JPS61273462A - Tape draw-out device in tape sticking apparatus - Google Patents

Abstract

PURPOSE:To improve operation efficiency by providing a pressured transferring roller and a guide roller disposed near the tape draw-out side more than the pressure roller and supporting one of the rollers through a one-way clutch for keeping one roller from rotating at the time of drawing out the one-sided adhesive tape, and freely rotating same in the reverse direction. CONSTITUTION:A one-sided adhesive tape A is wrapped round the outer periphery of a guide roller 23, drawn out below the outer periphery of a pressured transferring roller 40, and with the leading end portion of the adhesive tape A retained by a retaining device, the pressured transferring roller 40 is moved to a tape sticking start position. Whereupon, a roller supported through a one- way clutch is detented by operation of the clutch and moved, so that the one- sided adhesive tape is mechanically and automatically drawn out by a length corresponding to the travel of the pressured transferring roller 40. Then, the pressured transferring roller 40 is lowered and brought into contact with the adhering surface of an adhered body B previously set below roller, whereby the leading end portion of the adhesive tape is stuck to the adhering surface. In such a condition, the pressured transferring roller 40 is moved along the adhering surface to stick the adhesive tape A to the adhered body B.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention provides a circular thin plate such as a silicon wafer that serves as a base for forming an integrated circuit, and an annular ring that serves as a carrier jig for this thin plate. The present invention relates to a tape feeding device of a tape pasting device for pasting adhesive tape.

[Conventional technology and its problems]

A rolling pressure roller is installed so that it can come into contact with and separate from the surface of an adherend such as a silicon wafer set on a table, and can move in parallel along the surface. Conventional tape applicators have been used to apply single-sided adhesive tape to an adherend by moving it along the adherend surface while in contact with the adherend and pulling it out between the rolling pressure roller and the adherend. exist.

In the above-mentioned tape application device, after pasting the single-sided adhesive tape on the adherend, the single-sided adhesive tape is cut forward from the position where the pasting is completed. It is necessary to roll out a predetermined length of single-sided adhesive tape until it covers the body.

By the way, in the past, the work of unwinding single-sided adhesive tape was done manually. There was a problem that the efficiency of the pasting work was low because the adhesive was strained.

[Problem of invention]

Therefore, the technical object of the present invention is to solve the above-mentioned problems and improve the work efficiency by performing the tape feeding operation mechanically.

[Structure of the invention]

In order to solve the above-mentioned problems, the present invention arranges a tip holding device for a single-sided adhesive tape on the trailing side of the tape pasting process of the rolling pressure roller that sticks the single-sided adhesive tape to the adherend surface of an adherend. A single-sided adhesive tape is attached to either one of the above-mentioned rolling pressure roller and a guide roller which is disposed on the tape feeding side from the rolling pressure roller and moves together with the rolling pressure roller. The structure is such that it is supported via a one-way clutch that prevents rotation when it is extended and allows it to rotate in the opposite direction.

[Effect]

In the feeding device configured as described above, the single-sided adhesive tape is passed around the outer periphery of the guide roller and pulled out to the lower part of the outer periphery of the rolling pressure roller, and with the tip of the single-sided adhesive tape held by the holding device, the rolling pressure roller is When the roller moves to the tape adhesion start position, the roller supported via the one-way clutch moves while being prevented from rotating by the operation of the clutch, so the one-sided adhesive tape is removed by a dimension corresponding to the amount of movement of the compaction roller. is rolled out. Therefore, when the compaction roller is lowered or the entire support of the compaction roller is lowered and comes into contact with the adherend surface of the adherend set below it, the tip of the single-sided adhesive tape adheres. The single-sided adhesive tape is adhered to the surface, and in this state, the holding device is operated to release the tape tip from holding, and the rolling roller is moved along the surface to be adhered, so that the single-sided adhesive tape is sequentially adhered by the rolling roller. Since it is pressed against the body, single-sided adhesive tape can be attached to the adherend.

〔Example〕

Embodiments of the present invention will be described below with reference to the accompanying drawings.

