JP7319889B2 - Sheet peeling device - Google Patents

Description

TECHNICAL FIELD The present invention relates to a sheet peeling device for peeling a protective sheet attached to an adherend.

In the semiconductor manufacturing field, there is a process of grinding the back surface of a semiconductor substrate such as a silicon wafer (hereinafter referred to as an "adherend") to make it thinner. It is attached to protect the device formed on the surface of the adherend.

As a sheet peeling device for peeling off a protective sheet attached to an adherend, as shown in FIG. An adhesive tape t is adhered to the edge of the protective sheet s attached to w, and the adherend w is moved relative to the peeling tape t, thereby exerting a peeling force on the adhesive tape t to form the protective sheet. An apparatus for peeling s from an adherend w is known (see, for example, Patent Document 1).

JP-A-11-16862

However, in the device described in Patent Document 1, as shown in FIGS. When the tape t pulls the protective sheet s upward and separates it from the adherend w, the outer periphery of the adherend w may jump up so as to follow the protective sheet s, and the adherend w may crack or the like. There was a risk of damage.

Therefore, there arises a technical problem to be solved in order to peel off the protective sheet without damaging the adherend during trigger peeling, and an object of the present invention is to solve this problem. do.

In order to achieve the above object, a sheet peeling device according to the present invention is a sheet peeling device that applies a peeling force to a protective sheet attached to an adherend via a peeling tape to peel the protective sheet. holding means for holding the adherend; feeding means for feeding the release tape; applying means for applying the release tape to the protective sheet; and a regulating means that presses the deflection formed by folding back in a substantially vertical direction while maintaining an acute peeling angle between the peeling tape and the protective sheet .

According to this configuration, the regulating means suppresses the deflection of the release tape in a substantially vertical direction, thereby suppressing the adherend from jumping up following the protective sheet during trigger peeling. The protective sheet can be peeled off without damaging the

Further, in the sheet peeling device according to the present invention, it is preferable that the regulating means is a roller having an arcuate guide surface that regulates bending of the peeling tape.

According to this configuration, since the peeling tape is restrained from bending by the arc-shaped guide surface, the peeling tape can be fed out smoothly, so that the protective sheet can be peeled off smoothly.

Further, in the sheet peeling device according to the present invention, it is preferable that the roller is rotatably provided around a support shaft that horizontally supports the roller.

According to this configuration, the peeling tape is restrained from bending by the roller that rotates around the support shaft, so that the peeling tape can be fed out more smoothly, so that the protective sheet can be peeled off smoothly.

Further, in the sheet peeling device according to the present invention, it is preferable that the guide surface is processed with fluororesin.

According to this configuration, the peeling tape is prevented from accidentally adhering to the guide surface and its bending is regulated, so that the peeling tape can be fed out smoothly, so that the protective sheet can be peeled off smoothly.

Further, in the sheet peeling device according to the present invention, it is preferable that the guide surface is knurled.

According to this configuration, the peeling tape is prevented from accidentally adhering to the guide surface and its bending is regulated, so that the peeling tape can be fed out smoothly, so that the protective sheet can be peeled off smoothly.

Further, in the sheet peeling device according to the present invention, it is preferable that the holding means is provided so as to be slidable in the horizontal direction.

According to this configuration, the holding means can slide in the horizontal direction so that the adherend moves relative to the release tape, so that the release force can be applied to the protective sheet via the release tape.

Further, in the sheet peeling device according to the present invention, it is preferable that the holding means is provided so as to be slidable in the vertical direction.

According to this configuration, the holding means can slide in the vertical direction so that the adherend moves relative to the regulating means, so that the bending radius of the peeling tape regulated by the regulating means can be adjusted. can.

In the present invention, the restricting means suppresses the deflection of the release tape in a substantially vertical direction, thereby suppressing the adherend from following the protective sheet and jumping up during trigger peeling, thereby damaging the adherend. The protective sheet can be peeled off without giving

1 is a perspective view showing a sheet peeling device according to one embodiment of the present invention; FIG. FIG. 2 is a side view of the sheet peeling device; The top view which shows the installation position of a control means. Schematic diagrams showing a procedure for peeling off a protective sheet. 5(a) and 5(b) are schematic diagrams showing how the protective sheet is peeled off, and FIG. 5(c) is an enlarged view of a main part of FIG. 5(b). 6(a) and 6(b) are schematic diagrams showing how a protective sheet is peeled off in a conventional sheet peeling device, and FIG. 6(c) is an enlarged view of a main part of FIG. 6(b). be.

An embodiment of the present invention will be described based on the drawings. In addition, hereinafter, when referring to the number, numerical value, amount, range, etc. of the constituent elements, unless otherwise specified or clearly limited to a specific number in principle, it is limited to the specific number It does not matter if it is more than or less than a certain number.

In addition, when referring to the shape and positional relationship of components, etc., unless otherwise specified or in principle clearly considered otherwise, etc. include.

