CN101969018B - Striping apparatus of protection adhesive tape - Google Patents
Striping apparatus of protection adhesive tape Download PDFInfo
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- CN101969018B CN101969018B CN201010230381.4A CN201010230381A CN101969018B CN 101969018 B CN101969018 B CN 101969018B CN 201010230381 A CN201010230381 A CN 201010230381A CN 101969018 B CN101969018 B CN 101969018B
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- stripping
- protective tapes
- tape
- stripping tape
- adhesive tape
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Abstract
A striping apparatus of a protection adhesive tape comprises a striping platform (10) of a holding substrate (2), a roller-shaped supply mechanism (11) of a striping adhesive tape (5), a adhesive tape coiling mechanism (12), a sticking roller (27), a cutter (32) for cutting off the sticking rear side of a striping adhesive tape (5) after sticking the striping adhesive tape (5) onto a stripping front end side of the protection adhesive tape (4), a cutter platform (29) for holding the striping adhesive tape (5), and a striping adhesive tape holding mechanism (25) for holding the striping adhesive tape (5) at the rear part, wherein, the striping adhesive tape (5) is sticked to the stripping front end side of the protection adhesive tape (4) to strip the protection adhesive tape (4), the sticking rear side of the striping adhesive tape (5) can be cut off by the cutter (32), the front end part of the striping adhesive tape (5) with the cut rear side is sticked onto the striping rear end side of the protection adhesive tape (4), while the striping adhesive tape (5) is used to connected with the protection adhesive tape (4), the protection adhesive tape (4) can be striped by the striping adhesive tape (5).
Description
Technical field
The present invention relates to a kind of device peeling off the protective tapes (tape) that substrate attaches.Particularly relate to a kind of stripping off device using stripping tape to peel off the protective tapes in order to the protective tapes protecting the surface of the substrates such as semiconductor wafer (wafer) to attach.
Background technology
Since existing, in the manufacturing process of semiconductor, there is following operation: after the circuit forming surface pattern (pattern) of the semiconductor wafer (hereinafter referred to as wafer) cut out from crystal ingot (ingot), the back side of wafer is ground, to make described wafer reach specific thickness, come thus to carry out thinning to wafer.When carrying out the grinding of this chip back surface, can attach the protective tapes for the protection of wafer surface, the circuit pattern formed to avoid scuffing wafer surface or lapping liquid immerse and pollute circuit pattern.
After having ground the back side of wafer; before by wafer, along circuit pattern, chip (chip) is changed; this protective tapes is peeled off from wafer surface, then the wafer after this stripping is supplied to cuts crystalline substance (dicing) operation to carry out chip.
When the stripping of above-mentioned protective tapes; generally there will be a known two kinds of methods; one of method is: wafer is become the mode of upper surface with this protecting glue zone face and is held on stripping table; extract the stripping tape of roll out and be supplied on described protecting glue zone face; attach roller and press this stripping tape one side while utilize and attached on protective tapes, then to reel integratedly this protective tapes (such as patent documentation 1) with stripping tape.Thus; stripping tape at least needs the length of more than the diameter of protective tapes; thus the use amount that there is protective tapes waste more problem (such as when from 8 time (inch) wafer peel off protective tapes time, need the stripping tape of about 230mm).
And; another kind method is: wafer is become the mode of upper surface with this protecting glue zone face and is held on stripping table; the stripping tape with one end is supplied on this protecting glue zone face; while keep this one end by stripping head; what only utilize on one side heater connects from action to attach the rear side of described stripping tape; cut off being attached to the rear side on protective tapes of described stripping tape simultaneously and make after stripping tape becomes short-movie shape; pull by the one end of peeling off the stripping tape that head keeps, to peel off this protective tapes (such as patent documentation 2).
But; in the method for described patent documentation 2; the stripping tape used to peel off protective tapes is only attached in a part for protective tapes; therefore; although the use amount of stripping tape is less; but the protective tapes of stripping must be discarded in waste part piecewise, thus the action that there is stripping unit (unit) becomes miscellaneous, and discarded protective tapes volume becomes large and causes the problem of high capacity.
Therefore, the one end of the stripping tape cutting into short-movie shape is attached to tabular component and (is equivalent to wafer, be called wafer later) the sheet material (sheet) of front (winding leading section) upper surface (be equivalent to protective tapes, be called protective tapes later) on, and the state forming adhesive free region outside being projected to a part by the stripping tape of short-movie shape attaches on the protective tapes of rear end side (winding rearward end) upper surface of wafer, pull the front of described wafer stripping tape and towards wafer rear end side to peel off this protective tapes, and the adhesive free region of the stripping tape of wafer rear end side is attached to the wafer front of the protective tapes becoming next stripping object, thus link protective tapes via the stripping tape of short-movie shape successively on one side, peel off protective tapes (such as patent documentation 3) continuously on one side.In this way, need not discard piecewise and the protective tapes that can reel continuously is also discarded, thus improve operating efficiency.
