CN101842165A - 机械整合并且紧密连接的印刷头和烟雾源 - Google Patents

机械整合并且紧密连接的印刷头和烟雾源 Download PDF

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CN101842165A
CN101842165A CN200880113517A CN200880113517A CN101842165A CN 101842165 A CN101842165 A CN 101842165A CN 200880113517 A CN200880113517 A CN 200880113517A CN 200880113517 A CN200880113517 A CN 200880113517A CN 101842165 A CN101842165 A CN 101842165A
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布鲁斯·H·金
格雷戈里·詹姆斯·马克斯
迈克尔·J·雷恩
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Abstract

一种沉积装置，所述装置包括在结构上与沉积头整合的一个或多个雾化器。整个沉积头可以是可更换的，并且可以用材料预先填充。沉积头可以包括多个喷嘴。此外，还提供一种用于三维材料沉积的装置，所述装置包括与不可倾斜的雾化器连接的可倾斜沉积头。还提供用于同时或依次沉积不同材料的方法和装置。

Description

机械整合并且紧密连接的印刷头和烟雾源
相关申请的交叉引用
本申请要求在2007年8月30日提交的名称为″机械整合并且紧密连接的印刷头和烟雾源(Mechanically Integrated and Closely Coupled Print Headand Mist Source)″的美国临时专利申请序列60/969,068的申请日权益，该美国临时专利申请的说明书通过引用结合在此。
发明背景
发明领域(技术领域)
本发明是一种包括雾化器的装置，所述雾化器位于直接将材料沉积到平坦或不平坦的目标物上的沉积头内部或相邻处。
发明简述
本发明是用于沉积材料的沉积头，所述沉积头包括：一个或多个载气进口；一个或多个雾化器；气溶胶歧管，其在结构上与所述一个或多个雾化器整合；一个或多个气溶胶输送导管，其与所述气溶胶歧管流体连通；包覆气体进口和一个或多个材料沉积出口。沉积头优选还包括虚拟冲击器(virtual impactor)和废气出口，所述虚拟冲击器被设置在一个或多个雾化器中的至少一个和气溶胶歧管之间。沉积头优选包括材料的储存器，以及任选的用于将未使用的材料从气溶胶歧管传输回到储存器中的排出管(drain)。沉积头任选还包括材料的外部储存器，该储存器可用于选自如下各项中的目的：能够更长时间地运行而不用重新填充，将材料保持在所需的温度，将所述材料保持在所需的粘度，将材料保持在所需的组成，以及防止粒子的聚集。沉积头优选还包括包覆气体歧管，该包覆气体歧管至少同心地包围一个或多个气溶胶输送导管的中部。沉积头任选还包括包覆气体室，该包覆气体室包围每一个包括导管出口在内的气溶胶输送导管的一部分，所述气溶胶输送导管优选足够长，因而在包覆气体流与气溶胶流于所述包覆气体室的出口处或附近合并之前，所述包覆气体流基本上平行于所述气溶胶流，所述合并是在所述气溶胶流离开所述导管出口之后进行的。沉积头任选可更换，并且包括在安装之前预先填充有材料的材料储存器。这种沉积头任选是一次性的(disposable)，或是可再填充的。一个或多个雾化器中的每一个雾化不同的材料，这些材料优选不混合和/或不反应，直到即将沉积之前或沉积期间。要被沉积的不同材料的比率优选是可控的。雾化器任选同时运行，或至少两个雾化器任选在不同时间运行。
