CN101896642B - 一种用于淀积材料的方法和设备 - Google Patents

一种用于淀积材料的方法和设备 Download PDF

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CN101896642B
CN101896642B CN200880119970.6A CN200880119970A CN101896642B CN 101896642 B CN101896642 B CN 101896642B CN 200880119970 A CN200880119970 A CN 200880119970A CN 101896642 B CN101896642 B CN 101896642B
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CN101896642A (zh
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马瑟里诺·埃辛
布鲁斯·H·金
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Optomec Inc
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    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/0075—Nozzle arrangements in gas streams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
    • B05B1/20—Arrangements of several outlets along elongated bodies, e.g. perforated pipes or troughs, e.g. spray booms; Outlet elements therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
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    • B05B7/0491—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid the liquid and the gas being mixed at least twice along the flow path of the liquid
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    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
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Abstract

本发明公开了一种用于淀积成烟雾状散开材料的设备和方法，其中，浮质流被多于一个的连续鞘气流包围和聚集。混合的鞘气流和浮质流可以连续流动通过多于一个的毛细管，从而使流动进一步变窄。可以实现小于一微米的线宽。

Description

一种用于淀积材料的方法和设备
相关申请的交叉引用 
本申请主张2007年10月9日提出申请的题目为“Multiple SheathMultiple Capillary Aerosol Jet Apparatus”的临时专利申请No.60/978,649的权益，所述申请的说明书通过引用在此并入。 
技术领域
本发明总体涉及一种用于使用多个鞘以包围浮质流并提供空气动力聚集来对液体和液体颗粒悬浮液进行高解析度、无掩模式沉积的设备和方法。 
发明内容
本发明提供一种用于淀积材料的方法，所述方法包括以下步骤：使材料成烟雾状散开以形成浮质流；利用第一鞘气流包围浮质流以形成第一混合流；利用第二鞘气流包围第一混合流以形成第二混合流；使第二混合流通过至少一个第一毛细管；以及使得材料淀积。被沉积材料的线宽在大约10微米与大约1毫米之间。所述方法优选地还包括以下步骤：在利用第二鞘气流包围第一混合流之前，使第一混合流通过第二毛细管，在这种情况下，被沉积材料的线宽优选地小于大约10微米，并且更优选地小于大约1微米。每一个毛细管的孔口直径优选地在大约50微米与大约1毫米之间。被沉积材料的线宽优选地比毛细管孔口尺寸小大约40倍。所述方法优选地还包括以下步骤：打开排放阀以防止浮质流通过第一毛细管。 