Prior art document
Patent documentation
Patent documentation 1: Japan Patent Beneficial 3-67442 publication
Patent documentation 2: Japan Patent No. 4204653 publication
Patent documentation 3: Japan Patent No. 4057478 publication
But; before the protective tapes that the device of above-mentioned patent documentation 3 attaches on removed wafer; stripping tape is needed to cut into short-movie shape; and keep become this short-movie shape stripping tape (after; the stripping tape becoming short-movie shape is called and links adhesive tape) and attach on protective tapes; thus need to be used for link tape shifter that the stripping tape from roll is cut out deliver to the transverse shifting that attaches head and move up and down and be used for attaching link adhesive tape move up and down different moving up and down from described, thus there is the problem that the action that attaches head is complicated.
And; separately must arrange the shut-off mechanism making and link adhesive tape link adhesive tape with maintenance and attached to the attaching head of protective tapes and keep linking adhesive tape while carry out the mechanism for stripping portion of peeling off, thus there is the problem that device is complicated or maximize.
And then; in the device of above-mentioned patent documentation 3; peel off and winding reel (reel) side of the protective tapes that reels with supply stripping tape supply reel side be completely independently; need respectively during initial setting to guide (lead) adhesive tape hang to the operation of winding reel side and hung by stripping tape to supply side to make operation (and non-usage 1 continuous print stripping tape of link adhesive tape; and need the stripping of the guiding adhesive tape and supply side being divided into winding side to link this two-part adhesive tape of adhesive tape), thus there is the problem that initial setting becomes complexity.That is above-mentioned stripping off device needed first to cut out link adhesive tape and attaches on protective tapes again before attaching, and the operation that therefore there is setting initial condition becomes very miscellaneous problem.
And then, when starting the stripping of protective tapes, if link adhesive tape not fully to occur to peel off unsuccessfully (miss) to the bonding of protective tapes, then in order to make device restPose, after must guiding adhesive tape being hung to the absorption lattice (grid) in mechanism for stripping portion, described guiding adhesive tape is made to be held in the lower surface of absorption lattice and to be cut off front end, subsequently, described guiding adhesive tape is changed and is suspended to attaching head side, if there is the stripping failure that the bonding deficiency because linking adhesive tape causes in stripping, then exist and recover very difficult, resume operation and also need the problem of time.
And; when the stripping of the protective tapes that the device of above-mentioned patent documentation 3 is attached on wafer; when link tape sticker is invested protective tapes; must by by attach head lower surface adsorb maintenance link adhesive tape pressing paster invest protective tapes on wafer; therefore; if pressing force is more weak, then there is link adhesive tape can depart from protective tapes, thus can occur to peel off failed problem.And then; protective tapes is in order to the protective circuit pattern and be attached on wafer when the grinding back surface of wafer; dirt etc. during this grinding back surface remains on protecting glue zone face sometimes; if therefore only utilize pressing force to attach; then the adhesion strength deficiency because dirt cause is understood in existence, and causes occurring to peel off unsuccessfully.
And; the device of above-mentioned patent documentation 2; from action, the stripping tape (being equivalent to adhesive tape) cutting into short-movie shape is attached on protective tapes by means of only connecing of heater; and pull this stripping tape and make it peel off; therefore; if bonding is abundant not, then exists and can frequently occur to peel off failed problem.Especially when being applicable to above-mentioned wafer; connect for the attaching carried out from action for what only utilize heater; because the bond area of protective tapes and adhesive tape is less; therefore; if the dirt part of the protective tapes as described above during grinding back surface is overlapping with binding part, then can exists and attach undercapacity and occur to peel off failed problem.
Summary of the invention
Therefore; the object of the present invention is to provide a kind of feed mechanism simplifying stripping tape; cut down the use amount of stripping tape; thus be of value to the device of environment; and provide a kind of preventing to peel off failed generation; and then, even if occur to peel off unsuccessfully, the stripping off device that improve the protective tapes of operating efficiency that the recovery of stripping off device also can be carried out automatically.
Therefore, the 1st invention is a kind of stripping off device of protective tapes, and link the protective tapes being attached to substrate surface with the stripping tape of short-movie shape, while the protective tapes of the described link that reels is to be peeled off, this stripping off device comprises:
Stripping table, is kept the substrate being pasted with described protective tapes as upper surface using this protecting glue zone face, and is relatively moved horizontally relative to described stripping tape;
Stripping tape feed mechanism, is supplied to the stripping tape of roll on described protective tapes;
Adhesive tape winding mechanism, winding is linked to the protective tapes of described stripping tape;
Attach roller, across described stripping tape, on described protective tapes, pressing is rotated, near the peripheral end thus stripping tape being attached to protective tapes;
Cutting knife, after stripping tape attaches to the stripping front of described protective tapes, cuts off the attaching rear side of this stripping tape;
Cutting knife platform, is positioned at the front of described attaching roller, is provided with the cutting knife groove of advancing for described cutting knife, and adsorbs the rear side of the stripping tape that maintenance is cut off by described cutting knife; And
Stripping tape maintaining body, is positioned at the rear of described attaching roller, and when described cutting knife cuts off stripping tape, absorption keeps this stripping tape,
The stripping front that described stripping tape is attached to protective tapes by roller is attached while utilize, and the described stripping tape that reels, protective tapes is peeled off from stripping front with this, and utilize described cutting knife platform and stripping tape maintaining body to adsorb maintenance stripping tape, while utilize described cutting knife to cut off the attaching rear side of described stripping tape, reeled by adhesive tape winding mechanism again and be pasted with the protective tapes of stripping tape, peel off protective tapes thus, then, utilize and attach the stripping rear end side that the leading section being adsorbed the stripping tape kept by stripping tape maintaining body is attached to described protective tapes by roller, thus utilize stripping tape to link protective tapes successively while peeled off.
