FI119259B - Pinnan ja paksuuden määrittäminen - Google Patents
Pinnan ja paksuuden määrittäminen Download PDFInfo
- Publication number
- FI119259B FI119259B FI20065669A FI20065669A FI119259B FI 119259 B FI119259 B FI 119259B FI 20065669 A FI20065669 A FI 20065669A FI 20065669 A FI20065669 A FI 20065669A FI 119259 B FI119259 B FI 119259B
- Authority
- FI
- Finland
- Prior art keywords
- optical radiation
- measured
- optical
- detector
- normal
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 claims description 310
- 230000005855 radiation Effects 0.000 claims description 252
- 238000012545 processing Methods 0.000 claims description 109
- 238000005259 measurement Methods 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 24
- 239000006185 dispersion Substances 0.000 claims description 9
- 230000004431 optic radiations Effects 0.000 claims 1
- 238000001228 spectrum Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 230000010287 polarization Effects 0.000 description 3
- 238000004441 surface measurement Methods 0.000 description 3
- 238000012935 Averaging Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010606 normalization Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 235000013312 flour Nutrition 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
-
- D—TEXTILES; PAPER
- D21—PAPER-MAKING; PRODUCTION OF CELLULOSE
- D21F—PAPER-MAKING MACHINES; METHODS OF PRODUCING PAPER THEREON
- D21F7/00—Other details of machines for making continuous webs of paper
- D21F7/06—Indicating or regulating the thickness of the layer; Signal devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/46—Indirect determination of position data
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/499—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00 using polarisation effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/40—Caliper-like sensors
- G01B2210/44—Caliper-like sensors with detectors on both sides of the object to be measured
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/57—Measuring gloss
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Electromagnetism (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI20065669A FI119259B (fi) | 2006-10-18 | 2006-10-18 | Pinnan ja paksuuden määrittäminen |
| US12/446,298 US7936464B2 (en) | 2006-10-18 | 2007-10-17 | Determining surface and thickness |
| ES07823198T ES2400380T3 (es) | 2006-10-18 | 2007-10-17 | Determinación de superficie y de grosor |
| CN2007800386293A CN101529200B (zh) | 2006-10-18 | 2007-10-17 | 确定表面和厚度 |
| EP07823198A EP2076733B1 (en) | 2006-10-18 | 2007-10-17 | Determining surface and thickness |
| PCT/FI2007/050561 WO2008046966A1 (en) | 2006-10-18 | 2007-10-17 | Determining surface and thickness |
| JP2009532834A JP5155325B2 (ja) | 2006-10-18 | 2007-10-17 | 表面および厚みの決定 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI20065669 | 2006-10-18 | ||
| FI20065669A FI119259B (fi) | 2006-10-18 | 2006-10-18 | Pinnan ja paksuuden määrittäminen |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| FI20065669A0 FI20065669A0 (fi) | 2006-10-18 |
| FI20065669L FI20065669L (fi) | 2008-04-19 |
| FI119259B true FI119259B (fi) | 2008-09-15 |
Family
ID=37232275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FI20065669A FI119259B (fi) | 2006-10-18 | 2006-10-18 | Pinnan ja paksuuden määrittäminen |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7936464B2 (enExample) |
| EP (1) | EP2076733B1 (enExample) |
| JP (1) | JP5155325B2 (enExample) |
| CN (1) | CN101529200B (enExample) |