本发明还是用于三维材料沉积的装置，所述装置包括沉积头和雾化器，其中沉积头和雾化器在三个线性维度上一起移动，并且其中沉积头是可倾斜的，而雾化器不是可倾斜的。所述装置优选用于将材料沉积在结构体的外部、内部和/或下面，并且优选被构造成使得沉积头可延伸到窄的通道内。
本发明还是一种用于沉积材料的方法，所述方法包括如下步骤：雾化第一材料以形成第一气溶胶，雾化第二材料以形成第二气溶胶，将所述第一气溶胶和第二气溶胶合并，用环状的包覆气体流包围合并的气溶胶，将合并的气溶胶集中，以及沉积所述气溶胶。雾化步骤任选同时或依次进行。所述方法任选还包括改变在至少一种气溶胶中的材料的量的步骤。雾化步骤任选包括使用不同设计的雾化器。所述方法任选还包括沉积复合结构体的步骤。
本发明的一个优点是改善了沉积，原因在于降低了液滴的蒸发和降低了过度喷射。
本发明的另一个优点是降低了在气流的开始和材料到目标物上的沉积之间的延迟。
本发明的目的、其它优点和新的特征以及另外的可应用性范围将在下面的详述中结合附图部分地进行描述，并对于本领域技术人员，通过以下内容的审查将部分地变得明显，或可以通过本发明的实施而知晓。本发明的目的和优点可以通过特别在后附权利要求书中指出的手段和组合而实现和获得。
附图说明
结合到说明书中并且形成说明书的一部分的附图示出本发明的一个或多个实施方案，并且与说明书一起起到解释本发明的原理的作用。附图仅为了示出本发明的一个或多个优选实施方案的目的并且不应理解为限制本发明。在附图中：
图1是本发明的用于梯度材料(gradient material)制备的装置的示意图；
图2是具有雾化器的整体式的多喷嘴沉积头的示意图；
图3是具有单气溶胶喷射器的整合雾化器的示意图；
图4是整合了雾化器、沉积头和虚拟冲击器的单一装置的横截面示意图；
图5是具有沉积头和虚拟冲击器的整合的雾化系统的备选实施方案的示意图；
图6是具有沉积头和流量降低器的多喷嘴整合的雾化系统的另一个备选实施方案的示意图；以及
图7是与沉积头整合的多个雾化器(一个为容纳于一个室内的气动雾化器以及另一个为容纳于另一个室内的超声雾化器)的示意图。
发明详述
本发明总体上涉及利用气动力学集中(focusing)对液体、溶液和液体-粒子悬浮液的高分辨率、无掩模沉积。在一个实施方案中，将气溶胶流集中并且沉积到平坦或不平坦的目标物上，从而形成图案，这种图案被热或光化学处理以实现接近对应的本体材料的物理、光学和/或电学性质。这种方法被称为
Figure GPA00001115622400031
(无掩模中等尺度材料沉积(Maskless Mesoscale MaterialDeposition))技术，并且被用于沉积，优选直接并且在不使用掩模的情况下沉积气溶胶化的材料，其线宽的数量级小于用常规厚膜方法沉积的线的线宽的数量级，甚至小于1微米。
Figure GPA00001115622400032