And; 2nd invention is the stripping off device of the protective tapes according to the 1st invention; it arranges heater in a part for the periphery of described attaching roller, thus utilizes 1 to attach the roller stripping tape that carries out being undertaken by the rotation of described attaching roller to attach the heating of protective tapes the attaching of protective tapes and the stripping tape that utilizes described heater to carry out.
And the 3rd invention is the stripping off device of the protective tapes according to the 1st invention and the 2nd invention, arranges detecting mechanism, to detect the protective tapes with or without being stripped between described adhesive tape winding mechanism and described cutting knife platform.In addition, for detecting mechanism, the optical pickocff of reflection-type, transmission-type etc. preferably can be used.
The effect of invention
As mentioned above; after the stripping tape of roll being attached to the stripping front of protective tapes; cut off the attaching rear side of stripping tape; then; by the stripping rear end side being attached to protective tapes by the leading section that absorption keeps of the protective tapes of cut-out, stripping tape is utilized to be peeled off to link protective tapes, therefore, it is possible to provide a kind of use amount reducing stripping tape; thus be of value to the device of environment, and discarded protective tapes volume can not be caused to become large.
And; first 1 continuous print stripping tape is attached on protective tapes; then the rear end part of the stripping tape be attached on protective tapes is cut off; as long as therefore when initial setting, by stripping tape, from supplying, reel is disposable to be hung to winding reel along path; stripping process subsequently just can carry out automatically; do not need the stripping tape manually making short-movie shape in advance, therefore operating efficiency obtains leap raising.
And; in a part for the periphery of attaching roller; built-in heater; as long as therefore use and there is fusible stripping tape at normal temperatures; just can utilize 1 attach roller carry out by attach stripping tape that the pressing of roller carries out to the attaching of protective tapes and utilize heater in assigned position add attaching these two kinds attachings that thermo-compressed carries out; even if the attaching face of protective tapes is polluted to some extent; owing to being bondd by two kinds of adhesive methods; therefore, it is possible to guarantee adhesion strength, peel off and unsuccessfully significantly reduce.And, owing to attaching the linking part of roller to the pressing area of wafer surface also just stripping tape, therefore roller is attached to press whole wafer while carry out compared with situation about attaching, attaching roller can being made to be Min. to the pressing of wafer with utilizing, thus can not damage wafers.
And then; when the stripping of the protective tapes utilizing stripping tape to carry out; whether detecting protective tapes is peeled off; even if therefore because stripping tape occurs to peel off unsuccessfully to the imperfect bonding of protective tapes; also be before cut-out stripping tape is formed as short-movie shape, therefore do not need to change extension stripping tape, as long as make the winding of stripping tape and stripping table etc. restPose; just can restore (that is, device can be made automatically to restore).
And, the attaching mechanism part of stripping tape and shut-off mechanism portion can be made to form integratedly, and 1 continuous print stripping tape can be used, therefore, it is possible to simplification device, can the miniaturization of implement device and the reduction of cost.
Accompanying drawing explanation
Fig. 1 is the front elevation of the stripping off device of the protective tapes representing one embodiment of the present invention.
Fig. 2 is the arrow plane graph observed from the A-A direction of Fig. 1.
Fig. 3 is the arrow side view observed from the B-B direction of Fig. 1.
Fig. 4 is the stereogram that attaching roller used in the present invention is described.
Fig. 5 (a) ~ Fig. 5 (c) is the action specification figure of protective tapes stripping off device of the present invention.
Fig. 6 (a) ~ Fig. 6 (c) is the action specification figure of protective tapes stripping off device of the present invention.
Fig. 7 (a) ~ Fig. 7 (c) is the action specification figure of protective tapes stripping off device of the present invention.
Fig. 8 is the key diagram of the protective tapes utilizing the stripping off device of protective tapes of the present invention and peel off.
