the rear side (supply side of stripping tape 5) that attaches roller 27, the lower surface of described stripping tape maintaining body 25 is with along the mode of the inclination of stripping tape 5 and be formed obliquely, and a plurality of adsorption holes 26 are wearing on the direction vertical with the direct of travel of stripping tape 5, and be connected with not shown suitable vacuum source, with from the attached maintenance stripping tape 5 of non-adhesive surface side draught.In addition, the absorption affinity of stripping tape 5 so long as the degree that stripping tape 5 can not come off get final product, even so that stripping tape 5 also can be advanced under adsorbed state.
Described attaching roller 27 as shown in Figure 2, the two ends rotation is supported in roller carriage 34 freely, end at described attaching roller 27 is connecting the motor 35 of having clutch via roller carriage 34, can control the switching that rotates freely and drive rotation that attaches roller 27.In addition, also can replace common motor is set with the motor 35 of clutch, and adopt the mechanism that engages that can carry out freely with this motor.
As shown in Figure 4, described attaching roller 27 axially is provided with groove in the part of its outer peripheral face, near the central authorities of this groove, only is embedded with the heater (heater) 28 that the part to stripping tape 5 heats.And, the outer peripheral portion beyond the groove of described attaching roller 27, suitably reeling rubber (rubber) or resin etc., even so that push wafer 2, wafer 2 can not sustain damage yet.
The width of above-mentioned heater 28 or length are preferably and form, and in the mode of 3 of the circuit patterns that can not push wafer 2, push about the 2～3mm of the outer peripheral portion that is not provided with circuit pattern 3 of wafer 2.
In addition, described attaching roller 27 is attaching when action, is with the engaging of the clutch of the motor 35 of clutch obtains breaking away to rotate freely, and rotates under the rotation that pressing force brings.And; attach that roller 27 drives rotation so that above-mentioned heater 28 when being positioned at the outer circumference end of protective tapes 4 when making; utilize not shown suitable transducer to detect the position of heater 28; make with the clutch engaging of the motor 35 of clutch again and make to attach roller 27 and drive rotation, so that heater 28 is positioned at assigned position.
And, described cutting knife platform 29 is located at the front side (winding side of stripping tape 5) that attaches roller 27, lower surface at described cutting knife platform 29, winding side (front side) at stripping tape 5, become vertical mode and be provided with cutting knife groove 30 with direct of travel with stripping tape 5, at the supply side (rear side) of stripping tape 5, become vertical mode and be equipped with a plurality of adsorption holes 31 with direct of travel equally with stripping tape 5.
Below described cutting knife platform 29 and machine frame 7 sides, be provided with the cutting knife 32 of dise knife in the mode corresponding with cutting knife groove 30, this cutting knife 32 is supported on the front end of cutting knife carriage 33 to be free rotation mode.And the rear end of described cutting knife carriage 33 is inserted machine frame peristome 36 set on the logical machine frame 7 and is provided with slide block 38.And, in described machine frame peristome 36, fixedly have or not bar (rodless) cylinder 37 along the direction vertical with machine frame 7, described slide block 38 is connected to the guide rail 39 of this rod-free cylinder 37, thus, described cutting knife carriage 33 moves up freely in front and back with respect to machine frame 7 along guide rail 39.
Thereby, as shown in Figure 3, described cutting knife 32 is by driving rod-free cylinder 37, thereby utilize cutting knife carriage 33 set cutting knife groove 30 and as 2 chain lines, moving freely on the cutting knife platform 29 from solid line, the cutting knife 32 of dise knife utilizes on one side and cuts off resistances and rotate, on Width cut off stripping tape 5 by the adsorption hole 31 adsorbed maintenances of cutting knife platform 29 on one side.In addition, above-mentioned cutting knife 32 is to consider and used dise knife from the viewpoint of abrasivity and cuttability, but is not limited thereto, and also can utilize suitable cutting knife.
And, at the rear of described pressure roller 20,, be provided with by suitable optical facilities and detect the protective tapes detection sensor 40 that has or not the protective tapes 4 of being stripped from extending the front end of the sensor support frame 41 that is provided with to machine frame 7 along described pressure roller 20.As shown in Figure 2; described protective tapes detection sensor 40 comes irradiates light from the inboard set gap of pressure roller 20 along the direction of arrow; to when peeling off protective tapes 4, detecting, to confirm whether protective tapes 4 is bonded in stripping tape 5 by the protective tapes detecting part 46 (with reference to Fig. 8) of 20 armfuls of protective tapes 4 of going into and rolling of pressure roller.In addition, protective tapes detecting part 46 has only been represented an example, as long as can detect protective tapes 4 when the coiling of stripping tape 5 and protective tapes 4.
