CN101896350B - 用于液体排出头的基体以及使用该基体的液体排出头 - Google Patents

用于液体排出头的基体以及使用该基体的液体排出头 Download PDF

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Publication number
CN101896350B
CN101896350B CN2008801201208A CN200880120120A CN101896350B CN 101896350 B CN101896350 B CN 101896350B CN 2008801201208 A CN2008801201208 A CN 2008801201208A CN 200880120120 A CN200880120120 A CN 200880120120A CN 101896350 B CN101896350 B CN 101896350B
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CN
China
Prior art keywords
liquid discharge
discharge head
protective layer
film
upper protective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2008801201208A
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English (en)
Chinese (zh)
Other versions
CN101896350A (zh
Inventor
柴田和昭
齐藤一郎
松居孝浩
尾崎照夫
小室博和
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Canon Inc
Original Assignee
Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN101896350A publication Critical patent/CN101896350A/zh
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Publication of CN101896350B publication Critical patent/CN101896350B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN2008801201208A 2007-12-12 2008-11-27 用于液体排出头的基体以及使用该基体的液体排出头 Expired - Fee Related CN101896350B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007320954 2007-12-12
JP2007-320954 2007-12-12
PCT/JP2008/071994 WO2009075214A1 (en) 2007-12-12 2008-11-27 Base for liquid discharge head, and liquid discharge head using the same

Publications (2)

Publication Number Publication Date
CN101896350A CN101896350A (zh) 2010-11-24
CN101896350B true CN101896350B (zh) 2013-10-02

Family

ID=40755458

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008801201208A Expired - Fee Related CN101896350B (zh) 2007-12-12 2008-11-27 用于液体排出头的基体以及使用该基体的液体排出头

Country Status (4)

Country Link
US (1) US8449080B2 (enExample)
JP (1) JP5311975B2 (enExample)
CN (1) CN101896350B (enExample)
WO (1) WO2009075214A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5679688B2 (ja) 2010-03-31 2015-03-04 キヤノン株式会社 液体吐出ヘッド及びその製造方法
JP2017001217A (ja) * 2015-06-05 2017-01-05 キヤノン株式会社 液体吐出ヘッド、液体吐出ヘッドの製造方法
US20190263125A1 (en) * 2017-01-31 2019-08-29 Hewlett-Packard Development Company, L.P. Atomic layer deposition oxide layers in fluid ejection devices
JP7134752B2 (ja) * 2018-07-06 2022-09-12 キヤノン株式会社 液体吐出ヘッド
JP7163134B2 (ja) 2018-10-18 2022-10-31 キヤノン株式会社 液体吐出ヘッド、液体吐出ヘッドの製造方法および液体吐出装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003145767A (ja) * 2001-11-09 2003-05-21 Canon Inc 液体吐出ヘッド、その製造方法及び液体吐出装置
CN1732086A (zh) * 2002-12-27 2006-02-08 佳能株式会社 用于喷墨头的衬底、使用所述衬底的喷墨头及其制造方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4860033A (en) 1987-02-04 1989-08-22 Canon Kabushiki Kaisha Base plate having an oxidation film and an insulating film for ink jet recording head and ink jet recording head using said base plate
ATE144193T1 (de) 1990-12-12 1996-11-15 Canon Kk Tintenstrahlaufzeichnung
JPH0584910A (ja) * 1991-09-26 1993-04-06 Canon Inc 液体噴射記録ヘツド
JP3115720B2 (ja) 1992-09-29 2000-12-11 キヤノン株式会社 インクジェット記録ヘッド、該記録ヘッドを備えたインクジェット記録装置及び該記録ヘッドの製造方法
JP3143307B2 (ja) 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JPH09109392A (ja) 1995-10-13 1997-04-28 Canon Inc インクジェット記録ヘッドの製造方法および同方法により製造されたインクジェット記録ヘッド、並びにインクジェット記録装置
JP2000043271A (ja) 1997-11-14 2000-02-15 Canon Inc インクジェット記録ヘッド、その製造方法及び該インクジェット記録ヘッドを具備する記録装置
JP3559701B2 (ja) 1997-12-18 2004-09-02 キヤノン株式会社 インクジェット記録ヘッド用基板、該基板の製造方法及びインクジェット記録ヘッド及びインクジェット記録装置
US6402302B1 (en) 1999-06-04 2002-06-11 Canon Kabushiki Kaisha Liquid discharge head, manufacturing method thereof, and microelectromechanical device
JP2001105599A (ja) 1999-10-05 2001-04-17 Canon Inc 液体吐出ヘッド、液体吐出ヘッドの製造方法および液体吐出装置
JP4078295B2 (ja) 2002-12-27 2008-04-23 キヤノン株式会社 インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法
JP3962719B2 (ja) 2002-12-27 2007-08-22 キヤノン株式会社 インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法
US7117597B2 (en) * 2004-08-06 2006-10-10 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head
JP4137027B2 (ja) 2004-08-16 2008-08-20 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
JP4182035B2 (ja) 2004-08-16 2008-11-19 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
US7472975B2 (en) 2005-07-08 2009-01-06 Canon Kabushiki Kaisha Substrate for ink jet printing head, ink jet printing head, ink jet printing apparatus, and method of blowing fuse element of ink jet printing head
WO2007105801A1 (ja) 2006-03-10 2007-09-20 Canon Kabushiki Kaisha 液体吐出ヘッド基体、その基体を用いた液体吐出ヘッドおよびそれらの製造方法
JP4926691B2 (ja) 2006-12-21 2012-05-09 キヤノン株式会社 インクジェット記録ヘッド、およびインクジェット記録ヘッドの製造方法
JP5312202B2 (ja) 2008-06-20 2013-10-09 キヤノン株式会社 液体吐出ヘッド及びその製造方法
JP5393275B2 (ja) 2008-06-24 2014-01-22 キヤノン株式会社 液体吐出ヘッド

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003145767A (ja) * 2001-11-09 2003-05-21 Canon Inc 液体吐出ヘッド、その製造方法及び液体吐出装置
CN1732086A (zh) * 2002-12-27 2006-02-08 佳能株式会社 用于喷墨头的衬底、使用所述衬底的喷墨头及其制造方法

Also Published As

Publication number Publication date
CN101896350A (zh) 2010-11-24
US8449080B2 (en) 2013-05-28
WO2009075214A1 (en) 2009-06-18
US20100220154A1 (en) 2010-09-02
JP2009160918A (ja) 2009-07-23
JP5311975B2 (ja) 2013-10-09

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Granted publication date: 20131002

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