The explanation of symbol:
1: protective tapes stripping off device
2: wafer
3: circuit pattern
4: protective tapes
5: stripping tape
6: pedestal
7: machine frame
8: track
9: slide block
10: stripping table
11: stripping tape supply reel
12: adhesive tape winding reel
13: deflector roll
14: folder rod
15: cylinder
16: folder rod
17: deflector roll
18: roller carriage
19: cylinder
20: pressure roller
21: supporting bracket
22: cylinder
23: cylinder
24: cylinder
25: stripping tape maintaining body
26: adsorption hole
27: attach roller
28: heater
29: cutting knife platform
30: cutting knife groove
31: adsorption hole
32: cutting knife
33: cutting knife carriage
34: roller carriage
35: with the motor of clutch
36: machine frame peristome
37: rod-free cylinder
38: slide block
39: guide rail
40: protective tapes detection sensor
41: sensor support frame
42: guide rod
43: attaching portion, front
44: heater pressure contact portion
45: rear end side attaching portion
46: protective tapes detecting part
Embodiment
Below, according to Fig. 1 to Fig. 4, an execution mode of protective tapes stripping off device of the present invention is described.
Fig. 1 is a front elevation part for protective tapes stripping off device of the present invention cut, and major part is locally exaggerated description.And Fig. 2 is the arrow plane graph observed from the A-A direction of Fig. 1, Fig. 3 is the arrow side view observed from the B-B direction of Fig. 1.
As shown in Figure 1 to Figure 3, on the pedestal 6 of protective tapes stripping off device 1, be equipped with machine frame 7, on this pedestal 6, lay two tracks (rail) 8,8 abreast with machine frame 7.On described two tracks 8,8, be fitted together to slide block (slider) 9,9 slidably, on described slide block 9,9, by not shown suitable drive source, stripping table 10 can be set with moving horizontally along track 8,8.
Described stripping table 10 thereon surface is provided with not shown multiple adsorption holes, and these adsorption holes connect with same not shown suitable vacuum source, to produce absorption affinity.And, by the wafer 2 of being located by suitable mechanism, utilize suitable mechanism, to be attached to protective tapes 4 on circuit pattern 3 that its surface formed for upper surface and be placed on stripping table 10, and to be adsorbed by described adsorption hole and remain.
Above described stripping table 10 and above machine frame 7, be provided with supply one side and there is the stripping tape supply reel 11 of the stripping tape 5 of fusible roll and the adhesive tape winding reel 12 of winding protective tapes 4 of stripping by described stripping tape 5.
Described stripping tape 5, in its adhesive surface mode relative with the upper surface of described stripping table 10, is wound to adhesive tape winding reel 12 via multiple deflector roll 13, folder rod (nip roller) 14,16 and multiple deflector roll 17.In addition, be preferably, in folder rod 14,16 and deflector roll 17, non-adhering process has been carried out by fluorine process etc. in the side that the adhesive surface of stripping tape 5 contacts.
And; the both sides of described folder rod 16 and multiple deflector roll 17 are rotatably support by roller carriage 18; at this roller carriage 18 bottom; to support pressure roller 20 in the mode rotated freely; protective tapes 4, for when making protective tapes 4 peel off, is peeled off to the turnover of acute angle direction by this pressure roller 20.In addition, be preferably, the length of described folder rod 16, deflector roll 17, pressure roller 20 is more than the diameter of protective tapes 4, the protective tapes 4 be stripped to reel.
And described pressure roller 20 as shown in Figure 2, is provided with gap in a part for machine frame 7 side, protective tapes detection sensor (sensor) 40 described later detects the protective tapes 4 of stripping from this gap.
And two roller carriages 18 are integrally formed by hanging up, at the upper section that this hangs, cylinder (cylinder) 19 is installed.
And, in described folder rod 14,16, be provided with the drive source of not shown impulse motor (pulse motor) etc., to control supply and the winding amount of adhesive tape.And; in stripping tape supply reel 11, be provided with not shown known torque limiter (torque keeper), to extract stripping tape 5 out by fixing power; in adhesive tape winding reel 12, be provided with the not shown suitable motor of the protective tapes 4 forcing winding to be stripped.
And, described folder rod 14,16 by cylinder 15,19 opening and closing freely, usually, when carrying out peeling action, described folder rod 14,16 is closed clamp adhesive tape, when the replacing of adhesive tape or make then to open during the long-time stopping of protective tapes stripping off device 1.Whereby, the cohesive force preventing the distortion etc. because of the adhesive surface of stripping tape 5 from causing declines.
Above described stripping table 10 and near the central authorities of machine frame 7, to project to the mode in front from machine frame 7, supporting bracket 21 is set, in this supporting bracket 21, be fixed wtih cylinder 22,23,24 successively down from the supply side of stripping tape 5, this cylinder axis can be stretched downward.
In the below of described supporting bracket 21, in the front end of the axle of each cylinder 22,23,24, absorption is installed keep the stripping tape maintaining body 25 of stripping tape 5, support the roller carriage 34 of attaching roller 27, be provided with the absorption maintenance adsorption hole 31 of stripping tape 5 and the cutting knife platform 29 of cutting knife groove 30, flexible by the cylinder axis of each cylinder 22,23,24, stripping tape maintaining body 25, attach roller 27, cutting knife platform 29 is elevated freely respectively.In addition, as shown in Figure 3, in the both sides of cylinder 24, be provided with guide rod (guide) 42 slidably, although not shown, in the both sides of cylinder 22,23 similarly, be provided with guide rod 42 slidably.