In addition, the drawings may exaggerate characteristic parts by enlarging them in order to make the characteristics easier to understand.

FIG. 1 is a front view of the sheet peeling device 1. FIG. FIG. 2 is a side view of the sheet peeling device 1. FIG. The sheet peeling device 1 peels off a protective sheet S (BG tape) adhered to protect the surface of the adherend W when the back surface of the adherend W is ground. The adherend W is, for example, a semiconductor substrate such as a silicon wafer, but is not limited to this.

The adherend W is mounted on the ring frame RF via the dicing tape DT with the protective sheet S facing upward. The dicing tape DT is an ultraviolet curing tape or the like.

The sheet peeling device 1 includes a holding table 2 on which the adherend W is placed. A suction surface 21 is provided on the upper surface side of the holding table 2 .

The adsorption surface 21 is connected to a vacuum source or compressed air source (not shown). When the vacuum source is activated, the adherend W placed on the adsorption surface 21 is adsorbed and held on the adsorption surface 21 . Further, when the compressed air source is activated, the adsorption between the adherend W and the adsorption surface 21 is released.

The holding table 2 is provided so as to be movable in the horizontal direction (horizontal direction of the paper surface of FIG. 2) via a moving means (not shown).

The sheet peeling device 1 includes a feeding means 3 capable of feeding a strip-shaped peeling tape T. As shown in FIG. The delivery means 3 includes a feed roller 31 , a take-up roller 32 , first to fourth guide rollers 33 to 36 and a pressing member 37 .

The feed roller 31 supports the strip-shaped peeling tape T so that it can be fed out. The take-up roller 32 applies a feeding force to the peeling tape T and winds it. The first to fourth guide rollers 33 to 36 and the pressing member 37 are arranged at appropriate positions so as to exert tension on the peeling tape T and regulate the trajectory of the peeling tape T. As shown in FIG.

The sheet peeling device 1 includes a sticking means 4 for sticking a peeling tape T to a protective sheet S. As shown in FIG. The sticking means 4 includes a heat stamp 41 and a cylinder (not shown) for moving the heat stamp 41 up and down.

The sheet peeling device 1 includes a regulation roller 5 as regulation means. As shown in FIG. 3, the regulating roller 5 is arranged approximately 2 to 3 mm above the position where the protective sheet S starts to peel (peeling start position). The regulation roller 5 is provided rotatably around a support shaft (not shown) that is mounted substantially horizontally so that the release tape T can be fed out smoothly.

For example, the guide surface 51 is preferably coated with a fluorine resin or knurled so that the release tape T does not adhere to the surface of the regulation roller 5 (guide surface 51). As a result, the peeling tape T can be fed out smoothly.

The regulating means is not limited to the form described above. For example, a fan-shaped column having an arc-shaped guide surface with good slippage is used to regulate the bending direction so as to suppress the bending of the peeling tape T. It doesn't matter if it's something.

Further, if the guide surface slides well and the release tape T can be fed out smoothly, the release tape T may be configured so as not to be rotatable around the support shaft so that the release tape T slides on the guide surface 51 . I do not care.

Next, operation of the sheet peeling device 1 will be described based on the drawings. 4A and 4B are diagrams showing a procedure for peeling off the protective sheet S. FIG.

First, after an adherend W having a thickness of about 20 μm and a diameter of about 400 mm is adsorbed on the holding table 2, the outer peripheral portion of the adherend W is placed below the heat stamp 41 as shown in FIG. 4(a). so that the holding table 2 is moved.

Next, as shown in FIG. 4(b), the cylinder is driven to lower the heat stamp 41, and the heat stamp 41 comes into contact with the release tape T and is heated and pressed at a stamp temperature of 180° C., thereby releasing the tape. The tape T and the outer peripheral portion of the protective sheet S are welded together. The position of the protective sheet S to which the peeling tape T is welded becomes the peeling start position of the protective sheet S. As shown in FIG.

Next, as shown in FIG. 4C, the cylinder is driven to raise the heat stamp 41, and then, as shown in FIG. 4(d), the holding table 2 is moved. The length of the regulation roller 5 is larger than the diameter of the adherend W, and is set to 400 mm, for example. The peeling tape T bends in a substantially horizontal U shape when viewed from the side so as to bulge forward in the direction in which the holding table 2 advances from the peeling start position.

Next, as shown in FIG. 4(e), when the holding table 2 is further moved, the regulation roller 5 comes into contact with the peeling tape T, and the regulation roller 5 bends the peeling tape T in a substantially vertical direction. In other words, the regulating roller 5 suppresses the deflection of the peeling tape T so that the angle formed by the peeling tape T and the protective sheet S (the peeling angle Θ) becomes small.

Next, as shown in FIG. 4(f), when the holding table 2 is further moved, the tension acting on the peeling tape T removes the protective sheet S while the warping of the peeling tape T is pushed in a substantially vertical direction. A peeling force for peeling from the adherend W acts on the protective sheet S. As shown in FIG. The moving speed of the holding table 2 when the protective sheet S starts to peel off is set to 1 mm/s, for example.