| ES (1) | ES2400380T3 (enExample) |
| FI (1) | FI119259B (enExample) |
| WO (1) | WO2008046966A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011042606A1 (en) | 2009-10-08 | 2011-04-14 | Valtion Teknillinen Tutkimuskeskus | Measuring instrument and method for determination of the properties of an item and its surface |
Families Citing this family (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FI20075975L (fi) * | 2007-12-31 | 2009-07-01 | Metso Automation Oy | Rainan mittaus |
| US8085397B2 (en) * | 2009-07-10 | 2011-12-27 | Honeywell Asca Inc. | Fiber optic sensor utilizing broadband sources |
| JP2011229625A (ja) * | 2010-04-26 | 2011-11-17 | Fujifilm Corp | 内視鏡装置 |
| JP2011229603A (ja) * | 2010-04-26 | 2011-11-17 | Fujifilm Corp | 内視鏡装置 |
| FI124452B (fi) * | 2010-07-09 | 2014-09-15 | Teknologian Tutkimuskeskus Vtt | Menetelmä ja laite pinnan värin ja muiden ominaisuuksien mittaamiseksi |
| US11933899B2 (en) | 2011-06-30 | 2024-03-19 | The Regents Of The University Of Colorado | Remote measurement of shallow depths in semi-transparent media |
| US10684362B2 (en) | 2011-06-30 | 2020-06-16 | The Regents Of The University Of Colorado | Remote measurement of shallow depths in semi-transparent media |
| US11313678B2 (en) | 2011-06-30 | 2022-04-26 | The Regents Of The University Of Colorado | Remote measurement of shallow depths in semi-transparent media |
| US11231502B2 (en) * | 2011-06-30 | 2022-01-25 | The Regents Of The University Of Colorado | Remote measurement of shallow depths in semi-transparent media |
| JP2013096853A (ja) * | 2011-11-01 | 2013-05-20 | Omron Corp | 変位センサ |
| DE102011117523B3 (de) * | 2011-11-03 | 2013-04-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zur optischen Bestimmung der Oberflächengeometrie einer dreidimensionalen Probe |
| DK2798207T3 (en) * | 2011-12-29 | 2016-04-04 | Vestas Wind Sys As | A wind turbine and a method for determining the presence and / or the thickness of a layer of ice on a wing body of a wind turbine |
| CN102778202B (zh) * | 2012-03-23 | 2016-01-27 | 北京京东方光电科技有限公司 | 一种膜厚测量装置及方法 |
| FI125408B (fi) | 2012-09-17 | 2015-09-30 | Focalspec Oy | Menetelmä ja mittalaite pinnan etäisyyden, kohteen paksuuden ja optisten ominaisuuksien mittaamiseksi |
| JP5701837B2 (ja) * | 2012-10-12 | 2015-04-15 | 横河電機株式会社 | 変位センサ、変位測定方法 |
| FI20126126L (fi) * | 2012-10-30 | 2014-05-01 | Metso Automation Oy | Menetelmä ja laite kiillon mittaamiseksi |
| GB2507813B (en) | 2012-11-13 | 2017-06-21 | Focalspec Oy | Apparatus and method for inspecting seals of items |
| WO2016000764A1 (de) * | 2014-07-01 | 2016-01-07 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Chromatisch konfokale sensoranordnung |
| CN105303675B (zh) * | 2015-10-15 | 2018-01-19 | 东方通信股份有限公司 | 一种利用光敏传感器检测纸张厚度的装置和方法 |
| US11340343B2 (en) * | 2017-03-23 | 2022-05-24 | Dolphin Measurement Systems, Llc | Apparatus and methods for thickness and velocity measurement of flat moving materials using high frequency radar technologies |
| CN107326717B (zh) * | 2017-07-12 | 2019-05-28 | 东莞福迈包装印刷有限公司 | 一种可以检测纸张厚度的造纸机 |
| DE102017126310A1 (de) | 2017-11-09 | 2019-05-09 | Precitec Optronik Gmbh | Abstandsmessvorrichtung |
| CN108955549A (zh) * | 2018-09-11 | 2018-12-07 | 深圳立仪科技有限公司 | 一种透光材料双面测厚装置 |
| DE102018130901A1 (de) | 2018-12-04 | 2020-06-04 | Precitec Optronik Gmbh | Optische Messeinrichtung |
| JP7160779B2 (ja) * | 2019-10-03 | 2022-10-25 | 信越半導体株式会社 | 薄膜付ウェーハの膜厚分布の測定方法 |
