CN101815949A - 振动微机械角速度传感器 - Google Patents
振动微机械角速度传感器 Download PDFInfo
- Publication number
- CN101815949A CN101815949A CN200880109941A CN200880109941A CN101815949A CN 101815949 A CN101815949 A CN 101815949A CN 200880109941 A CN200880109941 A CN 200880109941A CN 200880109941 A CN200880109941 A CN 200880109941A CN 101815949 A CN101815949 A CN 101815949A
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- CN
- China
- Prior art keywords
- elastic construction
- angular
- rate sensor
- present
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 230000033001 locomotion Effects 0.000 claims abstract description 35
- 230000008878 coupling Effects 0.000 claims abstract description 32
- 238000010168 coupling process Methods 0.000 claims abstract description 32
- 238000005859 coupling reaction Methods 0.000 claims abstract description 32
- 238000010276 construction Methods 0.000 claims description 129
- 238000005530 etching Methods 0.000 claims description 33
- 238000000034 method Methods 0.000 claims description 31
- 238000000708 deep reactive-ion etching Methods 0.000 claims description 29
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 230000000694 effects Effects 0.000 claims description 7
- 238000005452 bending Methods 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 description 12
- 230000014509 gene expression Effects 0.000 description 11
- 238000001514 detection method Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000010363 phase shift Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
Abstract
Description
Claims (15)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20075708 | 2007-10-05 | ||
FI20075708A FI119895B (fi) | 2007-10-05 | 2007-10-05 | Värähtelevä mikromekaaninen kulmanopeusanturi |
PCT/FI2008/050539 WO2009043967A1 (en) | 2007-10-05 | 2008-09-29 | Vibrating micromechanical sensor of angular velocity |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2012100589271A Division CN102607544A (zh) | 2007-10-05 | 2008-09-29 | 振动微机械角速度传感器 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101815949A true CN101815949A (zh) | 2010-08-25 |
CN101815949B CN101815949B (zh) | 2012-05-23 |
Family
ID=38656855
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2012100589271A Pending CN102607544A (zh) | 2007-10-05 | 2008-09-29 | 振动微机械角速度传感器 |
CN2008801099411A Active CN101815949B (zh) | 2007-10-05 | 2008-09-29 | 振动微机械角速度传感器 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2012100589271A Pending CN102607544A (zh) | 2007-10-05 | 2008-09-29 | 振动微机械角速度传感器 |
Country Status (8)
Country | Link |
---|---|
US (3) | US8104343B2 (zh) |
EP (1) | EP2195662B1 (zh) |
JP (2) | JP2010540949A (zh) |
KR (1) | KR101547160B1 (zh) |
CN (2) | CN102607544A (zh) |
CA (1) | CA2700565C (zh) |
FI (1) | FI119895B (zh) |
WO (1) | WO2009043967A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102589539A (zh) * | 2010-12-22 | 2012-07-18 | 罗伯特·博世有限公司 | 用于测量旋转率的微型机械传感器以及相应的方法 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI119895B (fi) * | 2007-10-05 | 2009-04-30 | Vti Technologies Oy | Värähtelevä mikromekaaninen kulmanopeusanturi |
US8539832B2 (en) * | 2010-10-25 | 2013-09-24 | Rosemount Aerospace Inc. | MEMS gyros with quadrature reducing springs |
DE102014215038A1 (de) * | 2014-07-31 | 2016-02-04 | Robert Bosch Gmbh | Mikromechanischer Sensor und Verfahren zur Herstellung eines mikromechanischen Sensors |