By above-mentioned protective tapes detection sensor 40 is set; when protective tapes 4 is not stripped from when the bonding failure takes place when stripping tape 5 is bonded in protective tapes 4; can make protective tapes stripping off device 1 automatically restore to initial condition, to carry out stripping tape 5 is bonded in the action of protective tapes 4 once more.
More than be the structure of protective tapes stripping off device 1 of the present invention, then, to Fig. 7 (a)～Fig. 7 (c), the action of peeling off of the protective tapes 4 of protective tapes stripping off device 1 of the present invention described according to Fig. 5 (a)～Fig. 5 (c).In addition, be described for the ease of understanding, protective tapes 4 or stripping tape 5 are possessed the thickness that is thicker than reality.
Initial position when 2 chain line positions of Fig. 5 (a) are represented to utilize protective tapes stripping off device 1 to peel off protective tapes 4; attach roller 27 and under the effect of cylinder 23, drop to solid line position, thereby stripping tape 5 is pushed and attached to about the 1cm that peels off leading section of protective tapes 4 inboard from this initial position.
At this moment; utilize not shown suitable transducer to detect the position of the heater 28 of this attaching roller 27; and driving is with the motor 35 of clutch; so that heater 28 is positioned at from the lower end that attaches roller 27 to the position of counter clockwise direction deviation angle a; and after utilization attaching roller 27 is pressed into protective tapes 4 with stripping tape 5; cut off clutch, rotate freely so that attach roller 27 with the motor 35 of clutch.And, at this moment,, make an amount of stripping tape 5 supply with reel 11 from stripping tape and emit successively by the driving of folder rod 14 can stripping tape 5 not applied the mode of excessive power.
Then; shown in Fig. 5 (b); utilize attaching roller 27 that stripping tape 5 is pressed into protective tapes 4 on one side; it is mobile stripping table 10 to be retreated on one side; thus; heater 28 is followed the rotation that attaches roller 27 and anglec of rotation a, thereby utilizes heater 28 stripping tape 5 heating to be crimped to the outer circumference end of peeling off front of protective tapes 4.And, at this moment, follow moving of stripping table 10, stripping tape 5 is reeled in right amount by the driving of folder rod 14.
Then, shown in Fig. 5 (c), at first, attaching roller 27 is backed out, it is mobile that stripping table 10 is advanced, and supply with stripping tape 5, thus, pushes stripping tape 5 by pressure roller 20, so that stripping tape 5 acutangulates turnover.
Then; shown in Fig. 6 (a); make folder rod 14 stop to supply with stripping tape 5; and stripping table 10 is advanced further; thus; by the driving of folder driving of rod 16 and adhesive tape winding reel 12 binding part of protective tapes 4 and stripping tape 5 of reeling, thereby utilizing pressure roller 20 that protective tapes 4 is acutangulated on one side to turn down peels off it.
And; when the coiling of following protective tapes 4 and stripping tape 5; when the stripping tape 5 of the rear side of attaching roller 27 contacts the lower surface of stripping tape maintaining bodies 25; make suction force act on adsorption hole 26, adsorb the stripping tape 5 that remains in the rear side that attaches roller 27 by stripping tape maintaining body 25.In addition, whether stripping tape 5 contacts the lower surface of stripping tape maintaining body 25, as long as utilize suitable transducer to detect the height change of stripping tape maintaining body 25 or the variation of the pressure drag that stripping tape 5 causes etc.
And, follow the coiling of stripping tape 5, make cutting knife platform 29 under the effect of cylinder 24 and descend, make suction force act on adsorption hole 31 and absorption remains in the stripping tape 5 of the front side that attaches roller 27, attach roller 27 and motor 35 with clutch is driven and rotate, so that heater 28 is positioned at from the below that attaches roller 27 position behind the anglec of rotation b toward the clockwise direction.In addition, cutting knife platform 29 also can use being fixed under the state of appropriate location, but also can cause abrasion because of the friction with stripping tape 5 sometimes, and therefore being preferably cutting knife platform 29 can move up and down.