| CN110836642A (zh) * | 2019-12-23 | 2020-02-25 | 海伯森技术(深圳)有限公司 | 一种基于三角测量法的彩色三角位移传感器及其测量方法 |
| EP4443120A3 (en) | 2020-02-13 | 2024-12-25 | Hamamatsu Photonics K.K. | Imaging unit and measurement device |
| WO2021195190A1 (en) * | 2020-03-27 | 2021-09-30 | Lam Research Corporation | In-situ wafer thickness and gap monitoring using through beam laser sensor |
| KR20230011403A (ko) | 2020-06-19 | 2023-01-20 | 프레시텍 옵트로닉 게엠베하 | 크로마틱 공초점 측정장치 |
| CN112162296B (zh) * | 2020-09-29 | 2024-05-31 | 香港中文大学(深圳) | 一种激光测距系统 |
| FI130557B (en) * | 2020-09-29 | 2023-11-17 | Lmi Tech Inc | Device for determining a distance, surface thickness and optical properties of an object and related method |
| CN116325068A (zh) | 2020-10-01 | 2023-06-23 | Asml荷兰有限公司 | 检查装置和方法 |
| FI20215460A1 (en) | 2021-04-19 | 2022-10-20 | Lmi Tech Oy | Illumination device and method for generating measurement light and optical measurement device |
| US12215967B2 (en) | 2022-08-12 | 2025-02-04 | Hong Kong Applied Science and Technology Research Institute Company Limited | Line-scanning three-dimensional sensing system |
| DE102022134249A1 (de) * | 2022-12-20 | 2024-06-20 | Precitec Optronik Gmbh | Chromatisch konfokale Messeinrichtung |
| DE102022134243A1 (de) * | 2022-12-20 | 2024-06-20 | Precitec Optronik Gmbh | Chromatisch konfokale Messeinrichtung |
| CN116067435B (zh) * | 2023-03-20 | 2023-06-27 | 北京市农林科学院智能装备技术研究中心 | 土壤环境多参数监测传感器 |
| CN120008488A (zh) * | 2025-01-17 | 2025-05-16 | 海伯森技术(深圳)有限公司 | 表面轮廓检测装置及方法 |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
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| DE2906641A1 (de) * | 1979-02-21 | 1980-08-28 | Freudenberg Carl Fa | Verfahren zur optisch-elektrischen messung des abstandes zwischen einer messeinrichtung und einem pruefling |
| US4458152A (en) | 1982-05-10 | 1984-07-03 | Siltec Corporation | Precision specular proximity detector and article handing apparatus employing same |
| CH663466A5 (fr) | 1983-09-12 | 1987-12-15 | Battelle Memorial Institute | Procede et dispositif pour determiner la position d'un objet par rapport a une reference. |
| US4936676A (en) | 1984-11-28 | 1990-06-26 | Honeywell Inc. | Surface position sensor |
| US4656358A (en) * | 1985-03-12 | 1987-04-07 | Optoscan Corporation | Laser-based wafer measuring system |
| DE3643842C2 (de) * | 1986-12-20 | 1995-07-20 | Leuze Electronic Gmbh & Co | Anordnung zur berührungslosen Bestimmung der räumlichen Lage eines auf der Oberfläche eines Körpers befindlichen Objektpunkts |
| JP2595821B2 (ja) * | 1991-03-12 | 1997-04-02 | 日本電気株式会社 | 三次元形状測定装置 |
| JPH04370708A (ja) * | 1991-06-20 | 1992-12-24 | Meidensha Corp | 小型偏光解析装置 |
| US5162660A (en) | 1991-06-27 | 1992-11-10 | Macmillan Bloedel Limited | Paper roughness or glass sensor using polarized light reflection |
| JPH109827A (ja) * | 1996-06-24 | 1998-01-16 | Omron Corp | 高さ判別装置および方法 |
| US6064517A (en) * | 1996-07-22 | 2000-05-16 | Kla-Tencor Corporation | High NA system for multiple mode imaging |
| IL121267A0 (en) | 1997-07-09 | 1998-01-04 | Yeda Res & Dev | Method and device for determining the profile of an object |
| DE19733297C2 (de) | 1997-08-01 | 1999-12-09 | Marcus Gut | Berührungslose optische Dickenmessung |
| JPH11201729A (ja) * | 1998-01-12 | 1999-07-30 | Mitsutoyo Corp | 光学式測定装置 |
| FR2779517B1 (fr) | 1998-06-05 | 2000-08-18 | Architecture Traitement D Imag | Procede et dispositif d'acquisition opto-electrique de formes par illumination axiale |
| US6208411B1 (en) * | 1998-09-28 | 2001-03-27 | Kla-Tencor Corporation | Massively parallel inspection and imaging system |