装置优选包括气溶胶喷射印刷头，以形成由外部包覆流(sheathflow)和内部的气溶胶携带的载体流构成的环状传送射流。在所述环状气溶胶喷射法中，气溶胶流典型地进入印刷头，优选正好在气溶胶化方法之后或在经过加热器组件之后进入印刷头，并且沿着该装置的轴引导至印刷头锐孔。物料通过量优选通过气溶胶载气质量流量控制器控制。在沉积头内部，气溶胶流优选首先通过穿过毫米大小的锐孔而准直。然后，出来的粒子流优选与环状包覆气体合并，这起着消除喷嘴堵塞以及使气溶胶流集中的作用。载气和包覆气体最通常地包括压缩空气或惰性气体，其中一种或两种可以包含改性的溶剂蒸气内含物。例如，当气溶胶由水溶液形成时，水蒸气可以被添加到载气或包覆气体中以防止液滴蒸发。
包覆气体优选经由在气溶胶进口下面的包覆空气进口进入，并且与气溶胶流一起形成环形流。如同气溶胶载气一样，包覆气体流量优选通过质量流量控制器控制。合并的流以高速(～50m/s)经由对着目标物的锐孔离开喷嘴，并且随后撞击到目标物上。这种环形流将气溶胶流集中到目标物上，并且可以印刷尺寸小于约1微米的特征。通过使沉积头相对于目标物移动来形成图案。
与沉积头相邻布置的雾化器
雾化器典型地经由烟雾输送装置与沉积头连接，而不与沉积头机械连接。在本发明的一个实施方案中，雾化器和沉积头是完全整合的，共用共同的结构元件。
如整个说明书和权利要求书所使用的，术语“雾化器”是指典型地用于悬浮成气溶胶的雾化器、喷雾器、换能器、活塞或任何其它器件，它们以任何方式启动，包括但不限于气动、超声、机械，或经由喷雾工艺，其被用于由液体或其它材料形成更小的液滴或粒子，或来自蒸气的冷凝粒子。
如果雾化器与沉积头相邻或整合在一起，则烟雾在雾化器和所述头之间的传输所需要的管道的长度减小或消除。相应地，烟雾在管中的通过时间显著降低，因而在传输过程中来自液滴的溶剂损失最小化。这进而降低了过度喷射并且可以使用比通常能够被使用的液体更易挥发的液体。此外，在输送管内的粒子损失被最小化或消除，从而提高了沉积系统的总效率以及降低了堵塞的发生。系统的响应时间也得到了明显改善。
进一步的优点涉及紧密连接的头部在构造制造用系统中的使用。对于小的基板，通过固定雾化器和沉积头并且移动基板来简化自动化。在这种情况下，对于雾化器，相对于沉积头的布置选择有很多种。然而，对于大的基板，比如在制造平板显示器中碰到的那些基板，情形是相反的，并且移动沉积头是更简单的。在这种情况下，雾化器的布置选择受更多的限制。典型地，需要长的管道长度，以将烟雾从固定的雾化器输送到安装在移动台上的头部。由于聚结所导致的烟雾损失可能是严重的，并且由于长的停留时间导致的溶剂损失可能使烟雾干燥至不再可使用的水平。
另一个优点起因于筒式(cartridge-style)雾化器和沉积头的构造。在这种构造中，雾化器和沉积头以它们可以作为单一装置被安装到印刷系统上并且从该印刷系统上拆卸的这种方式连接。在这种构造中，雾化器和头部可以容易并且快速地进行更换。更换可以在通常的维修过程中进行，或由于灾难性故障事件比如喷嘴堵塞而进行。在这种实施方案中，雾化器储存器优选预先装载有原料，使得在安装时立即将更换装置准备使用。在相关的实施方案中，筒式装置允许印刷系统的快速替换。例如，容纳有材料A的印刷头可以快速地与容纳有材料B的印刷头交换。在这些实施方案中，雾化器/头部装置或筒优选被设计成是低成本的，使得它们能够作为消耗品售卖，这种消耗品可以是一次性的或是可再填充的。
在一个实施方案中，雾化器和沉积头完全整合成共用结构元件的单一装置，如图4所示。这种构造优选为最紧凑的并且最接近地表现为筒式装置。
虚拟冲击器通常用于移除运行气动雾化器所必要的过量气体，因此在整合雾化器的实施方案中还与沉积头整合。加热器，其用途在于加热烟雾并且驱散溶剂，也可以被整合到装置中。用于维持在雾化器中的原料所必需的，但是对于雾化未必是必需的，比如原料量控制或低墨水量报警、搅拌和温度控制的元件也可以任选被整合到雾化器中。
