CN101529200B - 确定表面和厚度 - Google Patents

确定表面和厚度 Download PDF

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Publication number
CN101529200B
CN101529200B CN2007800386293A CN200780038629A CN101529200B CN 101529200 B CN101529200 B CN 101529200B CN 2007800386293 A CN2007800386293 A CN 2007800386293A CN 200780038629 A CN200780038629 A CN 200780038629A CN 101529200 B CN101529200 B CN 101529200B
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China
Prior art keywords
optical radiation
measured
detector
normal
wavelength
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CN2007800386293A
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English (en)
Chinese (zh)
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CN101529200A (zh
Inventor
H·克拉内
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Lemmai Technology Co ltd
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VTT Technical Research Centre of Finland Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • D—TEXTILES; PAPER
    • D21—PAPER-MAKING; PRODUCTION OF CELLULOSE
    • D21F—PAPER-MAKING MACHINES; METHODS OF PRODUCING PAPER THEREON
    • D21F7/00—Other details of machines for making continuous webs of paper
    • D21F7/06—Indicating or regulating the thickness of the layer; Signal devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/499—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00 using polarisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/40—Caliper-like sensors
    • G01B2210/44—Caliper-like sensors with detectors on both sides of the object to be measured
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/57—Measuring gloss

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CN2007800386293A 2006-10-18 2007-10-17 确定表面和厚度 Active CN101529200B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI20065669 2006-10-18
FI20065669A FI119259B (fi) 2006-10-18 2006-10-18 Pinnan ja paksuuden määrittäminen
PCT/FI2007/050561 WO2008046966A1 (en) 2006-10-18 2007-10-17 Determining surface and thickness

Publications (2)

Publication Number Publication Date
CN101529200A CN101529200A (zh) 2009-09-09
CN101529200B true CN101529200B (zh) 2012-07-04

Family

ID=37232275

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007800386293A Active CN101529200B (zh) 2006-10-18 2007-10-17 确定表面和厚度

Country Status (7)

Country Link
US (1) US7936464B2 (enExample)
EP (1) EP2076733B1 (enExample)
JP (1) JP5155325B2 (enExample)
CN (1) CN101529200B (enExample)
ES (1) ES2400380T3 (enExample)
FI (1) FI119259B (enExample)
WO (1) WO2008046966A1 (enExample)