Described stripping tape maintaining body 25 is located at the rear side (supply side of stripping tape 5) attaching roller 27, the lower surface of described stripping tape maintaining body 25 is formed obliquely in the mode of the inclination along stripping tape 5, and multiple adsorption hole 26 wears on the direction vertical with the direct of travel of stripping tape 5, and be connected with not shown suitable vacuum source, with from the attached maintenance stripping tape 5 of non-adhering face side draught.In addition, as long as the degree that the absorption affinity stripping tape 5 of stripping tape 5 can not come off, even if to make stripping tape 5 under adsorbed state also can advance.
Described attaching roller 27 as shown in Figure 2, two ends are rotatably supported in roller carriage 34, in one end of described attaching roller 27, the motor 35 be connected to clutch via roller carriage 34, can control the switching rotating freely and drive rotation attaching roller 27.In addition, also can replace with the motor 35 of clutch and common motor is set, and adopting and can carry out the mechanism with the engaging of this motor freely.
As shown in Figure 4, described attaching roller 27 is axially provided with groove in a part for its outer peripheral face, near the central authorities of this groove, is embedded with only to the heater (heater) 28 that a part for stripping tape 5 heats.And the outer peripheral portion beyond the groove of described attaching roller 27, suitably wrapped around rubber (rubber) or resin etc., even if to make to press wafer 2, wafer 2 also can not sustain damage.
The width of above-mentioned heater 28 or length are preferably and are formed as, so that the mode of the circuit pattern 3 of wafer 2 can not be pressed, and about the 2 ~ 3mm not being provided with the outer peripheral portion of circuit pattern 3 of pressing wafer 2.
In addition, described attaching roller 27 is when carrying out attaching action, and the engaging with the clutch of the motor 35 of clutch is departed from and in rotating freely, and rotates under the rotation brought at pressing force.And; when making attaching roller 27 drive rotation to make above-mentioned heater 28 be positioned at the outer circumference end of protective tapes 4; utilize not shown suitable transducer to detect the position of heater 28; make with the clutch engaging of the motor 35 of clutch, attaching roller 27 to be driven again to rotate, be positioned at assigned position to make heater 28.
And, described cutting knife platform 29 is located at the front side (winding side of stripping tape 5) attaching roller 27, at the lower surface of described cutting knife platform 29, at the winding side (front side) of stripping tape 5, cutting knife groove 30 is provided with to become vertical mode with the direct of travel of stripping tape 5, at the supply side (rear side) of stripping tape 5, be equipped with multiple adsorption hole 31 to become vertical mode with the direct of travel of stripping tape 5 equally.
In the below of described cutting knife platform 29 and machine frame 7 side, be provided with the cutting knife 32 of dise knife in the mode corresponding with cutting knife groove 30, this cutting knife 32 is to be supported on the front end of cutting knife carriage 33 in the mode rotated freely.And the rear end of described cutting knife carriage 33 is inserted machine frame peristome 36 set on machine frame 7 and is provided with slide block 38.And, in described machine frame peristome 36, be fixed with without bar (rodless) cylinder 37 along the direction vertical with machine frame 7, described slide block 38 is connected to the guide rail 39 of this rod-free cylinder 37, thus, described cutting knife carriage 33 moves freely along guide rail 39 in the longitudinal direction relative to machine frame 7.
Thus, as shown in Figure 3, described cutting knife 32 is by driving rod-free cylinder 37, thus the cutting knife groove 30 utilizing cutting knife carriage 33 set on cutting knife platform 29 and from solid line as 2 chain lines mobile freely, the cutting knife 32 of dise knife while utilize and cut off resistance and rotate, to cut off in the direction of the width by the adsorption hole 31 of cutting knife platform 29 adsorb the stripping tape 5 of maintenance.In addition, above-mentioned cutting knife 32 employs dise knife from the viewpoint of abrasivity and cuttability, but be not limited thereto, and also can utilize suitable cutting knife.
And, at the rear of described pressure roller 20, along described pressure roller 20 to the front end of the extended sensor support frame 41 of machine frame 7, be provided with and detect protective tapes detection sensor 40 with or without the protective tapes 4 be stripped by suitable optical facilities.As shown in Figure 2; described protective tapes detection sensor 40 irradiates light in the direction of the arrow from the gap set by the inboard of pressure roller 20; the protective tapes detecting part 46 (with reference to Fig. 8) of the protective tapes 4 rolled being entered by pressure roller 20 armfuls when peeling off protective tapes 4 is detected, to confirm whether protective tapes 4 is bonded in stripping tape 5.In addition, protective tapes detecting part 46 illustrate only an example, as long as can detect protective tapes 4 when the winding of stripping tape 5 and protective tapes 4.
By arranging above-mentioned protective tapes detection sensor 40; when when occurring when stripping tape 5 being bonded in protective tapes 4 to bond unsuccessfully, protective tapes 4 is not stripped; protective tapes stripping off device 1 can be made to automatically restore to initial condition, again to carry out action stripping tape 5 being bonded in protective tapes 4.