本发明还提供了一种用于淀积材料的设备，所述设备包括：浮质入口；第一鞘气入口；第二鞘气入口；和至少一个第一毛细管。所述设备还优选地包括第二毛细管，所述第二毛细管设置在第一鞘气入口与第二鞘气入口之间。第一毛细管与第二毛细管之间的距离优选地可变化。每一个毛细管的孔口直径优选地在大约50微米与大约1毫米之间。被沉积材料的线宽优 选地比毛细管孔口尺寸小大约40倍。第一毛细管的孔口直径优选地与第二毛细管的孔口直径相同。可选地，第一毛细管的孔口直径可以小于第二毛细管的孔口直径。所述设备还包括排放阀或真空歧管，所述排放阀或真空歧管用于防止浮质流通过第一毛细管。包括第一毛细管的第一设备级任选地与包括第二毛细管的第二设备级以串列的方式叠置。 
以下结合附图在随后的详细说明中部分地说明本发明的目的、优点和新颖性特征、和适用性的进一步保护范围，并且所述目的、优点和新颖性特征、和适用性的进一步保护范围对本领域的技术人员来说当进行以下参阅时变得清楚呈现，或者可以通过实践本发明来获悉。本发明的目的和优点可以通过在所附权利要求中具体指出的手段和组合实现并获得。 
附图说明
并入并形成说明书的一部分的附图示出了本发明的一个或多个实施例，并且所述附图与说明书一起用于说明本发明的原理。附图仅仅用于显示本发明的一个或多个优选的实施例，并且不被认为是限制本发明。在附图中： 
图1是本发明的双鞘双毛细管喷嘴的实施例的示意图； 
图2是本发明的沉积头的双鞘单毛细管实施例的示意图； 
图3是本发明的双鞘多喷嘴阵列的实施例的示意图； 
图4是本发明的沉积头的单鞘单毛细管实施例的示意图；和 
图5是根据本发明的第二和第三鞘气流结构的示意图。 
具体实施方式
本发明总体涉及一种用于使用包围浮质流且提供空气动力聚集的多个鞘对液体和液体-颗粒悬浮液进行高解析度、无掩模式沉积的设备和方法。在传统的实施例中，浮质流聚集并沉积到平面或非平面的目标上，从而形成被热处理或光化学处理以获得接近于对应的粒状材料(bulkmaterial)的物理、光学、和/或电特性的图案。这种过程称为 
Figure GPA00001153558400021
(无掩模中尺度材料沉积)技术，并且用于使成烟雾状散开的材料沉积成线宽(linewidth)可以小于一微米，这是小于利用传统的厚膜工艺被沉积的线 的数量级。在不使用掩模的情况下执行沉积。 
M3D备优选地使用浮质喷嘴沉积头，以形成由外部鞘气流和内部载有浮质的载流构成的环状传播喷嘴。在环状浮质喷射工艺中，浮质载气进入沉积头，优选地直接在雾化工艺后或在所述浮质载气通过加热器组件之后包围并带走浮质，并且所述浮质载气沿装置的轴线朝向沉积头孔口被引导。质量通过量优选地由浮质载气质量流动控制器控制。在沉积头内，浮质流优选地经通过毫米尺寸的孔口而被初始校准。然后，出现的颗粒流优选地与环状鞘气结合，所述鞘气用于消除喷嘴的堵塞并且聚集浮质流。载气和鞘气大多数通常包括压缩空气或惰性气体，其中所述压缩空气和惰性气体中的一个或两个都可以含有改良的溶剂蒸气成分。例如，当浮质由水溶液形成时，水蒸气可被加入到载气或鞘气以防止液滴蒸发。 
鞘气优选地通过浮质入口下方的鞘气空气入口进入，并形成具有浮质流的环状流。与浮质载气一样，鞘气流量优选地由质量流动控制器控制。混合流优选地通过指向目标处的孔口以高速(例如，近似50m/s)离开喷嘴，并随后撞击在目标上。环状流将浮质流聚集到目标上，并且允许进行具有尺寸在1毫米、小到1微米和更小的特征的沉积。 
辅助鞘气流
通过使用包围环状、载有浮质的主要流的辅助鞘气流可以实现环状浮质喷射器的流动特性和沉积特性的提高。每一个辅助鞘气流优选地引导混合的鞘气流/浮质流进入到辅助毛细管。增强的流动使得减少过度喷涂和卫星液滴，并且增加空气动力聚集的量。在M3D应用中，将环形流注射到陶瓷毛细管内。在双鞘双毛细管(DSDC)结构中，第二鞘气包围环形喷射器，并且产生的流动被引导到第二毛细管内。图1中示出了DSDC浮质喷射器的示意图。浮质通过室上方的端口10进入喷嘴，或者可选地从安装在侧部的端口进入喷嘴。主要鞘气和次要鞘气分别通过端口12和14进入。主要鞘气聚集流动，并然后将所述流动喷射到主要毛细管16内。然后，次要鞘气提供环形流的二次聚集，并且将整个分布注射到次要毛细管18内。图1的结构包括两个聚集阶段。所述设备被设计成使得毛细管之间的距离可以变化。DSDC浮质喷射器被增强的流动可以通过使用多级、或采用三个或更 多个串联辅助鞘气流和毛细管的多鞘多毛细管(MSMC)结构来扩展。可以使用双鞘双毛细管或多鞘多毛细管结构实现降至1微米或更小的线宽。 
在本发明的一个实施例中，辅助鞘气流被独立控制。优选的毛细管孔口尺寸的直径近似为150微米或大约100微米，然而，与串联辅助鞘气流和毛细管的使用结合，孔口直径可小到大约为50微米和大到大约1000微米或以上。 