| JP2001070228A (ja) * | 1999-07-02 | 2001-03-21 | Asahi Optical Co Ltd | 内視鏡装置 |
| US6268923B1 (en) * | 1999-10-07 | 2001-07-31 | Integral Vision, Inc. | Optical method and system for measuring three-dimensional surface topography of an object having a surface contour |
| US6822745B2 (en) * | 2000-01-25 | 2004-11-23 | Zygo Corporation | Optical systems for measuring form and geometric dimensions of precision engineered parts |
| US6917421B1 (en) * | 2001-10-12 | 2005-07-12 | Kla-Tencor Technologies Corp. | Systems and methods for multi-dimensional inspection and/or metrology of a specimen |
| DE10242374A1 (de) | 2002-09-12 | 2004-04-01 | Siemens Ag | Konfokaler Abstandssensor |
| DE10325942B4 (de) | 2003-06-07 | 2010-09-16 | Jurca Optoelektronik Gmbh & Co. Kg | Vorrichtung und Verfahren zur berührungslosen Dickenmessung transparanter Körper |
| DE102004034693B4 (de) | 2004-07-17 | 2006-05-18 | Schott Ag | Verfahren und Vorrichtung zur berührungslosen optischen Messung der Dicke von heißen Glaskörpern mittels der chromatischen Aberration |
| US7345772B2 (en) * | 2004-08-06 | 2008-03-18 | Voith Paper Patent Gmbh | Optical triangulation device and method of measuring a variable of a web using the device |
| DE102004052205A1 (de) * | 2004-10-20 | 2006-05-04 | Universität Stuttgart | Interferometrischer Multispektral-Sensor und interferometrisches Multispektral-Verfahren zur hochdynamischen Objekt-Tiefenabtastung oder Objekt-Profilerfassung |
| DE102005006724A1 (de) * | 2004-10-20 | 2006-08-10 | Universität Stuttgart | Verfahren und Anordung zur konfokalen Spektral-Interferometrie, insbesondere auch zur optischen Kohärenz-Tomografie (OCT)und/oder optischen Kohärenz-Mikroskopie (OCM)von biologischen und technischen Objekten |
| US7522292B2 (en) | 2005-03-11 | 2009-04-21 | Carl Zeiss Smt Ag | System and method for determining a shape of a surface of an object and method of manufacturing an object having a surface of a predetermined shape |
| US20060232790A1 (en) * | 2005-04-18 | 2006-10-19 | Lee Chase | Confocal measurement method and apparatus in a paper machine |
| JP2007147299A (ja) * | 2005-11-24 | 2007-06-14 | Kobe Steel Ltd | 変位測定装置及び変位測定方法 |
-
2006
- 2006-10-18 FI FI20065669A patent/FI119259B/fi active IP Right Grant
-
2007
- 2007-10-17 CN CN2007800386293A patent/CN101529200B/zh active Active
- 2007-10-17 EP EP07823198A patent/EP2076733B1/en active Active
- 2007-10-17 US US12/446,298 patent/US7936464B2/en active Active
- 2007-10-17 ES ES07823198T patent/ES2400380T3/es active Active
- 2007-10-17 JP JP2009532834A patent/JP5155325B2/ja active Active
- 2007-10-17 WO PCT/FI2007/050561 patent/WO2008046966A1/en not_active Ceased
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011042606A1 (en) | 2009-10-08 | 2011-04-14 | Valtion Teknillinen Tutkimuskeskus | Measuring instrument and method for determination of the properties of an item and its surface |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2076733B1 (en) | 2012-12-05 |
| FI20065669A0 (fi) | 2006-10-18 |
| JP5155325B2 (ja) | 2013-03-06 |
| CN101529200B (zh) | 2012-07-04 |
| US20100296107A1 (en) | 2010-11-25 |
| US7936464B2 (en) | 2011-05-03 |
| JP2010507089A (ja) | 2010-03-04 |
| EP2076733A1 (en) | 2009-07-08 |
| EP2076733A4 (en) | 2010-01-06 |
| WO2008046966A1 (en) | 2008-04-24 |
| ES2400380T3 (es) | 2013-04-09 |
| CN101529200A (zh) | 2009-09-09 |
| FI20065669L (fi) | 2008-04-19 |
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