It is more than the structure of protective tapes stripping off device 1 of the present invention; then; according to Fig. 5 (a) ~ Fig. 5 (c) to Fig. 7 (a) ~ Fig. 7 (c), the peeling action of the protective tapes 4 of protective tapes stripping off device 1 of the present invention is described.In addition, for the ease of understanding, protective tapes 4 or stripping tape 5 are possessed be thicker than actual thickness to be described.
2 chain line positional representations of Fig. 5 (a) utilize protective tapes stripping off device 1 to peel off initial position during protective tapes 4; attach roller 27 under the effect of cylinder 23, drop to solid line position from this initial position, thus stripping tape 5 is pressed and attach to the stripping leading section of protective tapes 4 about 1cm inner side.
Now; utilize not shown suitable transducer to detect the position of the heater 28 of this attaching roller 27; and drive the motor 35 with clutch; position from the lower end deviation angle a counterclockwise attaching roller 27 is positioned to make heater 28; and after stripping tape 5 is pressed into protective tapes 4 by utilization attaching roller 27; cut off the clutch of the motor 35 with clutch, rotate freely to make attaching roller 27.And, now, can not apply the mode of excessive power to stripping tape 5, appropriate stripping tape 5 is released successively from stripping tape supply reel 11 by the driving of folder rod 14.
Then; as shown in Fig. 5 (b); while utilize attaching roller 27 that stripping tape 5 is pressed into protective tapes 4; while it is mobile to make stripping table 10 retreat; thus; heater 28 is anglec of rotation a with the rotation of attaching roller 27, thus utilizes heater 28 that stripping tape 5 heating is crimped to the outer circumference end of the stripping front of protective tapes 4.And now, with the movement of stripping table 10, stripping tape 5 is reeled in right amount by the driving of folder rod 14.
Then, as shown in Fig. 5 (c), first, attaching roller 27 is backed out, then make stripping table 10 advance mobile, and supply stripping tape 5, thus, press stripping tape 5 by pressure roller 20, acutangulate turnover to make stripping tape 5.
Then; as shown in Fig. 6 (a); folder rod 14 is made to stop supply stripping tape 5; and stripping table 10 is advanced further; thus; reeled by the folder driving of rod 16 and the driving of adhesive tape winding reel 12 binding part of protective tapes 4 and stripping tape 5, thus utilize pressure roller 20 to be peeled off to make protective tapes 4 acutangulate to turn down.
And; when the winding with protective tapes 4 and stripping tape 5; when the stripping tape 5 of the rear side of attaching roller 27 contacts the lower surface of stripping tape maintaining body 25; make suction force act on adsorption hole 26, adsorbed the stripping tape 5 remaining in the rear side attaching roller 27 by stripping tape maintaining body 25.In addition, whether stripping tape 5 contacts the lower surface of stripping tape maintaining body 25, as long as the change etc. of the pressure drag utilizing suitable transducer to cause to the height change or stripping tape 5 of detecting stripping tape maintaining body 25.
And, with the winding of stripping tape 5, make cutting knife platform 29 under the effect of cylinder 24 and decline, make suction force act on adsorption hole 31 and adsorb the stripping tape 5 remaining in the front side attaching roller 27, attaching roller 27 makes the motor 35 with clutch drive and rotate, and is positioned at from the position behind the below attaching roller 27 toward the clockwise direction anglec of rotation b to make heater 28.In addition, cutting knife platform 29 also can use under the state being fixed on appropriate location, but sometimes also can cause abrasion because of the friction with stripping tape 5, and being therefore preferably cutting knife platform 29 can move up and down.
And; with the winding of stripping tape 5; protective tapes 4 is while entered while be wound by pressure roller 20 armfuls; now; play a role by making protective tapes detection sensor 40; and when protective tapes 4 is bonded in stripping tape 5, utilize the protective tapes detecting part 46 of protective tapes 4 to be judged as that protective tapes 4 has bondd, continue stripping process subsequently.Now; when not detecting protective tapes 4 by protective tapes detection sensor 40; be considered as protective tapes 4 do not bond with stripping tape 5 and there occurs and peel off unsuccessfully, thus carry out the winding of stripping tape 5 or the recovery of stripping table 10, become initial condition to make protective tapes stripping off device 1.
Then; as shown in Fig. 6 (b); under the state that the absorption by cutting knife platform 29 and stripping tape maintaining body 25 keeps stripping tape 5, by rod-free cylinder 37 be used for drive cutting knife 32, thus cut off the rear side of the stripping tape 5 bondd with protective tapes 4 along cutting knife groove 30.
Then; as shown in Fig. 6 (c), stripping table 10 is advanced, while this protective tapes 4 that reels; and under the state that the absorption by stripping tape maintaining body 25 keeps the rear side of cut-off stripping tape 5, reel stripping tape 5 and be located at the below attaching roller 27 slightly.Then, when about the 1cm inner side of the stripping rearward end attaching the protective tapes 4 that the wafer 2 that roller 27 is positioned on stripping table 10 attaches is upper, stripping table 10 is stopped.In addition, herein, by the rear side of the stripping tape 5 that reels slightly, the use amount of stripping tape 5 can be reduced.