在M3D应用中产生的环形流通常能够沉积具有大约为毛细管出口的尺寸的十分之一的线宽的成烟雾状散开的材料。DSDC结构能够产生小于毛细管孔口的尺寸的十分之一的线宽，从而降至比毛细管孔口小40倍，并且DSDC结构使得能够直接书写具有小到大约1微米或更小的线宽的迹线。 
使用环形喷射器对成烟雾状散开材料进行直接沉积的两个常见问题在于过度喷涂的产生和卫星液滴的发生。过度喷涂可以广泛地被定义为额外浮质颗粒，在气体撞击基板并开始沿基板表面横向流动之后，所述额外浮质颗粒保持被携带在载气流内。然后，液滴可以在距离沉积物的几微米或远至距离沉积特征的几十微米的范围内撞击到基板上。DSDC喷嘴通过增加浮质流的空气动力聚集来减少过度喷涂和卫星液滴的发生。 
多鞘气流/单毛细管流
图2显示本发明的穿过通过单个毛细管的双鞘气流的结构的实施例。双鞘单毛细管结构提供环形流分布的二次聚集，所述环形流分布由浮质和主要鞘气流组成，但是没有将混合流引入到第二毛细管内。浮质从室上方的端口100进入喷嘴，或者可选地从安装在侧部的端口进入所述喷嘴。主要鞘气和次要鞘气分别通过端口120和140进入。由浮质和主要鞘气流组成的环形流分布被次要鞘气流包围，并且被注射到单个毛细管160内。可选地，可以使用多于两个的鞘气流。当淀积浮质易于撞击到沉积头的内表面上时，使用多鞘/单毛细管是有利的。当对由易于在输送给沉积头期间蒸发的挥发性、高蒸气压力油墨形成的浮质进行淀积时，通常可观察到这种碰撞。多鞘/单毛细管(MSSC)结构提供限制或在一些情况下完全防止这种液滴的碰撞的次要鞘气层。 
当沉积头的长度必须被最小化时，或者当第二级毛细管的增加是有问 题的或不可行的，多鞘/单毛细管(MSSC)结构也是有利的。一种这种结构的示例是多喷嘴阵列，所述多喷嘴阵列是用于同时将平行线印刷到基板上的两个或更多个毛细管的阵列。在多喷嘴阵列结构中，浮质流被等同地分配给通常位于相同平面中的多个喷嘴，优选地使得浮质流同时并且等同地流动通过阵列的每一个毛细管。然而，喷嘴阵列的使用增加了空气动力流的复杂性，使得用于增加聚集的第二级阵列或毛细管的使用可能是不可行的。然而，使用多鞘结构可以获得增加的浮质聚集。在这种设计中，浮质流的辅助聚集通过产生进入到毛细管阵列内的多鞘气流来实现。图3是双鞘/多喷嘴阵列的示意图。浮质雾进入每一个雾管20，并且由通过端口22进入的主要鞘气被聚集。在将环形流分布注射到阵列的每一个单个毛细管26内之前，浮质和主要鞘气流的二次聚集由通过下端口24进入的次要鞘气执行。在此结构中浮质流增加的空气动力聚集能够实现小到大约10微米的线宽。 
串列级结构
图4是通过移除所有辅助级而形成的单鞘/单毛细管结构级的示意图。除了对沉积头的下部分进行修改之外，单鞘/单毛细管结构类似于传统的 
Figure GPA00001153558400051
沉积头，这允许多级串列叠置，从而使得初始环形浮质喷射器的聚集增加。通常，每一级由通过端口112进入的单鞘气流和单毛细管116组成。所有级使用具有相同直径的毛细管。然而，在可选的实施例中，毛细管可以被渐缩，从而使每一个相继的毛细管具有比先前的毛细管小的直径。对于给定毛细管直径，串列结构的使用增加可沉积线宽的范围。在串列结构中，浮质以串联方式流动通过每一个毛细管，并且在通过每一级期间聚集到较小的直径。串列结构允许对小到1微米的线宽进行沉积。 
多鞘气流/多毛细管流
作为串列级原理的示例，由次要鞘气流和次要毛细管产生的流动增强可以通过使用另外的鞘气流和毛细管来增加。图5显示次要鞘气流和第三鞘气流结构，其中第三鞘气流与主要鞘气流和次要鞘气流混合以产生更多的聚集并且使卫星液滴减少。产生的流动被引导到第三毛细管。在类似的 实施例中，四个或更多个辅助鞘气流和毛细管可以用于进一步增加浮质喷射器的空气动力聚集特性。 
空气动力关断
多鞘浮质喷射器的材料关断可以通过打开排放阀来实现，所述排放阀位于喷射器的后两个毛细管之间，或喷射器的第一毛细管和喷射器的最后一个毛细管之间。阀的横截面面积相对于最终孔口的横截面面积较大，使得流动通过排放阀被转向。排放阀通常在真空泵之前。为了重新接合浮质流，阀闭合，使得流动被重新引导通过喷射器的长度并通过最终出口孔板。还可以使用用于真空的歧管形式的多个真空端口实现关断，所述歧管对来自雾管的雾产生拉动力。 
材料关断的这种方法和设备可以应用于单个鞘系统。 
虽然已经具体地参考这些优选的实施例详细地说明了本发明，但是其它实施例可以实现相同的结果。本发明的变化和修改对本领域的技术人员是显而易见的，并且目的是在所述权利要求中涵盖所有这些修改和等效物。以上引用的所用参考、申请、专利、和出版物的整个公开通过引用在此并入。 