Here, the behavior of the protective sheet S when the protective sheet S begins to peel from the adherend W, that is, the behavior of the protective sheet S in so-called triggered peeling will be specifically described with reference to FIG. 5 .

First, as shown in FIG. 5(a), immediately before the outer peripheral portion of the protective sheet S is peeled off from the adherend W, the release tape T is pressed downward by coming into contact with the regulating roller 5. The angle formed by T and the protective sheet S (peeling angle Θ) is small and bent.

Then, when the holding table 2 moves, the protective sheet S is peeled off from the adherend W while maintaining a peeling angle Θ smaller than that of the conventional one, as shown in FIGS. 5(b) and 5(c).

As a result, the vertical component of the peel force acting on the protective sheet S is reduced, the adherend W is suppressed from following the protective sheet S and jumping up, and the protective sheet does not damage the adherend W. S can be peeled off.

Then, as shown in FIG. 4(f), after the protective sheet S on the outer peripheral portion of the adherend W is completely peeled off, the entire surface of the protective sheet S is peeled off. In addition, it is preferable to change the moving speed of the holding table 2 according to the area from which the protective sheet S is peeled off.

For example, as shown in FIG. 4(e), when the protective sheet S is initially peeled off, the adhesion area between the protective sheet S and the adherend W is small, and the peeling force per unit area acting on the adherend W is large. tend to be Therefore, it is preferable that the moving speed of the holding table 2 is small.

On the other hand, as shown in FIG. 4( f ), after the peeling of the protective sheet S progresses to some extent, the adhesion area between the protective sheet S and the adherend W increases, and per unit area acting on the adherend W The peeling force of becomes smaller. Therefore, the moving speed of the holding table 2 can be accelerated, and is set to 4 to 5 mm/s, for example.

By appropriately changing the moving speed of the holding table 2 in this manner, the time required for peeling off the protective sheet S can be shortened without damaging the adherend W. FIG.

Moreover, it is preferable that the space between the holding table 2 and the regulating roller 5 can be adjusted by, for example, configuring the holding table 2 to be slidable in the vertical direction. Thereby, the distance between the regulating roller 5 and the holding table 2 can be adjusted, and the radius of curvature of bending can be appropriately changed according to the material, hardness, brittleness, etc. of the peeling tape T. For example, if the radius of curvature of the bending of the release tape T is reduced, the vertical component of the release force acting on the protective sheet S is reduced, so that the adherend W can be suppressed from jumping up during trigger release.

In this manner, in the sheet peeling apparatus 1 according to the present embodiment, the regulating roller 5 presses the peeling tape T in the substantially vertical direction, so that the adherend W is removed from the protective sheet at the time of trigger peeling. The protective sheet S can be peeled off without damaging the adherend W because the protective sheet S is suppressed from jumping up following the S.

In addition, the present invention can be modified in various ways without departing from the spirit of the present invention, and it is natural that the present invention extends to such modifications. Also, the above-described embodiments and modifications may be combined with each other.

Reference Signs List 1 Sheet peeling device 2 Holding table 21 Attracting surface 3 Feeding means 31 Feeding roller 32 Winding roller 37 Pressing member 4 Pasting means 41 ... heat stamp 5 ... regulation roller 51 ... guide surface DT ... dicing tape RF ... ring frame S ... protective sheet T ... peeling tape W ... adherend Θ・・・Peeling angle

Claims (8)

A sheet peeling device for peeling a protective sheet attached to an adherend by applying a peeling force via a peeling tape to the protective sheet,
holding means for holding the adherend;
a feeding means for feeding the peeling tape;
an attaching means for attaching the release tape to the protective sheet;
A regulation in which the flexure formed by folding back the release tape attached to the protective sheet in a substantially U-shape in a horizontal direction is suppressed in a substantially vertical direction while maintaining an acute peeling angle between the release tape and the protective sheet. means and
A sheet peeling device comprising: 2. The sheet peeling device according to claim 1, wherein said restricting means is a roller having an arc-shaped guide surface for restricting bending of said peeling tape. 3. The sheet peeling device according to claim 2, wherein the roller is rotatable around a support shaft that horizontally supports the roller. 4. The sheet peeling device according to claim 2, wherein said guide surface is processed with fluorine resin. 4. The sheet peeling device according to claim 2, wherein the guide surface is knurled. 6. The sheet peeling device according to claim 1, wherein said holding means is provided so as to be slidable in a horizontal direction. 7. The sheet peeling device according to claim 1, wherein said holding means is provided so as to be slidable in a vertical direction. The holding means is provided slidable in the horizontal direction and capable of changing the moving speed in the horizontal direction,
2. The sheet peeling device according to claim 1, wherein the moving speed of said holding means is set to be lower when said protective sheet starts peeling than when said protective sheet is being peeled off.

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