As shown in Fig. 7 (a); adsorbed under the state keeping stripping tape 5 by stripping tape maintaining body 25; make stripping tape maintaining body 25 and attach roller 27 to decline; stripping tape maintaining body 25 is made to stop at allocation and stop absorption; and attaching roller 27 is declined further, thus the leading section pressing paster of stripping tape 5 is attached to the stripping rear end side of protective tapes 4.
Then; as shown in Fig. 7 (b); under the state of clutch cutting off the motor 35 with clutch; rotate while make folder rod 14 carry out supply and supply stripping tape 5; while make stripping table 10 advance, thus, attach roller 27 carry out pressing rotation and stripping tape 5 is pasted on protective tapes 4; by making heater 28 be positioned in the stripping rearward end of protective tapes 4, stripping tape 5 heating is crimped to the stripping rearward end of protective tapes 4.
Subsequently, as shown in Fig. 7 (c), after making attaching roller 27 rising, by pressing from both sides the driving of rod 14, supplying stripping tape 5 and stripping table 10 is advanced, utilize folder rod 16 and adhesive tape winding reel 12 to carry out reeling to peel off this protective tapes 4.During this period, make stripping tape maintaining body 25 and cutting knife platform 29 rise to initial position, and make the heater 28 of attaching roller 27 return to initial position.
By repeatedly carrying out above-mentioned action, as shown in Figure 8, the protective tapes 4 of attaching on wafer 2 is linked while peeled off by the stripping tape 5 of short-movie shape.Now; owing to being provided with heater 28 in a part for the periphery attaching roller 27; as long as therefore carry out when stripping tape 5 being pasted to protective tapes 4 controlling to make heater 28 be positioned at the outer circumference end of protective tapes 4; just can be formed successively to utilize and attach roller 27 and the attaching portion, front 43 that attaches and heater pressure contact portion 44, rear end side attaching portion 45 and heater pressure contact portion 44, thus the stripping tape 5 of short-movie shape can be utilized to be peeled off to link protective tapes 4.
As mentioned above; by carrying out a series of action; the stripping tape 5 of short-movie shape need not be made in advance; just the state making a side of the stripping tape 5 of short-movie shape be attached at protective tapes 4 can be become; therefore this stripping tape 5 is easily processed; further, even if occurring to peel off unsuccessfully also can easily recovery device.
And the stripping tape that when existing 8, wafer uses is about 230mm, on the other hand, the stripping off device of the protective tapes of the application of the invention, can cut down the use amount of stripping tape to such as 35 ~ 40mm.The use amount of this stripping tape can according to used wafer diameter, protective tapes, stripping tape and suitably changing.
In addition, the above-mentioned Application Example illustrated semiconductor wafer, but also can use when the adhesive tape class of the protective tapes attached on the various substrate of stripping etc.
And, if attach the shape of the diameter of roller 27 or heater 28, size suitably changes according to the size of substrate, as long as the bond area of stripping tape 5 and protective tapes 4 is considered the adhesiveness of this stripping tape 5 or protective tapes 4 etc. and changes.
Be more than one embodiment of the present invention, but not by above-mentioned restriction, can suitably change within the scope of the invention.
Claims (3)
1. a stripping off device for protective tapes, link each protective tapes being attached to adjacent substrate surface with the stripping tape of short-movie shape, while the protective tapes of the described link that reels is to be peeled off, the feature of this stripping off device is to comprise:
Stripping table, is kept the substrate being pasted with described protective tapes as upper surface using this protecting glue zone face, and is relatively moved horizontally relative to described stripping tape;
Stripping tape feed mechanism, is supplied to the stripping tape of roll on described protective tapes;
Adhesive tape winding mechanism, winding is linked to this protective tapes of described stripping tape;
Attach roller, across described stripping tape, on described protective tapes, pressing is rotated, near the peripheral end thus stripping tape being attached to this protective tapes;
Cutting knife, after this stripping tape attaches to the stripping front of described protective tapes, cuts off the attaching rear side of this stripping tape;
Cutting knife platform, is positioned at the front of described attaching roller, is provided with the cutting knife groove of advancing for described cutting knife, and adsorbs the rear side of this stripping tape that maintenance is cut off by described cutting knife; And
Stripping tape maintaining body, is positioned at the rear of described attaching roller, and when described cutting knife cuts off this stripping tape, absorption keeps this stripping tape,
The stripping front that described stripping tape is attached to protective tapes by roller is attached while utilize, and the described stripping tape that reels, this protective tapes is peeled off from stripping front with this, and utilize described cutting knife platform and this stripping tape maintaining body to adsorb and keep this stripping tape, while utilize described cutting knife to cut off the attaching rear side of described stripping tape, reeled by adhesive tape winding mechanism again and be pasted with this protective tapes of this stripping tape, peel off this protective tapes thus, then, utilize and attach the stripping rear end side that the leading section being adsorbed this stripping tape kept by this stripping tape maintaining body is attached to described protective tapes by roller, by repeatedly carrying out above-mentioned action, thus while utilize this stripping tape to link the described protective tapes on adjacent substrate surface successively, and while peeled off.