As shown in FIGS. 1 to 3, a table support frame 2 is attached to the front part of the frame 1, and an adherend support table 3 is provided above the support frame 2. As shown in FIGS. The cutter frame 4 arranged above the table 3 has a pair of arms 5, 5, and the end of the arm 5 can be rotated by a pin 7 on a pair of support plates 6 rising from the rear end of the frame 1. When the cutter frame 4 is rotated around the pin 7 and raised as shown by the chain line (A) in FIG. 1, the end of the arm 5 comes into contact with the stopper 8 provided on the support plate 6. , the cutter frame 4 is held in an upright position.

A plurality of guide shafts 9 are installed between the pair of arms 5, and a cutter support plate 10 is slidable along the guide shafts 9. A circular cutter 11 is supported at the bottom of the cutter support plate 1°. is the guide shaft 9 below.
The blade can be moved along a blade holder 12 arranged parallel to the blade.

A pair of guide rails 1 are provided below both sides of the table 3.
3, and a roller support frame 2o is slidably supported along the guide rail 13.

The roller support frame 20 includes a pair of brackets (21, 21) movable along the guide rail 13 on both sides, and a shaft (22) installed between the upper parts of the brackets (21).
A guide roller 23 is fitted on the outside. shaft 2
2 and the guide roller 23, as shown in FIG.
A one-way clutch 24 is provided, which allows the guide roller 23 to rotate in the direction of the arrow in FIG. 1 and prevents it from rotating in the opposite direction. In addition, the shaft 22
A braking mechanism 30 that applies rotational resistance to the guide roller 23 is provided between the guide roller 23 and the guide roller 23 .

The braking mechanism 30 includes a braking plate 31 on the outside of the shaft 22.
is slidably provided, and the brake plate 31 is attached to the spring 3.
2, the spring 32 is pressed against a step 33 provided on the inner peripheral surface of the guide roller 32, and the elasticity of the spring 32 can be adjusted by rotating a nut 34 threadedly engaged with the end of the shaft 22. There is.

Further, as shown in FIG. 2, between the brackets 21, a rolling pressure roller 40 is arranged below the guide roller 23, and the upper part of a roller arm 42 that supports the roller shaft 41 of the rolling pressure roller 40 is Bracket 21 via pin 43
When the roller arm 42 is rotated to the left in FIG. When rotated in the opposite direction, a boss (not shown) provided on the roller arm 42 comes into contact with a side edge of a notch 45 formed on the side edge of the bracket 21 .

As shown in FIG. 2, a plate 46 is rotatably supported at the end of the roller shaft 41 of the compaction roller 40.
The elasticity of the spring 47 connected to the roller arm 4
The direction in which the boss of the roller arm 42 abuts the side edge of the notch 45 and the direction in which the side edge of the roller arm 42 abuts the stopper 44 are determined using a straight line connecting the rotation center of the roller arm 2 and the fixed end of the spring 47 as a dead point. The roller arm 42 is adapted to be deflected in either direction.

Furthermore, as shown in FIGS. 2 and 6, an engagement plate 48 is disposed on the outer side of the bracket 21, and the center portion of the engagement plate 48 is rotatably attached to the bracket 21 by a pin 49. ing. This engagement plate 48 is provided with a gripping piece 50 at one end, a notch 51 is formed at the end closer to the gripping piece 50, and this notch 51 is connected to the rolling pressure roller 40.
By fitting onto the outside of the end of the roller shaft 41, the roller arm 42 is held in a state in which the boss of the roller arm 42 contacts the side edge of the notch 45.

Further, a pin 52 is attached to the other end of the engagement plate 4,
One end of a kick spring 53 is connected to the pin 52. The other end of the kick spring 53 is connected to a pin 54 provided on the bracket 21, and due to its configuration, the kick spring 53 has a dead point that is a straight line connecting the center of rotation of the engagement plate 48 and the pin 54 of the bracket 21, and is positioned above the dead point. , when the pin 52 of the engagement plate 48 is positioned, the notch 5 of the engagement plate 48
The engagement plate 48 is deflected in a direction in which the engagement plate 1 fits onto the outside of the roller shaft 41 of the compaction roller 4o.