Claims (15)

1.一种用于淀积材料的方法，所述方法包括以下步骤：
使所述材料成烟雾状散开以形成浮质流；
利用第一鞘气流包围所述浮质流以形成第一混合流；
使得第一混合流通过第二毛细管；
随后，利用第二鞘气流包围所述第一混合流以形成第二混合流；
使所述第二混合流通过至少一个第一毛细管；以及
淀积所述材料。
2.根据权利要求1所述的方法，其中，被沉积的所述材料的线宽在10微米与1毫米之间。
3.根据权利要求1所述的方法，其中，被沉积的所述材料的线宽小于10微米。
4.根据权利要求3所述的方法，其中，所述线宽小于1微米。
5.根据权利要求1所述的方法，其中，每一个毛细管的孔口直径在50微米与1毫米之间。
6.根据权利要求1所述的方法，其中，被沉积的所述材料的线宽比第一毛细管的孔口尺寸小40倍。
7.根据权利要求1所述的方法，还包括以下步骤：
打开排放阀以防止所述浮质流通过所述第一毛细管。
8.一种用于淀积材料的设备，所述设备包括：
浮质入口；
第一鞘气入口；
第二鞘气入口；
第二毛细管，所述第二毛细管设置在所述第一鞘气入口与所述第二鞘气入口之间；以及
至少一个第一毛细管。
9.根据权利要求8所述的设备，其中，所述第一毛细管与所述第二毛细管之间的距离能够变化。
10.根据权利要求8所述的设备，其中，每一个毛细管的孔口直径在50微米与1毫米之间。
11.根据权利要求8所述的设备，其中，被沉积的所述材料的线宽比第一毛细管的孔口尺寸小40倍。
12.根据权利要求8所述的设备，其中，所述第一毛细管的孔口直径与所述第二毛细管的孔口直径相同。
13.根据权利要求8所述的设备，其中，所述第一毛细管的孔口直径小于所述第二毛细管的孔口直径。
14.根据权利要求8所述的设备，还包括排放阀或真空歧管，所述排放阀或真空歧管用于防止浮质流通过所述第一毛细管。
15.根据权利要求9所述的设备，其中，包括所述第一毛细管的第一设备级与包括所述第二毛细管的第二设备级以串列的方式叠置。
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