And; follow the coiling of stripping tape 5; protective tapes 4 is gone on one side to be reeled by 20 armfuls of pressure rollers on one side; at this moment; by protective tapes detection sensor 40 is played a role; and when protective tapes 4 is bonded in stripping tape 5, utilizes the protective tapes detecting part 46 of protective tapes 4 to be judged as protective tapes 4 and bondd, continue stripping process subsequently.At this moment; when not detecting protective tapes 4 by protective tapes detection sensor 40; be considered as protective tapes 4 and do not bond with stripping tape 5 and failure has taken place to peel off, thereby carry out the recovery of the coiling or the stripping table 10 of stripping tape 5, so that protective tapes stripping off device 1 becomes initial condition.
Then; shown in Fig. 6 (b); in that absorption keeps under the state of stripping tape 5 by cutting knife platform 29 and stripping tape maintaining body 25, by rod-free cylinder 37 be used for driving cutting knife 32, thereby cut off rear side with the stripping tape 5 of protective tapes 4 bondings along cutting knife groove 30.
Then; shown in Fig. 6 (c); stripping table 10 is advanced on one side; this protective tapes 4 of reeling on one side; and in that absorption keeps under the state of the rear side of cut stripping tape 5 by stripping tape maintaining body 25, reel stripping tape 5 slightly and be located at the below that attaches roller 27, then; when attaching about the 1cm that peels off rearward end that roller 27 is positioned at the protective tapes 4 that is attached on the wafer 2 on the stripping table 10 inboard going up, stripping table 10 is stopped.In addition,,, can reduce the use amount of stripping tape 5 herein by the rear side of the stripping tape 5 of reeling slightly.
Shown in Fig. 7 (a); keeping under the state of stripping tape 5 by 25 absorption of stripping tape maintaining body; make stripping tape maintaining body 25 and attach roller 27 and descend; make stripping tape maintaining body 25 stop and stopping absorption at assigned position; and attaching roller 27 is further descended, thereby the leading section pressing paster of stripping tape 5 is attached to the rear end side of peeling off of protective tapes 4.
Then; shown in Fig. 7 (b); under the state of the clutch that cuts off the motor 35 of having clutch; make folder rod 14 supply with rotation and supply with stripping tape 5 on one side; stripping table 10 is advanced on one side, thus, attaching roller 27 is pushed and is rotated and stripping tape 5 is pasted on the protective tapes 4; by making heater 28 be positioned at peeling off on the rearward end of protective tapes 4, stripping tape 5 heating are crimped to the rearward end of peeling off of protective tapes 4.
Subsequently, shown in Fig. 7 (c), make to attach after roller 27 risings, the driving by folder rod 14 advances stripping table 10 while supply with stripping tape 5, utilizes folder rod 16 and adhesive tape winding reel 12 to reel to peel off this protective tapes 4.During this period, make stripping tape maintaining body 25 and cutting knife platform 29 rise to initial position, and make the heater 28 that attaches roller 27 return to initial position.
By carrying out above-mentioned action repeatedly, as shown in Figure 8, on one side stripping tape 5 by the short-movie shape link the protective tapes 4 that attaches on the wafer 2 and on one side it peeled off.At this moment; because the part in the periphery that attaches roller 27 is provided with heater 28; therefore as long as when stripping tape 5 is pasted to protective tapes 4, control the outer circumference end that makes heater 28 be positioned at protective tapes 4; just can form the front attaching portion 43 and heater pressure contact portion 44, rear end side attaching portion 45 and the heater pressure contact portion 44 that utilize to attach roller 27 and attach successively, thereby while can utilize the stripping tape 5 of short-movie shape to link protective tapes 4 it is peeled off.
As mentioned above; by carrying out a series of action; need not make the stripping tape 5 of short-movie shape in advance; one side that just can become the stripping tape 5 that makes the short-movie shape is attached at the state of protective tapes 4; therefore handle this stripping tape 5 easily; and, even peel off also recovery device easily of failure.
And the employed stripping tape of wafer was about 230mm in existing 8 o'clock, and is relative therewith, and the stripping off device of the protective tapes of the application of the invention can be cut down the use amount of stripping tape to for example 35～40mm.The use amount of this stripping tape can be according to employed wafer diameter, protective tapes, stripping tape and suitably change.