2. the stripping off device of protective tapes according to claim 1, is characterized in that,
Described attaching roller is provided with heater in a part for its periphery, thus utilizes 1 to attach the roller attaching of carrying out the stripping tape undertaken by the rotation of described attaching roller and the heating of stripping tape that utilizes described heater to carry out attaches.
3. the stripping off device of protective tapes according to claim 1 and 2, is characterized in that,
Detecting mechanism is set between described adhesive tape winding mechanism and described cutting knife platform, to detect the protective tapes with or without being stripped.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009168256A JP5317280B2 (en) | 2009-07-16 | 2009-07-16 | Protective tape peeling device |
| JP2009-168256 | 2009-07-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101969018A CN101969018A (en) | 2011-02-09 |
| CN101969018B true CN101969018B (en) | 2015-05-20 |
Family
ID=43548155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010230381.4A Expired - Fee Related CN101969018B (en) | 2009-07-16 | 2010-07-15 | Striping apparatus of protection adhesive tape |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5317280B2 (en) |
| CN (1) | CN101969018B (en) |
| TW (1) | TWI466185B (en) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5981229B2 (en) * | 2012-06-01 | 2016-08-31 | リンテック株式会社 | Sheet peeling apparatus and peeling method |
| JP6247075B2 (en) * | 2013-10-30 | 2017-12-13 | 日東電工株式会社 | Protective tape peeling method and protective tape peeling apparatus |
| JP6325323B2 (en) * | 2014-04-14 | 2018-05-16 | 株式会社ディスコ | Tape peeling device |
| CN104960957B (en) * | 2015-05-22 | 2017-07-28 | 泉州市汉威机械制造有限公司 | A kind of outer unwinding device of line |
| JP6654831B2 (en) * | 2015-08-31 | 2020-02-26 | リンテック株式会社 | Sheet peeling device and peeling method |
| TWI576978B (en) * | 2016-04-12 | 2017-04-01 | 頎邦科技股份有限公司 | Apparatus and method for dicing flexible substrate and tearing protection tape |
| TWI616343B (en) * | 2016-08-10 | 2018-03-01 | Jhen Tou Technology Co Ltd | Automatic wafer protection layer removal equipment |
| CN108336413A (en) * | 2017-04-01 | 2018-07-27 | 深圳市新嘉拓自动化技术有限公司 | The tape sticking device of compact folding and unfolding adhesive tape |
| JP6963483B2 (en) * | 2017-12-08 | 2021-11-10 | 株式会社ディスコ | Peeling tape cutter |
| WO2019207634A1 (en) * | 2018-04-24 | 2019-10-31 | ディスコ ハイテック ヨーロッパ ゲーエムベーハー | Device and method for attaching protective tape to semiconductor wafer |
| JP7165572B2 (en) * | 2018-12-07 | 2022-11-04 | リンテック株式会社 | Sheet peeling device and sheet peeling method |
| JP7319889B2 (en) * | 2019-10-21 | 2023-08-02 | 株式会社東京精密 | Sheet peeling device |
| JP7454434B2 (en) | 2020-04-14 | 2024-03-22 | リンテック株式会社 | Sheet peeling device and sheet peeling method |
| CN112269302B (en) * | 2020-09-16 | 2023-05-30 | 上海光起电子设备有限公司 | Dust removing device of exposure machine |
| CN114906660B (en) * | 2022-05-06 | 2023-09-05 | 安徽省唯一纺织有限公司 | Automatic sticking equipment for magic tape |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1203181A (en) * | 1997-06-20 | 1998-12-30 | 琳得科株式会社 | Sheet removing apparatus and method |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0749796Y2 (en) * | 1989-11-07 | 1995-11-13 | 松下電子工業株式会社 | Wafer protection sheet peeling device |
| JP4204658B2 (en) * | 1997-11-28 | 2009-01-07 | リンテック株式会社 | Sheet peeling apparatus and method |
| US6715524B2 (en) * | 2002-06-07 | 2004-04-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | DFR laminating and film removing system |
| JP4057478B2 (en) * | 2003-06-26 | 2008-03-05 | リンテック株式会社 | Sheet peeling apparatus and peeling method |
| JP4803751B2 (en) * | 2007-08-09 | 2011-10-26 | 株式会社タカトリ | Wafer protective tape peeling device |
-
2009
- 2009-07-16 JP JP2009168256A patent/JP5317280B2/en active Active
-
2010
- 2010-07-15 CN CN201010230381.4A patent/CN101969018B/en not_active Expired - Fee Related
- 2010-07-16 TW TW099123482A patent/TWI466185B/en active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1203181A (en) * | 1997-06-20 | 1998-12-30 | 琳得科株式会社 | Sheet removing apparatus and method |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI466185B (en) | 2014-12-21 |
| CN101969018A (en) | 2011-02-09 |
| JP5317280B2 (en) | 2013-10-16 |
| JP2011023612A (en) | 2011-02-03 |
| TW201104739A (en) | 2011-02-01 |
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