可以与装置整合的元件的其它实例通常涉及传感和诊断。将传感元件直接整合到装置中的背后动机是提高响应和精度。例如，可以将压力传感整合到沉积头。压力传感提供了关于整个沉积头状态的反馈；高于正常情况的压力表示喷嘴被堵塞，而低于正常的压力表示在系统中存在泄漏。通过将一个或多个压力传感器直接放置在沉积头中，反馈更迅速和更精确。确定材料的沉积速率的烟雾传感也可以被整合到装置中。
典型的气溶胶喷射系统使用了电子质量流量控制器以计量处于特定速率的气体。包覆气体和雾化器气体流量通常是不同的，并且可以取决于材料原料和应用而变化。对于为不需要可调节性的特定目的而制造的沉积头，电子质量流量控制器可以被静态节流器(static restriction)所代替。对于给定上游压力，一定尺寸的静态节流器将仅允许一定量的气体通过其中。通过精确地将上游压力控制为预定的水平，静态节流器可以是适当大小的，以替换用于包覆气体和雾化器气体的电子质量流量控制器。用于虚拟冲击器废气的质量流量控制器通常可以容易被拆卸，条件是使用真空泵，该真空泵优选能够产生约16 inHg的真空。在这种情况下，节流器起着临界锐孔的作用。静态节流器和其它控制元件在沉积头中的整合减少了必需延伸到该沉积头的气体管线的数量。这种情况对于其中沉积头移动而不是基板移动的情形是特别有用的。
在本文中提供的任何实施方案中，无论雾化器是否与沉积头整合，该沉积头都可以包括单喷嘴或多喷嘴设计，即，具有任何数量的喷嘴。多喷射器阵列包括以任何几何结构构造的一个或多个喷嘴。
图1显示了在沉积头中与气溶胶喷射器整合的超声雾化器的实施方案。墨水12位于在与加长喷嘴25相邻的储存器中。超声换能器10将墨水12雾化。然后，经雾化的墨水18被经由烟雾空气进口14进入的烟雾空气或载气携带出储存器，并且绕着挡板24被引导至相邻的烟雾歧管，在此它进入烟雾输送管30。包覆气体经由包覆气体进口22进入包覆气体歧管28。当经雾化的墨水移动经过烟雾输送管30时，随着它进入加长喷嘴25它被包覆空气集中。
图2是整合的气动雾化系统的实施方案，其具有单一喷嘴沉积头和虚拟冲击器。雾化气体36进入墨水储存器34，在此它使墨水雾化并且携带雾化的墨水118进入虚拟冲击器38。雾化气体36是至少部分汽提过的，并且经由虚拟冲击器气体废气32离开。雾化的墨水118继续向下通过任选的加热器42并且进入到沉积头44。包覆气体122进入沉积头并且使雾化的墨水118集中。
图3是整合的气动雾化器、虚拟冲击器和单喷嘴沉积头的备选实施方案的横截面示意图。允许可调节流量的活塞19被用于使从墨水悬浮液进口17进入的墨水雾化。然后，经雾化的墨水218移动至相邻的虚拟冲击器138。废气经由废气出口132离开虚拟冲击器。然后雾化的墨水218移动至相邻的沉积头144，在此包覆气体122使墨水集中。
图4显示了具有整合的超声雾化器的整体式多喷嘴气溶胶喷射沉积头的实施方案。墨水312位于优选与喷嘴阵列326相邻的储存器中。超声换能器310使墨水雾化。然后，雾化的墨水318被经由烟雾空气进口314进入的烟雾空气携带出储存器，并且绕着挡板324被引导至相邻的气溶胶歧管320，在此它进入各个气溶胶输送管330。没有进入到任何烟雾输送管330内的雾化墨水318优选经由放空的排出管316再循环回到相邻的墨水储存器。包覆气体经由包覆气体进口322进入包覆气体歧管328。当雾化墨水318移动通过烟雾输送管330时，随着它进入喷嘴阵列326而被包覆气体集中。