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US11933899B2 (en) 2011-06-30 2024-03-19 The Regents Of The University Of Colorado Remote measurement of shallow depths in semi-transparent media
US10684362B2 (en) 2011-06-30 2020-06-16 The Regents Of The University Of Colorado Remote measurement of shallow depths in semi-transparent media
US11313678B2 (en) 2011-06-30 2022-04-26 The Regents Of The University Of Colorado Remote measurement of shallow depths in semi-transparent media
US11231502B2 (en) * 2011-06-30 2022-01-25 The Regents Of The University Of Colorado Remote measurement of shallow depths in semi-transparent media
JP2013096853A (ja) * 2011-11-01 2013-05-20 Omron Corp 変位センサ
DE102011117523B3 (de) * 2011-11-03 2013-04-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur optischen Bestimmung der Oberflächengeometrie einer dreidimensionalen Probe
DK2798207T3 (en) * 2011-12-29 2016-04-04 Vestas Wind Sys As A wind turbine and a method for determining the presence and / or the thickness of a layer of ice on a wing body of a wind turbine
CN102778202B (zh) * 2012-03-23 2016-01-27 北京京东方光电科技有限公司 一种膜厚测量装置及方法
FI125408B (fi) 2012-09-17 2015-09-30 Focalspec Oy Menetelmä ja mittalaite pinnan etäisyyden, kohteen paksuuden ja optisten ominaisuuksien mittaamiseksi
JP5701837B2 (ja) * 2012-10-12 2015-04-15 横河電機株式会社 変位センサ、変位測定方法
FI20126126L (fi) * 2012-10-30 2014-05-01 Metso Automation Oy Menetelmä ja laite kiillon mittaamiseksi
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CN105303675B (zh) * 2015-10-15 2018-01-19 东方通信股份有限公司 一种利用光敏传感器检测纸张厚度的装置和方法
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CN107326717B (zh) * 2017-07-12 2019-05-28 东莞福迈包装印刷有限公司 一种可以检测纸张厚度的造纸机
DE102017126310A1 (de) 2017-11-09 2019-05-09 Precitec Optronik Gmbh Abstandsmessvorrichtung
CN108955549A (zh) * 2018-09-11 2018-12-07 深圳立仪科技有限公司 一种透光材料双面测厚装置
DE102018130901A1 (de) 2018-12-04 2020-06-04 Precitec Optronik Gmbh Optische Messeinrichtung
JP7160779B2 (ja) * 2019-10-03 2022-10-25 信越半導体株式会社 薄膜付ウェーハの膜厚分布の測定方法
CN110836642A (zh) * 2019-12-23 2020-02-25 海伯森技术（深圳）有限公司 一种基于三角测量法的彩色三角位移传感器及其测量方法
EP4443120A3 (en) 2020-02-13 2024-12-25 Hamamatsu Photonics K.K. Imaging unit and measurement device
WO2021195190A1 (en) * 2020-03-27 2021-09-30 Lam Research Corporation In-situ wafer thickness and gap monitoring using through beam laser sensor
KR20230011403A (ko) 2020-06-19 2023-01-20 프레시텍 옵트로닉 게엠베하 크로마틱 공초점 측정장치
CN112162296B (zh) * 2020-09-29 2024-05-31 香港中文大学（深圳） 一种激光测距系统
FI130557B (en) * 2020-09-29 2023-11-17 Lmi Tech Inc Device for determining a distance, surface thickness and optical properties of an object and related method
CN116325068A (zh) 2020-10-01 2023-06-23 Asml荷兰有限公司 检查装置和方法
FI20215460A1 (en) 2021-04-19 2022-10-20 Lmi Tech Oy Illumination device and method for generating measurement light and optical measurement device
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Also Published As

Publication number Publication date
EP2076733B1 (en) 2012-12-05
FI20065669A0 (fi) 2006-10-18
JP5155325B2 (ja) 2013-03-06
US20100296107A1 (en) 2010-11-25
US7936464B2 (en) 2011-05-03
JP2010507089A (ja) 2010-03-04
FI119259B (fi) 2008-09-15
EP2076733A1 (en) 2009-07-08
EP2076733A4 (en) 2010-01-06
WO2008046966A1 (en) 2008-04-24
ES2400380T3 (es) 2013-04-09
CN101529200A (zh) 2009-09-09
FI20065669L (fi) 2008-04-19

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: FUCASPAK CO., LTD.

Free format text: FORMER OWNER: FINLAND TECHNICAL RESEARCH CENTRE

Effective date: 20131111

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20131111

Address after: Oulu, Finland

Patentee after: Phocas Parker Ltd.

Address before: Espoo, Finland

Patentee before: VALTION TEKNILLINEN TUTKIMUSKESKUS

CP01 Change in the name or title of a patent holder

Address after: Oulu, Finland

Patentee after: Lemmai Technology Co.,Ltd.

Address before: Oulu, Finland

Patentee before: Phocas Parker Ltd.

CP01 Change in the name or title of a patent holder
IP01 Partial invalidation of patent right

Commission number: 4W113632

Conclusion of examination: Declare claims 3, 24-25 of invention No. 200780038629.3 invalid, and continue to maintain the validity of this patent right on the basis of claims 1-2, 4-23

Decision date of declaring invalidation: 20221024

Decision number of declaring invalidation: 58761

Denomination of invention: Determine surface and thickness

Granted publication date: 20120704

Patentee: Lemmai Technology Co.,Ltd.

IP01 Partial invalidation of patent right