FI20146153A (fi) | 2014-12-29 | 2016-06-30 | Murata Manufacturing Co | Mikromekaaninen gyroskooppirakenne |
IT201700043012A1 (it) * | 2017-04-19 | 2018-10-19 | St Microelectronics Srl | Giroscopio mems con migliorata reiezione di un errore di quadratura |
JP2018185188A (ja) * | 2017-04-25 | 2018-11-22 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーの製造方法、物理量センサーデバイス、電子機器および移動体 |
JP6984342B2 (ja) * | 2017-11-22 | 2021-12-17 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーの製造方法、慣性計測ユニット、携帯型電子機器、電子機器、および移動体 |
JP7052345B2 (ja) * | 2017-12-27 | 2022-04-12 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーの製造方法、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体 |
JP7192437B2 (ja) * | 2018-11-28 | 2022-12-20 | セイコーエプソン株式会社 | 慣性センサー、電子機器および移動体 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06287082A (ja) * | 1993-03-31 | 1994-10-11 | Canon Inc | 導電体基板と絶縁体との接着方法及び該接着方法を用いた振動ジャイロデバイス |
JP3230347B2 (ja) * | 1993-07-27 | 2001-11-19 | 株式会社村田製作所 | 角速度センサ |
JP3090024B2 (ja) * | 1996-01-22 | 2000-09-18 | 株式会社村田製作所 | 角速度センサ |
US6250158B1 (en) * | 1997-05-09 | 2001-06-26 | Litton Systems, Inc. | Monolithic vibrating beam angular velocity sensor |
WO2000014415A2 (en) * | 1998-09-03 | 2000-03-16 | Lucas Novasensor | Proportional micromechanical device |
DE69836813T2 (de) * | 1998-10-12 | 2007-10-11 | Infineon Technologies Sensonor As | Verfahren zur Herstellung von Winkelgeschwindigkeitsmessern |
WO2000057194A1 (en) * | 1999-03-25 | 2000-09-28 | The Charles Stark Draper Laboratory, Inc. | Dynamically balanced microelectromechanical devices |
US6257059B1 (en) * | 1999-09-24 | 2001-07-10 | The Charles Stark Draper Laboratory, Inc. | Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation |
RU2162229C1 (ru) * | 2000-03-13 | 2001-01-20 | Ачильдиев Владимир Михайлович | Микромеханический вибрационный гироскоп-акселерометр |
JP2002022453A (ja) * | 2000-07-11 | 2002-01-23 | Murata Mfg Co Ltd | 振動体装置 |
US6619121B1 (en) * | 2001-07-25 | 2003-09-16 | Northrop Grumman Corporation | Phase insensitive quadrature nulling method and apparatus for coriolis angular rate sensors |
US6651500B2 (en) * | 2001-10-03 | 2003-11-25 | Litton Systems, Inc. | Micromachined silicon tuned counterbalanced accelerometer-gyro with quadrature nulling |
EP1478902B1 (de) * | 2002-01-12 | 2017-05-24 | Robert Bosch Gmbh | Drehratensensor |
US6701786B2 (en) * | 2002-04-29 | 2004-03-09 | L-3 Communications Corporation | Closed loop analog gyro rate sensor |
JP3767540B2 (ja) * | 2002-10-28 | 2006-04-19 | 株式会社村田製作所 | 振動ジャイロ及び角速度センサー |
US7630869B2 (en) * | 2003-05-27 | 2009-12-08 | University Of Washington | Method for predicting vibrational characteristics of rotating structures |
US7036372B2 (en) * | 2003-09-25 | 2006-05-02 | Kionix, Inc. | Z-axis angular rate sensor |
FI116543B (fi) * | 2004-12-31 | 2005-12-15 | Vti Technologies Oy | Värähtelevä mikromekaaninen kulmanopeusanturi |
FI116544B (fi) | 2004-12-31 | 2005-12-15 | Vti Technologies Oy | Värähtelevä mikromekaaninen kulmanopeusanturi |
JP2006317242A (ja) * | 2005-05-12 | 2006-11-24 | Dainippon Printing Co Ltd | 力学量検出センサ及びその製造方法 |
FI120921B (fi) * | 2007-06-01 | 2010-04-30 | Vti Technologies Oy | Menetelmä kulmanopeuden mittaamiseksi ja värähtelevä mikromekaaninen kulmanopeusanturi |