图5是多喷嘴整合气动雾化系统的一个实施方案，该系统具有使用了歧管和流量降低器的沉积头。烟雾空气经由通往气动雾化器452的烟雾空气进口414进入整合系统中。被夹带在烟雾空气中形成气溶胶的雾化的材料然后移动到相邻的虚拟冲击器438。废气经由废气出口432离开虚拟冲击器。然后，气溶胶移动到歧管进口447，并且经由一个或多个烟雾输送管430进入一个或多个包覆气体室448。包覆气体经由气体进口422进入沉积头，气体进口422任选与烟雾输送管430垂直定向，并且在烟雾输送管430的底部与气溶胶流合并。烟雾输送管430部分延长或完全延长至包覆气体室448的底部，优选形成直的几何结构。包覆气体室448的长度优选足够长，以确保包覆气体流与气溶胶流在两者合并之前基本上平行，由此产生优选圆柱形对称的包覆气体压力分布。然后包覆气体与气溶胶在包覆气体室448的底部或附近合并。保持这种用于合并气溶胶载气与包覆气体的直区域的优点在于：包覆流在与烟雾合并之前充分地形成，并且在烟雾管430周围分布更均匀，由此使得在合并过程中的湍流最小，使包覆/烟雾混合最小，降低了过度喷射以及产生了更紧密的集中。此外，在阵列中的喷嘴之间的“串流(cross talk)”最小化，这归因于单独的包覆气体室448。
歧管可以任选与沉积头远距离布置，或布置在沉积头上或在沉积头内部。在任一构造中，歧管可以由一个或多个雾化器进料。在图示的构造中，单一流量降低器(虚拟冲击器)被用于多喷射器阵列沉积头。在单个流量降低阶段不足以移除足够的过量载气的情况下，可以采用多个降低阶段。
多个雾化器
所述装置可以包括一个或多个雾化器。可以采用基本上相同设计的多个雾化器以产生更大量的从沉积头输送的烟雾，由此增加高速制造用的通过量。在这种情况下，基本上相同组成的材料优选起着用于多个雾化器的原料的作用。多个雾化器可以共用共同的原料室或任选地可以使用单独的室。可以使用独立的室来容纳不同组成的材料，以防止材料混合。在多种材料的情况下，雾化器可以同时运行，以所需的比率输送材料。可以使用任何的材料，比如电子材料、粘合剂、材料前体，或生物物质或生物材料。材料可以具有不同的材料组成、粘度、溶剂组成、悬浮流体，以及很多不同的其它物理、化学和材料性质。样品还可以是混溶或不混容的，并且可以是反应性的。在1个实例中，比如单体和催化剂之类的材料可以在使用之前保持分开直至使用，以避免在雾化器室中的反应。然后，优选将材料在沉积过程中以特定比率混合。在另外的实例中，具有不同的雾化特性的材料可以单独雾化以使各个材料的雾化率最佳化。例如，玻璃粒子的悬浮液可以采用1个雾化器雾化，而银粒子的悬浮液可以通过第二个雾化器雾化。在最终的沉积迹线中，可以控制玻璃与银的比率。
雾化器可以备选地依次运行以在相同位置上或在不同的位置上单独输送材料。在相同位置上的沉积能够形成复合结构，而在不同区域的沉积能够在基板的相同层上形成多个结构体。
任选地，雾化器可以包括不同的设计。例如，如图7所示，气动雾化器可以容纳在1个室内，而超声雾化器可以容纳在另一个室内。这允许最佳地选择雾化器，以匹配材料的雾化特性。
图6示出了用于同时经由单一沉积头沉积多种材料的
Figure GPA00001115622400081
法。每一个雾化器单元4a-c产生其相应样品的液滴，并且该液滴优选通过载气引导至合并室6。液滴流在合并室6中汇合，然后被引导至沉积头2。然后，同时沉积多种类型的样品液滴。沉积的相对速率优选通过进入每一个雾化器4a-c的载气速率进行控制。载气速率可以连续或间歇地变化。