In addition, the above-mentioned suitable example of having represented semiconductor wafer, but also can use in the adhesive tape class of the protective tapes that on peeling off various substrates, attaches etc.
And as long as the shape, size that attach the diameter of roller 27 or heater 28 be according to the size of substrate and suitably change, and as long as the bond area of stripping tape 5 and protective tapes 4 is adhesiveness of this stripping tape 5 of consideration or protective tapes 4 etc. and changing.
More than be one embodiment of the present invention, but be not subjected to above-mentioned qualification, can suitably change within the scope of the invention.
Claims (3)
1. the stripping off device of a protective tapes, with the stripping tape of short-movie shape linking the protective tapes that be attached to substrate surface on one side, the protective tapes of described binding is reeled so that it is peeled off in one side, and this stripping off device is characterised in that and comprises:
Stripping table is kept with this protective tapes face the substrate that is pasted with described protective tapes, and is relatively moved horizontally with respect to described stripping tape as upper surface;
The stripping tape feed mechanism is supplied to the stripping tape of roller shape on the described protective tapes;
The adhesive tape winding mechanism, reeling is linked to this protective tapes of described stripping tape;
Attach roller, on described protective tapes, push rotation, thus stripping tape is attached near the peripheral end of this protective tapes across described stripping tape;
Cutting knife attaches to peeling off after the front of described protective tapes at this stripping tape, cuts off the attaching rear side of this stripping tape;
The cutting knife platform is positioned at the place ahead of described attaching roller, is provided with the cutting knife groove of advancing for described cutting knife, and absorption keeps the rear side of this stripping tape of being cut off by described cutting knife; And
The stripping tape maintaining body is positioned at the rear of described attaching roller, and absorption keeps this stripping tape when described cutting knife cuts off this stripping tape,
Utilize on one side and attach the front of peeling off that roller attaches to described stripping tape protective tapes; and the described stripping tape of reeling; peel off this protective tapes with this from peeling off front; and utilize described cutting knife platform and this stripping tape maintaining body to adsorb and keep this stripping tape; utilize described cutting knife to cut off the attaching rear side of described stripping tape on one side; reel by the adhesive tape winding mechanism again and be pasted with this protective tapes of this stripping tape; peel off this protective tapes thus; then; the leading section that utilize to attach this stripping tape that roller will keep by this stripping tape maintaining body absorption attaches to the rear end side of peeling off of described protective tapes, thereby while utilizes this stripping tape to link this protective tapes successively it is peeled off.
2. the stripping off device of protective tapes according to claim 1 is characterized in that,
Described attaching roller is provided with heater in the part of its periphery, thereby utilizes 1 to attach the attaching of the stripping tape that roller carries out being undertaken by the rotation of described attaching roller and utilize the heating of the stripping tape that described heater carries out to attach.
3. the stripping off device of protective tapes according to claim 1 and 2 is characterized in that,
Between the described adhesive tape winding mechanism and the first stripping tape maintaining body, detecting mechanism is set, has or not the protective tapes of being stripped from detecting.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-168256 | 2009-07-16 | ||
| JP2009168256A JP5317280B2 (en) | 2009-07-16 | 2009-07-16 | Protective tape peeling device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101969018A true CN101969018A (en) | 2011-02-09 |
| CN101969018B CN101969018B (en) | 2015-05-20 |
Family
ID=43548155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010230381.4A Expired - Fee Related CN101969018B (en) | 2009-07-16 | 2010-07-15 | Striping apparatus of protection adhesive tape |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5317280B2 (en) |
