CN101479512B - 真空用闸阀及其使用的密封部件 - Google Patents

真空用闸阀及其使用的密封部件 Download PDF

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Publication number
CN101479512B
CN101479512B CN2007800245219A CN200780024521A CN101479512B CN 101479512 B CN101479512 B CN 101479512B CN 2007800245219 A CN2007800245219 A CN 2007800245219A CN 200780024521 A CN200780024521 A CN 200780024521A CN 101479512 B CN101479512 B CN 101479512B
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CN
China
Prior art keywords
sealed member
mounting groove
member mounting
summit
outside
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN2007800245219A
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English (en)
Chinese (zh)
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CN101479512A (zh
Inventor
辻和明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Co Walka
Original Assignee
Nippon Valqua Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Valqua Industries Ltd filed Critical Nippon Valqua Industries Ltd
Publication of CN101479512A publication Critical patent/CN101479512A/zh
Application granted granted Critical
Publication of CN101479512B publication Critical patent/CN101479512B/zh
Active legal-status Critical Current
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0227—Packings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
CN2007800245219A 2006-06-29 2007-06-22 真空用闸阀及其使用的密封部件 Active CN101479512B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006180272 2006-06-29
JP180272/2006 2006-06-29
PCT/JP2007/062576 WO2008001683A1 (fr) 2006-06-29 2007-06-22 Vanne à obturateur pour vide et élément d'étanchéité utilisé pour celle-ci

Publications (2)

Publication Number Publication Date
CN101479512A CN101479512A (zh) 2009-07-08
CN101479512B true CN101479512B (zh) 2010-10-20

Family

ID=38845449

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007800245219A Active CN101479512B (zh) 2006-06-29 2007-06-22 真空用闸阀及其使用的密封部件

Country Status (6)

Country Link
US (1) US8074967B2 (ja)
JP (1) JP4774549B2 (ja)
KR (1) KR101093330B1 (ja)
CN (1) CN101479512B (ja)
TW (1) TWI386577B (ja)
WO (1) WO2008001683A1 (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4275433B2 (ja) * 2003-03-19 2009-06-10 日本バルカー工業株式会社 ゲート弁のシールプレートおよびシール材
WO2010032722A1 (ja) * 2008-09-18 2010-03-25 日本バルカー工業株式会社 シールプレートおよびシールプレートに用いられるシール部材ならびにこれらの製造方法
JP5173011B1 (ja) 2011-11-25 2013-03-27 日本バルカー工業株式会社 ゲート弁
CN103335103A (zh) * 2013-07-12 2013-10-02 昆山新莱洁净应用材料股份有限公司 无死角的密封机构
EP2985497B1 (de) * 2014-08-11 2017-10-11 VAT Holding AG Verschlusselement für ein Vakuumventil mit abgepresster, aufvulkanisierter Dichtung
WO2016201327A1 (en) * 2015-06-10 2016-12-15 Translarity, Inc. Systems and methods for generating and preserving vacuum between semiconductor wafer and wafer translator
EP3348885B1 (de) * 2017-01-16 2019-12-11 VAT Holding AG Dichtung eines vakuumventils und diesbezügliches herstellungsverfahren
USD901648S1 (en) * 2018-07-10 2020-11-10 Valqua, Ltd. Seal
US11174958B2 (en) 2019-01-24 2021-11-16 Jet Oilfield Services, LLC Gate valve and method of repairing same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2133719Y (zh) * 1992-11-18 1993-05-19 国营五二六厂 一种高性能密封垫片

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3401915A (en) * 1966-05-10 1968-09-17 M & J Valve Co Resilient material valve seal ring
US3575431A (en) * 1968-08-19 1971-04-20 Grove Valve & Regulator Co Seal assembly
JPH11336905A (ja) * 1998-05-28 1999-12-07 Ckd Corp バルブのシール構造
JP3877918B2 (ja) * 1999-10-06 2007-02-07 日本プライ株式会社 自動車モール材用収縮防止材および自動車モール材
JP2001241553A (ja) * 2000-02-29 2001-09-07 Mitsubishi Cable Ind Ltd 密封蓋構造
US6629682B2 (en) * 2001-01-11 2003-10-07 Vat Holding Ag Vacuum valve
JP4135359B2 (ja) * 2001-05-29 2008-08-20 Ｎｏｋ株式会社 ガスケット
EP1470351B1 (en) * 2002-01-31 2007-02-28 Dupont Dow Elastomers L.L.C. Gate valve seal assembly
JP4275433B2 (ja) * 2003-03-19 2009-06-10 日本バルカー工業株式会社 ゲート弁のシールプレートおよびシール材
JP4578829B2 (ja) 2004-03-08 2010-11-10 日本バルカー工業株式会社 真空用ゲート弁のシールプレートおよびこれに用いられるシール部材

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2133719Y (zh) * 1992-11-18 1993-05-19 国营五二六厂 一种高性能密封垫片

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
JP特开2003-49949A 2003.02.21
JP特开2004-286067A 2004.10.14
JP特开平11-336905A 1999.12.07

Also Published As

Publication number Publication date
US8074967B2 (en) 2011-12-13
KR101093330B1 (ko) 2011-12-14
JP4774549B2 (ja) 2011-09-14
KR20090027739A (ko) 2009-03-17
TWI386577B (zh) 2013-02-21
US20090250649A1 (en) 2009-10-08
WO2008001683A1 (fr) 2008-01-03
JPWO2008001683A1 (ja) 2009-11-26
TW200801378A (en) 2008-01-01
CN101479512A (zh) 2009-07-08

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Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
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GR01 Patent grant
CP01 Change in the name or title of a patent holder
CP01 Change in the name or title of a patent holder

Address after: Tokyo, Japan

Patentee after: Company Walka

Address before: Tokyo, Japan

Patentee before: Nippon Valqua Industries, Ltd.