这样的梯度材料制备允许由载气流量控制连续的混合比率。这种方法也允许多个雾化器和样品在同时使用。此外，在目标物上发生混合，而不是在样品瓶或气溶胶管线内发生。这种方法可以沉积各种类型的材料，包括但不限于：UV、热固性或热塑性聚合物；粘合剂；溶剂；蚀刻化合物；金属墨水；电阻材料(resistor)、电介质和金属厚膜膏；蛋白质、酶和其它生物材料；以及低(聚)核苷酸。梯度材料制备的应用包括但不限于：梯度光学，比如折射率的3D梯度化；梯度纤维光学；合金沉积；陶瓷/金属结；在传输(on the fly)中共混电阻材料墨水；组合药物释放；连续灰度级照片的制备；连续彩色照片的制备；用于在RF(无线电频率)电路中阻抗匹配的梯度结；在目标物上的化学反应，比如电子特征的选择性蚀刻；在芯片上的DNA制备；以及粘合剂材料的保存期的延长。
图7显示了多个雾化器与沉积头的整合。在沉积头544的一侧是具有烟雾空气进口514的超声雾化器部550。在沉积头544的另一侧是气动雾化器552，其具有烟雾空气进口516和带有废气出口532的虚拟冲击器538。在该图中，包覆气体进口522并没有显示包覆气体路径。尽管这个实施方案对于匹配材料的雾化特性是最佳的，但是多个雾化器的其它组合是可能的，比如两个或更多个超声雾化器；两个或更多个气动雾化器；或它们的任何组合。
非整合的雾化器或组件
存在不优选将雾化器或某些组件整合的情况，如具有沉积头的单一装置。例如，沉积头典型地具有当相对于垂直以任意角度定向时进行印刷的能力。然而，雾化器可以包括流体储存器，该流体储存器必需保持在某一水平的位置以适当地发挥作用。因此，在沉积头是铰接的情况下，这种雾化器和沉积头必需不是刚性连接的，由此能够使雾化器在这种铰接过程中保持水平。这种构造的一个实例是这样的雾化器和沉积头被安装到机械臂的末端上的情况。在这种实例中，雾化器和沉积头组件在x、y和z上一起移动。然而，所述装置被构造成使得仅沉积头没有倾斜任意角度。这种构造有利于三维空间中的印刷，比如印刷到结构体，包括但不限于大的结构体比如机身的外部、内部或下面。
在紧密连接的、但是没有完全整合的雾化器和印刷头的另一个实例中，布置合并单元使得沉积头可以延伸到窄的通道中。
尽管在某些构造中，雾化器的烟雾产生部与沉积头相邻布置，但是雾化器的不产生烟雾的部分可以任选地远距离布置。例如，用于超声雾化器的驱动电路可以远距离布置并且不整合到装置中。用于材料原料的储存器也可以远距离布置。可以采用远距离布置的储存器来再填充与沉积头有关的本地储存器，从而能够在不用用户维护的情况下长时期运行。在特定的条件下，还可以采用远距离布置的储存器来维护原料，例如，在使用前冷却温度敏感的流体。其它形式的维护可以远距离进行，比如粘度调节、组成调节或防止粒子聚集的超声。原料可以仅在1个方向上流动，例如，从远距离布置的储存器再供给至本地的墨水储存器，或可以备选地从本地墨水储存器返回至远距离的储存器，用于维护或储存的目的。
材料
本发明能够沉积液体、溶液和液体-粒子悬浮液。还可以沉积这些的组合，比如还包含一种或多种溶质的液体-粒子悬浮液。液体材料是优选的，还可以在采用液体载体促进雾化，但随后经由干燥步骤移除的情况下沉积干燥的材料。
在本文中提及了超声和气动雾化方法。尽管这两种方法中的任一种可以被用于雾化仅具有特定性质范围的流体，但是可以被本发明使用的材料并不受这两种雾化方法的限制。在上述的雾化方法之一不适合于特定材料的情况下，可以选择不同的雾化方法，并且将其结合到本发明中。此外，本发明的实施并不依赖于特定的液体载体或配方，可以使用许多材料源。
