CN101771083B - 一种深沟槽功率mos器件及其制造方法 - Google Patents
一种深沟槽功率mos器件及其制造方法 Download PDFInfo
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Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102184844A (zh) * | 2011-04-08 | 2011-09-14 | 上海先进半导体制造股份有限公司 | 基于沟槽mosfet的二极管的电压保护环及其制作方法 |
CN103050404B (zh) * | 2011-10-14 | 2015-08-19 | 上海华虹宏力半导体制造有限公司 | 一种mosfet器件沟槽和保护环的制造方法 |
CN103633117A (zh) * | 2012-08-23 | 2014-03-12 | 比亚迪股份有限公司 | 一种沟槽mosfet及其制造方法 |
CN102832234B (zh) * | 2012-09-10 | 2015-04-22 | 张家港凯思半导体有限公司 | 一种沟槽型半导体功率器件及其制造方法和终端保护结构 |
CN103151310B (zh) * | 2013-03-11 | 2015-05-13 | 中航(重庆)微电子有限公司 | 深沟槽功率mos器件及其制造方法 |
CN104681444B (zh) * | 2013-11-27 | 2017-09-26 | 北大方正集团有限公司 | 一种提高沟槽型vdmos器件栅氧化层击穿电压的方法 |
CN106098751B (zh) * | 2016-07-14 | 2018-11-23 | 电子科技大学 | 一种功率半导体器件终端结构 |
CN106571395A (zh) * | 2016-10-31 | 2017-04-19 | 珠海格力电器股份有限公司 | 一种沟槽型金属氧化物半导体功率器件及其制作方法 |
CN109360785A (zh) * | 2018-09-27 | 2019-02-19 | 上海华虹宏力半导体制造有限公司 | Mos器件的制造方法 |
CN113380621B (zh) * | 2021-04-07 | 2023-03-17 | 厦门士兰集科微电子有限公司 | 半导体器件及其制造方法 |
CN113555354B (zh) * | 2021-06-24 | 2023-08-11 | 滁州华瑞微电子科技有限公司 | 一种集成sbd的沟槽终端结构及其制备方法 |
CN114927535B (zh) * | 2022-05-20 | 2023-09-22 | 无锡鉴微华芯科技有限公司 | 具有双三维全包围保护环的x射线检测器及制备方法 |
CN117059669B (zh) * | 2023-10-09 | 2024-02-06 | 华羿微电子股份有限公司 | 一种屏蔽栅型mosfet终端结构及制作方法 |
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