CN101471423B - 蒸镀用衬底及发光装置的制造方法 - Google Patents
蒸镀用衬底及发光装置的制造方法 Download PDFInfo
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- CN101471423B CN101471423B CN2008101906840A CN200810190684A CN101471423B CN 101471423 B CN101471423 B CN 101471423B CN 2008101906840 A CN2008101906840 A CN 2008101906840A CN 200810190684 A CN200810190684 A CN 200810190684A CN 101471423 B CN101471423 B CN 101471423B
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Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/048—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/18—Deposition of organic active material using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
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| WO2009099002A1 (en) | 2008-02-04 | 2009-08-13 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and method for manufacturing light-emitting device |
| WO2009107548A1 (en) * | 2008-02-29 | 2009-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and manufacturing method of light-emitting device |
| JP5416987B2 (ja) * | 2008-02-29 | 2014-02-12 | 株式会社半導体エネルギー研究所 | 成膜方法及び発光装置の作製方法 |
| JP5079722B2 (ja) * | 2008-03-07 | 2012-11-21 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| US8182863B2 (en) * | 2008-03-17 | 2012-05-22 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and manufacturing method of light-emitting device |
| KR101629637B1 (ko) * | 2008-05-29 | 2016-06-13 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 성막방법 및 발광장치의 제조방법 |
| US20110136282A1 (en) * | 2008-08-05 | 2011-06-09 | Toray Industries, Inc. | Method for producing device |
| US8486736B2 (en) * | 2008-10-20 | 2013-07-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing light-emitting device |
| JP5292263B2 (ja) * | 2008-12-05 | 2013-09-18 | 株式会社半導体エネルギー研究所 | 成膜方法及び発光素子の作製方法 |
| JP2010153127A (ja) * | 2008-12-24 | 2010-07-08 | Sony Corp | 表示装置 |
| JP5258666B2 (ja) * | 2009-04-22 | 2013-08-07 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法および成膜用基板 |
| KR101169001B1 (ko) * | 2009-07-10 | 2012-07-26 | 주식회사 엔씰텍 | 증착장치의 증착용 기판, 상기 증착용 기판을 사용한 성막 방법 및 유기전계발광표시장치의 제조방법 |
| JP5257314B2 (ja) * | 2009-09-29 | 2013-08-07 | 大日本印刷株式会社 | 積層体、準備用支持体、積層体の製造方法、及びデバイスの製造方法 |
| US8951816B2 (en) * | 2010-03-18 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Film forming method |
| TWI680600B (zh) | 2011-02-28 | 2019-12-21 | 日商半導體能源研究所股份有限公司 | 發光元件 |
| EP2660352A1 (en) * | 2012-05-02 | 2013-11-06 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Donor sheet and method for light induced forward transfer manufacturing |
| TWI720697B (zh) | 2012-08-03 | 2021-03-01 | 日商半導體能源研究所股份有限公司 | 發光元件 |
| US10043982B2 (en) | 2013-04-26 | 2018-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting element, light-emitting device, display device, electronic device, and lighting device |
| KR20150056112A (ko) * | 2013-11-14 | 2015-05-26 | 삼성디스플레이 주식회사 | 막 형성용 마스크, 이를 이용한 막 형성 방법 및 유기 발광 표시 장치의 제조 방법 |
| CN104104755B (zh) * | 2014-06-25 | 2017-04-05 | 京东方科技集团股份有限公司 | 手机套 |
| KR102144855B1 (ko) * | 2014-09-03 | 2020-08-18 | 삼성디스플레이 주식회사 | 광학 마스크 |
| KR20160030002A (ko) * | 2014-09-05 | 2016-03-16 | 삼성디스플레이 주식회사 | 도너마스크 및 이를 이용한 유기발광 디스플레이 장치 제조방법 |
| KR102409803B1 (ko) | 2014-10-10 | 2022-06-17 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광 소자, 표시 장치, 전자 기기, 및 조명 장치 |
| KR101706752B1 (ko) * | 2015-02-17 | 2017-02-27 | 서울대학교산학협력단 | 호스트, 인광 도펀트 및 형광 도펀트를 포함하는 유기발광소자 |
| TWI749726B (zh) | 2015-03-09 | 2021-12-11 | 日商半導體能源研究所股份有限公司 | 發光元件、顯示裝置、電子裝置及照明設備 |
| CN106910844B (zh) * | 2015-12-22 | 2019-03-26 | 昆山工研院新型平板显示技术中心有限公司 | Tft基板的蒸镀方法 |
| US20180171468A1 (en) | 2016-12-21 | 2018-06-21 | Ncc Nano, Llc | Method for deposting a functional material on a substrate |
| KR102180071B1 (ko) | 2017-10-31 | 2020-11-17 | 엘지디스플레이 주식회사 | 초미세 패턴 증착장치, 이를 이용한 초미세 패턴 증착방법 그리고 초미세 패턴 증착방법에 의해 제작된 전계발광표시장치 |
| CN110431251A (zh) * | 2017-12-14 | 2019-11-08 | 京东方科技集团股份有限公司 | 用于将沉积材料沉积在受体基板上的供体基板、用于沉积沉积材料的方法、以及制造供体基板的方法 |
| CN109962149B (zh) * | 2017-12-14 | 2020-10-27 | Tcl科技集团股份有限公司 | 一种封装薄膜及其制备方法、光电器件 |
| DE112019001181T5 (de) | 2018-03-07 | 2020-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Licht emittierendes Element, Anzeigevorrichtung, elektronisches Gerät, organische Verbindung und Beleuchtungsvorrichtung |
| WO2020161556A1 (ja) | 2019-02-06 | 2020-08-13 | 株式会社半導体エネルギー研究所 | 発光デバイス、発光機器、表示装置、電子機器及び照明装置 |
| WO2020217129A1 (ja) | 2019-04-25 | 2020-10-29 | 株式会社半導体エネルギー研究所 | 発光デバイス、発光装置、電子機器、および照明装置 |
| CN110148678A (zh) * | 2019-04-29 | 2019-08-20 | 深圳市华星光电半导体显示技术有限公司 | 辅助电极转移结构及显示面板的制作方法 |
| CN111474607A (zh) * | 2020-04-21 | 2020-07-31 | Tcl华星光电技术有限公司 | 一种用于降低反射率的涂层、显示面板及显示装置 |
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- 2008-12-26 CN CN2008101906840A patent/CN101471423B/zh not_active Expired - Fee Related
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Also Published As
| Publication number | Publication date |
|---|---|
| CN101471423A (zh) | 2009-07-01 |
| US8435811B2 (en) | 2013-05-07 |
| US8080811B2 (en) | 2011-12-20 |
| JP5112281B2 (ja) | 2013-01-09 |
| US20090166563A1 (en) | 2009-07-02 |
| TWI481733B (zh) | 2015-04-21 |
| TW200946700A (en) | 2009-11-16 |
| US20120088324A1 (en) | 2012-04-12 |
| JP2009212078A (ja) | 2009-09-17 |
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