As shown in FIG. 1, a roll holder 60 is attached to the rear of the frame 1, and a roll of single-sided adhesive tape A is rotatably supported by the roll holder 60. The single-sided adhesive tape A pulled out from the roll holder 60 is applied to the guide roller 61 supported by the support plate 6 of the frame 1, and then applied to the upper outer circumference of the guide roller 22 and the outer circumference side of the rolling pressure roller 40, and is rolled. A holding device 7 is pulled out from the lower part of the outer circumference of the pressure roller 40 in a tangential direction, and its tip portion is provided so as to be movable together with the compaction roller 40.
It is designed to be held at o.

As shown in FIGS. 2 and 3, the holding device 70 includes a pair of bar support arms 7 at the lower end of the roller arm 42.
1 are rotatably connected, a clamping bar 72 is passed between the tips of the bar support arm 71 in parallel with the rolling pressure roller 40, and a pair of holes 73 provided at both ends of the clamping bar 72 are respectively inserted. The central part of the clamping claw 74 is rotatably attached by inserting the L-shaped clamping claw 74, and the cylinder 75 for rotational driving of each clamping claw 74 is supported by the clamping bar 72, and the clamping bar 7
Both sides of the leading end of the single-sided adhesive tape A pulled out downward are held between a holding bar 72 and a pair of holding claws 74. Further, a suction lower roller is attached to the center portion of the lower surface of the clamping bar 72, and suction force is applied to the suction lower roller so that the center portion of the tip of the single-sided adhesive tape A is attracted.

Note that the holding device 70 is not limited to the above configuration, and may be configured to suck and support the entire width direction of the tip end of the single-sided adhesive tape A.

The bar support arm 71 is deflected by a spring (not shown) in a direction in which it comes into contact with a stopper 77 provided at the lower portion of the outer surface of the roller arm 42 .

The bracket 21 of the roller support frame 20 has a first
As shown in the figure, it is connected to a part of an endless chain 80 of a sprocket chain mechanism arranged below the guide rail 13, and the endless chain 80 is driven by a motor 81 supported by the frame 1 to move the guide rail 13. When the roller support frame 20 is moved to the end and the cutter frame 4 is rotated downward in that state, the cutter frame 4
The roller 83 at the end of the roller support plate 82 attached to the end of the arm 5 pushes down the end of the clamping bar 72 and holds the clamping bar 72 in a substantially horizontal state as shown in FIG. ing.

The pasting device shown in the embodiment has the above-mentioned structure, and this pasting device performs the work of setting the adherend B on the table 3 while holding the cutter frame 4 in the position shown by the chain line in FIG. and attaching the single-sided adhesive tape A to the adherend B, and after completing the attaching operation, return the cutter frame 4 to the solid line position in FIG.
Make sure to carry out cutting operations.

Now, after setting the adherend B on the table 3, the tip of the single-sided adhesive tape A pulled out forward from the lower part of the outer periphery of the rolling pressure roller 4o is held by the holding device 70, and the gripping piece of the engagement plate 48 is held. 5o upward to release the engagement between the notch 51 and the roller shaft 41 of the rolling pressure roller 40, and then pull up the roller arm 42 upward to remove the side part of the guide roller 23, as shown in FIG. When the endless chain 80 is moved with the rolling pressure roller 40 positioned at , and the roller support frame 1 is moved to the left in FIG. 1 along the guide rail 13, it is guided by the tension applied to the single-sided adhesive tape A. The roller 23 tries to rotate in the direction opposite to the direction of the arrow in FIG. ,
The single-sided adhesive tape A is fed out by a dimension corresponding to the amount of movement of the roller support frame 20.

After moving the roller support frame 20 to the starting position for applying the single-sided adhesive tape A, the roller arm 4
2 is rotated downward and the rolling pressure roller 4o is brought into contact with the adherend B that has been set in advance on the upper surface of the table 3 below.
The tip of the single-sided adhesive tape A adheres to the adherend B. After adhering, rotate the gripping piece 50 of the engagement plate barb downward to remove the notch 5.
1 is fitted on the outside of the roller shaft 41 of the compaction roller 40, and the holding device 7o is activated to release the tape tip end, and then the endless chain 80 is moved to move the roller support frame 2o to the guide rail. 13 in the direction of the roll holder 60, the single-sided adhesive tape A is sequentially pressed against the adherend B by the rolling pressure roller 40, so that the single-sided adhesive tape A can be attached to the adherend B.