| CN (1) | CN101969018B (en) |
| TW (1) | TWI466185B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104600017A (en) * | 2013-10-30 | 2015-05-06 | 日东电工株式会社 | Protective tape separating method and protective tape separating apparatus |
| CN104960957A (en) * | 2015-05-22 | 2015-10-07 | 泉州市汉威机械制造有限公司 | Off-line unwinding device |
| CN107293506A (en) * | 2016-04-12 | 2017-10-24 | 颀邦科技股份有限公司 | Machine and method for cutting flexible substrate and tearing protective tape |
| CN108336413A (en) * | 2017-04-01 | 2018-07-27 | 深圳市新嘉拓自动化技术有限公司 | The tape sticking device of compact folding and unfolding adhesive tape |
| CN112005363A (en) * | 2018-04-24 | 2020-11-27 | 迪思科高科技(欧洲)有限公司 | Apparatus and method for attaching protective tape to semiconductor wafer |
| CN112269302A (en) * | 2020-09-16 | 2021-01-26 | 上海光起电子设备有限公司 | Dust removal device of exposure machine |
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| JP5981229B2 (en) * | 2012-06-01 | 2016-08-31 | リンテック株式会社 | Sheet peeling apparatus and peeling method |
| JP6325323B2 (en) * | 2014-04-14 | 2018-05-16 | 株式会社ディスコ | Tape peeling device |
| JP6654831B2 (en) * | 2015-08-31 | 2020-02-26 | リンテック株式会社 | Sheet peeling device and peeling method |
| TWI616343B (en) * | 2016-08-10 | 2018-03-01 | Jhen Tou Technology Co Ltd | Automatic wafer protection layer removal equipment |
| JP6963483B2 (en) * | 2017-12-08 | 2021-11-10 | 株式会社ディスコ | Peeling tape cutter |
| JP7165572B2 (en) * | 2018-12-07 | 2022-11-04 | リンテック株式会社 | Sheet peeling device and sheet peeling method |
| JP7319889B2 (en) * | 2019-10-21 | 2023-08-02 | 株式会社東京精密 | Sheet peeling device |
| JP7454434B2 (en) | 2020-04-14 | 2024-03-22 | リンテック株式会社 | Sheet peeling device and sheet peeling method |
| CN114906660B (en) * | 2022-05-06 | 2023-09-05 | 安徽省唯一纺织有限公司 | Automatic sticking equipment for magic tape |
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| JP2009044008A (en) * | 2007-08-09 | 2009-02-26 | Takatori Corp | Protective tape peeling method and device for wafer |
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| JP4204658B2 (en) * | 1997-11-28 | 2009-01-07 | リンテック株式会社 | Sheet peeling apparatus and method |
| US6715524B2 (en) * | 2002-06-07 | 2004-04-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | DFR laminating and film removing system |
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- 2009-07-16 JP JP2009168256A patent/JP5317280B2/en active Active
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- 2010-07-16 TW TW099123482A patent/TWI466185B/en active
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH0367442U (en) * | 1989-11-07 | 1991-07-01 | ||
| CN1203181A (en) * | 1997-06-20 | 1998-12-30 | 琳得科株式会社 | Sheet removing apparatus and method |
| JP2005015160A (en) * | 2003-06-26 | 2005-01-20 | Lintec Corp | Sheet peeling device and method |
| JP2009044008A (en) * | 2007-08-09 | 2009-02-26 | Takatori Corp | Protective tape peeling method and device for wafer |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104600017A (en) * | 2013-10-30 | 2015-05-06 | 日东电工株式会社 | Protective tape separating method and protective tape separating apparatus |
| CN104960957A (en) * | 2015-05-22 | 2015-10-07 | 泉州市汉威机械制造有限公司 | Off-line unwinding device |
| CN104960957B (en) * | 2015-05-22 | 2017-07-28 | 泉州市汉威机械制造有限公司 | A kind of outer unwinding device of line |
| CN107293506A (en) * | 2016-04-12 | 2017-10-24 | 颀邦科技股份有限公司 | Machine and method for cutting flexible substrate and tearing protective tape |
| CN107293506B (en) * | 2016-04-12 | 2019-05-17 | 颀邦科技股份有限公司 | Machine and method for cutting flexible substrate and tearing protective tape |
| CN108336413A (en) * | 2017-04-01 | 2018-07-27 | 深圳市新嘉拓自动化技术有限公司 | The tape sticking device of compact folding and unfolding adhesive tape |
| CN112005363A (en) * | 2018-04-24 | 2020-11-27 | 迪思科高科技(欧洲)有限公司 | Apparatus and method for attaching protective tape to semiconductor wafer |
| CN112269302A (en) * | 2020-09-16 | 2021-01-26 | 上海光起电子设备有限公司 | Dust removal device of exposure machine |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201104739A (en) | 2011-02-01 |
| TWI466185B (en) | 2014-12-21 |
| JP5317280B2 (en) | 2013-10-16 |
| CN101969018B (en) | 2015-05-20 |
| JP2011023612A (en) | 2011-02-03 |
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