TW200909766A (en) * | 2007-08-28 | 2009-03-01 | Maruzen Co Ltd | Magazine ejector structure for air gun |
FI119895B (fi) * | 2007-10-05 | 2009-04-30 | Vti Technologies Oy | Värähtelevä mikromekaaninen kulmanopeusanturi |
EP2098823B1 (en) * | 2008-03-05 | 2016-10-19 | Colibrys S.A. | Accelerometer with offset compensation |
FI122397B (fi) * | 2008-04-16 | 2011-12-30 | Vti Technologies Oy | Värähtelevä mikromekaaninen kulmanopeusanturi |
FI20095201A0 (fi) * | 2009-03-02 | 2009-03-02 | Vti Technologies Oy | Värähtelevä mikromekaaninen kulmanopeusanturi |
US9250118B2 (en) * | 2011-03-31 | 2016-02-02 | The Regents Of The University Of California | Leaf-spring optical seismometer using fringe signals for seismic measurements |
-
2007
- 2007-10-05 FI FI20075708A patent/FI119895B/fi active IP Right Grant
-
2008
- 2008-09-29 EP EP08805461.4A patent/EP2195662B1/en active Active
- 2008-09-29 KR KR1020107008179A patent/KR101547160B1/ko active IP Right Grant
- 2008-09-29 JP JP2010527479A patent/JP2010540949A/ja active Pending
- 2008-09-29 CA CA2700565A patent/CA2700565C/en not_active Expired - Fee Related
- 2008-09-29 CN CN2012100589271A patent/CN102607544A/zh active Pending
- 2008-09-29 WO PCT/FI2008/050539 patent/WO2009043967A1/en active Application Filing
- 2008-09-29 CN CN2008801099411A patent/CN101815949B/zh active Active
- 2008-10-03 US US12/285,406 patent/US8104343B2/en active Active
-
2011
- 2011-12-16 US US13/328,453 patent/US8646333B2/en active Active
- 2011-12-16 US US13/328,429 patent/US8635909B2/en active Active
-
2014
- 2014-03-31 JP JP2014072879A patent/JP6027997B2/ja active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102589539A (zh) * | 2010-12-22 | 2012-07-18 | 罗伯特·博世有限公司 | 用于测量旋转率的微型机械传感器以及相应的方法 |
CN102589539B (zh) * | 2010-12-22 | 2017-01-18 | 罗伯特·博世有限公司 | 用于测量旋转率的微型机械传感器以及相应的方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2014134549A (ja) | 2014-07-24 |
CN101815949B (zh) | 2012-05-23 |
US20120085168A1 (en) | 2012-04-12 |
CN102607544A (zh) | 2012-07-25 |
US20090165553A1 (en) | 2009-07-02 |
KR20100074189A (ko) | 2010-07-01 |
KR101547160B1 (ko) | 2015-08-25 |
EP2195662A1 (en) | 2010-06-16 |
US20120085167A1 (en) | 2012-04-12 |
US8635909B2 (en) | 2014-01-28 |
US8104343B2 (en) | 2012-01-31 |
FI20075708A0 (fi) | 2007-10-05 |
EP2195662B1 (en) | 2015-03-04 |
WO2009043967A1 (en) | 2009-04-09 |
FI119895B (fi) | 2009-04-30 |
CA2700565A1 (en) | 2009-04-09 |
JP2010540949A (ja) | 2010-12-24 |
EP2195662A4 (en) | 2012-07-25 |
US8646333B2 (en) | 2014-02-11 |
JP6027997B2 (ja) | 2016-11-16 |
CA2700565C (en) | 2015-11-17 |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: CUNTIAN ELECTRONICS CO., LTD. Free format text: FORMER NAME: YTI HAMLIN OY |
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CP01 | Change in the name or title of a patent holder |
Address after: Finland Vantaa Patentee after: Vti Technologies OY Address before: Finland Vantaa Patentee before: VTI Technologies OY |
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TR01 | Transfer of patent right |
Effective date of registration: 20210331 Address after: Kyoto Japan Patentee after: Murata Manufacturing Co.,Ltd. Address before: Wanta, Finland Patentee before: MURATA ELECTRONICS OY |
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TR01 | Transfer of patent right |