In this case, since the guide roller 23 is rotatable in the direction of the arrow in FIG. 1, the guide roller 23 rolls due to contact with the tape A under tension and moves along the tape A. By applying an appropriate rotational resistance to the guide roller 23 in the rotational direction by the action of the braking mechanism 3o, an appropriate tension can be applied to the tape A between the compaction roller 40 and the guide roller 23. Tape A can be applied without wrinkles or air bubbles when the tape is applied.

After pasting the single-sided adhesive tape A, rotate the cutter frame 4 downward and hold it horizontally as shown by the solid line in FIG. The rollers 83 push down both ends of the clamping bar 72 to hold the bar support arm 71 in a substantially horizontal state, and the cutter 11 is moved along the blade holder 12 to cut the single-sided adhesive tape A. After cutting, the holding device 7o is operated to hold the tip of the single-sided adhesive tape A, and then the cutter frame 4 is pulled upward to replace the adherend B.

In the case of the embodiment, the guide roller 23 is connected to the one-way clutch 24.
However, the compacting roller 40 may be supported by the one-way clutch 24. Further, the rolling pressure roller 40 may be rotated in one direction by contact with the guide roller 23.

Since the guide roller 23 moves in contact with the adhesive surface of the single-sided adhesive tape 23, its surface is coated with Teflon coating material or knurled to prevent the single-sided adhesive tape from adhering more than necessary. is preferable.

Further, in the embodiment described above, the rolling pressure roller 40 was pulled up to perform the work of feeding out the adhesive tape A, but as shown in FIG. 90 is supported so as to be able to swing around a driving sprocket shaft 91 of the endless chain 80, and a cylinder 92 for swinging the support body is disposed below the swinging side end of the support body 90, and the adhesive tape A is fed out. By operating the cylinder 92 and lifting the support body 90, the tape A can be fed out while the rolling roller 40 remains lowered. In addition, the adhesive tape A can be attached to the adherend B by operating the cylinder 92 and pulling down the support 90 after the adhesive tape A is fed out, and the series of operations of feeding out and pasting the tape A can be automatically performed. can be done.

As described above, according to the present invention, a tape tip holding device is provided on the trailing side of the tape application process of the compaction roller, and the guide roller disposed on the tape feeding side from the compaction roller is Of these, one of them is...holding device, A...single-sided adhesive tape, B...adherent or one roller is supported via a one-way clutch to prevent rotation when the tape is fed out, and the tape is moved in the opposite direction. By holding the single-sided adhesive tape with the holding device and moving the compaction roller and guide roller to the starting position of the single-sided adhesive tape, the single-sided adhesive tape can be removed by a dimension corresponding to the amount of feed of both rollers. Adhesive tape can be automatically fed out, which has a great effect on improving the efficiency of tape application work.

[Brief explanation of the drawing]

Fig. 1 is a vertical sectional front view of a tape pasting device implementing the device according to the present invention, Fig. 2 is an enlarged front view of the tape feeding device section of the above, and Fig. 3 is a front view of the tape end holding device of the above. FIG. 4 is a cross-sectional view showing a part of the guide roller shown in the above, FIG. FIG. 20... Roller support frame, 23... Guide roller, 24... One-way clutch, 40... Rolling pressure roller,
70 Patent Applicant Nitto Electric Industry Co., Ltd. Agent Kama 1) Text 22o40 Figure 3
23 Figure 4

Claims (1)

[Claims] A guide roller and a rolling pressure roller are provided on a roller support frame that is movably supported along the adherend surface of an adherend placed at a fixed position, and the rolling pressure roller is brought into contact with the adherend surface to support the roller. In the tape applying device, the single-sided adhesive tape drawn out from the guide roller between the rolling pressure roller and the adherend surface is pasted to the adherend by movement of the frame, wherein the tape sticking of the rolling pressure roller is performed. A tip holding device for the single-sided adhesive tape is provided on the trailing side of the stroke, and one of the guide rollers and the rolling pressure roller is prevented from rotating when the single-sided adhesive tape is fed out, and is free to rotate in the opposite direction. What is claimed is: 1. A tape feeding device for a tape sticking device, characterized in that the tape feeding device is supported via a one-way clutch.