尽管特别参照这些优选实施方案详细描述了本发明，但是其它实施方案也可以实现相同的结果。本发明的变化和改变对于本领域技术人员是显而易见的，并且意欲在后附权利要求中涵盖所有这样的改变和等价物。以上引用的全部参考文献、申请、专利和出版物的整个公开内容都通过引用结合在此。

Claims (23)

1.一种用于沉积材料的沉积头，所述沉积头包括：
一个或多个载气进口；
一个或多个雾化器；
气溶胶歧管，其在结构上与所述一个或多个雾化器整合；
一个或多个气溶胶输送导管，其与所述气溶胶歧管流体连接；
包覆气体进口；以及
一个或多个材料沉积出口。
2.权利要求1所述的沉积头，所述沉积头还包括虚拟冲击器和废气出口，所述虚拟冲击器被设置在所述一个或多个雾化器中的至少一个和所述气溶胶歧管之间。
3.权利要求1所述的沉积头，所述沉积头还包括材料的储存器。
4.权利要求3所述的沉积头，所述沉积头还包括用于将未使用的材料从所述气溶胶歧管传输回到所述储存器中的排出管。
5.权利要求3所述的沉积头，所述沉积头还包括材料的外部储存器，该外部储存器可用于选自如下各项中的目的：能够更长时间地运行而不用重新填充，将所述材料保持在所需的温度，将所述材料保持在所需的粘度，将所述材料保持在所需的组成，以及防止粒子的聚集。
6.权利要求1所述的沉积头，所述沉积头还包括包覆气体歧管，所述包覆气体歧管至少同心地包围所述一个或多个气溶胶输送导管的中部。
7.权利要求1所述的沉积头，所述沉积头还包括包覆气体室，该包覆气体室包围每一个包括导管出口在内的气溶胶输送导管的一部分。
8.权利要求7所述的沉积头，其中所述气溶胶输送导管足够长，因而在包覆气体流与气溶胶流于所述包覆气体室的出口处或附近合并之前，所述包覆气体流基本上平行于所述气溶胶流，所述合并是在所述气溶胶流离开所述导管出口之后进行的。
9.权利要求1所述的沉积头，其中所述沉积头是可更换的。
10.权利要求9所述的沉积头，所述沉积头还包括在安装之前预先填充有材料的材料储存器。
11.权利要求9所述的沉积头，其中所述沉积头是一次性的或可再填充的。
12.权利要求1所述的沉积头，其中所述一个或多个雾化器中的每一个雾化不同的材料。
13.权利要求12所述的沉积头，其中所述不同的材料不混合和/或反应，直到在即将沉积之前或沉积期间。
14.权利要求12所述的沉积头，其中要被沉积的材料的比率是可控的。
15.权利要求12所述的沉积头，其中所述雾化器是同时运行的，或所述雾化器中的至少2个是在不同时间运行的。
16.一种用于三维材料沉积的装置，所述装置包括沉积头和雾化器，其中所述沉积头和雾化器在三个线性维度上一起移动，并且其中所述沉积头是可倾斜的，而所述雾化器不是可倾斜的。
17.权利要求16所述的材料沉积装置，所述材料沉积装置可用于将所述材料沉积在结构体的外部、内部和/或下面。
18.权利要求16所述的材料沉积装置，所述材料沉积装置被构造成使得所述沉积头可延伸到窄的通道内。
19.一种用于沉积材料的方法，所述方法包括如下步骤：
雾化第一材料以形成第一气溶胶；
雾化第二材料以形成第二气溶胶；
将所述第一气溶胶和第二气溶胶合并；
用环状的包覆气体流包围合并的气溶胶；
将所述合并的气溶胶集中；以及
沉积所述气溶胶。
20.权利要求19所述的方法，其中所述的雾化步骤同时或依次进行。
21.权利要求19所述的方法，所述方法还包括改变这些气溶胶的至少一种中的材料的量的步骤。
22.权利要求19所述的方法，其中所述雾化步骤包括使用不同设计的雾化器。
23.权利要求19所述的方法，所述方法还包括沉积复合结构体的步骤。
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